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A review on current development of thermophotovoltaic technology in heat recovery
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作者 Shuni Chen Yanming Guo +1 位作者 Qinghui Pan Yong Shuai 《International Journal of Extreme Manufacturing》 SCIE EI CAS CSCD 2024年第2期297-323,共27页
The burning of fossil fuels in industry results in significant carbon emissions,and the heat generated is often not fully utilized.For high-temperature industries,thermophotovoltaics(TPVs)is an effective method for wa... The burning of fossil fuels in industry results in significant carbon emissions,and the heat generated is often not fully utilized.For high-temperature industries,thermophotovoltaics(TPVs)is an effective method for waste heat recovery.This review covers two aspects of high-efficiency TPV systems and industrial waste heat applications.At the system level,representative results of TPV complete the systems,while selective emitters and photovoltaic cells in the last decade are compiled.The key points of components to improve the energy conversion efficiency are further analyzed,and the related micro/nano-fabrication methods are introduced.At the application level,the feasibility of TPV applications in high-temperature industries is shown from the world waste heat utilization situation.The potential of TPV in waste heat recovery and carbon neutrality is illustrated with the steel industry as an example. 展开更多
关键词 THERMOPHOTOVOLTAIC waste heat recovery micro/nano-fabrication carbon neutrality
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Research on the process of fabricating a multi-layer metal micro-structure based on UV-LIGA overlay technology 被引量:3
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作者 Yali Ma Wenkai Liu Chong Liu 《Nanotechnology and Precision Engineering》 EI CAS CSCD 2019年第2期83-88,共6页
In this paper,we report the study of the process of fabricating a multi-layermetal micro-structure using UV-LIGA overlay technology,includingmask fabrication,substrate treatment,and UV-LIGA overlay processes.To solve ... In this paper,we report the study of the process of fabricating a multi-layermetal micro-structure using UV-LIGA overlay technology,includingmask fabrication,substrate treatment,and UV-LIGA overlay processes.To solve the process problems in the masking procedure,the swelling problemof the first layer of SU-8 thick photoresist was studied experimentally.The 5μmline-width compensation and closed 20μmand 30μmisolation strips were designed and fabricated around the micro-structure pattern.The pore problemin the Ni micro-electroforming layer was analyzed and the electroforming parameters were improved.The pH value of the electroforming solution should be controlled between 3.8 and 4.4 and the current density should be below 3 A/dm^2.To solve the problems of high inner stress and incomplete development of the micro-cylinder hole array with a diameter of 30μm,the lithography process was optimized.The pre-baking temperature was increased via gradient heating and rose every 5℃ from 65℃ to 85℃ and then remained at 85℃ for 50 min–1 h.In addition,the full contact exposure was used.Finally,a multi-layer metal micro-structure with high precision and good quality of microelectroforming layer was fabricated using UV-LIGA overlay technology. 展开更多
关键词 UV-LIGA OVERLAY technology SU-8 photoresist micro-electroforming technology MULTI-LAYER METAL micro-STRUCTURE
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Research on Nanofabrication Technology of Micro-/Nano-Stereo Rapid Prototyping of PCVD
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作者 Sandy TO 《厦门大学学报(自然科学版)》 CAS CSCD 北大核心 2002年第S1期280-,共1页
At present, the most common micro/nano-scale fabri ca tion processes include the plane silicon process based on IC technology, stereo silicon process, LIGA, quasi-LIGA based on near ultra violet deep lithography, MEMS... At present, the most common micro/nano-scale fabri ca tion processes include the plane silicon process based on IC technology, stereo silicon process, LIGA, quasi-LIGA based on near ultra violet deep lithography, MEMS, energy beam etching and micro/nano-machining, etc. A common problem for t hese processes is the difficulty to fabricate arbitrary form for 3-dimensional micro/nano-parts, devices or mechanisms. To develop advanced MEMS manufacturin g technology, and to achieve fabrication of true 3-dimensional parts, devices or mechanisms, this paper proposes a nanofabrication technology for rapid proto typing of 3-dimensional parts, using plasma chemical vapor deposition (PCVD). This process can be describes as follows: A laser beam is produced by a low power, quasi molecule laser. It enters the vac uum chamber through a window, and is focused on with the substrate surface. A ga s in the chamber is ionized by the laser beam to produce PCVD on the substrate s urface, and forms a particle of the size of Ф100 nm (its thickness is about 100 nm). When the laser beam moves along X-axis, many particles form a line. Then the laser beam moves one step in Y-axis to form a new line. A plane is complete d by many lines. Then the substrate moves in Z-axis to form new plane. Eventu ally, many planes form a 3-dimensional component. Using available CAD/CAM softw are with this process, rapid prototyping of complex components can be achieved. A nanometer precision linear motor, such as that described in Chinese national p atent (patent No. ZL 98 2 16753.9), can be used to obtain the nanometer precisio n movements in the process. The process does not require mask, can be used for v arious rapid prototyping materials, to obtain high fabrication precision (its sc ale precision is 15 nm), and larger ratio of height to width of micro/nano-stru cture. It can find widespread applications in the fabrication of micro-mechani sm, trimming IC, and fabricating minilens, etc. 展开更多
关键词 PLASMA nanofabrication rapid prototyping advan ced manufacturing technology micro/nano-technology
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Research and test of the adaptive quadrature demodulation technology for silicon micro-machined gyroscope 被引量:3
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作者 王玉良 《Journal of Harbin Institute of Technology(New Series)》 EI CAS 2012年第5期118-122,共5页
A program of adaptive quadrature demodulation is proposed to supply the gaps in the traditional analog detection technology of a silicon micro-machined gyroscope (SMG). This program is suitable for digital phase locke... A program of adaptive quadrature demodulation is proposed to supply the gaps in the traditional analog detection technology of a silicon micro-machined gyroscope (SMG). This program is suitable for digital phase locked loop (DPLL) drive technology that proposed in other papers. In addition the program adopts an adaptive filtering algorithm, which selects the in-phase and quadrature components that are outputs of the DPLL of the SMG's drive mode as reference signals to update the amplitude of the in-phase and quadrature components of the input signal by iteratively. An objective of the program is to minimize the mean square error of the accurate amplitudes and the estimated amplitudes of SMG's detection mode. The simulation and test results prove the feasibility of the program that lays the foundation for the further improvement of the SMG's system performance and the implementation of the SMG system's self-calibration and self-demarcation in future. 展开更多
关键词 Silicon micro-machined Gyroscope (SMG) adaptive filtering technology quadrature demodulation Field Programmable Gate Array(FPGA)
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Study of Multi-Function Micro-Plasma Spraying Technology 被引量:3
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作者 汪刘应 王汉功 +1 位作者 华绍春 曹小平 《Plasma Science and Technology》 SCIE EI CAS CSCD 2007年第1期52-56,共5页
A multi-functional micro-arc plasma spraying system was developed according to aerodynamics and plasma spray theory. The soft switch IGBT (Insulated Gate Bipolar Transistor) invert technique, micro-computer control ... A multi-functional micro-arc plasma spraying system was developed according to aerodynamics and plasma spray theory. The soft switch IGBT (Insulated Gate Bipolar Transistor) invert technique, micro-computer control technique, convergent-divergent nozzle structure and axial powder feeding techniques have been adopted in the design of the micro-arc plasma spraying system. It is not only characterized by a small volume, a light weight, highly accurate control, high deposition efficiency and high reliability, but also has multi-functions in plasma spraying, welding and quenching. The experimental results showed that the system can produce a supersonic flame at a low power, spray Al2O3 particles at an average speed up to 430 m/s, and make nanostructured AT13 coatings with an average bonding strength of 42.7 MPa. Compared to conventional 9M plasma spraying with a higher power, the coatings with almost the same properties as those by conventional plasma spray can be deposited by multi-functional micro-arc plasma spraying with a lower power plasma arc due to an improved power supply design, spray gun structure and powder feeding method. Moreover, this system is suitable for working with thin parts and undertaking on site repairs, and as a result, the application of plasma spraying will be greatly extended. 展开更多
关键词 micro-plasma spraying soft-switch invert technology nanostructured coating high-pressure high-current plasmas (plasma spray arc welding etc.)
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The application of data mining technology in data service of micro service architecture
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作者 Kun liu Hanjing Liu Xiaohan Ding 《International Journal of Technology Management》 2017年第3期41-43,共3页
This paper introduces the application of data mining technology in data service. Data mining is a new technology, but its application time is long, and the application effect is obvious. Data mining technology can be ... This paper introduces the application of data mining technology in data service. Data mining is a new technology, but its application time is long, and the application effect is obvious. Data mining technology can be used in enterprise customer service system, which can help enterprises to find potential customers, while retaining the most valuable customers. We pointed out the necessity of establishing data mining technology and service intelligence analysis system based on the combination of intelligence analysis and service characteristics and processes, the method of data mining, knowledge management ideas applied to intelligence analysis and service system. 展开更多
关键词 Data mining technology micro service architecture data service
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A Protocol to Develop Phenolic Emulsifiers Used in Micro-surface by Control Technology
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作者 刘加平 CHEN Xiang +1 位作者 HONG Jinxiang LIU Zhifei 《Journal of Wuhan University of Technology(Materials Science)》 SCIE EI CAS 2015年第1期175-180,共6页
The phenolic emulsifiers used in emulsified asphalt of micro-surfacing, which was the most important tools in the road maintenance, were investigated by control technology. Many factors influencing this reaction were ... The phenolic emulsifiers used in emulsified asphalt of micro-surfacing, which was the most important tools in the road maintenance, were investigated by control technology. Many factors influencing this reaction were studied and three kinds of phenolic emulsifiers were prepared without catalyst in ethanol. The performance was researched that 2-({2-[2-(2-Amino-ethylamino)-ethylamino]-ethyl-amino}-methyl)-4- nonyl-phenol (abbreviated as TETA) could be used in micro-surface. With addition of 0.5 % demulsifier, the mixing time was extended to 120 seconds obviously, and the cohesion torque (60 min) was 2.8 N*m, which satisfied the opening traffic time shorter than 1 h. The wet track abrasion (6 d) was lower than 807 g/m2, with interracial modifier added, but the load wheel was increased with interfacial modifier increasing. When the TETA: demulsifier: interracial modifier =3:1:3, excellent performance was obtained and the experimental results met the International Slurry Surfacing Association (ISSA) standard. The synthesis process of this emulsifier is simple and the performance used in micro-surface was excellent, so this kind of emulsifier could have a better application future. 展开更多
关键词 phenolic emulsifiers synthesis application micro-surfaces control technology
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Application of Green Technology Using Biological Means for the Adsorption of Micro-Pollutants in Water
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作者 Tanimola Hamed Owolabi John +1 位作者 Awoyemi Emmanuel Kayode Benjamin 《Journal of Environmental Protection》 2020年第9期735-752,共18页
It is true that the world we have today is not the world we use to know. The Covid-19 pandemic has paralyzed all sector, hence the need for safety and enabling environment for mankind is of high importance. Adsorption... It is true that the world we have today is not the world we use to know. The Covid-19 pandemic has paralyzed all sector, hence the need for safety and enabling environment for mankind is of high importance. Adsorption technology is far the best and cheapest treatment technology for water and has extensively proven its worth for the uptake of micro-pollutant from surface, ground and water which are the major channels of home water. Over the years activated carbon is considered as the most common and universally used adsorbent for the eradication of different types of micro-pollutants from water. The contamination of surface water by micro-pollutant is a potential threat for the production of high quality and safe drinking water. Adsorption operation onto granulated activated carbon (GAC) in fixed-bed filters is often applied as a remedying step in the synthesis of safe and drinkable water. Activated carbon actively tends to act as a carrier material for a thin usually resistant layer of microorganisms (mostly bacteria) that forms on the coat of various surfaces (biofilm), hence biological simplification can be an alternative removal approach that can be adopted in granulated activated carbon filters. To evaluate the capacity of biofilm to biologically simplify micro-pollutants, it is very imperative to distinguish adsorption from biological simplification (biodegradation) as a removal mechanism. Experiment was carried out under the operating condition of a temperature range of 6?C to 20?C with biologically activated and autoclaved GAC to assess the biological simplification by the biofilm adsorbed on the GAC surface. Five micro-pollutants were selected as model compounds, of which some of them were biologically simplified by the GAC biofilm. Additionally, we observed that temperature can increase or decrease adsorption. Conclusively, comparison was made on the adsorption capacity of granulated activated carbon used for more than 50,000 beds. 展开更多
关键词 Green technology micro-Pollutants Removal Adsorption through Activated Carbon Water Treatment Biodegradation and Biological Means Temperature Effect
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The Rapid Development of Technology in Making Iron Clamps of Three Ancient Temples in the Archaic and Classical Period
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作者 George Varoufakis 《Journal of Chemistry and Chemical Engineering》 2012年第12期1136-1141,共6页
A few years ago, the present author had the opportunity to study the iron clamps of the archaic and classical temples. This research led to very interesting results concerning the development of technology applied in ... A few years ago, the present author had the opportunity to study the iron clamps of the archaic and classical temples. This research led to very interesting results concerning the development of technology applied in making those clamps and what is more its rapid evolution in a very short period. For instance, the technology in making the clamps of Parthenon and those of the Epikourios Apollo differs completely, although the latter was erected by the same engineer, Iktinos. Actually, it is a revolutionary one as compared with that applied in the erection of Parthenon. The paper starts by examining the making of the archaic Trapeza iron clamps and continue with those of the Parthenon and the Epikourios Apollo. 展开更多
关键词 Iron clamps archaic temples classical temples development in technology macro micro examination.
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基于Micro-CT评价超声骨焊接技术PDLLA材料对骨愈合性能的影响
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作者 阿曼妮萨罕·加帕尔 阿依达娜·乌拉尔别克 +4 位作者 贺琦 刘雪 孜尔达·阿依丁 杨一帆 凌彬 《新疆医科大学学报》 CAS 2024年第5期681-686,共6页
目的采用微焦点断层扫描(Micro-CT)评价超声骨焊接技术应用过程中超声震荡产热作用下PDLLA材料对骨愈合性能的影响。方法选择SPF级雄性新西兰大白兔36只,随机分为超声骨焊接技术辅助PDLLA材料组(A组)、拧入技术辅助PDLLA材料组(B组)、... 目的采用微焦点断层扫描(Micro-CT)评价超声骨焊接技术应用过程中超声震荡产热作用下PDLLA材料对骨愈合性能的影响。方法选择SPF级雄性新西兰大白兔36只,随机分为超声骨焊接技术辅助PDLLA材料组(A组)、拧入技术辅助PDLLA材料组(B组)、假手术组(C组)、空白对照组(D组),各9只。于术后4、8、12周取下颌骨标本,周围骨组织进行HE染色,观察各组植入钉周围情况。对术后4、8、12周的下颌骨大体标本拍摄Micro-CT图,使用VG Studio MAX软件进行三维重建,摆正数据样本,即颌骨颊侧造模处为轴向,动态分析植入钉体积、植入钉周围200μm环状区及骨缺损处的植入材料体积数、相对骨体积分数(BV/TV)、骨小梁厚度(Tb.Th)、骨小梁数(Tb.N)、骨小梁间隙(Tb.Sp)等骨愈合相关指标。结果HE染色结果显示,按3个时间可动态观察到A、B、C组骨缺损处骨性骨痂替代纤维性骨痂,形成类骨质,编织骨的过程符合正常骨损伤愈合的过程。Micro-CT结果显示,A、B组术后3个时间点的材料体积比较差异均无统计学意义(P>0.05);在3个时间点,4组植入钉周围200μm环状区中BV/TV、Tb.Th、Tb.N、Tb.Sp比较差异均无统计学意义(P>0.05);在骨缺损处,A、B、C组三个时间点BV/TV、Tb.Th、Tb.N、Tb.Sp比较差异无统计学意义(P>0.05);术后4周,与D组比较,A、B、C组BV/TV、Tb.Th、Tb.N、Tb.Sp差异有统计学意义(P<0.05);与C组比较,A、B组Tb.N差异有统计学意义(P<0.01)。术后8周,与D组比较,A、B、C组BV/TV、Tb.Th、Tb.N、Tb.Sp差异有统计学意义(P<0.05);术后12周,与D组比较,A、B、C组BV/TV、Tb.Th、Tb.Sp差异有统计学意义(P<0.05)。结论超声骨焊接技术其超声震荡产热作用下PDLLA材料对骨愈合性能无不良影响。 展开更多
关键词 超声骨焊接技术 PDLLA micro-CT 兔下颌骨缺损模型 骨愈合
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Technology Readiness of a Vertical-Axis Hydro-Kinetic Turbine
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作者 Stefan Runge Thorsten Stoesser +1 位作者 Emily Morris Madeleine White 《Journal of Power and Energy Engineering》 2018年第8期63-85,共23页
In this paper, the development of a vertical axis hydrokinetic twin turbine for harvesting energy from flowing water in man-made channels is described. The Technology Readiness Level (TRL) assessment procedure, develo... In this paper, the development of a vertical axis hydrokinetic twin turbine for harvesting energy from flowing water in man-made channels is described. The Technology Readiness Level (TRL) assessment procedure, developed by NASA and modified by the US Department of Energy, is followed and it is shown that the hydrokinetic turbine successfully reaches TRL 7, which is a full-scale, similar (prototypical) system demonstrated in a relevant environment. The concept of the twin turbine (TRL 1 - 3) is first validated and tested using a 1:10 scale laboratory model at Cardiff University and efficiencies of up to 75% are achieved (TRL 4 - 5). In order to justify system functionality and performance in a relevant environment as well as up-scalability, a 1:3 scale model of the twin turbine is implemented and tested in a discharge channel of a water treatment plant in Atlanta, thereby achieving TRL6. This paved the way for an application in the form of an array of ten full-scale twin turbine prototypes, including all relevant components such as housing, drive-train, gear-box and generator. Successful deployment and testing in the South Boulder Canal near Denver means that the hydrokinetic twin turbine system reached TRL7. 展开更多
关键词 Hydro-Turbine Vertical-Axis VAT micro-HYDRO TRL technology Readiness Level
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The Application of Multimedia Technology in High School Reading Class
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作者 黄鸿利 《神州》 2014年第11期71-71,共1页
With the development of multimedia technology and the application of multimedia technology,especially the conversion of the reading material into micro-movie in English reading class,a good way to develop the comprehe... With the development of multimedia technology and the application of multimedia technology,especially the conversion of the reading material into micro-movie in English reading class,a good way to develop the comprehensive abilities of students simultaneously has been found.This teaching method is not only good for students,but also benefits teachers’teaching on different aspects.So,the key point of this essay is to introduce this teaching method for our English teachers,at the same time,this essay will show some principles of this teaching method and also there will be some examples for the specific conversion of reading material. 展开更多
关键词 multimedia technology micro-movie READING teaching activities
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钙钛矿量子点色转换Micro-LEDs:稳定性与图案化研究进展
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作者 严梓峻 刘众 +8 位作者 杨晓 赖寿强 颜丰裕 林宗民 林岳 吕毅军 郭浩中 陈忠 吴挺竹 《光电工程》 CAS CSCD 北大核心 2024年第7期1-26,共26页
微型发光二极管(Micro light-emitting diode,Micro-LED)显示具有优异的显示性能和光电性质,被称为“下一代”终极显示技术。为了满足近眼显示需求,Micro-LED需要进一步微缩与集成化。随着微纳级图案化技术的不断革新,荧光色转换层法表... 微型发光二极管(Micro light-emitting diode,Micro-LED)显示具有优异的显示性能和光电性质,被称为“下一代”终极显示技术。为了满足近眼显示需求,Micro-LED需要进一步微缩与集成化。随着微纳级图案化技术的不断革新,荧光色转换层法表现出低制造成本等显著优势,相较于三色芯片法,更适合应用于对色域、分辨率有更高要求的虚拟/增强现实显示应用。钙钛矿量子点是最有前景的荧光色转换材料,然而自身晶格固有的不稳定性和外界环境因素刺激共同导致的结构降解是一大问题。另外,如何制备与Micro-LED芯片阵列相匹配的微米级荧光阵列图案是至关重要的。为此,本文首先讲述了造成钙钛矿量子点结构不稳定性的原因,其次,总结了配体交换、离子掺杂、表面包覆和化学交联等方案在提升钙钛矿量子点稳定性方面的应用,最后,总结了光刻技术和喷墨打印技术在制备高分辨率钙钛矿量子点荧光阵列的最新研究进展。 展开更多
关键词 micro-LED 荧光色转换层法 钙钛矿量子点 稳定性 图案化技术
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超声MicroPure成像对BI-RADS4级的乳腺肿块微钙化检出的价值 被引量:11
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作者 吴媛媛 黄猛 +4 位作者 周怡 杨金燕 赵晟 潘跃银 沈园园 《安徽医科大学学报》 CAS 北大核心 2015年第11期1661-1664,共4页
目的评价应用超声Micro Pure成像技术对BI-RADS分级为4级的乳腺肿块中微钙化的检测价值。方法对56例发现乳腺肿块并且BI-RADS分级为4级的患者分别应用X线钼靶、传统灰阶超声及Micro Pure成像技术进行肿块微钙化的检测,以钼靶为金标准,... 目的评价应用超声Micro Pure成像技术对BI-RADS分级为4级的乳腺肿块中微钙化的检测价值。方法对56例发现乳腺肿块并且BI-RADS分级为4级的患者分别应用X线钼靶、传统灰阶超声及Micro Pure成像技术进行肿块微钙化的检测,以钼靶为金标准,对传统灰阶超声和Micro Pure检测结果进行比较。同时结合术后病理结果进行分析。结果56例乳腺肿块中,钼靶发现43个病灶有微钙化,传统灰阶超声发现其中22个病灶有微钙化,Micro Pure成像技术发现40个病灶有微钙化。传统灰阶超声检测病灶内部及周边微钙化的敏感性为51.2%,特异性为92.3%,ROC曲线下面积为0.717;Micro Pure成像技术检测病灶内部及周边微钙化的敏感性为93.0%,特异性为100.0%,ROC曲线下面积为0.965。结论在BI-RADS分级为4级的乳腺肿块微钙化的检测中,超声Micro Pure成像技术明显优于传统灰阶超声,有助于乳腺癌的临床诊断。 展开更多
关键词 microPure成像技术 BI-RADS分级 乳腺肿块 微钙化
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Micro-LED显示的发展现状与技术挑战 被引量:32
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作者 季洪雷 张萍萍 +3 位作者 陈乃军 王代青 张彦 葛子义 《液晶与显示》 CAS CSCD 北大核心 2021年第8期1101-1112,共12页
Micro-LED技术被认为是消费电子领域下一个世代的显示技术。尽管市场上已经有很多公司推出了基于Micro-LED显示技术的样机以及应用示范,然而Micro-LED显示技术远没有达到成熟的程度。本文从Micro-LED显示技术的历史、定义及技术挑战进... Micro-LED技术被认为是消费电子领域下一个世代的显示技术。尽管市场上已经有很多公司推出了基于Micro-LED显示技术的样机以及应用示范,然而Micro-LED显示技术远没有达到成熟的程度。本文从Micro-LED显示技术的历史、定义及技术挑战进行了综述,重点总结了Micro-LED在工程领域的技术挑战,最后对Micro-LED技术的未来发展方向进行了探讨。Micro-LED在芯片、巨量转移、全彩化等方面仍存在技术挑战,但其所展现出的高分辨、快响应、低能耗、长寿命等突出特点,能满足超小和超大显示的需求,如虚拟/增强显示和电子广告牌,展现出巨大的应用潜力,已经在学术界和工业界引起了广泛研究。 展开更多
关键词 micro-LED 巨量转移 显示技术 全彩化
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Construction and Properties of Structure-and Size-controlled Micro/Nano-energetic Materials 被引量:20
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作者 HUANG Bing CAO Minhua +2 位作者 NIE Fude HUANG Hui HU Changwen 《Defence Technology(防务技术)》 SCIE EI CAS 2013年第2期75-103,共29页
The recent research progress of structure- and size-controlled micro/nano-energetic materials is reviewed, which properties are fundamentally different from those of their corresponding bulk materials. The development... The recent research progress of structure- and size-controlled micro/nano-energetic materials is reviewed, which properties are fundamentally different from those of their corresponding bulk materials. The development of the construction strategies for achieving zero-dimensional (0D), one-dimensional (1D), two-dimensional (2D), and three-dimensional (3D) micro/nanostructures from energetic molecules is introduced. Also, an overview of the unique properties induced by micro/nanostructures and size effects is provided. Special emphasis is focused on the size-dependent properties that are different from those of the conventional micro-sized energetic materials, such as thermal decomposition, sensitivity, combustion and detonation, and compaction behaviors. A conclusion and our view of the future development of micro/nano-energetic materials and devices are given. 展开更多
关键词 applied chemistry STRUCTURE SIZE micro/nano-energetic materials construction technology PROPERTY
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Fabrication of Fuze Micro-electro-mechanical System Safety Device 被引量:8
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作者 DU Liqun JIA Shengfang +1 位作者 NIE Weirong WANG Qijia 《Chinese Journal of Mechanical Engineering》 SCIE EI CAS CSCD 2011年第5期836-841,共6页
Fuze micro-electro-mechanical system(MEMS) has become a popular subject in recent years.Studies have been done for the application of MEMS-based fuze safety and arm devices.The existing researches mainly focused on ... Fuze micro-electro-mechanical system(MEMS) has become a popular subject in recent years.Studies have been done for the application of MEMS-based fuze safety and arm devices.The existing researches mainly focused on reducing the cost and volume of the fuze safety device.The reduction in volume allows more payload and,thus,makes small-caliber rounds more effective and the weapon system more affordable.At present,MEMS-based fuze safety devices are fabricated mainly by using deep reactive ion ething or LIGA technology,and the fabrication process research on the fuze MEMS safety device is in the exploring stage.In this paper,a new micro fabrication method of metal-based fuze MEMS safety device is presented based on ultra violet(UV)-LIGA technology.The method consists of SU-8 thick photoresist lithography process,micro electroforming process,no back plate growing process,and SU-8 photoresist sacrificial layer process.Three kinds of double-layer moveable metal devices have been fabricated on metal substrates directly with the method.Because UV-LIGA technology and no back plate growing technology are introduced,the production cycle is shortened and the cost is reduced.The smallest dimension of the devices is 40 μm,which meets the requirement of size.To evaluate the adhesion property between electroforming deposit layer and substrate qualitatively,the impact experiments have been done on the device samples.The experimental result shows that the samples are still in good condition and workable after undergoing impact pulses with 20 kg peak and 150 μs duration and completely met the requirement of strength.The presented fabrication method provides a new option for the development of MEMS fuze and is helpful for the fabrication of similar kinds of micro devices. 展开更多
关键词 fuze MEMS safety device UV-LIGA technology double-layer moveable device micro electroforming
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灰阶超声联合超声MicroPure成像技术对乳腺导管癌微钙化的诊断价值 被引量:3
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作者 尹逊娣 曹永政 +2 位作者 史军华 张松松 谢娜 《海南医学》 CAS 2016年第2期235-237,共3页
目的评价灰阶超声联合超声Micro Pure成像技术诊断乳腺导管癌微钙化的临床价值。方法回顾性分析我院2015年4月至2015年6月间的30例经手术病理证实为乳腺导管癌且钼靶诊断有微钙化患者的灰阶超声图像、超声Micro Pure技术图像及灰阶超声... 目的评价灰阶超声联合超声Micro Pure成像技术诊断乳腺导管癌微钙化的临床价值。方法回顾性分析我院2015年4月至2015年6月间的30例经手术病理证实为乳腺导管癌且钼靶诊断有微钙化患者的灰阶超声图像、超声Micro Pure技术图像及灰阶超声联合Micro Pure技术图像中微钙化的显示情况,分析并比较三种方法对乳腺导管癌微钙化的诊断情况。结果钼靶图像中显示有微钙化的30例乳腺导管癌患者中,单独应用灰阶超声对乳腺微钙化的检出率最低(60.0%),超声Micro Pure成像技术的检出率次之(76.7%),灰阶超声联合Micro Pure技术的检出率最高(90.0%),因此联合应用灰阶超声与Micro Pure技术对乳腺导管癌微钙化的显示能力明显高于二者的单独应用,其差异均有统计学意义(P<0.05)。结论灰阶超声联合超声Micro Pure成像技术能为乳腺导管癌微钙化的超声诊断提供重要的指导信息。 展开更多
关键词 灰阶超声 超声microPure成像技术 乳腺导管癌 微钙化
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Design and Performance Analysis of Micro Proton Exchange Membrane Fuel Cells 被引量:3
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作者 钟振忠 陈俊勋 彭荣贵 《Chinese Journal of Chemical Engineering》 SCIE EI CAS CSCD 2009年第2期298-303,共6页
This study describes a novel micro proton exchange membrane fuel cell(PEMFC)(active area,2.5 cm2).The flow field plate is manufactured by applying micro-electromechanical systems(MEMS) technology to silicon substrates... This study describes a novel micro proton exchange membrane fuel cell(PEMFC)(active area,2.5 cm2).The flow field plate is manufactured by applying micro-electromechanical systems(MEMS) technology to silicon substrates to etch flow channels without a gold-coating.Therefore,this investigation used MEMS technology for fabrication of a flow field plate and presents a novel fabrication procedure.Various operating parameters,such as fuel temperature and fuel stoichiometric flow rate,are tested to optimize micro PEMFC performance.A single micro PEMFC using MEMS technology reveals the ideal performance of the proposed fuel cell.The optimal power density approaches 232.75 mW·cm-1 when the fuel cell is operated at ambient condition with humidified,heated fuel. 展开更多
关键词 micro proton exchange membrane fuel cell flow field plate micro-electromechanical systems technology SILICON
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Micro-LED背板键合技术 被引量:1
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作者 王明星 曹占锋 +2 位作者 卢鑫泓 王珂 袁广才 《微纳电子与智能制造》 2021年第3期120-128,共9页
针对Micro-LED与背板的键合技术,分析和总结了现有用于集成电路及MEMS器件中导电键合技术,并结合Micro-LED特点,对Micro-LED键合技术进行了分析和总结,针对高分辨率微显示的Micro-LED外延片键合技术,可以采用集成电路及MEMS器件中直接... 针对Micro-LED与背板的键合技术,分析和总结了现有用于集成电路及MEMS器件中导电键合技术,并结合Micro-LED特点,对Micro-LED键合技术进行了分析和总结,针对高分辨率微显示的Micro-LED外延片键合技术,可以采用集成电路及MEMS器件中直接键合、表面活化键合、黏着键合、共晶键合、纳米键合、激光和超声辅助键合等常用键合技术,而对于巨量转移实现Micro-LED显示技术,更适宜采用黏着键合、共晶键合、金属微纳结构键合和激光辅助键合。共晶键合技术应用广泛,具有从材料到设备以及工艺等方面成熟的解决方案,是现有键合方案中最具前景的一种。 展开更多
关键词 微型发光二极管 显示技术 键合技术
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