A modularized, network, reconfigurable architecture and design method of embedded control module is proposed. This control module uses a TMS320F2812 chip as the core, and intro- duces modularization, network, reconfig...A modularized, network, reconfigurable architecture and design method of embedded control module is proposed. This control module uses a TMS320F2812 chip as the core, and intro- duces modularization, network, reconfigurable theory to the design of control module to better meet the flexible and reconfigurable control need of assembly line. The design method of the control module is verified by constructing a control experiment based on controlling of precision x - y displace- ment platform through a CAN bus. Experimental results show that the controlling repeat position accuracy of precision x - y platform by control module is 0. 5 μm and the position error is less than 1μm which meet the needs of micro-adjustment pose of assembly line.展开更多
This paper presents a vacuum gripper (as an actuator of an intelligent micromanipulator) for micro objects (with a diameter of 100 - 300μm) assembly tasks. The gripper is composed of a vacuum unit and a control u...This paper presents a vacuum gripper (as an actuator of an intelligent micromanipulator) for micro objects (with a diameter of 100 - 300μm) assembly tasks. The gripper is composed of a vacuum unit and a control unit. The vacuum unit with a proportional valve and a pressure sensor, and the control unit with a PC + MCU two-layered control architecture are designed. The mechanical structure, workflow and major programs of the micro-gripper are presented. This paper discusses the major components of the adhesion force acting on micro objects. Some equations of the operation conditions m three phases of pick, hold and place are derived by mechanics analysis. The pneumatic system's pressure loss is inevitable. There are some formulas for calculating the amount of the pressure loss, but parameters in formulas are diffficult to be quantified and evaluated. To control the working pressure accurately, a pressure controller based on fuzzy logic is designed. With MATLAB's fuzzy logic toolbox, simulation experiments are performed to validate the performance of the fuzzy PD controller. The gripper is characterized by a steady and reliable performance and a simple structure, and it is suitable for handling micro objects with a sub-millimeter size.展开更多
The integration of nanomaterials such as carbon nanotubes (CNTs) into microsystems is highly desirable, in order to make use of the unique nanomaterial properties in real devices. However, the CNTtomicrosystem integ...The integration of nanomaterials such as carbon nanotubes (CNTs) into microsystems is highly desirable, in order to make use of the unique nanomaterial properties in real devices. However, the CNTtomicrosystem integration is challenging to implement in a manufacturable, cost effective industrial process. This paper presents our work towards a process for making complete, integrated CMOS / MEMS systems with integrated CNT. We demonstrate the feasibility of the process, using roomtemperature process ing, lowcost equipment and consumables, and electrical control with automation possibilities. CNTs are directly integrated at the desired positions in the Si microsystem, forming closed Si / CNT / Si circuits. We explore different designs with the aim to obtain uniform and welldefined CNT synthesis conditions, and show that simplified designs can perform comparably to more complex ones. The Si / CNT / Si circuits obtained can show rectifying (Schottky like) or nearohmic behavior. Gas sensing possibilities are demonstrated, indicating the possibility of monitoring aging/ fermenting of food. Functionalization of CNTs is demon strated, using thermal evaporation of Sn and Pd, opening for selective and sensitive sensors for various gases and ana lytes. Detailed microscopic characterization of the obtained CNTs are presented.展开更多
基金Supported by National Defense Basic Scientific Research Project(A092000000)High Quality CNC Machine Tool and Basic Manufacturing Equipment Scientific Major Project(2012ZX04010-061)
文摘A modularized, network, reconfigurable architecture and design method of embedded control module is proposed. This control module uses a TMS320F2812 chip as the core, and intro- duces modularization, network, reconfigurable theory to the design of control module to better meet the flexible and reconfigurable control need of assembly line. The design method of the control module is verified by constructing a control experiment based on controlling of precision x - y displace- ment platform through a CAN bus. Experimental results show that the controlling repeat position accuracy of precision x - y platform by control module is 0. 5 μm and the position error is less than 1μm which meet the needs of micro-adjustment pose of assembly line.
基金This work was supported bythe National Natural Science Foundation of China (No .60275013) the Natural High Technology Researchand DevelopementProgramof China(No .2004AA844120) .
文摘This paper presents a vacuum gripper (as an actuator of an intelligent micromanipulator) for micro objects (with a diameter of 100 - 300μm) assembly tasks. The gripper is composed of a vacuum unit and a control unit. The vacuum unit with a proportional valve and a pressure sensor, and the control unit with a PC + MCU two-layered control architecture are designed. The mechanical structure, workflow and major programs of the micro-gripper are presented. This paper discusses the major components of the adhesion force acting on micro objects. Some equations of the operation conditions m three phases of pick, hold and place are derived by mechanics analysis. The pneumatic system's pressure loss is inevitable. There are some formulas for calculating the amount of the pressure loss, but parameters in formulas are diffficult to be quantified and evaluated. To control the working pressure accurately, a pressure controller based on fuzzy logic is designed. With MATLAB's fuzzy logic toolbox, simulation experiments are performed to validate the performance of the fuzzy PD controller. The gripper is characterized by a steady and reliable performance and a simple structure, and it is suitable for handling micro objects with a sub-millimeter size.
文摘The integration of nanomaterials such as carbon nanotubes (CNTs) into microsystems is highly desirable, in order to make use of the unique nanomaterial properties in real devices. However, the CNTtomicrosystem integration is challenging to implement in a manufacturable, cost effective industrial process. This paper presents our work towards a process for making complete, integrated CMOS / MEMS systems with integrated CNT. We demonstrate the feasibility of the process, using roomtemperature process ing, lowcost equipment and consumables, and electrical control with automation possibilities. CNTs are directly integrated at the desired positions in the Si microsystem, forming closed Si / CNT / Si circuits. We explore different designs with the aim to obtain uniform and welldefined CNT synthesis conditions, and show that simplified designs can perform comparably to more complex ones. The Si / CNT / Si circuits obtained can show rectifying (Schottky like) or nearohmic behavior. Gas sensing possibilities are demonstrated, indicating the possibility of monitoring aging/ fermenting of food. Functionalization of CNTs is demon strated, using thermal evaporation of Sn and Pd, opening for selective and sensitive sensors for various gases and ana lytes. Detailed microscopic characterization of the obtained CNTs are presented.