According to the inland micro electro-mechanical system （MEMS） process technique level, a design platform of piezoresistive micro electro-mechanical accelerometer is given. This platform is much more adaptable to th...According to the inland micro electro-mechanical system （MEMS） process technique level, a design platform of piezoresistive micro electro-mechanical accelerometer is given. This platform is much more adaptable to the inland designer compared with the current MEMS CAD software. The design flow is presented in detail, and the key techique in the platform is analyzed amply. The structure design methodology is exemplified in the design of a piezoresistive accelerometer, and the accelerometer is the optimized structure for the given performance requirements. The accelerometer is now being manufactured.展开更多
The virtual machine of code mechanism （VMCM） as a new concept for code mechanical solidification and verification is proposed and can be applied in MEMS （micro-electromechanical systems） security device for high c...The virtual machine of code mechanism （VMCM） as a new concept for code mechanical solidification and verification is proposed and can be applied in MEMS （micro-electromechanical systems） security device for high consequence systems. Based on a study of the running condition of physical code mechanism, VMCM＇s configuration, ternary encoding method, running action and logic are derived. The cases of multi-level code mechanism are designed and verified with the VMCM method, showing that the presented method is effective.展开更多
Currently, the monitoring of bridges in China heavily relies on manual operation, which has several major problems. It generally takes a very long time to complete an inspection process on bridges. The manual data is ...Currently, the monitoring of bridges in China heavily relies on manual operation, which has several major problems. It generally takes a very long time to complete an inspection process on bridges. The manual data is sometimes unreliable or even wrong in the case of careless operation. The inspection activity itself is dangerous for inspectors, e.g., bridges are located in the sea or river. Some semi-automatic monitoring methods are recently employed, but they are either very expensive or do not work properly. Therefore, the traditional bridge monitoring process becomes an increasing challenge for bridge operators. In this paper, a real-time and automatic bridge monitoring system is presented to meet the bridge monitoring needs, and MEMS （Micro Electro Mechanical Systems） are the key building block in this system. By using the MEMS-based sensors, it is much more efficient and accurate in monitoring bridges with the measurement of inclination, acceleration, displacement, moisture, temperature, stress and other data.展开更多
A novel and efficient absorption line recovery technique is presented.A micro-electromechanical systems(MEMS) mirror driven by an electrothermal actuator is used to generate laser intensity modulation through the mirr...A novel and efficient absorption line recovery technique is presented.A micro-electromechanical systems(MEMS) mirror driven by an electrothermal actuator is used to generate laser intensity modulation through the mirror reflection.Tunable diode laser spectroscopy(TDLS) and photoacoustic spectroscopy(PAS) are used to recover the target absorption line profile which is compared with the theoretical Voigt profile.The target gas is 0.01% acetylene(C2H2) in a nitrogen host gas.The laser diode wavelength is swept across the P17 absorption line of acetylene at 1 535.4 nm by a current ramp,and an erbium-doped fibre amplifier(EDFA) is used to enhance the optical intensity and increase the signal-to-noise ratio(SNR).A SNR of about 35 is obtained with 100 mW laser power from the EDFA.Good agreement is achieved between the experimental results and the theoretical simulation for the P17 absorption line profile.展开更多
An uncommon fractal construction method is applied in the microwave element design. A novel fractal defected ground structure （DGS） based on micro electro-mechanical system （MEMS） is proposed. The size of this nov...An uncommon fractal construction method is applied in the microwave element design. A novel fractal defected ground structure （DGS） based on micro electro-mechanical system （MEMS） is proposed. The size of this novel fractal DGS can achieve 86% size reduction compared with the conventional dumbbell type DGS. This novel fractal DGS is used in the miniaturization design of L-band microstrip antenna array. The simulation result shows that this novel fractal DGS can effectively reduce the mutual coupling between the antenna elements, so it is helpful to the miniaturization of microstrip array, namely the approximately same gain value can be achieved with the shorter distance between elements.展开更多
文摘According to the inland micro electro-mechanical system （MEMS） process technique level, a design platform of piezoresistive micro electro-mechanical accelerometer is given. This platform is much more adaptable to the inland designer compared with the current MEMS CAD software. The design flow is presented in detail, and the key techique in the platform is analyzed amply. The structure design methodology is exemplified in the design of a piezoresistive accelerometer, and the accelerometer is the optimized structure for the given performance requirements. The accelerometer is now being manufactured.
基金Project supported by High-Technology Research and Develop-ment Program of China (Grant No .863 -2003AA404210)
文摘The virtual machine of code mechanism （VMCM） as a new concept for code mechanical solidification and verification is proposed and can be applied in MEMS （micro-electromechanical systems） security device for high consequence systems. Based on a study of the running condition of physical code mechanism, VMCM＇s configuration, ternary encoding method, running action and logic are derived. The cases of multi-level code mechanism are designed and verified with the VMCM method, showing that the presented method is effective.
文摘Currently, the monitoring of bridges in China heavily relies on manual operation, which has several major problems. It generally takes a very long time to complete an inspection process on bridges. The manual data is sometimes unreliable or even wrong in the case of careless operation. The inspection activity itself is dangerous for inspectors, e.g., bridges are located in the sea or river. Some semi-automatic monitoring methods are recently employed, but they are either very expensive or do not work properly. Therefore, the traditional bridge monitoring process becomes an increasing challenge for bridge operators. In this paper, a real-time and automatic bridge monitoring system is presented to meet the bridge monitoring needs, and MEMS （Micro Electro Mechanical Systems） are the key building block in this system. By using the MEMS-based sensors, it is much more efficient and accurate in monitoring bridges with the measurement of inclination, acceleration, displacement, moisture, temperature, stress and other data.
基金Financial support from National High Technology Research and Development Programof China(Grant No.:2007A A06Z1122007AA03Z446)
文摘A novel and efficient absorption line recovery technique is presented.A micro-electromechanical systems(MEMS) mirror driven by an electrothermal actuator is used to generate laser intensity modulation through the mirror reflection.Tunable diode laser spectroscopy(TDLS) and photoacoustic spectroscopy(PAS) are used to recover the target absorption line profile which is compared with the theoretical Voigt profile.The target gas is 0.01% acetylene(C2H2) in a nitrogen host gas.The laser diode wavelength is swept across the P17 absorption line of acetylene at 1 535.4 nm by a current ramp,and an erbium-doped fibre amplifier(EDFA) is used to enhance the optical intensity and increase the signal-to-noise ratio(SNR).A SNR of about 35 is obtained with 100 mW laser power from the EDFA.Good agreement is achieved between the experimental results and the theoretical simulation for the P17 absorption line profile.
基金supported by the 11th Five-Year Plan under Grant No. 11001030203
文摘An uncommon fractal construction method is applied in the microwave element design. A novel fractal defected ground structure （DGS） based on micro electro-mechanical system （MEMS） is proposed. The size of this novel fractal DGS can achieve 86% size reduction compared with the conventional dumbbell type DGS. This novel fractal DGS is used in the miniaturization design of L-band microstrip antenna array. The simulation result shows that this novel fractal DGS can effectively reduce the mutual coupling between the antenna elements, so it is helpful to the miniaturization of microstrip array, namely the approximately same gain value can be achieved with the shorter distance between elements.
