High Resolution Differential Capacitance Detection Scheme for Micro Levitated Rotor Gyroscope

A differential capacitance detection circuit aiming at detection of rotating angle in a novel levitation structure is presented. To ensure the low non-linearity and high resolution, noise analysis and non-linearity simulation are conducted. In the capacitance interface, an integral charge amplifier is adopted as a front end amplifier to reduce the parasitic capacitance caused by connecting wire. For the novel differential capacitance bridge with a coupling capacitor, the noise floor and non-linearity of the detection circuit are analyzed, and the results show that the detecting circuit is capable of realizing angle detection with high angular resolution and relative low non-linearity. With a specially designed printed circuit board, the circuit is simulated by PSpice. The practical experiment shows that the detection board can achieve angular resolution as high as 0.04° with a non-linearity error 2.3%.

Capacitance Sensing and Software-Realized Lock-in Amplifier for the Electromagnetically Levitated Micro Gyroscope

In the novel prototype of micro-gyroscope structure,the new configured capacitance sensing scheme for the micro gyroscope was analyzed and the virtual instrument based detection scheme was implemented.The digital lock-in amplifier was employed in the capacitance detection to restrain the noise interference.The capacitance analysis shows that 1 fF capacitance variation corresponds to 0.1 degree of the turn angle.The differential capacitance bridge and the charge integral amplifier were used as the front signal input interface.In the implementation of digital lock-in amplifier,a new routine which warranted the exactly matching of the reference phase to signal phase was proposed.The result of the experiment shows that digital lock-in amplifier can greatly eliminate the noise in the output signal.The non linearity of the turn angle output is 2.3% and the minimum resolution of turn angle is 0.04 degrees.The application of the software demodulation in the signal detection of micro-electro-mechanical-system(MEMS)device is a new attempt,and it shows the prospective for a high-performance application.

Vibration test of micro machined gyroscope based on high speed photography and SURF

Based on three kinds of dynamic test of MEMS, a dynamic system for the vibration test of micro machined gyroscope based on high speed photography is introduced. Firstly, the architecture of the system hardware is introduced. Secondly, the image tracking performance is compared by the test using the template matching algorithm, the mean shift algorithm and the SURF algorithm. The vibration curve shows that high speed photograph combined with SURF algorithm is faster, more ac- curate, and more suitable for the vibration test of micro machined gyroscope. After the frequency a- nalysis and related interpolation, more characteristics of micro gyroscope can be obtained.

Noise estimation and filtering method of MEMS gyroscope based on EMMAP

Aiming at the problems of low measurement accuracy,uncertainty and nonlinearity of random noise of the micro electro mechanical system(MEMS)gyroscope,a gyroscope noise estimation and filtering method is proposed,which combines expectation maximum(EM)with maximum a posterior(MAP)to form an adpative unscented Kalman filter(UKF),called EMMAP-UKF.According to the MAP estimation principle,a suboptimal unbiased MAP noise statistical estimation model is constructed.Then,EM algorithm is introduced to transform the noise estimation problem into the mathematical expectation maximization problem,which can dynamically adjust the variance of the observed noise.Finally,the estimation and filtering of gyroscope random drift error can be realized.The performance of the gyro noise filtering method is evaluated by Allan variance,and the effectiveness of the method is verified by hardware-in-the-loop simulation.

Waveguide-type optical passive ring resonator gyro using frequency modulation spectroscopy technique

This paper reports the experimental results of silica on a silicon ring resonator in a resonator micro optic gyroscope based on the frequency modulation spectroscopy technique by our research group. The ring resonator is composed of a 4 cm diameter silica waveguide. By testing at D1550 nm, the FSR, FWHM and the depth of resonance are 3122 MHz, 103.07 MHz and 0.8 respectively. By using a polarization controller, the resonance curve under the TM mode can be inhibited. The depth of resonance increased from 0.8 to 0.8913, namely the finesse increase from 30.33 to 33.05. In the experiments, there is an acoustic-optical frequency shifter（AOFS） in each light loop. We lock the lasing frequency at the resonance frequency of the silica waveguide ring resonator for the counterclockwise lightwave; the frequency difference between the driving frequencies of the two AOFS is equivalent to the Sagnac frequency difference caused by gyro rotation. Thus, the gyro output is observed. The slope of the linear fit is about 0.330 m V/（°/s） based on the 900 to 900 k Hz equivalent frequency and the gyro dynamic range is ±2.0×10^3rad/s.