Robust tracking control for micro machine tools with load uncertainties

The quality of the micro-mechanical machining outcome depends significantly on the tracking performance of the miniaturized linear motor drive precision stage. The tracking behavior of a direct drive design is prone to uncertainties such as model parameter variations and disturbances. Robust optimal tracking controller design for this kind of precision stages with mass and damping ratio uncertainties was researched. The mass and damping ratio uncertainties were modeled as the structured parametric uncertainty model. An identification method for obtaining the parametric uncertainties was developed by using unbiased least square technique. The instantaneous frequency bandwidth of the external disturbance signals was analyzed by using short time Fourier transform technique. A two loop tracking control strategy that combines the p-synthesis and the disturbance observer （DOB） techniques was proposed. The p-synthesis technique was used to design robust optimal controllers based on structured uncertainty models. By complementing the/z controller, the DOB was applied to further improving the disturbance rejection performance. To evaluate the positioning performance of the proposed control strategy, the comparative experiments were conducted on a prototype micro milling machine among four control schemes： the proposed two-loop tracking control, the single loop μ control, the PID control and the PID with DOB control. The disturbance rejection performances, the root mean square （RMS） tracking errors and the performance robustness of different control schemes were studied. The results reveal that the proposed control scheme has the best positioning performance. It reduces the maximal errors caused by disturbance forces such as friction force by 60% and the RMS errors by 63.4% compared with the PID control. Compared to PID with DOB control, it reduces the RMS errors by 29.6%.

Vibration test of micro machined gyroscope based on high speed photography and SURF

Based on three kinds of dynamic test of MEMS, a dynamic system for the vibration test of micro machined gyroscope based on high speed photography is introduced. Firstly, the architecture of the system hardware is introduced. Secondly, the image tracking performance is compared by the test using the template matching algorithm, the mean shift algorithm and the SURF algorithm. The vibration curve shows that high speed photograph combined with SURF algorithm is faster, more ac- curate, and more suitable for the vibration test of micro machined gyroscope. After the frequency a- nalysis and related interpolation, more characteristics of micro gyroscope can be obtained.

Quaternion-Based Kalman Filter for Micro-machined Strapdown Attitude Heading Reference System

A Kalman filter used in strapdown AHRS (Attitude Heading Reference System) based on micro machined inertial sensors is introduced. The composition and principle of the system are described. The attitude algorithm and error model of the system are derived based on the quaternion formulation. The real time quaternion based Kalman filter is designed. Simulation results show that accuracy of the system is better than 0.04 degree without disturbance of lateral acceleration and reduced to 0.44 degree with l...

Double-loop robust tracking control for micro machine tools

This paper addresses double-loop robust tracking controller design of the miniaturized linear motor drive precision stage with mass and damping ratio uncertainties. As an inner-loop, a disturbance observer （DOB） is employed to suppress exogenous low frequency disturbances such as friction and cutting force. To further eliminate the residual disturbance and to guarantee the robust tracking to the reference input, μ-synthesis outer-loop controller is designed. For eliminating the steady state error, a technique is proposed to design the μ-synthesis outer-loop controller with an integrator. A guideline to select the bandwidth of the Q-filter in the DOB is provided. Simulations using a model of a prototype micro-milling machine indicate that the proposed outer-loop synthesis scheme is superior to the H∞ suboptimal control in disturbance rejection performance and steady state tracking performance. Furthermore, it is shown experimentally that the proposed double-loop robust tracking controller improves the tracking performance of the stage by 29.6% over PID control with a DOB inner-loop.

Optimization of micro milling electrical discharge machining of Inconel 718 by Grey-Taguchi method

The optimization of micro milling electrical discharge machining（EDM） process parameters of Inconel 718 alloy to achieve multiple performance characteristics such as low electrode wear,high material removal rate and low working gap was investigated by the Grey-Taguchi method.The influences of peak current,pulse on-time,pulse off-time and spark gap on electrode wear（EW）,material removal rate（MRR） and working gap（WG） in the micro milling electrical discharge machining of Inconel 718 were analyzed.The experimental results show that the electrode wear decreases from 5.6×10-9 to 5.2×10-9 mm3/min,the material removal rate increases from 0.47×10-8 to 1.68×10-8 mm3/min,and the working gap decreases from 1.27 to 1.19 μm under optimal micro milling electrical discharge machining process parameters.Hence,it is clearly shown that multiple performance characteristics can be improved by using the Grey-Taguchi method.

A NEW TYPE OF MICROPUMP DRIVEN BY A LOW ELECTRIC VOLTAGE

In this paper,we propose a new prototype model of a micro pump using ICPF(Ionic Conducting Polymer Film)actuator as the servo actuator.This micro pump consists of two active one- way valves that make use of the same ICPF actuator.The overall size of this micro pump prototype is 12mm in diameter and 20mm in length.The actuating mechanism is as follows:(1)The ICPF actuator as the diaphragm is bent into anode side by application of electricity.Then the volume of the pump chamber increases,resulting in the inflow of liquid from the inlet to the chamber.(2)By changing the current direction,the volume of the pump chamber decreases,resulting in the liquid flow from the chamber to the outlet.(3)The ICPF actuator is put on a sine voltage,the micro pump provides liquid flow from the inlet to the outlet continuously.Characteristic of the micro pump is measured.The experimental results indicate that the micro pump has the satisfactory responses.

Experimental Research on Effects of Process Parameters on Servo Scanning 3D Micro Electrical Discharge Machining

Servo scanning 3D micro electrical discharge machining (3D SSMEDM) is a novel and effective method in fabricating complex 3D micro structures with high aspect ratio on conducting materials. In 3D SSMEDM process, the axial wear of tool electrode can be compensated automatically by servo-keeping discharge gap, instead of the traditional methods that depend on experiential models or intermittent compensation. However, the effects of process parameters on 3D SSMEDM have not been reported up until now. In this study, the emphasis is laid on the effects of pulse duration, peak current, machining polarity, track style, track overlap, and scanning velocity on the 3D SSMEDM performances of machining efficiency, processing status, and surface accuracy. A series of experiments were carried out by machining a micro-rectangle cavity (900 μm×600 μm) on doped silicon. The experimental results were obtained as follows. Peak current plays a main role in machining efficiency and surface accuracy. Pulse duration affects obviously the stability of discharge state. The material removal rate of cathode processing is about 3/5 of that of anode processing. Compared with direction-parallel path, contour-parallel path is better in counteracting the lateral wear of tool electrode end. Scanning velocity should be selected moderately to avoid electric arc and short. Track overlap should be slightly less than the radius of tool electrode. In addition, a typical 3D micro structure of eye shape was machined based on the optimized process parameters. These results are beneficial to improve machining stability, accuracy, and efficiency in 3D SSMEDM.

Micro Electrical Discharge Machining Deposition in Air for Fabrication of Micro Spiral Structures

Micro electrical discharge machining（EDM） deposition process is a new micro machining method for fabrication of metal micro structures. In this process, the high level of tool electrode wear is used to achieve the metal material deposition. Up to now, the studies of micro EDM deposition process focused mainly on the researches of deposition process, namely the effects of discharge parameters in deposition process on the deposition rate or deposition quality. The research of the formation of micro structures with different discharge energy density still lacks. With proper conditions and only by the z-axis feeding in vertical direction, a novel shape of micro spiral structure can be deposited, with 0.11 mm in wire diameter, 0.20 mm in outside diameter, and 3.78 mm in height. Then some new deposition strategies including angular deposition and against the gravity deposition were also successful. In order to find the forming mechanism of the spiral structures, the numerical simulation of the transient temperature distribution on the discharge point was conducted by using the finite-element method（FEM）. The results show that there are two major factors lead to the forming of the spiral structures. One is the different material removal form of tool electrode according with the discharge energy density, the other is the influenced degree of the movement of the removed material particles in the discharge gap. The more the energy density in single discharge is, the smaller the mass of the removed material particles is, and the easier the movements of which will be changed to form an order tendency. The fine texture characteristics of the deposited micro spiral structures were analyzed by the energy spectrum analysis and the metallographic analysis. It shows that the components of the deposited material are almost the same as those of the tool electrode. Moreover the deposited material has the brass metallic luster in the longitudinal profile and has compact bonding with the base material. This research is useful to understand the micro-process of micro EDM deposition better and helpful to increase the controllability of the new EDM method for fabrication of micro structures.

Micro electrical discharge machining of small hole in TC4 alloy

Aiming at machining deeply small holes in TC4 alloy,a series of experiments were carried out on a self-developed multi-axis micro electrical discharge machining(micro-EDM)machine tool.To improve machining efficiency and decrease relative wear of electrode in machining deeply small hole in TC4 alloy,many factors in micro-EDM,such as polarity,electrical parameters and supplying ways of working fluid were studied.Experimental results show that positive polarity machining is far superior to negative polarity machining;it is more optimal when open-circuit voltage,pulse width and pulse interval are 130 V,5μs and 15μs respectively on the self developed multi-axis micro-EDM machine tool;when flushing method is applied in micro-EDM,the machining efficiency is higher and relative wear of electrode is smaller.

Taper Angle Correction in Cutting of Complex Micro-mechanical Contours with Ultra-Short Pulse Laser

The objective of this work was to investigate the possibility of taper angle correction in cutting of complex micro-mechanical contours using a TruMicro ultra-short pulse laser in combination with the SCANLAB precSYS micro machining sub system. In a first step, the influence of the process parameters on the kerftaper angle of metallic alloys was systematically investigated without beam inclination. A set of base parameters was derived for the subsequent investigations. In a second step, the kerftaper angle was controlled by static beam inclination. In a third step, the same optics was used in its dynamic precession mode to fabricate micro-mechanical components of complex contours with perpendicular 0~ taper angles. It was found that taper angle adjustments of up to 7.5~ are possible with the used setup for cutting applications. Taper angle control is possible both in the static beam inclination mode and in the dynamic precession mode. The static mode could be interesting for contours with sharp inner radii and for achieving faster cutting times similar to results with fixed optics, but would require excellent synchronization of beam inclination and axis motion. The dynamic precession mode would allow an easier integration of the optics into a laser machine but will result in longer cutting times and limitations with respect to achievable inner radii.

RESEARCH OF MICRO ELECTRO DISCHARGE MACHINING EQUIPMENT AND PROCESS TECHNIQUES

Micro electro discharge machining (micro EDM) is a feasible way tomanufacture micro structures and has potential application in advanced industrial fields. For therealization of micro EDM, it is necessary to pay careful attention to its equipment design and thedevelopment of process techniques. The present status of research and development of micro EDMequipment and process techniques is overviewed. A micro electro discharge machine incorporated withan inchworm type of micro feed mechanism is introduced, and a micro electro discharge machine fordrilling micro holes suitable to industrial use is also introduced. Some of the machiningexperiments carried out on the micro EDM prototypes are shown and the feasibility of the micro EDMtechnology to practical use is discussed.

Complex microstructure fabrication by integrating silicon anisotropic etching and UV-LIGA technology

A fabrication method which integrates silicon anisotropic etching micromachining with UV-LIGA technology to make complex microstmetures is presented. This proposed combined process enables the fabrication of high-aspect-ratio and three-dimensional （3D） microstructures, which cannot be fabricated by silicon bulk mieromachining or UV-LIGA alone. To demonstrate this combined method, the 100μm thick SU-8 micro gears were fabricated on the silicon convex square structure, which is 100μm × 100μm× 80μm in dimension. In the subsequent micro hot embossing process, a novel type of plastics polyethylene terephtalate glycol （PETG） was tried for use. Through optimizing process parameters, PETG shows the potential of being used as plastic replica in micro-electro-mechanical system （MEMS）. This fabrication technology provides a new option for the increasing need of functionality, quality and economy of MEMS.

Research of micro-EDM and its applications

A Micro Electrical Discharge Machining (MEDM) equipment was developed in this paper,on which the CNC interpolation for 3-axis linkage movement could be realized easily. By this micro-EDM equipment,the fabrication process of microelectrode,micro hole,silicon wafer and complex microstructure was discussed. The process rules of machining efficiency and the relative electrode wear rate as well as the machining mechanism and performance of silicon micro-EDM were also researched. Machining experiments showed that the microelectrode diameter as small as 6 μm and the micro hole with minimum size of 10 μm could be obtained steadily,and the maximum aspect ratios of microelectrode and micro hole were over 25 and 10 respectively. And silicon micro-EDM experiments showed that the micro beam with the aspect ratios over 15 could be obtained easily. And a micro beam with minimum size of 23 μm width on a silicon wafer with 420 μm thickness was achieved. At last,the microstructure machining technology for micro-EDM was also discussed. And a micro-facial sculpture with free space curved surface and size of 1 mm×0.3 mm×0.18 mm was also machined successfully.

Fabrication of 3D structure by combining AFM and chemical etching on crystalline silicon surface

AFM is used for forming silicon dioxide as a layer (mask) on the silicon wafer surface (100) during the cutting process in ambient atmosphere. The silicon dioxide is made through reaction of silicon and oxygen in the atmosphere. As a result of the anisotropic behavior of single crystalline silicon, the etching rates in alkaline solution depend greatly on the various crystal orientations. The anisotropic etching behaviors in KOH solution and reasons of crystalline silicon are described. Effect of etching conditions such as etching temperature and KOH concentration of the alkaline solution on height of the micro-protuberances has been described.

Development of an ultrahard nanotwinned cBN micro tool for cutting hardened steel

Binderless nanotwinned cubic boron nitride(nt-cBN) synthesized from onion-structured BN precursors under high pressure and high temperature shows a very fine microstructure consisting of densely lamellar nanotwins(average thickness of 4 nm) within nanograins. The unique nanotwinned microstructure offers high hardness, wear resistance, fracture toughness, and thermal stability which are essential for advanced cBN tool materials. Thus, a circular micro tool of nt-cBN was fabricated using femtosecond laser contour machining followed by focused ion beam precision milling. Thereafter turning tests were performed on hardened steel using the studied micro tool. To evaluate the cutting performance, the machined surface quality and subsurface damage of the hardened steel were characterized. The wear mechanism of the nt-cBN micro tool was also investigated. It is found that the fabricated nt-cBN micro tool can generate high quality surface with surface roughness less than 7 nm and nanograin subsurface of about 500 nm deep. In addition, abrasive wear is found to be the dominant wear mechanism of the nt-cBN micro tool in turning hardened steel. These results indicate that nt-cBN has outstanding potential for ultra-precision cutting hardened steel.

Recent advances in micro- and nano-machining technologies

Device miniaturization is an emerging advanced technology in the 21 st century. The miniaturiza- tion of devices in different fields requires production of micro- and nano-scale components. The features of these components range from the sub-micron to a few hundred microns with high tolerance to many engineering materi- als. These fields mainly include optics, electronics, medicine, bio-technology, communications, and avionics. This paper reviewed the recent advances in micro- and nano-machining technologies, including micro-cutting, micro-electrical-discharge machining, laser micro-machin- ing, and focused ion beam machining. The four machining technologies were also compared in terms of machining efficiency, workpiece materials being machined, minimum feature size, maximum aspect ratio, and surface finish.

Micro water dissolution machining principle and its application in ultra-precision processing of KDP optical crystal

In this paper, a micro water dissolution machining （MWDM） principle is proposed for machining potassium dihydrogen phosphate （KDP） crystal using water-in-oil micro-emulsion as an abrasive-free polishing fluid. In addition, two instances of the application of this principle to ultra-precision machining of KDP crystals are presented. Computer-controlled optical surfacing （CCOS） and diamond wire cutting （DWC） process were carried out according to the MWDM principle. In the case of the CCOS technology, it is found that the micro-waviness was removed completely by following the MWDM principle. The surface undulation decreased from 40 nm to less than 10 nm, and the surface root-mean-square （rms） roughness obviously reduced from 8.147 to 2.660 nm. In the case of the DWC process, the surface rms roughness reduced from 8.012 to 2.391 gm, and the cutting efficiency was improved. These results indicate that the MWDM principle can efficiently improve the machining quality of KDP optical crystal and has a great potential to machine water-soluble materials.

Machining of circular micro holes by electrochemical micro-machining process

Machining of micro holes with micro electro- chemical machining （micro ECM） process has been carried out with an indigenously developed set up. This paper describes relevant problems and solutions for the circular micro holes machining process on 304 stainless steel sheets with 60 μm thickness using high speed steel cylindrical tool of diameter 500 ~tm and using dilute I-I2SO4 as elec- trolyte. The taper angle variation of the machined hole is analyzed and reported for different experimental setting parameters. The minimum value of the taper angle of machined holes is achieved at the parameter setting of 0.4 mol/L H2504, 700 kHz, 600 ns and 21 V, for stainless steel sheets and HSS tool.

Investigation on the cleaning of KDP ultra-precision surface polished with micro water dissolution machining principle

A potassium dihydrogen phosphate(KDP) optical crystal was machined to an ultra-precision surface with water-in-oil(W/O) micro emulsion polishing fluid. The micro water dissolution principle utilized in the machining process is discussed, its planarization mechanism is illustrated, and an ultra-precision polished surface with 2.205 nm RMS roughness is obtained. However, a substantial quantity of residual contamination remained on the polished surface after machining. This can seriously impact the optical performance of the crystal, and so it must be removed. Fourier transform infrared(FTIR) spectroscopy was used to conduct an investigation into the composition of the surface residue, and the results showed that the residue was comprised of organic chemicals with hydrocarbon chains and aromatic ether, i.e., mostly the polishing fluid. The cleaning method and the principle on which the KDP ultra precision surface investigation is based are discussed in detail, and the cleaning experiments with selected KDP-compatible organic solvents were then performed. FTIR transmittance spectra measurement and microscopic observations were employed to assess the effects of the cleaning process on the surface of the KDP crystal. The results showed that toluene cleaning achieved the most desirable results. This cleaning method produced a surface roughness of 1.826 nm RMS, which allows the KDP crystal to be applied to subsequent engineering applications.