Six million Q factor micro fused silica shell resonator with teeth-like tines released by femtosecond laser-assisted chemical etching

The quality factor(Q factor)is a crucial performance parameter for resonators.In this paper,a novel release method for highquality micro fused silica shell resonators with teeth-like tines with good surface morphology is proposed.This method is based on femtosecond laser-assisted chemical etching.First,the optimal energy range of femtosecond laser modification is obtained through mechanism analysis.Second,the optimal parameters for a straight line and arc pattern are determined by optimizing the average output power,processing speed,and processing spacing.The results demonstrate why edge breakage in rounded corners is easy under different parameters.Finally,according to these conclusions,the processing is performed on a micro fused silica shell resonator with a Q factor exceeding 6 million.In addition,subsurface damage is rare throughout the fabrication process,and the surface roughness of the released cross section reaches the nanometer level.The improved Q factor helps suppress mechanical thermal noise and reduce zero bias and zero bias drift,constituting the primary method for enhancing the performance of the resonant gyroscope.

Tunable filters based on an SOI nano-wire waveguide micro ring resonator

Micro ring resonator（MRR） filters based on a silicon on insulator（SOI） nanowire waveguide are fabricated by electron beam photolithography（EBL） and inductive coupled plasma（ICP） etching technology.The cross-section size of the strip waveguides is 450×220 nm2,and the bending radius of the micro ring is around 5μm.The test results from the tunable filter based on a single ring show that the free spectral range（FSR） is 16.8 nm and the extinction ratio（ER） around the wavelength 1550 nm is 18.1 dB.After thermal tuning,the filter＇s tuning bandwidth reaches 4.8 nm with a tuning efficiency of 0.12 nm/℃Meanwhile,we fabricated and studied multi-channel filters based on a single ring and a double ring.After measurement,we drew the following conclusions： during the signal transmission of multi-channel filters,crosstalk exists mainly among different transmission channels and are fairly distinct when there are signals input to add ports.

System level simulation of a micro resonant accelerometer with geometric nonlinear beams

Geometric nonlinear behaviors ofmicro resonators have attracted extensive attention of MEMS （micro- electro-mechanical systems） researchers, and MEMS transducers utilizing these behaviors have been widely re- searched and used due to the advantages of essentially digital output. Currently, the design of transducers with nonlinear behaviors is mainly performed by numerical method and rarely by system level design method. In this paper, the geometric nonlinear beam structure was modeled and established as a reusable library component by sys- tem level modeling and simulation method MuPEN （multi port element network）. A resonant accelerometer was constructed and simulated using this model together with MuPEN reusable library. The AC （alternating current） analysis results of MuPEN model agreed well with the results of architect model and the experiment results shown in the existing reference. Therefore, we are convinced that the beam component based on MuPEN method is valid, and MEMS system level design method and related libraries can effectively model and simulate transducers with geometric nonlinear behaviors if appropriate system level components are available.

几何非线性条件下微纳米梁型谐振器的非线性支撑损失

作为微纳米机械谐振器主要的能量耗散源之一,支撑损失主要采用未考虑中面拉伸效应的线性理论进行研究.然而该理论却无法适用于大挠度非线性振动状态谐振器的支撑损失.为此,我们研究了考虑几何非线性和轴向预拉力的两端固支微梁谐振器处于面内弯曲振动模式时的支撑损失,旨在准确模拟大挠度振动下高性能谐振器的支撑损失.本文不仅考虑了支撑结构与谐振器连接区域受中面拉伸产生的正应力作用而引起的支撑损失,也考虑了受剪应力作用而引起的支撑损失,并且理论结果与有限元模拟以及文献中实验结果一致.另外,本文还研究了轴向预拉力对谐振器非线性振动特性的影响,并讨论了谐振器的振幅、长高比以及轴向预拉力对支撑损失的影响.理论结果表明,相比于线性振动状态下谐振器的支撑损失,由谐振器大变形振动产生的中面拉伸效应会引起更大的支撑损失,并且会随非线性振幅的增大而增大.本文提出的非线性支撑损失模型有望对评估非线性振动谐振器的支撑损失以及阐明支撑损失随非线性振幅增大的现象提供理论指导.