The object is to investigate the wear of an atomic force microscope (AFM) diamond tip when conducting micro/nano machining on single crystal silicon surface. The experimental research and theoretical analysis were car...The object is to investigate the wear of an atomic force microscope (AFM) diamond tip when conducting micro/nano machining on single crystal silicon surface. The experimental research and theoretical analysis were carried out on the worn tip in terms of wear rate, wear mechanism and the effect of the tip wear on micro machining process. The wear rate was calculated as 1.7(10～10mm 3/(N·m) by using a theoretical model combined with the experimental results. Through an integration of an AFM observation on the worn tip features with the FEM simulation of the stress distribution, in addition to the unit cutting force calculation on the AFM diamond tip, the wear mechanism of the AFM diamond tip was concluded as mainly chemical wear, and the wear process was also elaborated as well.展开更多
Machining experiment of micro channel structure with 6:4 brass was carried out by shaping process using a single crystal diamond tool. FEM simulation using solid cantilever beam model was analyzed. In result of experi...Machining experiment of micro channel structure with 6:4 brass was carried out by shaping process using a single crystal diamond tool. FEM simulation using solid cantilever beam model was analyzed. In result of experiment, tool deflection is observed as machining characteristics through result of experiments such as surface roughness, cutting force and burr formations. And the influence of tool deflection is experimentally proved.展开更多
文摘The object is to investigate the wear of an atomic force microscope (AFM) diamond tip when conducting micro/nano machining on single crystal silicon surface. The experimental research and theoretical analysis were carried out on the worn tip in terms of wear rate, wear mechanism and the effect of the tip wear on micro machining process. The wear rate was calculated as 1.7(10～10mm 3/(N·m) by using a theoretical model combined with the experimental results. Through an integration of an AFM observation on the worn tip features with the FEM simulation of the stress distribution, in addition to the unit cutting force calculation on the AFM diamond tip, the wear mechanism of the AFM diamond tip was concluded as mainly chemical wear, and the wear process was also elaborated as well.
文摘Machining experiment of micro channel structure with 6:4 brass was carried out by shaping process using a single crystal diamond tool. FEM simulation using solid cantilever beam model was analyzed. In result of experiment, tool deflection is observed as machining characteristics through result of experiments such as surface roughness, cutting force and burr formations. And the influence of tool deflection is experimentally proved.
