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High sensitivity micro-displacement sensor based on fiber Bragg grating and amplification substrate 被引量:1
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作者 ZENG Li SUN Xiao-yan +1 位作者 HU You-wang DUAN Ji-an 《Journal of Central South University》 SCIE EI CAS CSCD 2022年第10期3361-3367,共7页
A micro-displacement sensor based on fiber Bragg grating(FBG) is proposed. The device consists of a pair of FBGs with different central wavelengths fabricated by femtosecond laser phase mask method and a metal substra... A micro-displacement sensor based on fiber Bragg grating(FBG) is proposed. The device consists of a pair of FBGs with different central wavelengths fabricated by femtosecond laser phase mask method and a metal substrate with lever structure. The displacement is amplified by lever structure and it converts into axial tension of FBG, which has a high displacement sensitivity. The amplification factors obtained by theoretical analysis and finite element simulation are 2.67 and 2.50, respectively. The experimental results show that in the range of 0-50 μm the shift of FBG center wavelength is linearly related to the displacement of measured object and displacement sensitivity reaches 121 pm/μm. In addition, the cascaded FBG is used to compensate the temperature. 展开更多
关键词 fiber Bragg grating femtosecond laser micro-displacement sensor lever structure
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COMPACT PHASE GRATING INTERFERENCE SENSOR FOR MICRO-DISPLACEMENT 被引量:2
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作者 XIAO Gang XIE Tiebang WANG Xuanze 《Chinese Journal of Mechanical Engineering》 SCIE EI CAS CSCD 2006年第1期131-133,共3页
On the basis of existing techniques, a compact micro-displacement sensor of phase grating interference (PGI) is described, which adopts cylindrical hologram diffraction grating as the calibration standard. The optic... On the basis of existing techniques, a compact micro-displacement sensor of phase grating interference (PGI) is described, which adopts cylindrical hologram diffraction grating as the calibration standard. The optical principle of the sensor is explained, and the relation between the grating motion displacement and the phase shift of interference stripes is deduced. The improvement of the integral structure and the method of photoelectric signal processing are described in detail. With the software system based on the virtual instrument development platform Labwindows/CVI and other hardwares such as the precision displacement worktable, the surfaces of typical parts are measured and the characterization results are given. The sensor has wide measuring range and high resolution, its sensitivity and resolution being independent of the wavelength of the incident light. The vertical measuring range is 0-6 mm, and the vertical resolution is 0.005μm. The experimental results show that the sensor can be used to measure and characterize the surface topography parameters of the plane and curved surface. 展开更多
关键词 Sensor Surface topography Phase grating interference(PGI)micro-displacement measurement
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Application of Wavelet Transform in Dual-differential Optical Fiber F-P Interferometric Micro-displacement Measurement System
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作者 ZHANG Shu-qing YANG Feng-lu WANG Xue-qiang BAI Qin-yuan ZHANG Li-guo 《Semiconductor Photonics and Technology》 CAS 2005年第4期263-265,共3页
Based on dual-differential comparing principle, an experimental system of optical fiber F-P interferometric micro-displacement measurement is introduced. It is capable of achieving the absolute displacement measuremen... Based on dual-differential comparing principle, an experimental system of optical fiber F-P interferometric micro-displacement measurement is introduced. It is capable of achieving the absolute displacement measurement, and wavelet transforms is adopted as theory fundament to extract the optical F-P interferometric characteristic signal and remove the noise, so its resolution can reach 0. 01 μm in the dynamic range of 0~ 1 mm. 展开更多
关键词 Optical fiber Fabry-Perot interferometer micro-displacement Dual differential Wavelet transform
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MODELING OF SCG ROTOR DRIFT AND MEASURING SCHEME 被引量:1
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作者 汤继强 房建成 张延顺 《Transactions of Nanjing University of Aeronautics and Astronautics》 EI 2007年第1期17-24,共8页
Based on micro-displacement measurement principles of the spherical differential capacitance sensor, the relationship between the capacitance variation and the micro-displacement of each pair of detecting electrodes f... Based on micro-displacement measurement principles of the spherical differential capacitance sensor, the relationship between the capacitance variation and the micro-displacement of each pair of detecting electrodes for the superconducting gyroscope (SCG) with eight detecting electrodes is analyzed. The model of the SCG rotor drift is established through dimensionless processing, linearization within micro-displacement and the least-square approach. Both the measurement scheme of the SCG rotor drift based on the model and its parameter relationship are presented. To guarantee the potential of the suspension rotor to be zero, the distributing scheme of four pairs of detecting electrodes is presented. The scheme can measure the magnitude and the direction of the rotor drift. The negative factors for affecting the measurement precision of .the SCG rotor drift and simulation results of the total effects are given. Simulation results show that the distributing capacitance of these differential capacitance sensors, the zero potential of the rotor and the model error are the major negative factors. The methods for eliminating those negative factors and the application range of the model are given. The model ensures the relationship between the output voltage and the rotor drift be linear. 展开更多
关键词 superconducting gyroscope suspension rotor DRIFT spherical differential capacitance micro-displacement
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A laser shaft alignment system with dual PSDs 被引量:5
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作者 JIAO Guo-hua LI Yu-lin +2 位作者 ZHANG Dong-bo LI Tong-hai HU Bao-wen 《Journal of Zhejiang University-Science A(Applied Physics & Engineering)》 SCIE EI CAS CSCD 2006年第10期1772-1776,共5页
Shaft alignment is an important technique during installation and maintenance of a rotating machine. A high-precision laser alignment system has been designed with dual PSDs (Position Sensing Detector) to change tradi... Shaft alignment is an important technique during installation and maintenance of a rotating machine. A high-precision laser alignment system has been designed with dual PSDs (Position Sensing Detector) to change traditional manual way of shaft alignment and to make the measurement easier and more accurate. The system is comprised of two small measuring units (laser transmitter and detector) and a PDA (Personal Digital Assistant) with measurement software. The laser alignment system with dual PSDs was improved on a single PSD system, and yields higher measurement accuracy than the previous design, and has been successful for designing and implements actual shaft alignment. In the system, the range of offset measurement is ±4 mm, and the resolution is 1.5 μm, with accuracy being less than 2 μm. 展开更多
关键词 Rotating machine Shaft alignment Laser alignment Position sensing detector (PSD) Laser micro-displacement measurement
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Highly sensitive and fast response strain sensor based on evanescently coupled micro/nanofibers 被引量:5
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作者 Wen Yu Ni Yao +4 位作者 Jing Pan Wei Fang Xiong Li Limin Tong Lei Zhang 《Opto-Electronic Advances》 SCIE EI CAS 2022年第9期34-42,共9页
Flexible strain sensors play an important role in electronic skins,wearable medical devices,and advanced robots.Herein,a highly sensitive and fast response optical strain sensor with two evanescently coupled optical m... Flexible strain sensors play an important role in electronic skins,wearable medical devices,and advanced robots.Herein,a highly sensitive and fast response optical strain sensor with two evanescently coupled optical micro/nanofibers(MNFs)embedded in a polydimethylsiloxane(PDMS)film is proposed.The strain sensor exhibits a gauge factor as high as 64.5 for strain≤0.5%and a strain resolution of 0.0012%which corresponds to elongation of 120 nm on a 1 cm long device.As a proof-of-concept,highly sensitive fingertip pulse measurement is realized.The properties of fast temporal frequency response up to 30 kHz and a pressure sensitivity of 102 kPa^(−1) enable the sensor for sound detection.Such versatile sensor could be of great use in physiological signal monitoring,voice recognition and micro-displacement detection. 展开更多
关键词 optical micro/nanofiber strain sensor pressure sensor micro-displacement directional coupler
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Waveforms analysis and optimization of new electro-hydraulic excitation technology 被引量:3
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作者 韩冬 龚国芳 +2 位作者 杨华勇 刘毅 廖湘平 《Journal of Central South University》 SCIE EI CAS 2014年第8期3098-3106,共9页
A new electro-hydraulic exciter that consists of rotary valve and micro-displacement double-functioned hydraulic cylinder was proposed to realize different kinds of waveforms.Calculated fluid dynamics(CFD) simulation ... A new electro-hydraulic exciter that consists of rotary valve and micro-displacement double-functioned hydraulic cylinder was proposed to realize different kinds of waveforms.Calculated fluid dynamics(CFD) simulation of rotary valve orifice reveals that orifice exists the two-throttle phenomenon.According to the finding,the revised flow area model was established.Vibration waveforms analysis was carried out by means of mathematic model and the related experiments were validated.Furthermore,as a new analysis indicator,saturation percentage was introduced first.The experimental results indicate that the revised flow area model is more accurate compared to the original one,and vibration waveforms can be optimized through suitable spool parameters and the revised cylinder structure. 展开更多
关键词 rotary valve micro-displacement double-functioned hydraulic cylinder two-throttle phenomenon revised flow areamodel saturation drift motion
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The Laser Shaft Alignment System with Dual PSDs 被引量:1
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作者 JIAO Guohua 1,2 ,LI Yulin1,ZHANG Dongbo3,LI Tonghai1,HU Baowen1 (1.Xian Institute of Optics and Precision Mechanics of CAS,Xi’an 710068,China 2.Graduate School of the Chinese Academy of Sciences,Beijing 100039,China 3.The 16th Institute of CATEC,Xi’an 710100,China) 《武汉理工大学学报》 CAS CSCD 北大核心 2006年第S1期107-111,共5页
Shaft alignment is an important technique during installation and maintenance of a rotating machine. A high-precision laser alignment system has been designed with dual PSDs (Position Sensing Detector) to change tradi... Shaft alignment is an important technique during installation and maintenance of a rotating machine. A high-precision laser alignment system has been designed with dual PSDs (Position Sensing Detector) to change traditional manual way of shaft alignment and to make the measurement easier and more accurate. The system is comprised of two small measuring units (laser transmitter and detector) and a PDA (Personal Digital Assistant) with the measurement software. The laser alignment system with dual PSDs was improved on a single PSD system,and it gets higher measurement accuracy than the previous design,and it has been succeeded in designing and implement for actual shaft alignment. In the system,the range of offset measurement is ±4 mm,and the resolution is 1.5 μm,and the accuracy is less than 2 μm. 展开更多
关键词 ROTATING machine SHAFT ALIGNMENT LASER ALIGNMENT POSITION sensing detector (PSD) LASER micro-displac
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Micro-Displacement Sensor Based on High Sensitivity Photonic Crystal 被引量:1
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作者 Saeed OLYAEE Morteza AZIZI 《Photonic Sensors》 SCIE EI CAS 2014年第3期220-224,共5页
In this paper, we present a micro-displacement sensor formed by the fixed and movable photonic crystal slabs. In this sensor, a waveguide was created by changing the radius of holes rather than removing them. At a pro... In this paper, we present a micro-displacement sensor formed by the fixed and movable photonic crystal slabs. In this sensor, a waveguide was created by changing the radius of holes rather than removing them. At a proper operating wavelength, the structure could be used as the micro-displacement sensor. The results revealed that the micro-displacement sensor had a sensitivity of 3.6 gm-1, the Q-factor was nearly 180, and the sensing range was 0.0 ~tm - 0.5 p.m. The properties of the micro-displacement sensor are also analyzed theoretically and verified using the finite-difference time-domain (FDTD) method carried out using the software (Rsoft). 展开更多
关键词 micro-displacement sensor Q-factor WAVEGUIDE sensitivity FDTD Lorentzian function
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DEVELOPMENT OF THE CONTROL METHODOLOGY OF THE GIANT MAGNETOSTRICTIVE ACTUATOR BASED ON MAGNETIC FLUX DENSITY
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作者 JiaZhenyuan YangXing +1 位作者 ShiChun GuoOongming 《Chinese Journal of Mechanical Engineering》 SCIE EI CAS CSCD 2003年第4期359-362,共4页
According to the principle of the magnetostriction generating mechanism, thecontrol model of giant magnetostriction material based on magnetic field and the control method withmagnetic flux density are developed. Furt... According to the principle of the magnetostriction generating mechanism, thecontrol model of giant magnetostriction material based on magnetic field and the control method withmagnetic flux density are developed. Furthermore, this control method is used to develop a giantmagnetostrictive micro-displacement actuator (GMA) and its driving system. Two control methods whosecontrol variables are current intensity and magnetic flux density are compared with each other byexperimental studies. Finally, effective methods on improving the linearity and control precision ofmicro-displacement actuator and reducing the hysteresis based on the controlling magnetic fluxdensity are obtained. 展开更多
关键词 Giant magnetostriction Magnetic flux density Control method micro-displacement actuator
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Micro-Displace Sensor Based on Self-Mixing Interference of the Fiber Laser With Phase Modulation 被引量:3
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作者 Hui HAO Dongmei GUO Ming WANG Wei XIA Xiaoqi NI 《Photonic Sensors》 SCIE EI CAS 2014年第4期379-384,共6页
Micro-displacement measurement based on self-mixing interference using a fiber laser system was demonstrated. The sinusoidal phase modulation technique was introduced into the fiber laser self-mixing interference meas... Micro-displacement measurement based on self-mixing interference using a fiber laser system was demonstrated. The sinusoidal phase modulation technique was introduced into the fiber laser self-mixing interference measurement system to improve the measurement resolution. The phase could be demodulated by the Fourier analysis method. Error sources were evaluated in detail, and the system was experimentally applied to reconstruct the motion of a high-precision commercial piezoelectric ceramic transducer (PZT). The displacement measurement resolution was well beyond a half-wavelength. It provides a practical solution for displacement measurement based on all optical-fiber sensing applications with high precision. 展开更多
关键词 Self-mixing interference micro-displacement sensing phase modulation fiber laser
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High-finesse displacement sensor and a theoretical accelerometer model based on a fiber Fabry-Perot interferometer 被引量:3
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作者 Xu ZENG Yu WU +1 位作者 Chang-lun HOU Guo-guang YANG 《Journal of Zhejiang University-Science A(Applied Physics & Engineering)》 SCIE EI CAS CSCD 2009年第4期589-594,共6页
A displacement sensor based on the fiber Fabry-Perot (F-P) cavity was proposed in this paper. Theoretical and experimental analyses were presented. Displacement resolution was demonstrated by spectrum-domain experimen... A displacement sensor based on the fiber Fabry-Perot (F-P) cavity was proposed in this paper. Theoretical and experimental analyses were presented. Displacement resolution was demonstrated by spectrum-domain experiments to obtain the dynamic range of the F-P sensor, and a piezoelectric crystal unit (PZT) was used as the driver. The output signal was modulated by a piezoelectric ceramic ring and demodulated by a phase-locked oscillator. The experimental results show that the displacement resolution of the F-P sensor is less than 5 nm and the dynamic range is more than 100 μm. As acceleration is the second-order differential of displacement, an accelerometer model was proposed using the finite element method (FEM) nd ANSYS software. 展开更多
关键词 Fiber Fabry-Perot (F-P) sensor Spectrum demodulation micro-displacement measurement Accelerometer model
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