This work presents a novel radio frequency(RF)narrowband Si micro-electro-mechanical systems(MEMS)filter based on capacitively transduced slotted width extensional mode(WEM)resonators.The flexibility of the plate lead...This work presents a novel radio frequency(RF)narrowband Si micro-electro-mechanical systems(MEMS)filter based on capacitively transduced slotted width extensional mode(WEM)resonators.The flexibility of the plate leads to multiple modes near the target frequency.The high Q-factor resonators of around 100000 enable narrow bandwidth filters with small size and simplified design.The 1-wavelength and 2-wavelength WEMs were first developed as a pair of coupled modes to form a passband.To reduce bandwidth,two plates are coupled with aλ-length coupling beam.The 79.69 MHz coupled plate filter(CPF)achieved a narrow bandwidth of 8.8 kHz,corresponding to a tiny 0.011%.The CPF exhibits an impressive 34.84 dB stopband rejection and 7.82 dB insertion loss with near-zero passband ripple.In summary,the RF MEMS filter presented in this work shows promising potential for application in RF transceiver front-ends.展开更多
In this paper,we present the applications of Boundary Element Method(BEM) to simulate the electro-mechanical coupling responses of Micro-Electro-Mechanical systems(MEMS). The algorithm is programmed in our research gr...In this paper,we present the applications of Boundary Element Method(BEM) to simulate the electro-mechanical coupling responses of Micro-Electro-Mechanical systems(MEMS). The algorithm is programmed in our research group based on BEM modeling for electrostatics and elastostatics.Good agreement is shown while the simulation results of the pull-in voltages are compared with the theoretical/experimental ones for some examples.展开更多
The virtual machine of code mechanism （VMCM） as a new concept for code mechanical solidification and verification is proposed and can be applied in MEMS （micro-electromechanical systems） security device for high c...The virtual machine of code mechanism （VMCM） as a new concept for code mechanical solidification and verification is proposed and can be applied in MEMS （micro-electromechanical systems） security device for high consequence systems. Based on a study of the running condition of physical code mechanism, VMCM＇s configuration, ternary encoding method, running action and logic are derived. The cases of multi-level code mechanism are designed and verified with the VMCM method, showing that the presented method is effective.展开更多
Photoacoustic imaging(PAI)is a new biomedical imaging technology that provides a mixed contrast mechanism and excellent spatial resolution in biological tissues.It is a non-invasive technology that can provide in vivo...Photoacoustic imaging(PAI)is a new biomedical imaging technology that provides a mixed contrast mechanism and excellent spatial resolution in biological tissues.It is a non-invasive technology that can provide in vivo anatomical and functional information.This technology has great application potential in microscopic imaging and endoscope system.In recent years,the devel-opment of micro electro mechanical system(MEMS)technology has promoted the improvement and miniaturization of the photoacoustic imaging system,as well as its preclinical and clinical appli-cations.This paper introduces the research progress of MEMS technology in photoacoustic micro-scope systems and the miniaturization of photoacoustic endoscope ultrasonic transducers,and points out the shortcomings of existing technology and the direction of future development.展开更多
基金supported by the National Natural Science Foundation of China(61734007)National Key Research and Development Program of China(2022YFF0706100).
文摘This work presents a novel radio frequency(RF)narrowband Si micro-electro-mechanical systems(MEMS)filter based on capacitively transduced slotted width extensional mode(WEM)resonators.The flexibility of the plate leads to multiple modes near the target frequency.The high Q-factor resonators of around 100000 enable narrow bandwidth filters with small size and simplified design.The 1-wavelength and 2-wavelength WEMs were first developed as a pair of coupled modes to form a passband.To reduce bandwidth,two plates are coupled with aλ-length coupling beam.The 79.69 MHz coupled plate filter(CPF)achieved a narrow bandwidth of 8.8 kHz,corresponding to a tiny 0.011%.The CPF exhibits an impressive 34.84 dB stopband rejection and 7.82 dB insertion loss with near-zero passband ripple.In summary,the RF MEMS filter presented in this work shows promising potential for application in RF transceiver front-ends.
基金The project supported by the 973 Program (G1999033108)the National Natural Science Foundation of China (10125211)
文摘In this paper,we present the applications of Boundary Element Method(BEM) to simulate the electro-mechanical coupling responses of Micro-Electro-Mechanical systems(MEMS). The algorithm is programmed in our research group based on BEM modeling for electrostatics and elastostatics.Good agreement is shown while the simulation results of the pull-in voltages are compared with the theoretical/experimental ones for some examples.
基金Project supported by High-Technology Research and Develop-ment Program of China (Grant No .863 -2003AA404210)
文摘The virtual machine of code mechanism （VMCM） as a new concept for code mechanical solidification and verification is proposed and can be applied in MEMS （micro-electromechanical systems） security device for high consequence systems. Based on a study of the running condition of physical code mechanism, VMCM＇s configuration, ternary encoding method, running action and logic are derived. The cases of multi-level code mechanism are designed and verified with the VMCM method, showing that the presented method is effective.
基金supported by the National Natural Science Foundation of China(No.32101153)the Fundamental Research Funds for the Central Universities(No.2021CX11018).
文摘Photoacoustic imaging(PAI)is a new biomedical imaging technology that provides a mixed contrast mechanism and excellent spatial resolution in biological tissues.It is a non-invasive technology that can provide in vivo anatomical and functional information.This technology has great application potential in microscopic imaging and endoscope system.In recent years,the devel-opment of micro electro mechanical system(MEMS)technology has promoted the improvement and miniaturization of the photoacoustic imaging system,as well as its preclinical and clinical appli-cations.This paper introduces the research progress of MEMS technology in photoacoustic micro-scope systems and the miniaturization of photoacoustic endoscope ultrasonic transducers,and points out the shortcomings of existing technology and the direction of future development.
