A drive signal frequency-lock method for quartz angular-rate sensor is presented. The calculation result obtained by the equivalent volume force analytic method indicated that when taking the inherent frequency of the...A drive signal frequency-lock method for quartz angular-rate sensor is presented. The calculation result obtained by the equivalent volume force analytic method indicated that when taking the inherent frequency of the drive tines as the drive signal frequency the phase of the reference vibration is 90° behind that of the drive signal, and the square of amplitude is less than that of the maximal amplitude by 1/(4Q~2_d) merely. The curves derived from the finite element analytic method proved that near the inherent frequency the phase shift of the feedback voltage is identical to that of the reference vibration, and the amplitude is proportional to that of the reference vibration, and the phase shift is linear approximatively with the frequency shift. The frequency shift could be calculated according to the phase shift obtained by quadrature correlation detection, so the drive signal frequency could be locked at the inherent frequency of the drive tines by means of iteration.展开更多
This paper presents a digital readout system to detect small capacitive signals of a micromachined angular rate sensor. The flexible parameter adjustment ability and the computation speed of the digital signal process...This paper presents a digital readout system to detect small capacitive signals of a micromachined angular rate sensor. The flexible parameter adjustment ability and the computation speed of the digital signal processor were used to develop a new calibration procedure to determine the scale factor of a gyroscope without a turntable. The force of gravity was used to deflect the movable masses in the sensor, which resulted in a corresponding angular rate input. The gyroscope scale factor was then measured without a turntable. Test results show a maximum deviation of about 1.2% with respect to the scale factor determined on a turntable with the accuracy independent of the manufacturing process and property variations The calibration method in combination with the improved readout electronics can minimize the calibration procedure and, thus, reduce the manufacturing costs.展开更多
In recent years,a large number of small volume,low cost micro electro mechanical systems（MEMS）digital three-axis angular rate gyroscopes have been developed and widely used in civil and military fields.However,these...In recent years,a large number of small volume,low cost micro electro mechanical systems（MEMS）digital three-axis angular rate gyroscopes have been developed and widely used in civil and military fields.However,these kinds of gyroscopes have poor performances in initial zero-bias,temperature drift,In-Run bias stability,bias repeatability,etc.,their output errors need to be compensated before being used.Based on a lot of experiments,the temperature drift and the initial zero-bias are the major error sources in the MEMS gyroscopes output data.Due to the poor repeatability of temperature drift,the temperature compensation coefficients need to be recalculated every time before using.In order to recalculate parameters of the temperature compensation model quickly,a 1st-order polynomial model of temperature is established,then a forgetting factor recursive least squares estimator will be adopted to identify the model parameters in real time.Static and dynamic experimental data shows that this method removed/compensated the temperature drift and initial zero-bias from the output of the gyroscopes effectively.展开更多
MEMS gyroscope is a new inertial navigation sensor,which can measure the input angular rate of sensitive axis using Coriolis effect.Compared to the conventional gyroscope,it owns many unique advantages.A novel structu...MEMS gyroscope is a new inertial navigation sensor,which can measure the input angular rate of sensitive axis using Coriolis effect.Compared to the conventional gyroscope,it owns many unique advantages.A novel structure of vibrating ring gyroscope is proposed and the finite element model of the oscillator is established based on MEMS technology.Through the modal analysis,the natural frequency and mode shapes of the oscillator are obtained.By analyzing the effects of the structural parameters on the mode shapes and frequency of the harmonic oscillator,the optimal design parameters are got.The frequency difference between the operating mode and the other modes is greater than 1kHz after optimization,which can avoid the frequency coupling of the operating mode and other vibrating modes of the oscillator.The simulation results show that the performance parameters of the ring structure meet the design requirements and have obvious advantages.展开更多
文摘A drive signal frequency-lock method for quartz angular-rate sensor is presented. The calculation result obtained by the equivalent volume force analytic method indicated that when taking the inherent frequency of the drive tines as the drive signal frequency the phase of the reference vibration is 90° behind that of the drive signal, and the square of amplitude is less than that of the maximal amplitude by 1/(4Q~2_d) merely. The curves derived from the finite element analytic method proved that near the inherent frequency the phase shift of the feedback voltage is identical to that of the reference vibration, and the amplitude is proportional to that of the reference vibration, and the phase shift is linear approximatively with the frequency shift. The frequency shift could be calculated according to the phase shift obtained by quadrature correlation detection, so the drive signal frequency could be locked at the inherent frequency of the drive tines by means of iteration.
文摘This paper presents a digital readout system to detect small capacitive signals of a micromachined angular rate sensor. The flexible parameter adjustment ability and the computation speed of the digital signal processor were used to develop a new calibration procedure to determine the scale factor of a gyroscope without a turntable. The force of gravity was used to deflect the movable masses in the sensor, which resulted in a corresponding angular rate input. The gyroscope scale factor was then measured without a turntable. Test results show a maximum deviation of about 1.2% with respect to the scale factor determined on a turntable with the accuracy independent of the manufacturing process and property variations The calibration method in combination with the improved readout electronics can minimize the calibration procedure and, thus, reduce the manufacturing costs.
文摘In recent years,a large number of small volume,low cost micro electro mechanical systems（MEMS）digital three-axis angular rate gyroscopes have been developed and widely used in civil and military fields.However,these kinds of gyroscopes have poor performances in initial zero-bias,temperature drift,In-Run bias stability,bias repeatability,etc.,their output errors need to be compensated before being used.Based on a lot of experiments,the temperature drift and the initial zero-bias are the major error sources in the MEMS gyroscopes output data.Due to the poor repeatability of temperature drift,the temperature compensation coefficients need to be recalculated every time before using.In order to recalculate parameters of the temperature compensation model quickly,a 1st-order polynomial model of temperature is established,then a forgetting factor recursive least squares estimator will be adopted to identify the model parameters in real time.Static and dynamic experimental data shows that this method removed/compensated the temperature drift and initial zero-bias from the output of the gyroscopes effectively.
文摘MEMS gyroscope is a new inertial navigation sensor,which can measure the input angular rate of sensitive axis using Coriolis effect.Compared to the conventional gyroscope,it owns many unique advantages.A novel structure of vibrating ring gyroscope is proposed and the finite element model of the oscillator is established based on MEMS technology.Through the modal analysis,the natural frequency and mode shapes of the oscillator are obtained.By analyzing the effects of the structural parameters on the mode shapes and frequency of the harmonic oscillator,the optimal design parameters are got.The frequency difference between the operating mode and the other modes is greater than 1kHz after optimization,which can avoid the frequency coupling of the operating mode and other vibrating modes of the oscillator.The simulation results show that the performance parameters of the ring structure meet the design requirements and have obvious advantages.
