The free vibration characteristics of functionally graded micro-switches under combined electrostatic, axial residual stress and temperature change is investigated, with an emphasis on the effect of geometric nonlinea...The free vibration characteristics of functionally graded micro-switches under combined electrostatic, axial residual stress and temperature change is investigated, with an emphasis on the effect of geometric nonlinear deformation due to mid-plane stretching, the influence of volume fraction profile parameter and temperature change. The micro-switch considered in this study is made of either homogeneous material or non-homogeneous functionally graded material with two material phases. Taking the temperature-dependency of the effective material properties into consideration, the Voigt model is used to simulate the material properties of the FGMs （functionally graded materials）. The principle of virtual work is used to derive the nonlinear governing differential equation. The eigenvalue problem which describes free vibration of the micro-beam at its statically deflected state is then solved using DQM （differential quadrature method）. The natural frequencies of clamped-clamped micro-switches are obtained. The solutions are validated through direct comparisons with experimental results reported in previous studies. A parametric study is conducted to show the effects of geometric nonlinearity, material composition, temperature change and geometrical parameters for the natural frequencies.展开更多
采用压电多层微悬臂梁理论分析模型,研究了一种新型PZT压电复合多层膜微悬臂梁驱动微开关的机械性能,提出了一种新的硅基PZT压电复合多层薄膜微悬臂梁驱动微开关的制作方法。利用有限元分析软件AN SY S7.0对微悬臂梁结构进行了模态分析...采用压电多层微悬臂梁理论分析模型,研究了一种新型PZT压电复合多层膜微悬臂梁驱动微开关的机械性能,提出了一种新的硅基PZT压电复合多层薄膜微悬臂梁驱动微开关的制作方法。利用有限元分析软件AN SY S7.0对微悬臂梁结构进行了模态分析,探讨了结构参数与微悬臂梁运动特性的关系及影响压电薄膜微开关性能的因素,进一步模拟了0.3 V工作电压下微开关的位移。结果表明,经优化后的压电薄膜微开关可进一步应用到集成化芯片系统中。展开更多
基金Acknowledgments The research was financially supported by the National Natural Science Foundation of China （Grant No. 11402309） and the Science Foundation of China University of Petroleum, Beijing （No. YJRC-2013-32）.
文摘The free vibration characteristics of functionally graded micro-switches under combined electrostatic, axial residual stress and temperature change is investigated, with an emphasis on the effect of geometric nonlinear deformation due to mid-plane stretching, the influence of volume fraction profile parameter and temperature change. The micro-switch considered in this study is made of either homogeneous material or non-homogeneous functionally graded material with two material phases. Taking the temperature-dependency of the effective material properties into consideration, the Voigt model is used to simulate the material properties of the FGMs （functionally graded materials）. The principle of virtual work is used to derive the nonlinear governing differential equation. The eigenvalue problem which describes free vibration of the micro-beam at its statically deflected state is then solved using DQM （differential quadrature method）. The natural frequencies of clamped-clamped micro-switches are obtained. The solutions are validated through direct comparisons with experimental results reported in previous studies. A parametric study is conducted to show the effects of geometric nonlinearity, material composition, temperature change and geometrical parameters for the natural frequencies.
文摘采用压电多层微悬臂梁理论分析模型,研究了一种新型PZT压电复合多层膜微悬臂梁驱动微开关的机械性能,提出了一种新的硅基PZT压电复合多层薄膜微悬臂梁驱动微开关的制作方法。利用有限元分析软件AN SY S7.0对微悬臂梁结构进行了模态分析,探讨了结构参数与微悬臂梁运动特性的关系及影响压电薄膜微开关性能的因素,进一步模拟了0.3 V工作电压下微开关的位移。结果表明,经优化后的压电薄膜微开关可进一步应用到集成化芯片系统中。
