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A multivariate process capability index model system
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作者 王少熙 王党辉 《Journal of Semiconductors》 EI CAS CSCD 北大核心 2011年第1期116-122,共7页
This paper presents a systematic multivariate process capability index (MPCI) method, which may provide references for assuring and improving process quality levels while achieving an overall evaluation of process q... This paper presents a systematic multivariate process capability index (MPCI) method, which may provide references for assuring and improving process quality levels while achieving an overall evaluation of process quality. The system method includes a spatial MPCI model for multivariate normal distribution data, MPCI model based on factor weight for multivariate no-normal distribution application, and MPCI model based on yield foryield application. At last, examples for calculating MPCI are given, and the experimental results show that this systematic method is effective and practical. 展开更多
关键词 microelectronics process MULTIVARIATE process capability index YIELD factor weight
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Novel fused-silica charge detection tile for particle detectors
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作者 Wu-Rong Cen Xiao-Meng Wu +2 位作者 Li-Qiang Cao Qi-Dong Wang Liang-Jian Wen 《Radiation Detection Technology and Methods》 CSCD 2019年第2期22-26,共5页
Purpose Develop a novel charge-detecting tile for future large-scale liquid xenon TPC for searching for neutrinoless doublebeta decay.Methods Use advanced microelectronic technologies to fabricate small metal pads on ... Purpose Develop a novel charge-detecting tile for future large-scale liquid xenon TPC for searching for neutrinoless doublebeta decay.Methods Use advanced microelectronic technologies to fabricate small metal pads on a fused-silica wafer.The pads are chained into orthogonal strips,and the strips are isolated at the cross sections.The size of the pads defines the pitch between parallel strips and can be flexibly tuned according to any optimized dimension from future Monte Carlo studies.Such tile also has good potential to suppress the radioactivity and control electronics noise.Furthermore,its modular design allows to easily cover a large size.Results The design and performance have been demonstrated by a prototype tile,particularly by comprehensive tests in liquid xenon.Conclusions A new design of charge detection tile and the fabrication technologies have been developed,which would be useful for future noble liquid detectors. 展开更多
关键词 Time projection chamber(TPC) Charge collection Double-beta decay Microelectronic processing
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