The temperature characteristics of a silicon microgyroscope are studied, and the temperature compensation method of the silicon microgyroscope is proposed. First, an open-loop circuit is adopted to test the entire mic...The temperature characteristics of a silicon microgyroscope are studied, and the temperature compensation method of the silicon microgyroscope is proposed. First, an open-loop circuit is adopted to test the entire microgyroscope＇s resonant frequency and quality factor variations over temperature, and the zero bias changing trend over temperature is measured via a closed-loop circuit. Then, in order to alleviate the temperature effects on the performance of the microgyroscope, a kind of temperature compensated method based on the error back propagation（BP）neural network is proposed. By the Matlab simulation, the optimal temperature compensation model based on the BP neural network is well trained after four steps, and the objective error of the microgyroscope＇s zero bias can achieve 0.001 in full temperature range. By the experiment, the real time operation results of the compensation method demonstrate that the maximum zero bias of the microgyroscope can be decreased from 12.43 to 0.75（°）/s after compensation when the ambient temperature varies from -40 to 80℃, which greatly improves the zero bias stability performance of the microgyroscope.展开更多
基金The National High Technology Research and Development Program of China (863 Program)(No.2002AA812038)the NationalNatural Science Foundation of China (No.60974116)
文摘The temperature characteristics of a silicon microgyroscope are studied, and the temperature compensation method of the silicon microgyroscope is proposed. First, an open-loop circuit is adopted to test the entire microgyroscope＇s resonant frequency and quality factor variations over temperature, and the zero bias changing trend over temperature is measured via a closed-loop circuit. Then, in order to alleviate the temperature effects on the performance of the microgyroscope, a kind of temperature compensated method based on the error back propagation（BP）neural network is proposed. By the Matlab simulation, the optimal temperature compensation model based on the BP neural network is well trained after four steps, and the objective error of the microgyroscope＇s zero bias can achieve 0.001 in full temperature range. By the experiment, the real time operation results of the compensation method demonstrate that the maximum zero bias of the microgyroscope can be decreased from 12.43 to 0.75（°）/s after compensation when the ambient temperature varies from -40 to 80℃, which greatly improves the zero bias stability performance of the microgyroscope.
