A novel self-alignment method for high precision silicon diffraction microlens arrays preparation and its integration with infrared focal plane arrays

Silicon(Si)diffraction microlens arrays are usually used to integrating with infrared focal plane arrays(IRFPAs)to improve their performance.The errors of lithography are unavoidable in the process of the Si diffrac-tion microlens arrays preparation in the conventional engraving method.It has a serious impact on its performance and subsequent applications.In response to the problem of errors of Si diffraction microlens arrays in the conven-tional method,a novel self-alignment method for high precision Si diffraction microlens arrays preparation is pro-posed.The accuracy of the Si diffractive microlens arrays preparation is determined by the accuracy of the first li-thography mask in the novel self-alignment method.In the subsequent etching,the etched area will be protected by the mask layer and the sacrifice layer or the protective layer.The unprotection area is carved to effectively block the non-etching areas,accurately etch the etching area required,and solve the problem of errors.The high precision Si diffraction microlens arrays are obtained by the novel self-alignment method and the diffraction effi-ciency could reach 92.6%.After integrating with IRFPAs,the average blackbody responsity increased by 8.3%,and the average blackbody detectivity increased by 10.3%.It indicates that the Si diffraction microlens arrays can improve the filling factor and reduce crosstalk of IRFPAs through convergence,thereby improving the perfor-mance of the IRFPAs.The results are of great reference significance for improving their performance through opti-mizing the preparation level of micro nano devices.

Highly Efficient Broadband Achromatic Microlens Design Based on Low-Dispersion Materials

Metalenses with achromatic performance offer a new opportunity for high-quality imaging with an ultracompact configuration;however,they suffer from complex fabrication processes and low focusing efficiency.In this study,we propose an efficient design method for achromatic microlenses on a wavelength scale using materials with low dispersion,an adequately designed convex surface,and a thickness profile distribution.By taking into account the absolute chromatic aberration,relative focal length shift(FLS),and numerical aperture(NA),microlens with a certain focal length can be realized through our realized map of geometric features.Accordingly,the designed achromatic microlenses with low-dispersion fused silica were fabricated using a focused ion beam,and precise surface profiles were obtained.The fabricated microlenses exhibited a high average focusing efficiency of 65%at visible wavelengths of 410-680 nm and excellent achromatic capability via white light imaging.Moreover,the design exhibited the advantages of being polarization-insensitive and near-diffraction-limited.These results demonstrate the effectiveness of our proposed achromatic microlens design approach,which expands the prospects of miniaturized optics such as virtual and augmented reality,ultracompact microscopes,and biological endoscopy.

Fabrication of Silicon Microlens Arrays Using Ion Beam Milling

A spherical mask for the fabrication of microlens arrays was prepared by melting photoresist, and the spherical photoresist shape was transferred into a silicon substrate using ion beam milling. The ion beam milling process was computer simulated using the Sigmund ion beam sputtering theory of collision cascades. The experiment results show that microlens arrays can be effectively formed at low substrate temperature of less than 200 ℃.Shapes and dimensions of photoresist masks and silicon microlens arrays were examined by the scanning electron microscope and tested by the surface stylus measurement.

Fabrication of Microlens Array and Its Application:A Review

Microlens arrays are the key component in the next generation of 3D imaging system, for it exhibits some good optical properties such as extremely large field of view angles, low aberration and distortion, high temporal resolution and infinite depth of field. Although many fabrication methods or processes are proposed for manufacturing such precision component, however, those methods still need to be improved. In this review, those fabrication methods are categorized into direct and indirect method and compared in detail. Two main challenges in manufacturing microlens array are identified: how to obtain a microlens array with good uniformity in a large area and how to produce the microlens array on a curved surface? In order to effectively achieve control of the geometry of a microlens,indirect methods involving the use of 3D molds and replication technologies are suggested. Further development of ultraprecision machining technology is needed to reduce the surface fluctuation by considering the dynamics of machine tool in tool path planning. Finally, the challenges and opportunities of manufacturing microlens array in industry and academic research are discussed and several principle conclusions are drawn.

Compressional Deformation in Indentation Process for Microlens Array Mold

The structure of a microlens array（ MLA） can be formed on copper by an indentation process which is a new manufacture approach we applied here instead of a traditional method to test the material property,thereby work time can be saved. Single-indentation and multi-indentation are both conducted to generate a single dimple and dimples array,namely micro lens and MLA. Based on finite element simulation method,factors affecting the form accuracy,such as springback at the compressed area of one single dimple and compressional deformation at the adjacent area of dimples arrays,are determined,and the results are verified by experiments under the same conditions. Meanwhile,indenter compensation method is proposed to improve form accuracy of single dimple,and the relationship between pitch and compressional deformation is investigated by modelling seven sets of multi-indentations at different pitches to identify the critical pitch for the MLA＇s indentation processing. Loads and cross-sectional profiles are measured and analyzed to reveal the compressional deformation mechanism. Finally,it is found that MLA at pitches higher than 1. 47 times of its diameter can be manufactured precisely by indentation using a compensated indenter.

Microlens Light Field Imaging Method Based on Bionic Vision and 3-3 Dimensional Information Transforming

his paper adopts the 3-3-2 information processing method for the capture of moving objects as its premise, and proposes a basic principle of three-dimensional (3D) imaging using biological compound eye. Traditional bionic vision is limited by the available hardware. Therefore, in this paper, the new-generation technology of microlens-array light-field camera is proposed as a potential method for the extraction of depth information from a single image. A significant characteristic of light-field imaging is that it records intensity and directional information from the lights entering the camera. Herein, a refocusing method using light-field image is proposed. By calculating the focusing cost at different depths from the object, the imaging plane of the object is determined, and a depth map is constructed based on the position of the object’s imaging plane. Compared with traditional light-field depth estimation, the depth map calculated by this method can significantly improve resolution and does not depend on the number of light-field microlenses. In addition, considering that software algorithms rely on hardware structure, this study develops an imaging hardware that is only 7 cm long based on the second-generation microlens camera’s structure, further validating its important refocusing characteristics. It thereby provides a technical foundation for 3D imaging with a single camera.

Fabrication of Diffraction-limited Full Aperture Microlens Array by Melting Photoresist

A further study on the fabrication of diffraction--limited full aperture microlens array by melting photoresist is described. The formation of aspherical surface is considered. The parameters for controlling the process of lens production, the height of original photoresist cylinders and the angle of contact between the melted photoresist and the substrate, are discussed in detail. The diffraction limited full--aperture microlens arrays have been obtained,and some measurement results are shown in the paper. A method of controlling the formation of quality microlens array in real time is suggested.

Integration of 256×256 Element Si Microlens Arrays with PtSi IR Detector Array Devices

Diffractive 11-phase-level Si microlens arrays are fabricated by a special method, i.e. part-etching. The method can increase focal length of diffractive microlens arrays. By using this method, the microlens arrays on the back side of the Si substrate and PtSi IR focal plane arrays(FPAs) on the front side of the same wafer are monolithically integrated together. The IR response characteristics of the integrated devices are improved greatly.

Scalable and ultrafast epitaxial growth of single-crystal graphene wafers for electrically tunable liquid-crystal microlens arrays

The scalable growth of wafer-sized single-crystal graphene in an energy-efficient manner and compatible with wafer process is critical for the killer applications of graphene in high-performance electronics and optoelectronics. Here, ultrafast epitaxial growth of single-crystal graphene wafers is realized on singlecrystal Cu90Ni10(1 1 1) thin films fabricated by a tailored two-step magnetron sputtering and recrystallization process. The minor nickel(Ni) content greatly enhances the catalytic activity of Cu, rendering the growth of a 4 in. single-crystal monolayer graphene wafer in 10 min on Cu90Ni10(1 1 1), 50 folds faster than graphene growth on Cu(1 1 1). Through the carbon isotope labeling experiments, graphene growth on Cu90Ni10(1 1 1) is proved to be exclusively surface-reaction dominated, which is ascribed to the Cu surface enrichment in the Cu Ni alloy, as indicated by element in-depth profile. One of the best benefits of our protocol is the compatibility with wafer process and excellent scalability. A pilot-scale chemical vapor deposition(CVD) system is designed and built for the mass production of single-crystal graphene wafers, with productivity of 25 pieces in one process cycle. Furthermore, we demonstrate the application of single-crystal graphene in electrically controlled liquid-crystal microlens arrays(LCMLA), which exhibit highly tunable focal lengths near 2 mm under small driving voltages. By integration of the graphene based LCMLA and a CMOS sensor, a prototype camera is proposed that is available for simultaneous light-field and light intensity imaging. The single-crystal graphene wafers could hold great promising for highperformance electronics and optoelectronics that are compatible with wafer process.

Parallel fabrication of silicon concave microlens array by femtosecond laser irradiation and mixed acid etching

A method of multi-beam femtosecond laser irradiation combined with modified HF-HNO3-CH3COOH etching is used for the parallel fabrication of all-silicon piano-concave microlens arrays （MLAs）. The laser beam is split by a diffractive optical element and focused by a lens to drill microholes parallely on silicon. An HF-HNO3-H2SO4-CH3COOH solution is used to expand and polish laser-ablated microholes to form micro- lenses. Compared with the HF-HNO3-CH3COOH solution, the solution with H2SO4 can effectively reduce the etched surface roughness. The morphologies of MLAs at different laser powers and pulse numbers are observed. The image array formed by the silicon microlenses is also demonstrated.

Snapshot imaging spectrometer based on a microlens array

This Letter proposes a snapshot imaging spectrometer, which obtains the spectral information and spatial information in one "shot". The device proposed can achieve the data cube size of 21 × 29 × 40 in the waveband of400–800 nm. The core element of this system is the microlens array, which contains 60 × 60 microlenses in a square arrangement, each microlens has an aperture of 125 μm× 125 μm, and the F number is 15. The microlens array is mounted in a rotation mount, which provides 360° of rotation around the optical axis to maximize the spectral resolution. The final resolution of the system is about 10 nm.

High speed sub-micrometric microscopy using optical polymer microlens

We report the high speed scanning submicronic microscopy （SSM） using a low cost polymer microlens integrated at the extremity of an optical fiber. These microlenses are fabricated by a free-radical photopolymerization method. Using a polymer microlens with a radius of curvature of 250 nm, a sub-micrometric gold pattern is imaged experimentally by SSM. Different distances between the tip and the sample are used with a high scanning speed of 200 cm/s. In particular, metallic absorption contrasts are described with an optical spatial resolution of 250 nm at the wavelength of 532 nm. Moreover, finite-difference time-domain （FDTD） simulations concerning the focal lengths of microlenses with different geometries and heights support the experimental data.

3D-printed facet-attached microlenses for advanced photonic system assembly

Wafer-level mass production of photonic integrated circuits(PIC)has become a technological mainstay in the field of optics and photonics,enabling many novel and disrupting a wide range of existing applications.However,scalable photonic packaging and system assembly still represents a major challenge that often hinders commercial adoption of PIC-based solutions.Specifically,chip-to-chip and fiber-to-chip connections often rely on so-called active alignment techniques,where the coupling efficiency is continuously measured and optimized during the assembly process.This unavoidably leads to technically complex assembly processes and high cost,thereby eliminating most of the inherent scalability advantages of PIC-based solutions.In this paper,we demonstrate that 3D-printed facet-attached microlenses(FaML)can overcome this problem by opening an attractive path towards highly scalable photonic system assembly,relying entirely on passive assembly techniques based on industry-standard machine vision and/or simple mechanical stops.FaML can be printed with high precision to the facets of optical components using multi-photon lithography,thereby offering the possibility to shape the emitted beams by freely designed refractive or reflective surfaces.Specifically,the emitted beams can be collimated to a comparatively large diameter that is independent of the device-specific mode fields,thereby relaxing both axial and lateral alignment tolerances.Moreover,the FaML concept allows to insert discrete optical elements such as optical isolators into the free-space beam paths between PIC facets.We show the viability and the versatility of the scheme in a series of selected experiments of high technical relevance,comprising pluggable fiber-chip interfaces,the combination of PIC with discrete micro-optical elements such as polarization beam splitters,as well as coupling with ultra-low back-reflection based on non-planar beam paths that only comprise tilted optical surfaces.Based on our results,we believe that the FaML concept opens an attractive path towards novel PIC-based system architectures that combine the distinct advantages of different photonic integration platforms.

Advancing pressure sensors performance through a flexible MXene embedded interlocking structure in a microlens array

Piezoresistive composite elastomers have shown great potentials for wearable and flexible electronic applications due to their high sensitivity,excellent frequency response,and easy signal detection.A composition membrane sensor with an interlocked structure has been developed and demonstrated outstanding pressure sensitivity,fast response time,and low temperature drift features.Compared with a flexible MXene-based flat sensor(Ti_(3)C_(2)),the interlocked sensor exhibits a significantly improved pressure sensitivity of two magnitudes higher(21.04 kPa^(-1)),a fast reaction speed of 31 ms,and an excellent cycle life of 5000 test runs.The viability of sensor in responding to various external stimuli with high deformation capacity has been confirmed by calculating the force distribution of a polydimethylsiloxane(PDMS)film model with a microlens structure using the solid mechanics module in COMSOL.Unlike conventional process,we utilized three-dimensional(3D)laser-direct writing lithography equipment to directly transform high-precision 3D data into a micro-nano structure morphology through variable exposure doses,which reduces the hot melting step.Moreover,the flexible pressure device is capable of detecting and distinguishing signals ranging from finger movements to human pulses,even for speech recognition.This simple,convenient,and large-format lithographic method offers new opportunities for developing novel human-computer interaction devices.

Wafer-scale fabricated thermo-pneumatically tunable microlenses

We have developed a self-contained,liquid tunable microlens based on polyacrylate membranes integrated with compact on-chip thermo-pneumatic actuation fabricated using full-wafer processing.Silicone oil is used as the optical liquid,which is pushed or pulled into the lens cavity via an extended microfluidic channel structure without any pumps,valves or other mechanical means.The heat load generated by the thermal actuator is physically isolated from the lens chamber.The back focal length may be tuned from infinity to 4 mm with a maximum power consumption of 300 mW.The principal application is fine tuning of the back focal length,for which tuning time constants as small as 100 ms are suitable.

Optically anisotropic,electrically tunable microlens arrays formed via single-step photopolymerization-induced phase separation in polymer/liquid-crystal composite materials

Microlenses or arrays are key elements in many applications.However,their construction methods involve multiple fabrication processes,thereby increasing the complexity and cost of fabrication.In this study,we demonstrate an optically anisotropic,electrically tunable liquid crystal(LC)microlens array using a simple,one-step fabrication method.The microlens array is formed via photopolymerization-induced phase separation inside a polymer/LC composite.It possesses both polarization-dependent and electrically tunable focusing and imaging properties.Without applying voltage,the microlens array has a natural focal length of 8 mm,which is a result of its inherent gradient refractive index profile.Upon applying voltage above the threshold,the LC molecules reorient along the electric field direction and the focal length of the microlens array gradually increases.Based on its superior properties,the microlens array is further used for integral imaging applications,demonstrating electrically tunable central depth plane.Such LC microlens arrays could find numerous potential applications owing to their advantageous features of being flat,ultra-thin,and tunable,including 3D displays,optical interconnects,and more.

Mechanism of brittle fracture in diamond turning of microlens array on polymethyl methacrylate

Diamond cutting is a popular method to fabricate microlens array (MLA) on polymethyl methacrylate (PMMA);however, it is limited by brittle fracture, which is formed easily on the surface of MLA during the cutting process. In this paper, the formation mechanism of the brittle fracture is studied via a series of experiments including the slow tool servo (STS) cutting experiment of MLA, surface scratching experiment and suddenstop cutting experiment. The effects of undeformed chip thickness, feed rate, and machining track on brittle fracture formation are investigated in detail. In addition, based on the fracture formation mechanism, a bi-directional cutting approach is proposed to eliminate the regional brittle fracture of the microlens during diamond cutting. An experiment was then conducted to verify the method;the results demonstrated that bi-directional cutting could eliminate brittle fracture entirely. Finally, a spherical MLA with the form error (vPV) of 60 nm and the surface roughness (Ra) of 8 nm was successfully fabricated.

Imaging Properties of Planar Microlens Arrays

The planar microlens arrays is a two-dimensional array of optical component which is fabricated monolithically available. Imaging properties of planar microlens arrays are described, which provide both image multiplexer and erect, unit magnification images.