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A high precision profilometer based on vertical scanning microscopic interferometry
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作者 戴蓉 谢铁邦 +1 位作者 龚文 常素萍 《Journal of Shanghai University(English Edition)》 CAS 2008年第3期255-260,共6页
A profilometer used for 3 dimension measurement of micro-surface topography is presented. The instrument is based on the vertical scanning microscopic interferometry (VSMI). A Linnik type interference microscope is ... A profilometer used for 3 dimension measurement of micro-surface topography is presented. The instrument is based on the vertical scanning microscopic interferometry (VSMI). A Linnik type interference microscope is used and the interferograms which present changes of surface profile are recorded with a CCD camera. A developed nano-positioning work stage with an integrated optical grating displacement measuring system realizes the precise vertical scanning motion during profile measurement. By a white-light phase shifting algorithm of arbitrary step, frames of interferograms are processed by a computer to rebuild and evaluate the measured profile. Because of the specialty of VSMI, the profilometer is suitable for both smooth and rough surface measurement. It can also be used to measure curved surfaces, dimension of micro electro mechanical systems (MEMS), etc. The vertical resolution of the profilometer is 0.5 nm, and lateral resolution 0.5 μm. 展开更多
关键词 PROFILOMETER vertical scanning microscopic interferometry (VSMI) interference microscope work stage piezo- electric (PZT) actuator flexural hinge
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