Three-dimensional(3D)vertical architecture transistors represent an important technological pursuit,which have distinct advantages in device integration density,operation speed,and power consumption.However,the fabric...Three-dimensional(3D)vertical architecture transistors represent an important technological pursuit,which have distinct advantages in device integration density,operation speed,and power consumption.However,the fabrication processes of such 3D devices are complex,especially in the interconnection of electrodes.In this paper,we present a novel method which combines suspended electrodes and focused ion beam(FIB)technology to greatly simplify the electrodes interconnection in 3D devices.Based on this method,we fabricate 3D vertical core-double shell structure transistors with ZnO channel and Al_(2)O_(3) gate-oxide both grown by atomic layer deposition.Suspended top electrodes of vertical architecture could be directly connected to planar electrodes by FIB deposited Pt nanowires,which avoid cumbersome steps in the traditional 3D structure fabrication technology.Both single pillar and arrays devices show well behaved transfer characteristics with an Ion/Ioff current ratio greater than 106 and a low threshold voltage around 0 V.The ON-current of the 2×2 pillars vertical channel transistor was 1.2μA at the gate voltage of 3 V and drain voltage of 2 V,which can be also improved by increasing the number of pillars.Our method for fabricating vertical architecture transistors can be promising for device applications with high integration density and low power consumption.展开更多
Ground-based microwave radiometers(MWRs)operating in the K-and V-bands(20–60 GHz)can help us obtain temperature and humidity profiles in the troposphere.Aside from some soundings from local meteorological observatori...Ground-based microwave radiometers(MWRs)operating in the K-and V-bands(20–60 GHz)can help us obtain temperature and humidity profiles in the troposphere.Aside from some soundings from local meteorological observatories,the tropospheric atmosphere over the Tibetan Plateau(TP)has never been continuously observed.As part of the Chinese Second Tibetan Plateau Scientific Expedition and Research Program(STEP),the Tibetan Plateau Atmospheric Profile(TPPROFILE)project aims to construct a comprehensive MWR troposphere observation network to study the synoptic processes and environmental changes on the TP.This initiative has collected three years of data from the MWR network.This paper introduces the data information,the data quality,and data downloading.Some applications of the data obtained from these MWRs were also demonstrated.Our comparisons of MWR against the nearest radiosonde observation demonstrate that the TP-PROFILE MWR system is adequate for monitoring the thermal and moisture variability of the troposphere over the TP.The continuous temperature and moisture profiles derived from the MWR data provide a unique perspective on the evolution of the thermodynamic structure associated with the heating of the TP.The TP-PROFILE project reveals that the low-temporal resolution instruments are prone to large uncertainties in their vapor estimation in the mountain valleys on the TP.展开更多
针对多层微波集成电路设计的微带线层间互连问题,介绍了垂直通孔互连、垂直带条互连和层耦合过渡互连三种高性能的互连方法,并且采用三维电磁仿真软件HFSS对这三种互连结构进行了建模和仿真。仿真结果表明,垂直通孔互连和垂直带条互连在...针对多层微波集成电路设计的微带线层间互连问题,介绍了垂直通孔互连、垂直带条互连和层耦合过渡互连三种高性能的互连方法,并且采用三维电磁仿真软件HFSS对这三种互连结构进行了建模和仿真。仿真结果表明,垂直通孔互连和垂直带条互连在0.1~25 GHz的频宽范围内,回波损耗S11<-20 d B,插入损耗S21>-1 d B,互连性能优良,而层耦合过渡互连在20~68 GHz内回波损耗S11<-20 d B,插入损耗S21>-1 d B,具有在毫米波频段实现互连的潜力。展开更多
基金the National Key Research and Development Program of China(Grant Nos.2016YFA0200400 and 2016YFA0200800)the National Natural Science Foundation of China(Grant Nos.61888102,12074420,and 11674387)+1 种基金Strategic Priority Research Program of the Chinese Academy of Sciences(Grant No.XDB33000000)Key Research Program of Frontier Sciences,Chinese Acdemy of Sciences(Grant No.QYZDJ-SSWSLH042).
文摘Three-dimensional(3D)vertical architecture transistors represent an important technological pursuit,which have distinct advantages in device integration density,operation speed,and power consumption.However,the fabrication processes of such 3D devices are complex,especially in the interconnection of electrodes.In this paper,we present a novel method which combines suspended electrodes and focused ion beam(FIB)technology to greatly simplify the electrodes interconnection in 3D devices.Based on this method,we fabricate 3D vertical core-double shell structure transistors with ZnO channel and Al_(2)O_(3) gate-oxide both grown by atomic layer deposition.Suspended top electrodes of vertical architecture could be directly connected to planar electrodes by FIB deposited Pt nanowires,which avoid cumbersome steps in the traditional 3D structure fabrication technology.Both single pillar and arrays devices show well behaved transfer characteristics with an Ion/Ioff current ratio greater than 106 and a low threshold voltage around 0 V.The ON-current of the 2×2 pillars vertical channel transistor was 1.2μA at the gate voltage of 3 V and drain voltage of 2 V,which can be also improved by increasing the number of pillars.Our method for fabricating vertical architecture transistors can be promising for device applications with high integration density and low power consumption.
基金supported by the Second Tibetan Plateau Scientific Expedition and Research Program(STEP)(Grant Nos.2019QZKK0103 and 2019QZKK0105)the National Natural Science Foundation of China(Grant Nos.41975009,42230610,41840650 and U2242208)the Youth Innovation Promotion Association of the Chinese Academy of Sciences(Wang Binbin,2022069).
文摘Ground-based microwave radiometers(MWRs)operating in the K-and V-bands(20–60 GHz)can help us obtain temperature and humidity profiles in the troposphere.Aside from some soundings from local meteorological observatories,the tropospheric atmosphere over the Tibetan Plateau(TP)has never been continuously observed.As part of the Chinese Second Tibetan Plateau Scientific Expedition and Research Program(STEP),the Tibetan Plateau Atmospheric Profile(TPPROFILE)project aims to construct a comprehensive MWR troposphere observation network to study the synoptic processes and environmental changes on the TP.This initiative has collected three years of data from the MWR network.This paper introduces the data information,the data quality,and data downloading.Some applications of the data obtained from these MWRs were also demonstrated.Our comparisons of MWR against the nearest radiosonde observation demonstrate that the TP-PROFILE MWR system is adequate for monitoring the thermal and moisture variability of the troposphere over the TP.The continuous temperature and moisture profiles derived from the MWR data provide a unique perspective on the evolution of the thermodynamic structure associated with the heating of the TP.The TP-PROFILE project reveals that the low-temporal resolution instruments are prone to large uncertainties in their vapor estimation in the mountain valleys on the TP.
文摘针对多层微波集成电路设计的微带线层间互连问题,介绍了垂直通孔互连、垂直带条互连和层耦合过渡互连三种高性能的互连方法,并且采用三维电磁仿真软件HFSS对这三种互连结构进行了建模和仿真。仿真结果表明,垂直通孔互连和垂直带条互连在0.1~25 GHz的频宽范围内,回波损耗S11<-20 d B,插入损耗S21>-1 d B,互连性能优良,而层耦合过渡互连在20~68 GHz内回波损耗S11<-20 d B,插入损耗S21>-1 d B,具有在毫米波频段实现互连的潜力。
