The present work aims at the microstructural characterization of TiAlZrN/ Al2O3 and TiAlZrN/Si3N4 coatings deposited via lateral rotating cathodes. The coatings were deposited using Lateral Rotating Cathodes (LARC) te...The present work aims at the microstructural characterization of TiAlZrN/ Al2O3 and TiAlZrN/Si3N4 coatings deposited via lateral rotating cathodes. The coatings were deposited using Lateral Rotating Cathodes (LARC) technology. The deposited coatings were studied for its cross sectional morphology using scanning electron microscopy. Energy Dispersive Spectrometry was also conducted along the cross section to determine the elemental composition. Micro Vickers hardness test was conducted to determine the hardness of the coatings. The scanning electron microscope images showed that TiAlZrN/Al2O3 coatings showed preferred columnar grain orientation with multilayered structure while TiAlZrN/Si3N4 coatings exhibit a dense grain structure. The TiAlZrN/Si3N4 coating shows a hardness of 31.58 GPa while TiAlZrN/Al2O3 coating shows a hardness of 25.40 GPa. Dry turning tests were performed on AISI 304 stainless steel. The TiAlZrN/Si3N4 coatings show reduced flank wear. Both the coatings even under severe cutting conditions impart surface roughness of less than 1.5 μm.展开更多
With the increasing use of difficult-to-machine materials in aerospace applications,machining requirements are becoming ever more rigorous.However,traditional single-point diamond turning(SPDT)can cause surface damage...With the increasing use of difficult-to-machine materials in aerospace applications,machining requirements are becoming ever more rigorous.However,traditional single-point diamond turning(SPDT)can cause surface damage and tool wear.Thus,it is difficult for SPDT to meet the processing requirements,and it has significant limitations.Research indicates that supplementing SPDT with unconventional techniques can,importantly,solve problems due to the high cutting forces and poor surface quality for difficult-to-machine materials.This paper first introduces SPDT and reviews research into unconventional techniques for use with SPDT.The machining mechanism is discussed,and the main advantages and disadvantages of various methods are investigated.Second,hybrid SPDT is briefly described,which encompasses ultrasonic-vibration magnetic-field SPDT,ultrasonic-vibration laser SPDT,and ultrasonic-vibration cold-plasma SPDT.Compared with the traditional SPDT method,hybrid SPDT produces a better optical surface quality.The current status of research into unconventional techniques to supplement SPDT is then summarized.Finally,future development trends and the application prospects of unconventional assisted SPDT are discussed.展开更多
Now vibration isolation of ultra precision machine tool is usually achieved through air springs systems. As far as HCM I sub micro turning machine developed by HIT, an active vibration isolation system that consists o...Now vibration isolation of ultra precision machine tool is usually achieved through air springs systems. As far as HCM I sub micro turning machine developed by HIT, an active vibration isolation system that consists of air springs and electro magnetic actuators was presented. The primary function of air springs is to support the turning machine and to isolate the high frequency vibration. The electro magnetic actuators controlled by fuzzy neural networks isolate the low frequency vibration. The experiment indicates that active vibration isolation system isolates base vibration effectively in all the frequency range. So the vibration of the machine bed is controlled under 10 -6 g and the surface roughness is improved.展开更多
In order to minimize vibration and improve rotary precision of spindle, we apply active vibration control technique to ultra-precision turning machine based on the analysis of vibration characteristic of aerostatic be...In order to minimize vibration and improve rotary precision of spindle, we apply active vibration control technique to ultra-precision turning machine based on the analysis of vibration characteristic of aerostatic bearing spindle. Using aerostatic bearing itself as actuator, the vibration of spindle is controlled by adjusting admission pressure respectively and by changing pressure distribution in the bearing. The experiments and simulations prove that this method can minimize the vibration of spindle effectively.展开更多
The machining process is primarily used to remove material using cutting tools.Any variation in tool state affects the quality of a finished job and causes disturbances.So,a tool monitoring scheme(TMS)for categorizati...The machining process is primarily used to remove material using cutting tools.Any variation in tool state affects the quality of a finished job and causes disturbances.So,a tool monitoring scheme(TMS)for categorization and supervision of failures has become the utmost priority.To respond,traditional TMS followed by the machine learning(ML)analysis is advocated in this paper.Classification in ML is supervised based learning method wherein the ML algorithm learn from the training data input fed to it and then employ this model to categorize the new datasets for precise prediction of a class and observation.In the current study,investigation on the single point cutting tool is carried out while turning a stainless steel(SS)workpeice on the manual lathe trainer.The vibrations developed during this activity are examined for failure-free and various failure states of a tool.The statistical modeling is then incorporated to trace vital signs from vibration signals.The multiple-binary-rule-based model for categorization is designed using the decision tree.Lastly,various tree-based algorithms are used for the categorization of tool conditions.The Random Forest offered the highest classification accuracy,i.e.,92.6%.展开更多
The characteristics of several different linear motors have been investigated, and the feed drive system with linear motor instead of screw-nut mechanism has been built for a submicro ultraprecision turning machine. I...The characteristics of several different linear motors have been investigated, and the feed drive system with linear motor instead of screw-nut mechanism has been built for a submicro ultraprecision turning machine. In the control system for the feed drive system arranged as "T", both P-position and PI-speed control loops are used. The feedback variable is obtained from a double frequecy laser interferometor. Experiments show that the feed drive with linear motor is simple in construction, and that its dynamics is better than others. So the machining accuracy of the workpiece machined has been successfully improved.展开更多
A new tool force model to be presented is based upon process geometry and thecharacteristics of the force system, in which the forces acting on the tool rake face, the cuttingedge rounding and the clearance face have ...A new tool force model to be presented is based upon process geometry and thecharacteristics of the force system, in which the forces acting on the tool rake face, the cuttingedge rounding and the clearance face have been considered, and the size effect is accountable forthe new model. It is desired that the model can be well applicable to conventional diamond turningand the model may be employed as a tool in the design of diamond tools. This approach is quitedifferent from traditional investigations primarily based on empirical studies. As the depth of cutbecomes the same order as the rounded cutting edge radius, sliding along the clearance face due toelastic recovery of workpiece material and plowing due to the rounded cutting edge may becomeimportant in micro-machining, the forces acting on the cutting edge rounding and the clearance facecan not be neglected. For this reason, it is very important to understand the influence of someparameters on tool forces and develop a model of the relationship between them.展开更多
Laser assisted machining (LAM) has difficulties in estimating temperature after applying a LAM process due to its very small heat input area, large energy and movement. In particular, in the case of laser assisted t...Laser assisted machining (LAM) has difficulties in estimating temperature after applying a LAM process due to its very small heat input area, large energy and movement. In particular, in the case of laser assisted turning (LAT) process, it is more difficult to estimate the temperature after preheating because it has a shape of ellipse when a laser heat source is rotated. A prediction method and thermal analysis method for heat source shapes were proposed as a square shaped member was preheated. The temperature distribution was calculated according to the rotation of the member. Compared with the results of the former study, the maximum temperature of the calculation results, 1 407.1 ℃, is 8.5 ℃ higher than that of the square member, which is 1 398.6 ℃. In a LAT process for a square member, the maximum temperature is 1 850.8 ℃. It is recognized that a laser power control process is required because square members show a maximum temperature that exceeds a melting temperature at around a vertex of the member according to the rotation.展开更多
A finite element model was established for analyzing the geometric errors in turning operations and a two-step analyzing process was proposed. In the first analyzing step, the cutting force and the cutting heat for th...A finite element model was established for analyzing the geometric errors in turning operations and a two-step analyzing process was proposed. In the first analyzing step, the cutting force and the cutting heat for the cutting conditions were obtained using the AdvantEdge. Also, the deformation of a workpiece was estimated in the second step using the ANSYS. The deformation was analyzed for a 150 mm-long workpiece at three different measuring points, such as 10, 70 and 130 mm from a reference point, and the amounts of the deformation were compared through experiments. /n the results of the comparison and analysis, the values obtained from these comparison and analysis represent similar tendencies. Also, it is verified that their geometric errors increase with the increase in temperature. In addition, regarding the factors that affect the deformation of a workpiecc, it can be seen that the geometric error in the lathe is about 15%, the error caused by the cutting force is about 10%, and the deformation caused by the heat is about 75%.展开更多
In this paper we present a multi-optimization technique based on genetic algorithms to search optimal cuttings parameters such as cutting depth, feed rate and cutting speed of multi-pass turning processes. Tow objecti...In this paper we present a multi-optimization technique based on genetic algorithms to search optimal cuttings parameters such as cutting depth, feed rate and cutting speed of multi-pass turning processes. Tow objective functions are simultaneously optimized under a set of practical of machining constraints, the first objective function is cutting cost and the second one is the used tool life time. The proposed model deals multi-pass turning processes where the cutting operations are divided into multi-pass rough machining and finish machining. Results obtained from Genetic Algorithms method are presented in Pareto frontier graphic;this technique helps us in decision making process. An example is presented to illustrate the procedure of this technique.展开更多
The computer-controlled turning technique of shaped connection (keyless connection), shaft and hole, is discussed. By using the method, a clearance free fit with a taper is obtained. After the comparison of the mechan...The computer-controlled turning technique of shaped connection (keyless connection), shaft and hole, is discussed. By using the method, a clearance free fit with a taper is obtained. After the comparison of the mechanical behavior and the turning machinability of the contours, it is found that the present contour needs further improvement, and a new contour is presented.展开更多
With the increasing market demand for optical complex surface parts,the application of multi-axis ultraprecision single-point diamond turning is increasing.A tool path generation method is very important to decrease m...With the increasing market demand for optical complex surface parts,the application of multi-axis ultraprecision single-point diamond turning is increasing.A tool path generation method is very important to decrease manufacturing time,enhance surface quality,and reduce cost.Compared with the tool path generation of the traditional multi-axis milling,that of the ultra-precision single-point diamond turning requires higher calculation accuracy and efficiency.This paper reviews the tool path generation of ultra-precision diamond turning,considering several key issues:cutter location(CL)points calculation,the topological form of tool path,interpolation mode,and G code optimization.展开更多
The objective of this study is to develop an effective approach for product quality prediction in Computer Numerical Control turning of cantilever bars. A systematic predictive modelling procedure based on experimenta...The objective of this study is to develop an effective approach for product quality prediction in Computer Numerical Control turning of cantilever bars. A systematic predictive modelling procedure based on experimental investigations, neural network modelling and various statistical analysis tools is designed to produce the most accurate, practical and cost-effective prediction model. The modeling procedure begins by exploring the relationships between cutting parameters known to have an influence on quality characteristics of machined parts, such as dimensional errors, form errors and surface roughness, as well as their sensitivity to the process conditions. Based on these explorations and using numerous statistical tools, the most relevant variables to include in the prediction model are identified and fused using several artificial neural network architectures. An application on CNC turning of cantilever bars demonstrates that the proposed modeling procedure can be effectively and advantageously applied to quality characteristics prediction due to its simplicity, accuracy and efficiency. The experimental validation reveals that the resulting prediction model can correctly predict the quality characteristics of machined parts under variable machining conditions.展开更多
In order to prevent unwanted excited vibrations and to secure better machining precision in large size heavy duty machine tools dynamic stiffness is one of the most desirable and critical properties. In the past decad...In order to prevent unwanted excited vibrations and to secure better machining precision in large size heavy duty machine tools dynamic stiffness is one of the most desirable and critical properties. In the past decades, many researches on machine tool stiffness test and evaluation methodology have been made. However any methodology for a Pin Turning Device (PTD), which is a special kind of turning lathe for machining big size crankshaft pins, is rarely found among them. This study proposes a test and evaluation process of stiffness of a PTD by measuring frequency response function at the tool center point (TCP). For conformance proving for the proposed methodology, stiffness of a PTD obtained by the proposed method with impact hammer test (IHT) has been compared with that determined by FEM.展开更多
Diamond turning based on a fast tool servo(FTS)is widely used in freeform optics fabrication due to its high accuracy and machining efficiency.As a new trend,recently developed high-frequency and long-stroke FTS units...Diamond turning based on a fast tool servo(FTS)is widely used in freeform optics fabrication due to its high accuracy and machining efficiency.As a new trend,recently developed high-frequency and long-stroke FTS units are independently driven by a separate control system from the machine tool controller.However,the tool path generation strategy for the independently controlled FTS is far from complete.This study aims to establish methods for optimizing tool path for the independent control FTS to reduce form errors in a single step of machining.Different from the conventional integrated FTS control system,where control points are distributed in a spiral pattern,in this study,the tool path for the independent FTS controller is generated by the ring method and the mesh method,respectively.The machined surface profile is predicted by simulation and the parameters for the control point generation are optimized by minimizing the deviation between the predicted and the designed surfaces.To demonstrate the feasibility of the proposed tool path generation strategies,cutting tests of a two-dimensional sinewave and a micro-lens array were conducted and the results were compared.As a result,after tool path optimization,the peak-to-valley form error of the machined surface was reduced from 429 nm to 56 nm for the two-dimensional sinewave by using the ring method,and from 191 nm to 103 nm for the micro-lens array by using the mesh method,respectively.展开更多
nm roughness value of silicon surface by diamond turning is obtained firstly and three novel techniques are proposed. The surface integrity is studied in detail by using atomic force microscope, scanning electron micr...nm roughness value of silicon surface by diamond turning is obtained firstly and three novel techniques are proposed. The surface integrity is studied in detail by using atomic force microscope, scanning electron microscope, and stylus surface instrument. The diamond tool sharpness has a considerable influence on the machined surface, therefore a novel technique—brightness modulation for measuring accurately the edge of the cutter is proposed. Mirror surfaces are assessed by another novel technique—a measure of their reflectivity. A third technique, single grit diamond machining is carried out. It supplies a experimental evidence for verifying the obtained high quality turned surfaces.展开更多
文摘The present work aims at the microstructural characterization of TiAlZrN/ Al2O3 and TiAlZrN/Si3N4 coatings deposited via lateral rotating cathodes. The coatings were deposited using Lateral Rotating Cathodes (LARC) technology. The deposited coatings were studied for its cross sectional morphology using scanning electron microscopy. Energy Dispersive Spectrometry was also conducted along the cross section to determine the elemental composition. Micro Vickers hardness test was conducted to determine the hardness of the coatings. The scanning electron microscope images showed that TiAlZrN/Al2O3 coatings showed preferred columnar grain orientation with multilayered structure while TiAlZrN/Si3N4 coatings exhibit a dense grain structure. The TiAlZrN/Si3N4 coating shows a hardness of 31.58 GPa while TiAlZrN/Al2O3 coating shows a hardness of 25.40 GPa. Dry turning tests were performed on AISI 304 stainless steel. The TiAlZrN/Si3N4 coatings show reduced flank wear. Both the coatings even under severe cutting conditions impart surface roughness of less than 1.5 μm.
基金supported by the National Natural Science Foundation of China(Grant No.52175431)the Natural Science Foundation of Tianjin of China(Grant No.22JCZDJC00730)the Scientific Research Project of Tianjin Municipal Education Commission(Grant No.2022ZD021).
文摘With the increasing use of difficult-to-machine materials in aerospace applications,machining requirements are becoming ever more rigorous.However,traditional single-point diamond turning(SPDT)can cause surface damage and tool wear.Thus,it is difficult for SPDT to meet the processing requirements,and it has significant limitations.Research indicates that supplementing SPDT with unconventional techniques can,importantly,solve problems due to the high cutting forces and poor surface quality for difficult-to-machine materials.This paper first introduces SPDT and reviews research into unconventional techniques for use with SPDT.The machining mechanism is discussed,and the main advantages and disadvantages of various methods are investigated.Second,hybrid SPDT is briefly described,which encompasses ultrasonic-vibration magnetic-field SPDT,ultrasonic-vibration laser SPDT,and ultrasonic-vibration cold-plasma SPDT.Compared with the traditional SPDT method,hybrid SPDT produces a better optical surface quality.The current status of research into unconventional techniques to supplement SPDT is then summarized.Finally,future development trends and the application prospects of unconventional assisted SPDT are discussed.
文摘Now vibration isolation of ultra precision machine tool is usually achieved through air springs systems. As far as HCM I sub micro turning machine developed by HIT, an active vibration isolation system that consists of air springs and electro magnetic actuators was presented. The primary function of air springs is to support the turning machine and to isolate the high frequency vibration. The electro magnetic actuators controlled by fuzzy neural networks isolate the low frequency vibration. The experiment indicates that active vibration isolation system isolates base vibration effectively in all the frequency range. So the vibration of the machine bed is controlled under 10 -6 g and the surface roughness is improved.
文摘In order to minimize vibration and improve rotary precision of spindle, we apply active vibration control technique to ultra-precision turning machine based on the analysis of vibration characteristic of aerostatic bearing spindle. Using aerostatic bearing itself as actuator, the vibration of spindle is controlled by adjusting admission pressure respectively and by changing pressure distribution in the bearing. The experiments and simulations prove that this method can minimize the vibration of spindle effectively.
文摘The machining process is primarily used to remove material using cutting tools.Any variation in tool state affects the quality of a finished job and causes disturbances.So,a tool monitoring scheme(TMS)for categorization and supervision of failures has become the utmost priority.To respond,traditional TMS followed by the machine learning(ML)analysis is advocated in this paper.Classification in ML is supervised based learning method wherein the ML algorithm learn from the training data input fed to it and then employ this model to categorize the new datasets for precise prediction of a class and observation.In the current study,investigation on the single point cutting tool is carried out while turning a stainless steel(SS)workpeice on the manual lathe trainer.The vibrations developed during this activity are examined for failure-free and various failure states of a tool.The statistical modeling is then incorporated to trace vital signs from vibration signals.The multiple-binary-rule-based model for categorization is designed using the decision tree.Lastly,various tree-based algorithms are used for the categorization of tool conditions.The Random Forest offered the highest classification accuracy,i.e.,92.6%.
文摘The characteristics of several different linear motors have been investigated, and the feed drive system with linear motor instead of screw-nut mechanism has been built for a submicro ultraprecision turning machine. In the control system for the feed drive system arranged as "T", both P-position and PI-speed control loops are used. The feedback variable is obtained from a double frequecy laser interferometor. Experiments show that the feed drive with linear motor is simple in construction, and that its dynamics is better than others. So the machining accuracy of the workpiece machined has been successfully improved.
基金This project is supported by National Natural Science Foundation of China (No.50175022)National Aerospace Support Foundation of China(No.0223HIT07).
文摘A new tool force model to be presented is based upon process geometry and thecharacteristics of the force system, in which the forces acting on the tool rake face, the cuttingedge rounding and the clearance face have been considered, and the size effect is accountable forthe new model. It is desired that the model can be well applicable to conventional diamond turningand the model may be employed as a tool in the design of diamond tools. This approach is quitedifferent from traditional investigations primarily based on empirical studies. As the depth of cutbecomes the same order as the rounded cutting edge radius, sliding along the clearance face due toelastic recovery of workpiece material and plowing due to the rounded cutting edge may becomeimportant in micro-machining, the forces acting on the cutting edge rounding and the clearance facecan not be neglected. For this reason, it is very important to understand the influence of someparameters on tool forces and develop a model of the relationship between them.
基金Project(70004782)supported by the Regional Strategic Technology Development Program of the Ministry of Knowledge Economy(MKE),KoreaProject(2011-0017407)supported by National Research Foundation(NRF)of KoreaWork financially supported by the Second Stage of Brain Korea 21 Projects
文摘Laser assisted machining (LAM) has difficulties in estimating temperature after applying a LAM process due to its very small heat input area, large energy and movement. In particular, in the case of laser assisted turning (LAT) process, it is more difficult to estimate the temperature after preheating because it has a shape of ellipse when a laser heat source is rotated. A prediction method and thermal analysis method for heat source shapes were proposed as a square shaped member was preheated. The temperature distribution was calculated according to the rotation of the member. Compared with the results of the former study, the maximum temperature of the calculation results, 1 407.1 ℃, is 8.5 ℃ higher than that of the square member, which is 1 398.6 ℃. In a LAT process for a square member, the maximum temperature is 1 850.8 ℃. It is recognized that a laser power control process is required because square members show a maximum temperature that exceeds a melting temperature at around a vertex of the member according to the rotation.
基金Project(RTI04-01-03) supported by the Regional Technology Innovation Program of the Ministry of Knowledge Economy (MKE),Korea
文摘A finite element model was established for analyzing the geometric errors in turning operations and a two-step analyzing process was proposed. In the first analyzing step, the cutting force and the cutting heat for the cutting conditions were obtained using the AdvantEdge. Also, the deformation of a workpiece was estimated in the second step using the ANSYS. The deformation was analyzed for a 150 mm-long workpiece at three different measuring points, such as 10, 70 and 130 mm from a reference point, and the amounts of the deformation were compared through experiments. /n the results of the comparison and analysis, the values obtained from these comparison and analysis represent similar tendencies. Also, it is verified that their geometric errors increase with the increase in temperature. In addition, regarding the factors that affect the deformation of a workpiecc, it can be seen that the geometric error in the lathe is about 15%, the error caused by the cutting force is about 10%, and the deformation caused by the heat is about 75%.
文摘In this paper we present a multi-optimization technique based on genetic algorithms to search optimal cuttings parameters such as cutting depth, feed rate and cutting speed of multi-pass turning processes. Tow objective functions are simultaneously optimized under a set of practical of machining constraints, the first objective function is cutting cost and the second one is the used tool life time. The proposed model deals multi-pass turning processes where the cutting operations are divided into multi-pass rough machining and finish machining. Results obtained from Genetic Algorithms method are presented in Pareto frontier graphic;this technique helps us in decision making process. An example is presented to illustrate the procedure of this technique.
文摘The computer-controlled turning technique of shaped connection (keyless connection), shaft and hole, is discussed. By using the method, a clearance free fit with a taper is obtained. After the comparison of the mechanical behavior and the turning machinability of the contours, it is found that the present contour needs further improvement, and a new contour is presented.
基金supports of the Funds for the National Natural Science Foundation of China [grant numbers 51575386,51275344]
文摘With the increasing market demand for optical complex surface parts,the application of multi-axis ultraprecision single-point diamond turning is increasing.A tool path generation method is very important to decrease manufacturing time,enhance surface quality,and reduce cost.Compared with the tool path generation of the traditional multi-axis milling,that of the ultra-precision single-point diamond turning requires higher calculation accuracy and efficiency.This paper reviews the tool path generation of ultra-precision diamond turning,considering several key issues:cutter location(CL)points calculation,the topological form of tool path,interpolation mode,and G code optimization.
文摘The objective of this study is to develop an effective approach for product quality prediction in Computer Numerical Control turning of cantilever bars. A systematic predictive modelling procedure based on experimental investigations, neural network modelling and various statistical analysis tools is designed to produce the most accurate, practical and cost-effective prediction model. The modeling procedure begins by exploring the relationships between cutting parameters known to have an influence on quality characteristics of machined parts, such as dimensional errors, form errors and surface roughness, as well as their sensitivity to the process conditions. Based on these explorations and using numerous statistical tools, the most relevant variables to include in the prediction model are identified and fused using several artificial neural network architectures. An application on CNC turning of cantilever bars demonstrates that the proposed modeling procedure can be effectively and advantageously applied to quality characteristics prediction due to its simplicity, accuracy and efficiency. The experimental validation reveals that the resulting prediction model can correctly predict the quality characteristics of machined parts under variable machining conditions.
文摘In order to prevent unwanted excited vibrations and to secure better machining precision in large size heavy duty machine tools dynamic stiffness is one of the most desirable and critical properties. In the past decades, many researches on machine tool stiffness test and evaluation methodology have been made. However any methodology for a Pin Turning Device (PTD), which is a special kind of turning lathe for machining big size crankshaft pins, is rarely found among them. This study proposes a test and evaluation process of stiffness of a PTD by measuring frequency response function at the tool center point (TCP). For conformance proving for the proposed methodology, stiffness of a PTD obtained by the proposed method with impact hammer test (IHT) has been compared with that determined by FEM.
基金supported by Japan Society for the Promotion of Science,Grant-in-Aid for Scientific Research(B),Project Number 21H01230.
文摘Diamond turning based on a fast tool servo(FTS)is widely used in freeform optics fabrication due to its high accuracy and machining efficiency.As a new trend,recently developed high-frequency and long-stroke FTS units are independently driven by a separate control system from the machine tool controller.However,the tool path generation strategy for the independently controlled FTS is far from complete.This study aims to establish methods for optimizing tool path for the independent control FTS to reduce form errors in a single step of machining.Different from the conventional integrated FTS control system,where control points are distributed in a spiral pattern,in this study,the tool path for the independent FTS controller is generated by the ring method and the mesh method,respectively.The machined surface profile is predicted by simulation and the parameters for the control point generation are optimized by minimizing the deviation between the predicted and the designed surfaces.To demonstrate the feasibility of the proposed tool path generation strategies,cutting tests of a two-dimensional sinewave and a micro-lens array were conducted and the results were compared.As a result,after tool path optimization,the peak-to-valley form error of the machined surface was reduced from 429 nm to 56 nm for the two-dimensional sinewave by using the ring method,and from 191 nm to 103 nm for the micro-lens array by using the mesh method,respectively.
文摘nm roughness value of silicon surface by diamond turning is obtained firstly and three novel techniques are proposed. The surface integrity is studied in detail by using atomic force microscope, scanning electron microscope, and stylus surface instrument. The diamond tool sharpness has a considerable influence on the machined surface, therefore a novel technique—brightness modulation for measuring accurately the edge of the cutter is proposed. Mirror surfaces are assessed by another novel technique—a measure of their reflectivity. A third technique, single grit diamond machining is carried out. It supplies a experimental evidence for verifying the obtained high quality turned surfaces.