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Miniaturized Fiber-Optic Fabry-Perot Interferometer for Highly Sensitive Refractive Index Measurement
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作者 Ming Deng Tao Zhu +1 位作者 Yun-Jiang Rao Hong Li 《Journal of Electronic Science and Technology of China》 2008年第4期365-368,共4页
This paper presents a novel miniaturized fiber-optic Fabry-Peort interferometer (FPI) for highly sensitive refractive index measurement. This device was tested for the refractive indices of various liquids including... This paper presents a novel miniaturized fiber-optic Fabry-Peort interferometer (FPI) for highly sensitive refractive index measurement. This device was tested for the refractive indices of various liquids including acetone and ethanol at room temperature. The sensitivity for measurement of refractive index change of ethanol is 1138 nm/RIU at the wavelength of 1550 nm. In addition, the sensor fabrication is simple including only cleaving, splicing, and etching. The signal is stable with high visibility. Therefore, it provides a valuable tool in biological and chemical applications. 展开更多
关键词 Fiber optic sensors Fabry-Perot miniature sensor photonic crystal fiber refractive indexmeasurement.
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A MICROFABRICATED METAL GRATING OSCILLATOR FOR ELECTRIC FIELD DETECTION
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作者 Deng Kai Xia Shanhong +2 位作者 Gong Chao Chen Shaofeng Bai Qiang 《Journal of Electronics(China)》 2005年第5期564-568,共5页
This letter proposes a novel design of a Micro Electro Mechanical System (MEMS) device featuring a metal grating vibratory mierostructure driven by electrostatic force to sense the spatial electric field. Due to the... This letter proposes a novel design of a Micro Electro Mechanical System (MEMS) device featuring a metal grating vibratory mierostructure driven by electrostatic force to sense the spatial electric field. Due to the advantages in slide-film damping and large vibration amplitude, such a device makes atmospheric packaging a low-cost option for practical manufacture. In this letter, we present the operating principles and specifications, the design structure, as well as the finite element simulation. Computational analysis shows that our design obtains good results in device parameters setting, while its simplicity and low-cost features make it an attractive solution for applications. 展开更多
关键词 miniature Electric Field sensor(MEFS) Anodic bonding Deep Reactive Ion Etching(DRIE)
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