This paper presents a new optical interferometric system, MMI-T/G, composed of a modified four-beam moire interferometer and a Twyman/Green interferometer. The MMI-T/G system can measure three-dimensional displacement...This paper presents a new optical interferometric system, MMI-T/G, composed of a modified four-beam moire interferometer and a Twyman/Green interferometer. The MMI-T/G system can measure three-dimensional displacement fringe patterns with a single loading on the specimen, and the in-plane and out-of-plane displacement fields can be measured independently and defined clearly. The optical setup has the advantages of structural novelty, flexibility, and high fringe contrast. Moreover, the in-plane displacement sensitivity is twice of that of the normal moire interferometer. The measuring techniques to obtain the fringe patterns and displacement fields using the MMI-T/G system are described. The experimental results of thermal displacement of an electronic device are shown.展开更多
To reduce the cost and achieve high diffraction efficiency, a modified moir@ technique for fabricating a large- aperture multi-level Fresnel membrane optic by a novel design of alignment marks is proposed. The modifie...To reduce the cost and achieve high diffraction efficiency, a modified moir@ technique for fabricating a large- aperture multi-level Fresnel membrane optic by a novel design of alignment marks is proposed. The modified moire fringes vary more sensitively with the actual misalignment. Hence, the alignment accuracy is significantly improved. Using the proposed method, a 20 μm thick, four-level Fresnel diffractive polyimide membrane optic with a 200 mm diameter is made, which exhibits over 62% diffraction efficiency into the ＋1 order, and an efficiency root mean square of 0.051.展开更多
基金The authors are grateful to the financial support by the Science and Technology Development Foundation, Education Commission of Beijing, P. R. China (No. 00KJ-094).
文摘This paper presents a new optical interferometric system, MMI-T/G, composed of a modified four-beam moire interferometer and a Twyman/Green interferometer. The MMI-T/G system can measure three-dimensional displacement fringe patterns with a single loading on the specimen, and the in-plane and out-of-plane displacement fields can be measured independently and defined clearly. The optical setup has the advantages of structural novelty, flexibility, and high fringe contrast. Moreover, the in-plane displacement sensitivity is twice of that of the normal moire interferometer. The measuring techniques to obtain the fringe patterns and displacement fields using the MMI-T/G system are described. The experimental results of thermal displacement of an electronic device are shown.
基金supported by the National Natural Science Foundation of China under Grant No.11375175
文摘To reduce the cost and achieve high diffraction efficiency, a modified moir@ technique for fabricating a large- aperture multi-level Fresnel membrane optic by a novel design of alignment marks is proposed. The modified moire fringes vary more sensitively with the actual misalignment. Hence, the alignment accuracy is significantly improved. Using the proposed method, a 20 μm thick, four-level Fresnel diffractive polyimide membrane optic with a 200 mm diameter is made, which exhibits over 62% diffraction efficiency into the ＋1 order, and an efficiency root mean square of 0.051.
