In this paper, a micro capacitive sensor with nanometer resolution is presented for ultra-precision measurement of micro components, which is fabricated by the MEMS （micro electromechanical systems） non-silicon tech...In this paper, a micro capacitive sensor with nanometer resolution is presented for ultra-precision measurement of micro components, which is fabricated by the MEMS （micro electromechanical systems） non-silicon technique. Based on the sensor, a micro capacitive tactile probe is constructed by stylus assembly and packaging design for dimension metrology on micro/nano scale, in which a data acquiring system is developed with AD7747. Some measurements of the micro capacitive tactile probe are performed on a nano positioning and measuring machine （NMM）. The measurement results show good linearity and hysteresis with a range of 11.6 μm and resolution of better than 5 nm. Hence, the micro capacitive tactile probe can be integrated on NMM to realize measurement of micro structures with nanometer accuracy.展开更多
This article presents the application and evaluation of a cantilever with integrated sensing and actuation as part of an atomic force microscope(AFM)with an adjustable probe direction,which is integrated into a nano m...This article presents the application and evaluation of a cantilever with integrated sensing and actuation as part of an atomic force microscope(AFM)with an adjustable probe direction,which is integrated into a nano measuring machine(NMM-1).The AFM,which is operated in closed-loop intermittent contact mode,is based on two rotational axes that enable the adjustment of the probe direction to cover a complete hemisphere.The axes greatly enlarge the metrology frame of the measuring system by materials with a comparatively high coefficient of thermal expansion,which ultimately limits the achievable measurement uncertainty of the measuring system.Thus,to reduce the thermal sensitivity of the system,the redesign of the rotational kinematics is mandatory.However,in this article,some preliminary investigations on the application of a self-sensing cantilever with an integrated micro heater for its stimulation will be presented.In previous investigations,a piezoelectric actuator has been applied to stimulate the cantilever.However,the removal of the piezoelectric actuator,which is enabled by the application of a cantilever with an integrated micro heater,promises an essential simplification of the sensor holder.Thus,in the future it might be possible to use materials with a low coefficient of thermal expansion,which are often difficult to machine and therefore only allow for rather simple geometries.Furthermore,because of the creepage of piezoelectric actuators,their removal from the metrology frame might lead to improved metrological characteristics.As will be shown,there are no significant differences between the two modes of actuation.Therefore,the redesigned rotational system will be based on the cantilever with integrated sensing and actuation.展开更多
基金supported by the Nano Special Projects of Shanghai Science and Technology Commission of China(Grant No.11nm0560800)the Young Scientists Fund of the National Natural Science Foundation of China(Grant No.11104284)
文摘In this paper, a micro capacitive sensor with nanometer resolution is presented for ultra-precision measurement of micro components, which is fabricated by the MEMS （micro electromechanical systems） non-silicon technique. Based on the sensor, a micro capacitive tactile probe is constructed by stylus assembly and packaging design for dimension metrology on micro/nano scale, in which a data acquiring system is developed with AD7747. Some measurements of the micro capacitive tactile probe are performed on a nano positioning and measuring machine （NMM）. The measurement results show good linearity and hysteresis with a range of 11.6 μm and resolution of better than 5 nm. Hence, the micro capacitive tactile probe can be integrated on NMM to realize measurement of micro structures with nanometer accuracy.
基金funded by the Deutsche Forschungsgemeinschaft(DFG,German Research Foundation)-TRR 285-Project-ID 418701707,subproject C05Open Access funding enabled and organized by Projekt DEAL.
文摘This article presents the application and evaluation of a cantilever with integrated sensing and actuation as part of an atomic force microscope(AFM)with an adjustable probe direction,which is integrated into a nano measuring machine(NMM-1).The AFM,which is operated in closed-loop intermittent contact mode,is based on two rotational axes that enable the adjustment of the probe direction to cover a complete hemisphere.The axes greatly enlarge the metrology frame of the measuring system by materials with a comparatively high coefficient of thermal expansion,which ultimately limits the achievable measurement uncertainty of the measuring system.Thus,to reduce the thermal sensitivity of the system,the redesign of the rotational kinematics is mandatory.However,in this article,some preliminary investigations on the application of a self-sensing cantilever with an integrated micro heater for its stimulation will be presented.In previous investigations,a piezoelectric actuator has been applied to stimulate the cantilever.However,the removal of the piezoelectric actuator,which is enabled by the application of a cantilever with an integrated micro heater,promises an essential simplification of the sensor holder.Thus,in the future it might be possible to use materials with a low coefficient of thermal expansion,which are often difficult to machine and therefore only allow for rather simple geometries.Furthermore,because of the creepage of piezoelectric actuators,their removal from the metrology frame might lead to improved metrological characteristics.As will be shown,there are no significant differences between the two modes of actuation.Therefore,the redesigned rotational system will be based on the cantilever with integrated sensing and actuation.
