Laser focused atomic deposition is a unique and effective way to fabricate highly accurate pitch standards in nanometrology.However,the stability and repeatability of the atom lithography fabrication process remains a...Laser focused atomic deposition is a unique and effective way to fabricate highly accurate pitch standards in nanometrology.However,the stability and repeatability of the atom lithography fabrication process remains a challenging problem for massive production.Based on the atom-light interaction theory,channeling is utilized to improve the stability and repeatability.From the comparison of three kinds of atom-light interaction models,the optimal parameters for channeling are obtained based on simulation.According to the experimental observations,the peak to valley height of Cr nano-gratings keeps stable when the cutting proportion changes from 15%to 50%,which means that the channeling shows up under this condition.The channeling proves to be an effective method to optimize the stability and repeatability of laser focused Cr atomic deposition.展开更多
基金Project supported by the National Key Research and Development Program of China(Grant No.2016YFA0200902)Science and Technology Commission of Shanghai Municipality,China(Grant No.17JC1400801)Young Scientists Fund of the National Natural Science Foundation of China(Grant No.51705369).
文摘Laser focused atomic deposition is a unique and effective way to fabricate highly accurate pitch standards in nanometrology.However,the stability and repeatability of the atom lithography fabrication process remains a challenging problem for massive production.Based on the atom-light interaction theory,channeling is utilized to improve the stability and repeatability.From the comparison of three kinds of atom-light interaction models,the optimal parameters for channeling are obtained based on simulation.According to the experimental observations,the peak to valley height of Cr nano-gratings keeps stable when the cutting proportion changes from 15%to 50%,which means that the channeling shows up under this condition.The channeling proves to be an effective method to optimize the stability and repeatability of laser focused Cr atomic deposition.
