MICRO/NANO-MACHINING ON SILICON SURFACE WITH A MODIFIED ATOMIC FORCE MICROSCOPE

To understand the deformation and removal mechanism of material on nano-scale at ultralow loads,a systemic study on AFM micro/nano-machining on single crystal ailicon is conducted. The results indicate that AFM nano- machining has a precisely dimensional controllability and a good surface quality on nanometer scale.A SEM is adopted to observe nano-machined region and chips,the results indicate that the material removal mechanisms change with the applied normal load. An XPS is used to analyze the changes of chemical composition inside and outside the nano-machined region respectively.The nano-indentation which is conducted with the same AFM diamond tip on the machined region shows a big discrepancy compared with that on the macro-scale. The calculated results show higher nano-hardness and elastic modulus than normal values .This phenomenon on be regarded as the indentation size effect(ISE).

Bibliometric analysis of micro-nano manufacturing technologies

Manufacturing is the primary industry promoting economic and social development.For the past 30 years,the global trends of preciseness and device miniaturisation have promoted manufacturing to the micro(μ)and nano(η)scale.Identification of themost promising micro-nano manufacturing technologies(MNMT)is of interest to industry,academia and private and national science investing foundations.Considering the exponential broadening of the research area and an enormous volume of literature,providing an overview of the state of the art is far beyond the scope of a technical review paper.This study performs bibliometric analysis of a stream of academic literature devoted toμ-andη-machining.Themain goals of the analysis are to assess the current core and trends in the field ofMNMT.Literature and citation statistics from 1988 were collected from theWeb of Science,Google Scholar,Scopus,Engineering Village,ScienceDirect and SpringerLink databases and were then analysed and illustrated with Microsoft Excel and VOSviewer software.The top keywords,articles,journals,authors,universities and countrieswere identified according to different parameters.The index of normalised influence was offered to evaluate the top element in each category.We observed that the most powerful keywords were present in well-known articles published in prominent journals by authoritative scientists at leading universities in the countries that are most actively engaged in MNMT.The implications of the research outcomes for investors and academicians are summarised in the conclusion.

Micro-Mechanical Behavior of HOPG in Nano-Indentation

The mechanical behavior of highly oriented pyrolyti c graphite (HOPG) has been investigated in this paper, by simulating a machining p rocess in a nano-indent test with the method of molecular dynamics (MD) and by doing an experiment directly using the probe tip of atomic force microscope (AFM ) as tool. The characteristics and properties of graphite crystal lattice are di scussed firstly, then, three potentials are selected for different interaction b etween graphite atoms according to the graphite properties, and molecular dynami c calculations of nano-indent test are carried out. After that, an experiments for nano-indentation of graphite crystal and its observation, directly by using an AFM tip as indent tool and consequential measurement, are introduced and don e. The topography of the hole indented by the tip, the profile, surface of the g raphite, as well the indented force and the strength of HOPG are measured and ca lculated. Results show the indentation experiment and the MD calculation consist ent with each other, that MD may be a good tool for comprehending the micro-mac hining behavior and the mechanism of materials.

Nanorobotic Agents Communication Using Bee-Inspired Swarm Intelligence

The main goal of this paper is to design nanorobotic agent communication mechanisms which would yield coordinated swarm behavior. Precisely we propose a bee-inspired swarm control algorithm that allows nanorobotic agents communication in order to converge at a specific target. In this paper, we present experiment to test convergence speed and quality in a simulated multi-agent deployment in an environment with a single target. This is done to measure whether the use of our algorithm or random guess improves efficiency in terms of convergence and quality. The results attained from the experiments indicated that the use of our algorithm enhance the coordinated movement of agents towards the target compared to random guess.