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The Transplant of Technology of Capacitive Displacement Transducer to Phase Modulation Grating-the Research of the Grating with nm Measuring Resolution
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作者 Zhang Zengyao, Wang Wei, Jin NingMetrology Technique Engineering College, China Institute of Metrology, Hang Zhou, P.R.China, Tel: 86-571-88075024 ext.8374, Fax: 86-571-88869281, E-mail: zzengyao@mail.hz.zj.cn Information Engineering College, China Institute of Metrology, Hang Zhou, Tel: 86- (0)-13957152611, Fax: 86-571-88075024 ext.8262, E-mail:wangwei0@mail.hz.zj.cn Information Engineering College, China Institute of Metrology, Hang Zhou, Tel: 86 0571 85931209, Fax: 86-571-88075024ext.8262, E-mail:Ning_ Jin@china.com 《光学学报》 EI CAS CSCD 北大核心 2003年第S1期835-836,共2页
The method rising measuring resolution through reducing pitch of the transducer has brought forward from the basic structure, principle and the corresponding relationship among pitches of capacitive electrodes, period... The method rising measuring resolution through reducing pitch of the transducer has brought forward from the basic structure, principle and the corresponding relationship among pitches of capacitive electrodes, period T and phase shift of vv(x,t). But if the traditional technique of PCB made of the transducer is still used, it will meet with difficulties in lead wire. And so the technology transplant from the transducer to grating is presented, the basic principle of the phase modulation grating similar... 展开更多
关键词 Technology transplant Capacitive displacement transducer Phase modulation grating nm resolution
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