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The total ionizing dose effects of non-planar triple-gate transistors
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作者 刘诗尧 贺威 +1 位作者 曹建民 黄思文 《Journal of Semiconductors》 EI CAS CSCD 2013年第9期49-52,共4页
This paper investigates the total ionizing dose response of different non-planar triple-gate transistor structures with different fin widths. By exposing the pseudo-MOS transistor to different amounts of radiation, di... This paper investigates the total ionizing dose response of different non-planar triple-gate transistor structures with different fin widths. By exposing the pseudo-MOS transistor to different amounts of radiation, different interface trap densities and trapped-oxide charges can be obtained. Using these parameters together with Altal 3D simulation software, the total dose radiation response of various non-planar triple-gate devices can be simulated. The behaviors of three kinds of non-planar devices are compared. 展开更多
关键词 SILICON-ON-INSULATOR total ionizing dose effects pseudo-MOS non-planar triple-gate transistors
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