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Influence of nonionic surfactant on the solubilization and biodegradation of phenanthrene 被引量:8
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作者 YANGJian-gang LIUXiang +3 位作者 LONGTao YUGang PENGShe ZHENGLiu 《Journal of Environmental Sciences》 SCIE EI CAS CSCD 2003年第6期859-862,共4页
Phenanthrene was solubilized in two different nonionic surfactants, Tween80 and Triton X-100. The bioavailability of phenanthrene to the bacteria isolated from the petroleum contaminated soils was studied based on the... Phenanthrene was solubilized in two different nonionic surfactants, Tween80 and Triton X-100. The bioavailability of phenanthrene to the bacteria isolated from the petroleum contaminated soils was studied based on the rotary flasks experiments. The results showed that the concentration of nonionic surfactants above the critical micelle concentration(CMC) can increase the solubility of phenanthrene in water and were innoxious to the phenanthrene-degrading bacteria; phenanthrene solubilized in the micelles of Tween80 was bioavailable and biodegradable. The research demonstrated the potential of surfactant-enhanced bioremediation of soils contaminated by hydrophobic organic compounds(HOCs). 展开更多
关键词 BIODEGRADATION SOLUBILIZATION PHENANTHRENE nonionic surfactant
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CALORIMETRIC STUDIES ON THE STRUCTURE OF MICROEMULSION WITH NONIONIC SURFACTANT
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作者 滕弘霓 《Journal of Wuhan University of Technology(Materials Science)》 SCIE EI CAS 1997年第Z1期14-18,共5页
Enthalpic studies on the state of water in hex-adecane/hexanol/ AEO8/water system have been conducted. The results show that water exists in three states such as bound water,trap water and free water. The enthalpic ef... Enthalpic studies on the state of water in hex-adecane/hexanol/ AEO8/water system have been conducted. The results show that water exists in three states such as bound water,trap water and free water. The enthalpic effect of condition that water to oil ratio is in the abnormal rheology region, the negative thixotropy of the system is directly proportional to the enthalpy. 展开更多
关键词 nonionic surfactant MICROEMULSION ENTHALPY
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Quantitative Structure-Property Relationship on Prediction of Surface Tension of Nonionic Surfactants
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作者 ZhengWuWANG XiaoYiZHANG 《Chinese Chemical Letters》 SCIE CAS CSCD 2002年第4期363-366,共4页
A quantitative structure-property relationship (QSPR) study has been made for the prediction of the surface tension of nonionic surfactants in aqueous solution. The regressed model includes a topological descriptor, ... A quantitative structure-property relationship (QSPR) study has been made for the prediction of the surface tension of nonionic surfactants in aqueous solution. The regressed model includes a topological descriptor, the Kier & Hall index of zero order (KH0) of the hydrophobic segment of surfactant and a quantum chemical one, the heat of formation (fHD) of surfactant molecules. The established general QSPR between the surface tension and the descriptors produces a correlation coefficient of multiple determination, 2r=0.9877, for 30 studied nonionic surfactants. 展开更多
关键词 Quantitative structure-property relationship surface tension nonionic surfactants.
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Studies on the Cloud Points of Nonionic Surfactants with QSPR
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作者 CHEN Mei-ling WANG Zheng-wu +3 位作者 ZHANG Ge-xin GU Jin CUN Zhe TAO Fu-ming 《Chemical Research in Chinese Universities》 SCIE CAS CSCD 2007年第6期715-719,共5页
With quantum chemical parameters, topological indexes, and physical chemistry parameters as descriptors, a quantitative structure-property relationship(QSPR) has been found for the cloud points of four series of non... With quantum chemical parameters, topological indexes, and physical chemistry parameters as descriptors, a quantitative structure-property relationship(QSPR) has been found for the cloud points of four series of nonionic surfactants( a total of 65 surfactants). The best-regressed model includes six descriptors, and the correlation coefficient of multiple determination is as high as 0. 962. 展开更多
关键词 nonionic surfactants Cloud point Quantitative structure-property relationship
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Formation of macroporous gel morphology by phase separation in the silica sol-gel system containing nonionic surfactant
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作者 Junsheng Wu Xiaogang Li Wei Du Hua Chen 《Journal of University of Science and Technology Beijing》 CSCD 2005年第6期564-571,共8页
The phase separation and gel formation behavior in an alkoxy-derived silica sol-gel system containing C16EO15 has been investigated. Various gel morphologies similar to other sol-gel systems containing organic additiv... The phase separation and gel formation behavior in an alkoxy-derived silica sol-gel system containing C16EO15 has been investigated. Various gel morphologies similar to other sol-gel systems containing organic additives were obtained by changing the preparation conditions. Micrometer-range interconnected porous gels were obtained by freezing transitional structures of phase separation in the sol-gel process. The dependence of the resulting gel morphology on several important reaction parameters such as the starting composition, reaction temperature and acid catalyst concentration was studied in detail. The experimental results indicate that the gel morphology is mainly determined by the time relation between the onset of phase separation and gel formation. 展开更多
关键词 silica sol-gel phase separation macroporous gel morphology nonionic surfactant
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Nonionic surfactant vesicular systems for effective drug delivery—an overview 被引量:9
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作者 Gannu P.Kumar Pogaku Rajeshwarrao 《Acta Pharmaceutica Sinica B》 SCIE CAS 2011年第4期208-219,共12页
Vesicular systems are a novel means of drug delivery that can enhance bioavailability of encapsulated drug and provide therapeutic activity in a controlled manner for a prolonged period of time.Liposomes were the firs... Vesicular systems are a novel means of drug delivery that can enhance bioavailability of encapsulated drug and provide therapeutic activity in a controlled manner for a prolonged period of time.Liposomes were the first such system but they suffer from a number of drawbacks including high cost and lack of stability at various pHs.Niosomes are a nonionic surfactant vesicular system,which can be easily and reliably made in the laboratory.Many factors affect noisome formation such as the method of manufacture,nature of surfactant and encapsulated drug,temperature at which the lipids are hydrated and the critical packing parameter.This review describes all aspects of niosomes including their different compositions,the various methods of preparation,the effect of changing manufacturing parameters,methods of characterization,factors that affect their stability,their use by various routes of administration,their therapeutic applications and the most important patents.The review also provides detailed information of the various types of niosomes that provide effective drug delivery. 展开更多
关键词 NIOSOMES nonionic surfactants Transferosomes Discomes Elastic niosomes PRONIOSOMES
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Catalytic Spectrophotometric Determination of Ultratrace Amounts of Silver with Solubilizing Effect of Nonionic Surfactant 被引量:2
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作者 郭效军 邓启良 +2 位作者 彭波 高锦章 康敬万 《Chinese Journal of Chemistry》 SCIE CAS CSCD 2002年第1期39-44,共6页
The synthesis and analytical properties of 4,4'-bis(antipyrinyl-4-diazoamino)biphenyl (BAPDAB) were described for the first time. A catalytic kinetic method for thedetermination of silver was proposed. In the pres... The synthesis and analytical properties of 4,4'-bis(antipyrinyl-4-diazoamino)biphenyl (BAPDAB) were described for the first time. A catalytic kinetic method for thedetermination of silver was proposed. In the presence of Triton X-100 as a solubilizing agent and2,2'-dipyridyl as an activator, silver has a very strong catalytic effect on oxidative decolorationof BAPDAB by persulfate in acetic acid medium. The reaction was followed spectrophotometrically bymeasuring the decrease of absorbance of BAPDAB at 478 nm and 50 ℃. The calibration graphs are ofgood linearity in the range of 8.0 * 10^(-10)-1.0 * 10^(-6) mol/L by a fixed time method. The limitof detection is down to 5.0 * 10^(-10) mol/L. The catalytic reaction is pseudo-first-order withrespect to silver, which in real samples was determined with satisfactory results. 展开更多
关键词 catalytic spectrophotometric determination SILVER nonionic surfactant
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Synergetic effect of chelating agent and nonionic surfactant for benzotriazole removal on post Cu-CMP cleaning 被引量:1
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作者 李彦磊 刘玉岭 +1 位作者 王辰伟 李月 《Journal of Semiconductors》 EI CAS CSCD 2016年第8期97-102,共6页
The cleaning of copper interconnects after chemical mechanical planarization (CMP) process is a crit- ical step in integrated circuits (ICs) fabrication. Benzotriazole (BTA), which is used as corrosion inhibitor... The cleaning of copper interconnects after chemical mechanical planarization (CMP) process is a crit- ical step in integrated circuits (ICs) fabrication. Benzotriazole (BTA), which is used as corrosion inhibitor in the copper CMP slurry, is the primary source for the formation of organic contaminants. The presence of BTA can degrade the electrical properties and reliability of ICs which needs to be removed by using an effective cleaning solution. In this paper, an alkaline cleaning solution was proposed. The alkaline cleaning solution studied in this work consists of a chelating agent and a nonionic surfactant. The removal of BTA was characterized by contact angle measurements and potentiodynamic polarization studies. The cleaning properties of the proposed cleaning solution on a 300 mm copper patterned wafer were also quantified, total defect counts after cleaning was studied, scanning electron microscopy (SEM) review was used to identify types of BTA to confirm the ability of cleaning solution for BTA removal. All the results reveal that the chelating agent can effectively remove the BTA residual, nonionic surfactant can further improve the performance. 展开更多
关键词 post Cu-CMP alkaline cleaning solution BTA removal chelating agent nonionic surfactant
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Experimental investigation of wettability alteration on residual oil saturation using nonionic surfactants: Capillary pressure measurement 被引量:3
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作者 Masoud Amirpour Seyed Reza Shadizadeh +1 位作者 Hamid Esfandyari Saeid Ahmadi 《Petroleum》 2015年第4期289-299,共11页
Introducing the novel technique for enhancing oil recovery from available petroleum reservoirs is one of the important issues in future energy demands.Among of all operative factors,wettability may be the foremost par... Introducing the novel technique for enhancing oil recovery from available petroleum reservoirs is one of the important issues in future energy demands.Among of all operative factors,wettability may be the foremost parameter affecting residual oil saturation in all stage of oil recovery.Although wettability alteration is one of the methods which enhance oil recovery from the petroleum reservoir.Recently,the studies which focused on this subject were more than the past and many contributions have been made on this area.The main objective of the current study is experimentally investigation of the two nonionic surfactants effects on altering wettability of reservoir rocks.Purpose of this work is to change the wettability to preferentially the water-wet condition.Also reducing the residual oil saturation(Sor)is the other purpose of this work.The wettability alteration of reservoir rock is measured by two main quantitative methods namely contact angle and the USBM methods.Results of this study showed that surfactant flooding is more effective in oil-wet rocks to change their wettability and consequently reducing Sor to a low value.Cedar(Zizyphus Spina Christi)is low priced,absolutely natural,and abundantly accessible in the Middle East and Central Asia.Based on the results,this material can be used as a chemical surfactant in field for enhancing oil recovery. 展开更多
关键词 Wettability alteration Residual oil saturation nonionic surfactant USBM method Contact angle
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Effect of H_2O_2 and nonionic surfactant in alkaline copper slurry 被引量:2
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作者 袁浩博 刘玉岭 +3 位作者 蒋勐婷 陈国栋 刘伟娟 王胜利 《Journal of Semiconductors》 EI CAS CSCD 2015年第1期163-167,共5页
For improving the polishing performance, in this article, the roles of a nonionic surfactant(Fatty alcohol polyoxyethylene ether) and H2O2 were investigated in the chemical mechanical planarization process, respecti... For improving the polishing performance, in this article, the roles of a nonionic surfactant(Fatty alcohol polyoxyethylene ether) and H2O2 were investigated in the chemical mechanical planarization process, respectively.Firstly, the effects of the nonionic surfactant on the within-wafer non-uniformity(WIWNU) and the surface roughness were mainly analyzed. In addition, the passivation ability of the slurry, which had no addition of BTA, was also discussed from the viewpoint of the static etch rate, electrochemical curve and residual step height under different concentrations of H2O2. The experimental results distinctly revealed that the nonionic surfactant introduced in the slurry improved the WIWNU and surface roughness, and that a 2 vol% was considered as an appropriate concentration relatively. When the concentration of H2O2 surpasses 3 vol%, the slurry will possess a relatively preferable passivation ability, which can effectively decrease the step height and contribute to acquiring a flat and smooth surface. Hence, based on the result of these experiments, the influences of the nonionic surfactant and H2O2 are further understood, which means the properties of slurry can be improved. 展开更多
关键词 copper CMP nonionic surfactant within wafer non-uniformity surface roughness electrochemical curve step height
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Interaction of Fluorocarbon Containing Hydrophobically Modified Polyelectrolyte with Nonionic Surfactants
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作者 郭金峰 庄东青 +1 位作者 周晖 章云祥 《Chinese Journal of Chemistry》 SCIE CAS CSCD 2002年第5期509-513,共5页
The interaction of fluorocarbon containing hydrophobically modified polyelectrolyte (FMPAANa) with two kinds of nonionic surfactants (hydrogenated and fluorinated) in a semidilute (0.5 wt%) aqueous solution had been s... The interaction of fluorocarbon containing hydrophobically modified polyelectrolyte (FMPAANa) with two kinds of nonionic surfactants (hydrogenated and fluorinated) in a semidilute (0.5 wt%) aqueous solution had been studied by rheological measurements. Association behavior was found in both systems. The hydrophobic interaction of FMPAANa with fluorinated surfactant (FC171) is much stronger than that with hydrogenated surfactant (NP7.5) at low surfactant concentrations. The interaction is strengthened by surfactants being added for the density of active junctions increased. Whereas distinct phenomena for FC171 and NP7.5 start to be found as the surfactants added over their respective certain concentration. The interaction of polyelectrolyte with fluorinated surfactant increases dramatical ly while that with hydrogenated surfactant decreases. 展开更多
关键词 fluorocarbon modified polyelectrolyte nonionic surfactant FLUORINATED RHEOLOGY
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Prediction on Critical Micelle Concentration of Nonionic Surfactants in Aqueous Solution:Quantitative Structure-Property Relationship Approach
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作者 王正武 黄东阳 +1 位作者 宫素萍 李干佐 《Chinese Journal of Chemistry》 SCIE CAS CSCD 2003年第12期1573-1579,共7页
In order to predict the critical micelle concentration (cmc) of nonionic surfactants in aqueous solution,a quantitative structure-property relationship (QSPR) was found for 77 nonionic surfactants belonging to eight s... In order to predict the critical micelle concentration (cmc) of nonionic surfactants in aqueous solution,a quantitative structure-property relationship (QSPR) was found for 77 nonionic surfactants belonging to eight series. The best-regressed model contained four quantum-chemical descriptors,the heat of formation (ΔH),the molecular dipole moment (D),the energy of the lowest unoccupied molecular orbital (E_ LUMO ) and the energy of the highest occupied molecular orbital (E_ HOMO ) of the surfactant molecule; two constitutional descriptors,the molecular weight of surfactant (M) and the number of oxygen and nitrogen atoms (n_ ON ) of the hydrophilic fragment of surfactant molecule; and one topological descriptor,the Kier & Hall index of zero order (KH0) of the hydrophobic fragment of the surfactant. The established general QSPR between lg(cmc) and the descriptors produced a relevant coefficient of multiple determination:R 2=0.986. When cross terms were considered,the corresponding best model contained five descriptors E_ LUMO ,D,KH0,M and a cross term n_ ON ·KH0,which also produced the same coefficient as the seven-parameter model. 展开更多
关键词 quantitative structure-property relationship critical micelle concentration nonionic surfactant
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Sorption of Triton X-100 on soil organic matter fractions:Kinetics and isotherms 被引量:6
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作者 ZHANG Guangzhi HU Hao +1 位作者 SUN Weiling NI Jinren 《Journal of Environmental Sciences》 SCIE EI CAS CSCD 2009年第6期795-800,共6页
Kinetics and isotherms of Triton X-100 sorption on soil,base-extracted soil(BE),humic acid(HA) and humin(HM) were investigated respectively to get better understanding on characteristics of the surfactant sorpti... Kinetics and isotherms of Triton X-100 sorption on soil,base-extracted soil(BE),humic acid(HA) and humin(HM) were investigated respectively to get better understanding on characteristics of the surfactant sorption onto different soil organic matters(SOMs).It was demonstrated that the kinetics results could be satisfactorily described by the pseudo-second order model.The half of the time to reach equilibrium(t1/2) for different sorbents followed the sequence of soil 〉 HA 〉 BE 〉 HM.Furthermore,the calculated equilibrium sorption capacity(Ceq) was found in the sequence of HA 〉 BE 〉 HM 〉 soil,which agreed well with the experimental results.The isotherms of Triton X-100 sorption on soil and HA could be well described by the S-type isotherm,but BE and HM by the L-type.The isotherms of all the four sorbents were found reasonably fitted to the Langmuir equation.The Kd value,defined as the ratio of Triton X-100 in sorbent and in the equilibrium solution for given concentrations,generally followed the order of HM 〉 HA 〉 soil 〉 BE.Separated HM and HA showed high affnity for Triton X-100,but the HA and HM in soil and BE were tightly bounded by the minerals.Thus,the HA on the soil surface might dominate the sorption,whereas the bounded HM would play a key role upon the surfactants being penetrated inside the soil. 展开更多
关键词 Triton X-100 SORPTION soil organic matters nonionic surfactant KINETICS isotherms
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Low-cost preparation of mesoporous silica with high pore volume 被引量:4
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作者 Shuling Shen Wei Wu +1 位作者 Kai Guo Jianfeng Chen 《Journal of University of Science and Technology Beijing》 CSCD 2007年第4期369-372,共4页
Mesoporous silica materials with high pore volume were successfully prepared by the chemical precipitation method, with water glass and a biodegradable nonionic surfactant polyethylene glycol (PEG). The obtained mat... Mesoporous silica materials with high pore volume were successfully prepared by the chemical precipitation method, with water glass and a biodegradable nonionic surfactant polyethylene glycol (PEG). The obtained materials were characterized by transmission electron microscopy (TEM), scanning electron microscopy (SEM), thermo gravimetric analyzer and differential scanning calorimetry (TG-DSC), nitrogen adsorption-desorption measurements, and X-ray diffraction (XRD). The results showed that the changes of the pore parameters depended on both the surfactant content and heat treatment temperature. When the content of PEG was 10wt% and the obtained PEG/SiO2 composite was heated at 600℃, the mesoporous silica with a pore volume of 2.2 cma/g, a BET specific surface area of 361.55 m^2/g, and a diameter of 2-4 μm could be obtained. The obtained mesoporous silica materials have potential applications in the fields of paint and plastic, as thickening, reinforcing, and flatting agents. 展开更多
关键词 mesoporous silica chemical precipitation high pore volume water glass nonionic surfactant
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The Effect of Adjuvants on Penetration of beta-cypermethrin Through the Epidermis of Cabbage Leaf 被引量:3
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作者 WANG Yi, ZHANG Li-ta, ZHENG Fei-neng, CHEN Fu-liang and LIANG Wen-ping( Institute of Plant Protection , Chinese Academy of Agricultural Sciences , Beijing 100094 Center for Molecular Science , Institute of Chemistry , The Chinese Academy of Sciences , Beijing 100101 ) 《Agricultural Sciences in China》 CAS CSCD 2002年第3期313-318,共6页
The effects of three types of adjuvant (mineral oil, higher aliphatic acid and nonionic surfactant) on the penetration of beta-cypermethrin through the cabbage leaf surface were studied. The results showed that the pe... The effects of three types of adjuvant (mineral oil, higher aliphatic acid and nonionic surfactant) on the penetration of beta-cypermethrin through the cabbage leaf surface were studied. The results showed that the penetration was positively correlated with both the concentration of adjuvant and the time after application, in a given range of treatment. A synergistic effect of two types of adjuvant on the penetration was found. Some physical properties of emulsions were determined. The change of the structures of the cabbage leaf surface by these adjuvants was observed from photomicrographs. The mechanism concerned with the effect of these adjuvants on the penetration of beta- cypermethrin through the cabbage leaf surface was tentatively discussed. 展开更多
关键词 ADJUVANT nonionic surfactant PENETRATION BETA-CYPERMETHRIN Synergistic effect
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Preparation and Characterization of In_2O_3 Nanorods
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作者 Qingyi Pan Xiangbing Dong Zhixuan Cheng Xiaowen Dong 《稀有金属材料与工程》 SCIE EI CAS CSCD 北大核心 2006年第A03期572-574,共3页
In_2O_3 nanorods were prepared by sol-gel technique with nonionic surfactant controlling their morphology,and were characterized by TEM,TG-DSC and XRD.The results indicated that In_2O_3 nanorods had the length of abou... In_2O_3 nanorods were prepared by sol-gel technique with nonionic surfactant controlling their morphology,and were characterized by TEM,TG-DSC and XRD.The results indicated that In_2O_3 nanorods had the length of about 120 nm and diameter of 20 nm.The In_2O(OH)_4 dried gelatin was formed by partial dehydrating of In(OH)_3 molecules.The factors influencing the morphology of In_2O_3 nanorods and their growth mechanism were discussed.The geometry array parameter P of the nonionic surfactant was between 1/3~1/2 through calculation,which confirmed that the shape of the micelle was claviform. 展开更多
关键词 NANORODS IN2O3 SOL-GEL nonionic surfactant
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The effect of nanosilica sizes in the presence of nonionic TX100 surfactant on CO_(2)foam flooding
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作者 Suriatie Mat Yusuf Radzuan Junin +5 位作者 Mohd Akhmal Muhamad Sidek Muhammad AManan Mohd Fazril Irfan Ahmad Fuad Mohd Zaidi Jaafar Effah Yahya Nor Roslina Rosli 《Petroleum Research》 2022年第1期62-76,共15页
The aim of this research is to study the effect of hydrophilic silica nanoparticles,sizes as CO_(2) foam stabilizer in the presence of nonionic TX100 surfactant.Two nanosilica sizes,15 and 70 nm,have been examined tho... The aim of this research is to study the effect of hydrophilic silica nanoparticles,sizes as CO_(2) foam stabilizer in the presence of nonionic TX100 surfactant.Two nanosilica sizes,15 and 70 nm,have been examined thoroughly.Physisorption of TX100 on silica nanoparticles(nanosilica)was characterized by adsorption isotherm and surface tension measurement,while CO_(2) foams stability was quantified based on their foamability,foam stability,particle partitioning in the foams,and bubble sizes.Results show that direct contact of TX100 with nanosilica does altered the wettability of hydrophilic nanosilica surface,enable them to lengthen CO_(2) foams life at certain surfactant and nanoparticles concentrations.For 15 nm nanosilica,CO_(2) foam stability shows excellent performance at 0.1 and 0.5 wt%TX100 concentrations.As for 70 nm nanosilica,CO_(2) foam demonstrates longer lifetime at much lower TX100 concentration,0.01 wt%.Without the presence of TX100,CO_(2) foams exhibit undesirable lifetime performances for both nanosilica sizes.Nanosilica partitioning in CO_(2) foams structures demonstrate consistent relation with contact angle measurement.Estimated bubble sizes shows insignificant effect on CO_(2) foams life.With the assists of nanosilica and TX100,enhanced oil recovery via CO_(2) foam injection succeeds in increasing oil production by 13e22%of original oil-in-place(OOIP). 展开更多
关键词 Nanoparticle sizes Adsorption nonionic surfactant TX100 surfactant FOAMABILITY CO_(2)foam stability CO_(2)foam flooding EOR
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The ex vivo and in vivo biological performances of graphene oxide and the impact of surfactant on graphene oxide's biocompatibility 被引量:7
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作者 Guangbo Qu Xiaoyan Wang +7 位作者 Qian Liu Rui Liu Nuoya Yin Juan Ma Liqun Chen Jiuyang He Sijin Liu Guibin Jiang 《Journal of Environmental Sciences》 SCIE EI CAS CSCD 2013年第5期873-881,共9页
Graphene oxide(GO)displays promising properties for biomedical applications including drug delivery and cancer therapeutics.However,GO exposure also raises safety concerns such as potential side effects on health.He... Graphene oxide(GO)displays promising properties for biomedical applications including drug delivery and cancer therapeutics.However,GO exposure also raises safety concerns such as potential side effects on health.Here,the biological effects of GO suspended in phosphate buffered saline(PBS)with or without 1% nonionic surfactant Tween 80 were investigated.Based on the ex vivo experiments,Tween 80 significantly affected the interaction between GO and peripheral blood from mice.GO suspension in PBS tended to provoke the aggregation of diluted blood cells,which could be prevented by the addition of Tween 80.After intravenous administration,GO suspension with or without 1% Tween 80 was quickly eliminated by the mononuclear phagocyte system.Nevertheless,GO suspension without Tween 80 showed greater accumulation in lungs than that containing 1% Tween 80.In contrast,less GO was found in livers for GO suspension compared to Tween 80 assisted GO suspension.Organs including hearts,livers,lungs,spleens,kidneys,brains,and testes did not reveal histological alterations.The indexes of peripheral blood showed no change upon GO exposure.Our results together demonstrated that Tween 80 could greatly alter GO's biological performance and determine the pattern of its biodistribution in mice. 展开更多
关键词 graphene oxide biological performance nonionic surfactant Tween 80 intravenous injection
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Mechanism analysis of the affect the copper line surface roughness after FA/O alkaline barrier CMP 被引量:3
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作者 高娇娇 刘玉岭 +1 位作者 王辰伟 崔晋 《Journal of Semiconductors》 EI CAS CSCD 2014年第12期150-154,共5页
The surface roughness seriously affects the performance of devices after barrier CMP. Due to the high surface roughness of copper line, the local resistance of a device will be high when working, then the copper line ... The surface roughness seriously affects the performance of devices after barrier CMP. Due to the high surface roughness of copper line, the local resistance of a device will be high when working, then the copper line will overheat prompting the generation of electro-migration and the circuit will lose efficacy. Reducing the surface roughness of the copper line in barrier CMP is still an important research topic. The main factors influencing the surface roughness of copper line in alkaline barrier slurry are analyzed in the paper. Aimed at influencing the law on the surface roughness of copper line, using a new type of alkaline barrier slurry with a different p H of the chelating agent and changing the content of non-ionic surfactant, we then analyze the influencing law both on the surface roughness of copper line, and the influence mechanism. The experimental results show that with a chelating agent with a low p H value in the barrier slurry, the surface roughness of the copper line is 1.03 nm and it is the lowest in all of the barrier slurries, and with the increase of non-ionic surfactant concentration, the surface roughness of copper line is reduced to 0.43 nm, meeting the demand of further development of integrated circuits. 展开更多
关键词 barrier CMP new alkaline barrier slurry FA/OIV chelating agent nonionic surfactant copper line surface roughness
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