A novel surface-type nonvolatile electric memory elements based on organic semiconductors CuPc and H2Pc are fabricated by vacuum deposition of the CuPc and H2Pc films on preliminary deposited metallic (Ag and Cu) el...A novel surface-type nonvolatile electric memory elements based on organic semiconductors CuPc and H2Pc are fabricated by vacuum deposition of the CuPc and H2Pc films on preliminary deposited metallic (Ag and Cu) electrodes. The gap between Ag and Cu electrodes is 3040μm. For the current-voltage (I-V) characteristics the memory effect, switching effect, and negative differential resistance regions are observed. The switching mechanism is attributed to the electric-field-induced charge transfer. As a result the device switches from a low to a high-conductivity state and then back to a low conductivity state if the opposite polarity voltage is applied. The ratio of resistance at the high resistance state to that at the low resistance state is equal to 120-150. Under the switching condition, the electric current increases -- 80-100 times. A comparison between the forward and reverse I-V characteristics shows the presence of rectifying behavior.展开更多
Pd-Al2O3-Si capacitors with Ru nanocrystals are fabricated and electrically characterized for nonvolatile memory application. While keeping the entire insulator Al2O3 thickness fixed, the memory window has a strong de...Pd-Al2O3-Si capacitors with Ru nanocrystals are fabricated and electrically characterized for nonvolatile memory application. While keeping the entire insulator Al2O3 thickness fixed, the memory window has a strong dependence on the tunneling layer thickness under low operating voltages, whereas it has weak dependence under high operating voltages. As for the optimal configuration comprised of 6-nm tunneling layer and 22-nm blocking layer, the resulting memory window increases from 1.5 V to 5.3 V with bias pulse increasing from 10-5 s to 10-2 s under ±7 V. A ten-year memory window as large as 5.2 V is extrapolated at room temperature after ±8 V/1 ms programming/erasing pulses.展开更多
A method of fabricating Cu nanocrystals embedded in SiO2 dielectric film for nonvolatile memory applications by magnetron sputtering is introduced in this paper. The average size and distribution density of Cu nanocry...A method of fabricating Cu nanocrystals embedded in SiO2 dielectric film for nonvolatile memory applications by magnetron sputtering is introduced in this paper. The average size and distribution density of Cu nanocrystal grains are controlled by adjusting experimental parameters. The relationship between nanocrystal floating gate micro-structure and its charge storage capability is also discussed theoretically.展开更多
The N2-plasma treatment on a HfO2 blocking layer of Au nanocrystal nonvolatile memory without any post annealing is investigated. The electrical characteristics of the MOS capacitor with structure of Al–Ta N/HfO2/Si ...The N2-plasma treatment on a HfO2 blocking layer of Au nanocrystal nonvolatile memory without any post annealing is investigated. The electrical characteristics of the MOS capacitor with structure of Al–Ta N/HfO2/Si O2/p-Si are also characterized. After N2-plasma treatment, the nitrogen atoms are incorporated into HfO2 film and may passivate the oxygen vacancy states. The surface roughness of HfO2 film can also be reduced. Those improvements of HfO2 film lead to a smaller hysteresis and lower leakage current density of the MOS capacitor. The N2-plasma is introduced into Au nanocrystal(NC) nonvolatile memory to treat the HfO2 blocking layer. For the N2-plasma treated device, it shows a better retention characteristic and is twice as large in the memory window than that for the no N2-plasma treated device. It can be concluded that the N2-plasma treatment method can be applied to future nonvolatile memory applications.展开更多
Amorphous In–Ga–Zn–O(a-IGZO)thin-film transistor(TFT)memories with novel p-SnO/n-SnO_(2) heterojunction charge trapping stacks(CTSs)are investigated comparatively under a maximum fabrication temperature of 280℃.Co...Amorphous In–Ga–Zn–O(a-IGZO)thin-film transistor(TFT)memories with novel p-SnO/n-SnO_(2) heterojunction charge trapping stacks(CTSs)are investigated comparatively under a maximum fabrication temperature of 280℃.Compared to a single p-SnO or n-SnO_(2) charge trapping layer(CTL),the heterojunction CTSs can achieve electrically programmable and erasable characteristics as well as good data retention.Of the two CTSs,the tunneling layer/p-SnO/nSnO_(2)/blocking layer architecture demonstrates much higher program efficiency,more robust data retention,and comparably superior erase characteristics.The resulting memory window is as large as 6.66 V after programming at 13 V/1 ms and erasing at-8 V/1 ms,and the ten-year memory window is extrapolated to be 4.41 V.This is attributed to shallow traps in p-SnO and deep traps in n-SnO_(2),and the formation of a built-in electric field in the heterojunction.展开更多
Based on the charge storage mode,it is important to investigate the scaling dependence of memory performance in silicon nanocrystal(Si-NC) nonvolatile memory(NVM) devices for its scaling down limit.In this work,we...Based on the charge storage mode,it is important to investigate the scaling dependence of memory performance in silicon nanocrystal(Si-NC) nonvolatile memory(NVM) devices for its scaling down limit.In this work,we made eight kinds of test key cells with different gate widths and lengths by 0.13-μm node complementary metal oxide semiconductor(CMOS) technology.It is found that the memory windows of eight kinds of test key cells are almost the same of about1.64 V @ ±7 V/1 ms,which are independent of the gate area,but mainly determined by the average size(12 nm) and areal density(1.8×10^(11)/cm^2) of Si-NCs.The program/erase(P/E) speed characteristics are almost independent of gate widths and lengths.However,the erase speed is faster than the program speed of test key cells,which is due to the different charging behaviors between electrons and holes during the operation processes.Furthermore,the data retention characteristic is also independent of the gate area.Our findings are useful for further scaling down of Si-NC NVM devices to improve the performance and on-chip integration.展开更多
A novel high-κ~ A1203/HfO2/AI203 nanolaminate charge trapping memory capacitor structure based on SiGe substrates with low interface densities is successfully fabricated and investigated. The memory capacitor exhibit...A novel high-κ~ A1203/HfO2/AI203 nanolaminate charge trapping memory capacitor structure based on SiGe substrates with low interface densities is successfully fabricated and investigated. The memory capacitor exhibits excellent program-erasable characteristics. A large memory window of ~4 V, a small leakage current density of ~2 ×10-6 Acre-2 at a gate voltage of 7V, a high charge trapping density of 1.42 × 1013 cm-2 at a working vo]tage of 4-10 V and good retention characteristics are observed. Furthermore, the programming (△ VFB = 2.8 V at 10 V for 10μs) and erasing speeds (△VFB =-1.7 V at -10 V for 10μs) of the fabricated capacitor based on SiGe substrates are significantly improved as compared with counterparts reported earlier. It is concluded that the high-κ Al2O3/HfO2/Al2O3 nanolaminate charge trapping capacitor structure based on SiGe substrates is a promising candidate for future nano-scaled nonvolatile flash memory applications.展开更多
Wearable devices become popular because they can help people observe health condition.The battery life is the critical problem for wearable devices. The non-volatile memory(NVM) attracts attention in recent years beca...Wearable devices become popular because they can help people observe health condition.The battery life is the critical problem for wearable devices. The non-volatile memory(NVM) attracts attention in recent years because of its fast reading and writing speed, high density, persistence, and especially low idle power. With its low idle power consumption,NVM can be applied in wearable devices to prolong the battery lifetime such as smart bracelet. However, NVM has higher write power consumption than dynamic random access memory(DRAM). In this paper, we assume to use hybrid random access memory(RAM)and NVM architecture for the smart bracelet system.This paper presents a data management algorithm named bracelet power-aware data management(BPADM) based on the architecture. The BPADM can estimate the power consumption according to the memory access, such as sampling rate of data, and then determine the data should be stored in NVM or DRAM in order to satisfy low power. The experimental results show BPADM can reduce power consumption effectively for bracelet in normal and sleeping modes.展开更多
Memristor is a newly found fourth circuit element for the next generation emerging nonvolatile memory technology. In this paper, design of new type of nonvolatile static random access memory cell is proposed by using ...Memristor is a newly found fourth circuit element for the next generation emerging nonvolatile memory technology. In this paper, design of new type of nonvolatile static random access memory cell is proposed by using a combination of memristor and complemented metal oxide semiconductor. Biolek memristor model and CMOS 180 nm technology are used to form a single cell. By introducing distinct binary logic to avoid safety margin is left for each binary logic output and enables better read/write data integrity. The total power consumption reduces from 0.407 mw (milli-watt) to 0.127 mw which is less than existing memristor based memory cell of the same CMOS technology. Read and write time is also significantly reduced. However, write time is higher than conventional 6T SRAM cell and can be reduced by increasing motion of electron in the memristor. The change of the memristor state is shown by applying piecewise linear input voltage.展开更多
随着大数据应用的涌现,计算机系统需要更大容量的内存以满足大数据处理的高时效性需求.新型非易失性存储器(non-volatile memory,NVM)结合传统动态随机存储器(dynamic random access memory,DRAM)组成的混合内存系统具有内存容量大、功...随着大数据应用的涌现,计算机系统需要更大容量的内存以满足大数据处理的高时效性需求.新型非易失性存储器(non-volatile memory,NVM)结合传统动态随机存储器(dynamic random access memory,DRAM)组成的混合内存系统具有内存容量大、功耗低的优势,因而得到了广泛关注.大数据应用同时也面临着旁路转换缓冲器(translation lookaside buffer,TLB)缺失率过高的性能瓶颈.大页可以有效降低TLB缺失率,然而,在混合内存中支持大页面临着大页迁移开销过大的问题.因此,设计了一种支持大页和大容量缓存的层次化混合内存系统:DRAM和NVM分别使用4KB和2MB粒度的页面分别进行管理,同时在DRAM和NVM之间实现直接映射.设计了基于访存频率的DRAM缓存数据过滤机制,减轻了带宽压力.提出了基于内存实时信息的动态热度阈值调整策略,灵活适应应用访存特征的变化.实验显示:与使用大页的全NVM内存系统和缓存热页(caching hot page,CHOP)系统相比平均有69.9%和15.2%的性能提升,而与使用大页的全DRAM内存系统相比平均只有8.8%的性能差距.展开更多
新型非易失性存储器(non-volatile memory,NVM)技术日渐成熟,延迟越来越低,带宽越来越高,未来将不仅有可能取代以动态随机存储器(dynamic random access memory,DRAM)为代表的易失型存储设备在主存中的垄断地位,还有可能取代传统Flash...新型非易失性存储器(non-volatile memory,NVM)技术日渐成熟,延迟越来越低,带宽越来越高,未来将不仅有可能取代以动态随机存储器(dynamic random access memory,DRAM)为代表的易失型存储设备在主存中的垄断地位,还有可能取代传统Flash和机械硬盘作为外存服务未来的计算机系统.如何综合各类新型存储的特性,设计高能效的存储架构,实现可应对大数据、云计算所需求的新型主存系统已经成为工业界和学术界的研究热点.提出基于高性能SOC FPGA阵列的NVM验证架构,互联多级FPGA,利用多层次FPGA结构扩展链接多片NVM.依据所提出的验证架构,设计了基于多层次FPGA的主从式NVM控制器,并完成适用于该架构的硬件原型设计.该架构不仅可以实现测试同类型多片NVM协同工作,也可以进行混合NVM存储管理方案验证.展开更多
Si-doped Ge2Sb2Te5 films have been prepared by dc magnetron co-sputtering with Ge2Sb2Te5 and Si targets. The addition of Si in the Ge2Sb2Te5 film results in the increase of both crystallization temperature and phasetr...Si-doped Ge2Sb2Te5 films have been prepared by dc magnetron co-sputtering with Ge2Sb2Te5 and Si targets. The addition of Si in the Ge2Sb2Te5 film results in the increase of both crystallization temperature and phasetransition temperature from face-centred-cubic (fcc) phase to hexagonal (hex) phase. The resistivity of the Ge2Sb2Te5 film shows a significant increase with the Si doping. When doping 11.8 at.% of Si in the film, the resistivity after 460℃ annealing increases from 1 to 11 mΩ.cm and dynamic resistance increase from 64 to 99Ω compared to the undoped Ge2Sb2Te5 film. This is very helpful to writing current reduction of phase-change random access memory.展开更多
Phase change memory (PCM) cell array is fabricated by a standard complementary metal-oxide-semiconductor process and the subsequent special fabrication technique. A chalcogenide Ge2Sb2Te5 film in thickness 50hm depo...Phase change memory (PCM) cell array is fabricated by a standard complementary metal-oxide-semiconductor process and the subsequent special fabrication technique. A chalcogenide Ge2Sb2Te5 film in thickness 50hm deposited by rf magnetron sputtering is used as storage medium for the PCM cell. Large snap-back effect is observed in current-voltage characteristics, indicating the phase transition from an amorphous state (higher resistance state) to the crystalline state (lower resistance state). The resistance of amorphous state is two orders of magnitude larger than that of the crystalline state from the resistance measurement, and the threshold current needed for phase transition of our fabricated PCM cell array is very low (only several μA). An x-ray total dose radiation test is carried out on the PCM cell array and the results show that this kind of PCM cell has excellent total dose radiation tolerance with total dose up to 2 ×10^6 rad(Si), which makes it attractive for space-based applications.展开更多
Designed ZrxSi1-xO2 films with combining bent and flat energy bands are employed as a charge trapping layer for memory capacitors.Compared to a single bent energy band,the bandgap structure with combining bent and fla...Designed ZrxSi1-xO2 films with combining bent and flat energy bands are employed as a charge trapping layer for memory capacitors.Compared to a single bent energy band,the bandgap structure with combining bent and flat energy bands exhibits larger memory window,faster program/erase speed,lower charge loss even at 200℃ for 104s,and wider temperature insensitive regions.The tunneling thickness together with electron recaptured efficiency in the trapping layer,and the balance of two competing electron loss mechanisms in the bent and flat energy band regions collectively contribute to the improved memory characteristics.Therefore,the proposed ZrxSi1-xO2 with combining bent and flat energy bands should be a promising candidate for future nonvolatile memory applications,taking into consideration of the trade-off between the operation speed and retention characteristics.展开更多
基金supported by the GIK Institute of Engineering Science and Technology,Pakistan and Physical Technical Institute of Academy of Sciences of Tajikistan
文摘A novel surface-type nonvolatile electric memory elements based on organic semiconductors CuPc and H2Pc are fabricated by vacuum deposition of the CuPc and H2Pc films on preliminary deposited metallic (Ag and Cu) electrodes. The gap between Ag and Cu electrodes is 3040μm. For the current-voltage (I-V) characteristics the memory effect, switching effect, and negative differential resistance regions are observed. The switching mechanism is attributed to the electric-field-induced charge transfer. As a result the device switches from a low to a high-conductivity state and then back to a low conductivity state if the opposite polarity voltage is applied. The ratio of resistance at the high resistance state to that at the low resistance state is equal to 120-150. Under the switching condition, the electric current increases -- 80-100 times. A comparison between the forward and reverse I-V characteristics shows the presence of rectifying behavior.
基金Project supported by the National Key Technology Research and Development Program of China(Grant No.2009ZX02302-002)the National Natural Science Foundation of China(Grant No.61274088)the Program for New Century Excellent Talents in University of Ministry of Education of China(Grant No.NCET-08-0127)
文摘Pd-Al2O3-Si capacitors with Ru nanocrystals are fabricated and electrically characterized for nonvolatile memory application. While keeping the entire insulator Al2O3 thickness fixed, the memory window has a strong dependence on the tunneling layer thickness under low operating voltages, whereas it has weak dependence under high operating voltages. As for the optimal configuration comprised of 6-nm tunneling layer and 22-nm blocking layer, the resulting memory window increases from 1.5 V to 5.3 V with bias pulse increasing from 10-5 s to 10-2 s under ±7 V. A ten-year memory window as large as 5.2 V is extrapolated at room temperature after ±8 V/1 ms programming/erasing pulses.
文摘A method of fabricating Cu nanocrystals embedded in SiO2 dielectric film for nonvolatile memory applications by magnetron sputtering is introduced in this paper. The average size and distribution density of Cu nanocrystal grains are controlled by adjusting experimental parameters. The relationship between nanocrystal floating gate micro-structure and its charge storage capability is also discussed theoretically.
基金supported by the High Level Talent Project of Xiamen University of Technology,China(Grant Nos.YKJ16012R and YKJ16016R)the National Natural Science Foundation of China(Grant No.51702271)
文摘The N2-plasma treatment on a HfO2 blocking layer of Au nanocrystal nonvolatile memory without any post annealing is investigated. The electrical characteristics of the MOS capacitor with structure of Al–Ta N/HfO2/Si O2/p-Si are also characterized. After N2-plasma treatment, the nitrogen atoms are incorporated into HfO2 film and may passivate the oxygen vacancy states. The surface roughness of HfO2 film can also be reduced. Those improvements of HfO2 film lead to a smaller hysteresis and lower leakage current density of the MOS capacitor. The N2-plasma is introduced into Au nanocrystal(NC) nonvolatile memory to treat the HfO2 blocking layer. For the N2-plasma treated device, it shows a better retention characteristic and is twice as large in the memory window than that for the no N2-plasma treated device. It can be concluded that the N2-plasma treatment method can be applied to future nonvolatile memory applications.
基金Project supported by the National Natural Science Foundation of China (Grant No.61874029)。
文摘Amorphous In–Ga–Zn–O(a-IGZO)thin-film transistor(TFT)memories with novel p-SnO/n-SnO_(2) heterojunction charge trapping stacks(CTSs)are investigated comparatively under a maximum fabrication temperature of 280℃.Compared to a single p-SnO or n-SnO_(2) charge trapping layer(CTL),the heterojunction CTSs can achieve electrically programmable and erasable characteristics as well as good data retention.Of the two CTSs,the tunneling layer/p-SnO/nSnO_(2)/blocking layer architecture demonstrates much higher program efficiency,more robust data retention,and comparably superior erase characteristics.The resulting memory window is as large as 6.66 V after programming at 13 V/1 ms and erasing at-8 V/1 ms,and the ten-year memory window is extrapolated to be 4.41 V.This is attributed to shallow traps in p-SnO and deep traps in n-SnO_(2),and the formation of a built-in electric field in the heterojunction.
基金Project supported by the State Key Development Program for Basic Research of China(Grant No.2010CB934402)the National Natural Science Foundation of China(Grant Nos.11374153,61571221,and 61071008)
文摘Based on the charge storage mode,it is important to investigate the scaling dependence of memory performance in silicon nanocrystal(Si-NC) nonvolatile memory(NVM) devices for its scaling down limit.In this work,we made eight kinds of test key cells with different gate widths and lengths by 0.13-μm node complementary metal oxide semiconductor(CMOS) technology.It is found that the memory windows of eight kinds of test key cells are almost the same of about1.64 V @ ±7 V/1 ms,which are independent of the gate area,but mainly determined by the average size(12 nm) and areal density(1.8×10^(11)/cm^2) of Si-NCs.The program/erase(P/E) speed characteristics are almost independent of gate widths and lengths.However,the erase speed is faster than the program speed of test key cells,which is due to the different charging behaviors between electrons and holes during the operation processes.Furthermore,the data retention characteristic is also independent of the gate area.Our findings are useful for further scaling down of Si-NC NVM devices to improve the performance and on-chip integration.
基金Supported by the National Science and Technology Major Project of China under Grant No 2013ZX02303007the National Key Research and Development Program of China under Grant No 2016YFA0301701the Youth Innovation Promotion Association of the Chinese Academy of Sciences under Grant No 2016112
文摘A novel high-κ~ A1203/HfO2/AI203 nanolaminate charge trapping memory capacitor structure based on SiGe substrates with low interface densities is successfully fabricated and investigated. The memory capacitor exhibits excellent program-erasable characteristics. A large memory window of ~4 V, a small leakage current density of ~2 ×10-6 Acre-2 at a gate voltage of 7V, a high charge trapping density of 1.42 × 1013 cm-2 at a working vo]tage of 4-10 V and good retention characteristics are observed. Furthermore, the programming (△ VFB = 2.8 V at 10 V for 10μs) and erasing speeds (△VFB =-1.7 V at -10 V for 10μs) of the fabricated capacitor based on SiGe substrates are significantly improved as compared with counterparts reported earlier. It is concluded that the high-κ Al2O3/HfO2/Al2O3 nanolaminate charge trapping capacitor structure based on SiGe substrates is a promising candidate for future nano-scaled nonvolatile flash memory applications.
基金supported by the Research Fund of National Key Laboratory of Computer Architecture under Grant No.CARCH201501the Open Project Program of the State Key Laboratory of Mathematical Engineering and Advanced Computing under Grant No.2016A09
文摘Wearable devices become popular because they can help people observe health condition.The battery life is the critical problem for wearable devices. The non-volatile memory(NVM) attracts attention in recent years because of its fast reading and writing speed, high density, persistence, and especially low idle power. With its low idle power consumption,NVM can be applied in wearable devices to prolong the battery lifetime such as smart bracelet. However, NVM has higher write power consumption than dynamic random access memory(DRAM). In this paper, we assume to use hybrid random access memory(RAM)and NVM architecture for the smart bracelet system.This paper presents a data management algorithm named bracelet power-aware data management(BPADM) based on the architecture. The BPADM can estimate the power consumption according to the memory access, such as sampling rate of data, and then determine the data should be stored in NVM or DRAM in order to satisfy low power. The experimental results show BPADM can reduce power consumption effectively for bracelet in normal and sleeping modes.
文摘Memristor is a newly found fourth circuit element for the next generation emerging nonvolatile memory technology. In this paper, design of new type of nonvolatile static random access memory cell is proposed by using a combination of memristor and complemented metal oxide semiconductor. Biolek memristor model and CMOS 180 nm technology are used to form a single cell. By introducing distinct binary logic to avoid safety margin is left for each binary logic output and enables better read/write data integrity. The total power consumption reduces from 0.407 mw (milli-watt) to 0.127 mw which is less than existing memristor based memory cell of the same CMOS technology. Read and write time is also significantly reduced. However, write time is higher than conventional 6T SRAM cell and can be reduced by increasing motion of electron in the memristor. The change of the memristor state is shown by applying piecewise linear input voltage.
文摘随着大数据应用的涌现,计算机系统需要更大容量的内存以满足大数据处理的高时效性需求.新型非易失性存储器(non-volatile memory,NVM)结合传统动态随机存储器(dynamic random access memory,DRAM)组成的混合内存系统具有内存容量大、功耗低的优势,因而得到了广泛关注.大数据应用同时也面临着旁路转换缓冲器(translation lookaside buffer,TLB)缺失率过高的性能瓶颈.大页可以有效降低TLB缺失率,然而,在混合内存中支持大页面临着大页迁移开销过大的问题.因此,设计了一种支持大页和大容量缓存的层次化混合内存系统:DRAM和NVM分别使用4KB和2MB粒度的页面分别进行管理,同时在DRAM和NVM之间实现直接映射.设计了基于访存频率的DRAM缓存数据过滤机制,减轻了带宽压力.提出了基于内存实时信息的动态热度阈值调整策略,灵活适应应用访存特征的变化.实验显示:与使用大页的全NVM内存系统和缓存热页(caching hot page,CHOP)系统相比平均有69.9%和15.2%的性能提升,而与使用大页的全DRAM内存系统相比平均只有8.8%的性能差距.
文摘Si-doped Ge2Sb2Te5 films have been prepared by dc magnetron co-sputtering with Ge2Sb2Te5 and Si targets. The addition of Si in the Ge2Sb2Te5 film results in the increase of both crystallization temperature and phasetransition temperature from face-centred-cubic (fcc) phase to hexagonal (hex) phase. The resistivity of the Ge2Sb2Te5 film shows a significant increase with the Si doping. When doping 11.8 at.% of Si in the film, the resistivity after 460℃ annealing increases from 1 to 11 mΩ.cm and dynamic resistance increase from 64 to 99Ω compared to the undoped Ge2Sb2Te5 film. This is very helpful to writing current reduction of phase-change random access memory.
基金Supported by the Chinese Academy of Sciences (Y2005027), the Science and Technology Council of Shanghai (AM0517, 0452nm012, 04DZ05612, 04ZR14154, 04JC14080, 05JC14076, AM0414, 05nm05043), the China Postdoctoral Science Foundation, and the K. C. Wong Education Foundation (Hong Kong).
文摘Phase change memory (PCM) cell array is fabricated by a standard complementary metal-oxide-semiconductor process and the subsequent special fabrication technique. A chalcogenide Ge2Sb2Te5 film in thickness 50hm deposited by rf magnetron sputtering is used as storage medium for the PCM cell. Large snap-back effect is observed in current-voltage characteristics, indicating the phase transition from an amorphous state (higher resistance state) to the crystalline state (lower resistance state). The resistance of amorphous state is two orders of magnitude larger than that of the crystalline state from the resistance measurement, and the threshold current needed for phase transition of our fabricated PCM cell array is very low (only several μA). An x-ray total dose radiation test is carried out on the PCM cell array and the results show that this kind of PCM cell has excellent total dose radiation tolerance with total dose up to 2 ×10^6 rad(Si), which makes it attractive for space-based applications.
基金Project supported by the National Natural Science Foundation of China(Grant No.51402004)the Science and Technology Research Key Project of Education Department of Henan Province of China(Grant No.19A140001)。
文摘Designed ZrxSi1-xO2 films with combining bent and flat energy bands are employed as a charge trapping layer for memory capacitors.Compared to a single bent energy band,the bandgap structure with combining bent and flat energy bands exhibits larger memory window,faster program/erase speed,lower charge loss even at 200℃ for 104s,and wider temperature insensitive regions.The tunneling thickness together with electron recaptured efficiency in the trapping layer,and the balance of two competing electron loss mechanisms in the bent and flat energy band regions collectively contribute to the improved memory characteristics.Therefore,the proposed ZrxSi1-xO2 with combining bent and flat energy bands should be a promising candidate for future nonvolatile memory applications,taking into consideration of the trade-off between the operation speed and retention characteristics.