Cantilevers in microelectromechanical systems have the advantages of non-labeling,real-time detection,positioning,and specificity.Rectangular solid,rectangular hollow,and triangular microcantilevers were fabricated on...Cantilevers in microelectromechanical systems have the advantages of non-labeling,real-time detection,positioning,and specificity.Rectangular solid,rectangular hollow,and triangular microcantilevers were fabricated on an optical fiber tip via two-photon polymerization.The mechanical properties were characterized using finite element simulations.Coating the microcantilever with a palladium film enabled high sensitivity and rapid hydrogen detection.The shape of the cantilever determines the sensitivity,whereas the thickness of the palladium film determines the response time.Additional microelectromechanical systems can be realized via polymerization combined with optical fibers.展开更多
基金the National Natural Science Foundation of China(NSFC)(62122057,62075136)the Natural Science Foundation of Guangdong Province(2018B030306003,2020A0505100066)the Science and Technology Innovation Commission of Shenzhen(JCYJ20200109114001806,RCYX20200714114524139,JCYJ20180507184503128).
文摘Cantilevers in microelectromechanical systems have the advantages of non-labeling,real-time detection,positioning,and specificity.Rectangular solid,rectangular hollow,and triangular microcantilevers were fabricated on an optical fiber tip via two-photon polymerization.The mechanical properties were characterized using finite element simulations.Coating the microcantilever with a palladium film enabled high sensitivity and rapid hydrogen detection.The shape of the cantilever determines the sensitivity,whereas the thickness of the palladium film determines the response time.Additional microelectromechanical systems can be realized via polymerization combined with optical fibers.
