Bubble plumes are important during the process of air-sea exchange,and optical-fiber phase detection is a suitable way to observe bubble plumes entrained by breaking waves.This paper designs a new optical-fiber probe(...Bubble plumes are important during the process of air-sea exchange,and optical-fiber phase detection is a suitable way to observe bubble plumes entrained by breaking waves.This paper designs a new optical-fiber probe(OFP)made of sapphire to overcome the limitations of existing materials(e.g.,high brittleness,poor corrosion resistance,and narrow bandwidth)and thereby enhance the detection performance of the OFP by improving its structure.Based on total internal reflection and light refraction,a simulation model of the probe is established in the Zemax optical design software to optimize the probe tip and matching mode of the two probe tips.The results show that the optimum OFP tip is a conical sapphire one with a cone angle of 35°.Tests are then conducted on a bespoke OFP sensor,the results of which are consistent with those predicted theoretically.The simulation results lay the foundation for the integrated design of OFP sensors and the optimization of their internal optics.The findings could also be applied to OFPs with multiple tips.展开更多
A temperature measurement device can produce data deviations and can even be damaged in a high-dose radiation environment.To reduce the radiation damage to such a device and improve the temperature measurement accurac...A temperature measurement device can produce data deviations and can even be damaged in a high-dose radiation environment.To reduce the radiation damage to such a device and improve the temperature measurement accuracy in a radiation environment,a temperature sensor based on optical-fiber sensing technology is proposed.This sensor has a cascade structure composed of a single-mode fiber(SMF),a dispersion-compensation fiber(DCF),a nocore fiber(NCF),and another SMF(SDNS).The DCF and NCF are coated with a polydimethylsiloxane(PDMS)film,which is a heat-sensitive material with high thermal optical and thermal expansion coefficients.In experiments,PDMS was found to produce an irradiation crosslinking effect after irradiation,which improved the temperature sensitivity of the SDNS sensor.The experimental results showed that within a range of 30–100℃,the maximum temperature sensitivity after irradiation was 62.86 pm/℃,and the maximum transmission sensitivity after irradiation was 3.353×10^(-2)dB/℃,which were 1.22 times and 2.267 times the values before irradiation,respectively.In addition,repeated temperature experiments verified that the SDNS sensor coated with the PDMS film had excellent temperature repeatability.Furthermore,it was found that with an increase in the irradiation intensity,the irradiation crosslinking degree of PDMS increased,and the temperature sensitivity of the sensor was improved.The proposed sensor could potentially be applied to temperature measurement in a nuclear-radiation environment.展开更多
On the basis of oxidative decoloration of bromopyrogallol red (BPR) with H2O2, catalyzed by horseradish peroxidase( HRP), and the sequential injection renewable surface technique( SI-RST), a highly sensitive opt...On the basis of oxidative decoloration of bromopyrogallol red (BPR) with H2O2, catalyzed by horseradish peroxidase( HRP), and the sequential injection renewable surface technique( SI-RST), a highly sensitive optical-fiber sensor spectrophotometric method for the enzymatic determination of hydrogen peroxide was proposed. By coupling with a glucose oxidase(GOD)-catalyzed reaction, the method was used to determine glucose in human serum. The considerations in system and flow cell design, and factors that influence the determination performance are discussed. With 100μL of sample loaded and 0. 6 mg of bead trapped, the linear response range from 5.0 × 10^-8 to 5.2 × 10^-6 mol/L BPR with a detection limit(3σ) of 2. 5 ×10 ^-8 mol/L BPR, and a precision of 1.1% RSD( n = 11 ) and a throughput of a 80 samples per hour can be achieved. Under the conditions of a 8. 7 × 10^ -6 mol/L BPR substrate, 0. 04 unit/mL HRP, 600 s reaction time and a reaction temperature of 37℃, the linear response range for H2O2 was from 5.0 × 10^-8 to 7.0 × 10^-6 mol/L with a detection limit(3σ) of 1.0 × 10^-8 mol/L and a precision of 3.7% RSD ( n = 11 ). The linear response range by coupling with a GOD-catalyzed reaction was from 1.0 × 10^-7 to 1.0 × 10^-5 mol/L. The method was directly applied to determine glucose in human serum. Glucose contents obtained by the proposed procedure were compared with those obtained by using the phenol-4-AAP method, the error was found to be less than 3%.展开更多
High sensitivity of a distributed optical-fiber vibration sensing (DOVS) system based on the phase-sensitivity optical time domain reflectometry (Ф-OTDR) technology also brings in high nuisance alarm rates (NARs...High sensitivity of a distributed optical-fiber vibration sensing (DOVS) system based on the phase-sensitivity optical time domain reflectometry (Ф-OTDR) technology also brings in high nuisance alarm rates (NARs) in real applications. In this paper, feature extraction methods of wavelet decomposition (WD) and wavelet packet decomposition (WPD) are comparatively studied for three typical field testing signals, and an artificial neural network (ANN) is built for the event identification. The comparison results prove that the WPD performs a little better than the WD for the DOVS signal analysis and identification in oil pipeline safety monitoring. The identification rate can be improved up to 94.4%, and the nuisance alarm rate can be effectively controlled as low as 5.6% for the identification network with the wavelet packet energy distribution features.展开更多
The generation of a flat supercontinuum of over 80nm in the 1550nm region by injecting 1.6ps 10 GHz repetition rate optical pulses into an 80-m-long dispersion-flattened microstructure fibre is demonstrated. The fibre...The generation of a flat supercontinuum of over 80nm in the 1550nm region by injecting 1.6ps 10 GHz repetition rate optical pulses into an 80-m-long dispersion-flattened microstructure fibre is demonstrated. The fibre has small normal dispersion with a variation smaller than 1.5 (ps·nm^-1·km^-1) between 1500 and 1650nm. The generated supercontinuum ranging from 1513 to 1591 nm has the flatness of ±1.5 dB and it is not so flat in the range of several nanometres around the pump wavelength 1552nm. Numerical simulation is also used to study the effect of optical loss, fibre parameters and pumping conditions on supercontinuum generation in the dispersion-flattened microstructure fibre, and can be used for further optimization to generate flat broad spectra.展开更多
An index-guiding photonic crystal fibre with a small hole in the core is fabricated. The simulated results show that the first higher order mode possesses two zero-dispersion wavelengths, and the phase-matching is pos...An index-guiding photonic crystal fibre with a small hole in the core is fabricated. The simulated results show that the first higher order mode possesses two zero-dispersion wavelengths, and the phase-matching is possible in the anomalous dispersion regime between the two zero-dispersion wavelengths. Using 200 fs Ti: sapphire laser of 820, 830 and 840nm, the anti-Stokes line around 530nm can be generated efficiently. The maximum ratio of the anti-Stokes signal energy to the pump component in the output spectrum is estimated to be 1.03 and the conversion efficiency is above 50%.展开更多
Fibre Bragg gratings (FBGs) are inscribed in homemade microstructured fibres by the standard phase mask method. Enhanced couplings between the forward fundamental mode and backward cladding modes are obtained. The m...Fibre Bragg gratings (FBGs) are inscribed in homemade microstructured fibres by the standard phase mask method. Enhanced couplings between the forward fundamental mode and backward cladding modes are obtained. The mode coupling and spectral characteristics are investigated experimentally. The cladding mode resonances can be affected by filling active materials into the air holes, which will be useful for the implementation of tunable photonic devices in optical fibre communication and sensing systems.展开更多
Employing the technique of symmetry reduction of analytic method, we solve the Ginzburg-Landau equation with varying nonlinear, dispersion, gain coefficients, and gain dispersion which originates from the limiting eff...Employing the technique of symmetry reduction of analytic method, we solve the Ginzburg-Landau equation with varying nonlinear, dispersion, gain coefficients, and gain dispersion which originates from the limiting effect of transition bandwidth in the realistic doped fibres. The parabolic asymptotic self-similar analytical solutions in gain medium of the normal GVD is found for the first time to our best knowledge. The evolution of pulse amplitude, strict linear phase chirp and effective temporal width are given with self-similarity results in longitudinal nonlinearity distribution and longitudinal gain fibre. These analytical solutions are in good agreement with the numerical simulations. Furthermore, we theoretically prove that pulse evolution has the characteristics of parabolic asymptotic self-similarity in doped ions dipole gain fibres.展开更多
A simplified scheme of bend-induced mode distortion is introduced into bent holey fibres, the distorted mode distribution and mode effective area reduction are investigated using the finite difference method. Numerica...A simplified scheme of bend-induced mode distortion is introduced into bent holey fibres, the distorted mode distribution and mode effective area reduction are investigated using the finite difference method. Numerical results show that the modes of bent holey fibres with small bend radius shift away from the core and are deformed greatly, and the mode areas drop significantly as the bend radius decreases, which severely affects the fibre laser performance. The propagation characteristics of bent holey fibres at given wavelength are determined by fill factor and normalized bend radius. Finally, the transition normalized bend radius that represents the location of the mode area beginning to fall off is obtained.展开更多
A new approach is introduced to enhance supercontinuum (SC) spectrum in a dispersion-flattened/decreasing fibre with a convex dispersion profile. A flat SC spectrum nearly extending from 1200hm to 2100hm can be gene...A new approach is introduced to enhance supercontinuum (SC) spectrum in a dispersion-flattened/decreasing fibre with a convex dispersion profile. A flat SC spectrum nearly extending from 1200hm to 2100hm can be generated based on this scheme. It is found that group-velocity dispersions (GVD) and self-phase modulation (SPM) effects are the primary factors for pump Raman scattering (SRS) effect plays an essential self-steepening effect can be ignored. pulse compression and SC spectrum generation, stimulated role on the final SC-spectrum bandwidth and flatness, but展开更多
A fully vectorial effective index method is developed for accurate dispersion calculation of photonic crystal fibres (PCFs). In order to improve the accuracy of the model, different values for the effective core rad...A fully vectorial effective index method is developed for accurate dispersion calculation of photonic crystal fibres (PCFs). In order to improve the accuracy of the model, different values for the effective core radius are used when PCFs have different fibre parameters. The accuracy of our approach is demonstrated by comparing our results with other numerical and experimental results reported in literature. It is found that the accuracy of the fully vectorial effective index method is improved and our results agree well with accurate numerical results obtained by other methods as well as the previously reported experimental data.展开更多
We present an improved approach to determine the zero-dispersion wavelength by measurement of the four-wave mixing (FWM) effect employing the two-tunable-laser scanning method. The FWM behaviour of combined fibres w...We present an improved approach to determine the zero-dispersion wavelength by measurement of the four-wave mixing (FWM) effect employing the two-tunable-laser scanning method. The FWM behaviour of combined fibres with two different zero-dispersion wavelengths is investigated theoretically and experimentally. The results are compared with those by regular zero-dispersion wavelength test instrument using phase shift technique. The theoretical and experimental results confirm the feasibility of determination of zero-dispersion wavelength by FWM.展开更多
Polarization mode dispersion is modelled as decoherence of polarization under the disturbance of environment and the coupling with frequency. This model is described by the quantum master equation and the Langevin equ...Polarization mode dispersion is modelled as decoherence of polarization under the disturbance of environment and the coupling with frequency. This model is described by the quantum master equation and the Langevin equation. It can be predicted that the optical beam is depolarized exponentially in a fibre and the differential group delay (DGD) is proportional to the square root of the propagation distance. The distribution of the DGD can also be calculated.展开更多
In this study,we experimentally demonstrate a miniature fiber thermometer based on tip-integrated ZnO-nanowire-nanograting.The sensor has a diameter less than 1μm and the length of the Bragg grating is sub-10μm.The ...In this study,we experimentally demonstrate a miniature fiber thermometer based on tip-integrated ZnO-nanowire-nanograting.The sensor has a diameter less than 1μm and the length of the Bragg grating is sub-10μm.The ZnO-nanowire-nanograting is sensitive to the environmental temperature change.Thus,the intensity of the light whose wavelength is in the rising or falling region of the nanograting spectrum will vary with the shift in wavelength due to change in temperature.Taking one wavelength(655 nm)in the rise linear region of the nanograting spectrum,a sensitivity of 0.066nW/℃in the air is achieved experimentally.The proposed temperature sensor has the superiorities of compactness,stableness,and easy fabrication compared to regular fiber grating sensors,offering great potential for detecting inside minimal volume environments.展开更多
This paper presents an all-SiC fiber-optic Fabry-Perot(FP)pressure sensor based on the hydrophilic direct bonding technology for the applications in the harsh environment.The operating principle,fabrication,interface ...This paper presents an all-SiC fiber-optic Fabry-Perot(FP)pressure sensor based on the hydrophilic direct bonding technology for the applications in the harsh environment.The operating principle,fabrication,interface characteristics,and pressure response test of the proposed all-SiC pressure sensor are discussed.The FP cavity is formed by hermetically direct bonding of two-layer SiC wafers,including a thinned SiC diaphragm and a SiC wafer with an etched cavity.White light interference is used for the detection and demodulation of the sensor pressure signals.Experimental results demonstrate the sensing capabilities for the pressure range up to 800 kPa.The all-SiC structure without any intermediate layer can avoid the sensor failure caused by the thermal expansion coefficient mismatch and therefore has a great potential for pressure measurement in high temperature environments.展开更多
文摘Bubble plumes are important during the process of air-sea exchange,and optical-fiber phase detection is a suitable way to observe bubble plumes entrained by breaking waves.This paper designs a new optical-fiber probe(OFP)made of sapphire to overcome the limitations of existing materials(e.g.,high brittleness,poor corrosion resistance,and narrow bandwidth)and thereby enhance the detection performance of the OFP by improving its structure.Based on total internal reflection and light refraction,a simulation model of the probe is established in the Zemax optical design software to optimize the probe tip and matching mode of the two probe tips.The results show that the optimum OFP tip is a conical sapphire one with a cone angle of 35°.Tests are then conducted on a bespoke OFP sensor,the results of which are consistent with those predicted theoretically.The simulation results lay the foundation for the integrated design of OFP sensors and the optimization of their internal optics.The findings could also be applied to OFPs with multiple tips.
基金the National Natural Science Foundation of China(Nos.62075057 and 11975091)the Program for Innovative Research Team(in Science and Technology)in University of Henan Province(No.21IRTSTHN011).
文摘A temperature measurement device can produce data deviations and can even be damaged in a high-dose radiation environment.To reduce the radiation damage to such a device and improve the temperature measurement accuracy in a radiation environment,a temperature sensor based on optical-fiber sensing technology is proposed.This sensor has a cascade structure composed of a single-mode fiber(SMF),a dispersion-compensation fiber(DCF),a nocore fiber(NCF),and another SMF(SDNS).The DCF and NCF are coated with a polydimethylsiloxane(PDMS)film,which is a heat-sensitive material with high thermal optical and thermal expansion coefficients.In experiments,PDMS was found to produce an irradiation crosslinking effect after irradiation,which improved the temperature sensitivity of the SDNS sensor.The experimental results showed that within a range of 30–100℃,the maximum temperature sensitivity after irradiation was 62.86 pm/℃,and the maximum transmission sensitivity after irradiation was 3.353×10^(-2)dB/℃,which were 1.22 times and 2.267 times the values before irradiation,respectively.In addition,repeated temperature experiments verified that the SDNS sensor coated with the PDMS film had excellent temperature repeatability.Furthermore,it was found that with an increase in the irradiation intensity,the irradiation crosslinking degree of PDMS increased,and the temperature sensitivity of the sensor was improved.The proposed sensor could potentially be applied to temperature measurement in a nuclear-radiation environment.
文摘On the basis of oxidative decoloration of bromopyrogallol red (BPR) with H2O2, catalyzed by horseradish peroxidase( HRP), and the sequential injection renewable surface technique( SI-RST), a highly sensitive optical-fiber sensor spectrophotometric method for the enzymatic determination of hydrogen peroxide was proposed. By coupling with a glucose oxidase(GOD)-catalyzed reaction, the method was used to determine glucose in human serum. The considerations in system and flow cell design, and factors that influence the determination performance are discussed. With 100μL of sample loaded and 0. 6 mg of bead trapped, the linear response range from 5.0 × 10^-8 to 5.2 × 10^-6 mol/L BPR with a detection limit(3σ) of 2. 5 ×10 ^-8 mol/L BPR, and a precision of 1.1% RSD( n = 11 ) and a throughput of a 80 samples per hour can be achieved. Under the conditions of a 8. 7 × 10^ -6 mol/L BPR substrate, 0. 04 unit/mL HRP, 600 s reaction time and a reaction temperature of 37℃, the linear response range for H2O2 was from 5.0 × 10^-8 to 7.0 × 10^-6 mol/L with a detection limit(3σ) of 1.0 × 10^-8 mol/L and a precision of 3.7% RSD ( n = 11 ). The linear response range by coupling with a GOD-catalyzed reaction was from 1.0 × 10^-7 to 1.0 × 10^-5 mol/L. The method was directly applied to determine glucose in human serum. Glucose contents obtained by the proposed procedure were compared with those obtained by using the phenol-4-AAP method, the error was found to be less than 3%.
基金The authors gratefully acknowledge the supports provided for this research by Youth Foundation (Grant No. 61301275), Major Instrument Special Program (Grant No. 41527805), the Major Program (Grant No. 61290312) of the National Science Foundation of China (NSFC), and the fund of State Grid Corporation of China: Research on distributed multi-parameter sensing and measurement control technology for electric power optical fiber communication networks (Grant No. 5455HT160014). This work is also supported by Program for Changjiang Scholars and Innovative Research Team in University (PCSIRT, IRT1218) and the 111 Project (B14039).
文摘High sensitivity of a distributed optical-fiber vibration sensing (DOVS) system based on the phase-sensitivity optical time domain reflectometry (Ф-OTDR) technology also brings in high nuisance alarm rates (NARs) in real applications. In this paper, feature extraction methods of wavelet decomposition (WD) and wavelet packet decomposition (WPD) are comparatively studied for three typical field testing signals, and an artificial neural network (ANN) is built for the event identification. The comparison results prove that the WPD performs a little better than the WD for the DOVS signal analysis and identification in oil pipeline safety monitoring. The identification rate can be improved up to 94.4%, and the nuisance alarm rate can be effectively controlled as low as 5.6% for the identification network with the wavelet packet energy distribution features.
文摘The generation of a flat supercontinuum of over 80nm in the 1550nm region by injecting 1.6ps 10 GHz repetition rate optical pulses into an 80-m-long dispersion-flattened microstructure fibre is demonstrated. The fibre has small normal dispersion with a variation smaller than 1.5 (ps·nm^-1·km^-1) between 1500 and 1650nm. The generated supercontinuum ranging from 1513 to 1591 nm has the flatness of ±1.5 dB and it is not so flat in the range of several nanometres around the pump wavelength 1552nm. Numerical simulation is also used to study the effect of optical loss, fibre parameters and pumping conditions on supercontinuum generation in the dispersion-flattened microstructure fibre, and can be used for further optimization to generate flat broad spectra.
基金Supported by the National Key Basic Research Programme of China under Grant No 2003CB314905, and the National Natural Science Foundation of China under Grant No 60637010.
文摘An index-guiding photonic crystal fibre with a small hole in the core is fabricated. The simulated results show that the first higher order mode possesses two zero-dispersion wavelengths, and the phase-matching is possible in the anomalous dispersion regime between the two zero-dispersion wavelengths. Using 200 fs Ti: sapphire laser of 820, 830 and 840nm, the anti-Stokes line around 530nm can be generated efficiently. The maximum ratio of the anti-Stokes signal energy to the pump component in the output spectrum is estimated to be 1.03 and the conversion efficiency is above 50%.
基金Supported by the National Key Basic Research Programme of China under Grant Nos 2003CB314906 and 2003CB314905, the National High-Technology Programme of China under Grant No 2006AA01Z217, the Tianjin Natural Science Foundation under Grant No 06YFJZJC00300, and the 0pen Research Fund of Key Laboratory of 0pto-Electronic Information Science and Technology (Ministry of Education) in Nankai University
文摘Fibre Bragg gratings (FBGs) are inscribed in homemade microstructured fibres by the standard phase mask method. Enhanced couplings between the forward fundamental mode and backward cladding modes are obtained. The mode coupling and spectral characteristics are investigated experimentally. The cladding mode resonances can be affected by filling active materials into the air holes, which will be useful for the implementation of tunable photonic devices in optical fibre communication and sensing systems.
基金Supported by the Natural Science Foundation of Guangdong Province under Grant No 04010397.
文摘Employing the technique of symmetry reduction of analytic method, we solve the Ginzburg-Landau equation with varying nonlinear, dispersion, gain coefficients, and gain dispersion which originates from the limiting effect of transition bandwidth in the realistic doped fibres. The parabolic asymptotic self-similar analytical solutions in gain medium of the normal GVD is found for the first time to our best knowledge. The evolution of pulse amplitude, strict linear phase chirp and effective temporal width are given with self-similarity results in longitudinal nonlinearity distribution and longitudinal gain fibre. These analytical solutions are in good agreement with the numerical simulations. Furthermore, we theoretically prove that pulse evolution has the characteristics of parabolic asymptotic self-similarity in doped ions dipole gain fibres.
基金Supported by the National Science Foundation of China under Grant Nos 60637010 and 60671036, and the Optoelectronic Unite Science Research Center of Tianjin under Grant No 013184011.
文摘A simplified scheme of bend-induced mode distortion is introduced into bent holey fibres, the distorted mode distribution and mode effective area reduction are investigated using the finite difference method. Numerical results show that the modes of bent holey fibres with small bend radius shift away from the core and are deformed greatly, and the mode areas drop significantly as the bend radius decreases, which severely affects the fibre laser performance. The propagation characteristics of bent holey fibres at given wavelength are determined by fill factor and normalized bend radius. Finally, the transition normalized bend radius that represents the location of the mode area beginning to fall off is obtained.
基金Supported by the Natural Science Foundation of Education Department of Guangdong Province under Grant No 0159, and the Natural Science Foundation of Guangdong Polytechnic Normal University under Grant No 109212.
文摘A new approach is introduced to enhance supercontinuum (SC) spectrum in a dispersion-flattened/decreasing fibre with a convex dispersion profile. A flat SC spectrum nearly extending from 1200hm to 2100hm can be generated based on this scheme. It is found that group-velocity dispersions (GVD) and self-phase modulation (SPM) effects are the primary factors for pump Raman scattering (SRS) effect plays an essential self-steepening effect can be ignored. pulse compression and SC spectrum generation, stimulated role on the final SC-spectrum bandwidth and flatness, but
文摘A fully vectorial effective index method is developed for accurate dispersion calculation of photonic crystal fibres (PCFs). In order to improve the accuracy of the model, different values for the effective core radius are used when PCFs have different fibre parameters. The accuracy of our approach is demonstrated by comparing our results with other numerical and experimental results reported in literature. It is found that the accuracy of the fully vectorial effective index method is improved and our results agree well with accurate numerical results obtained by other methods as well as the previously reported experimental data.
文摘We present an improved approach to determine the zero-dispersion wavelength by measurement of the four-wave mixing (FWM) effect employing the two-tunable-laser scanning method. The FWM behaviour of combined fibres with two different zero-dispersion wavelengths is investigated theoretically and experimentally. The results are compared with those by regular zero-dispersion wavelength test instrument using phase shift technique. The theoretical and experimental results confirm the feasibility of determination of zero-dispersion wavelength by FWM.
基金Supported by the National Fundamental Research Programme under Grant No 2001CB309300, the National Natural Science Foundation of China under Grant Nos 10304017 and 60121503, the Knowledge Innovation Project of Chinese Academy of Sciences, and the Programme for New Century Excellent Talents in University.
文摘Polarization mode dispersion is modelled as decoherence of polarization under the disturbance of environment and the coupling with frequency. This model is described by the quantum master equation and the Langevin equation. It can be predicted that the optical beam is depolarized exponentially in a fibre and the differential group delay (DGD) is proportional to the square root of the propagation distance. The distribution of the DGD can also be calculated.
基金supported by the National Natural Science Foundation of China(Grants Nos.62035006 and 62005118).
文摘In this study,we experimentally demonstrate a miniature fiber thermometer based on tip-integrated ZnO-nanowire-nanograting.The sensor has a diameter less than 1μm and the length of the Bragg grating is sub-10μm.The ZnO-nanowire-nanograting is sensitive to the environmental temperature change.Thus,the intensity of the light whose wavelength is in the rising or falling region of the nanograting spectrum will vary with the shift in wavelength due to change in temperature.Taking one wavelength(655 nm)in the rise linear region of the nanograting spectrum,a sensitivity of 0.066nW/℃in the air is achieved experimentally.The proposed temperature sensor has the superiorities of compactness,stableness,and easy fabrication compared to regular fiber grating sensors,offering great potential for detecting inside minimal volume environments.
基金This work was supported by the National Natural Science Foundation of China(Grant No.51935011)the fund for Shanxi"1331 Project"Key Subject Construction,Shanxi Natural Science Foundation(Grant Nos.201801D121157 and 201801D221203)Scientific and Technological Innovation Programs of Higher Education Institutions in Shanxi(Grant No.1810600108MZ).
文摘This paper presents an all-SiC fiber-optic Fabry-Perot(FP)pressure sensor based on the hydrophilic direct bonding technology for the applications in the harsh environment.The operating principle,fabrication,interface characteristics,and pressure response test of the proposed all-SiC pressure sensor are discussed.The FP cavity is formed by hermetically direct bonding of two-layer SiC wafers,including a thinned SiC diaphragm and a SiC wafer with an etched cavity.White light interference is used for the detection and demodulation of the sensor pressure signals.Experimental results demonstrate the sensing capabilities for the pressure range up to 800 kPa.The all-SiC structure without any intermediate layer can avoid the sensor failure caused by the thermal expansion coefficient mismatch and therefore has a great potential for pressure measurement in high temperature environments.