The maximum power conversion efficiencies of the top-emitting,oxide-confined,two-dimensional integrated 2×2 and4×4 vertical-cavity surface-emitting laser（VCSEL） arrays with the oxide-apertures of 6 μm,16 ...The maximum power conversion efficiencies of the top-emitting,oxide-confined,two-dimensional integrated 2×2 and4×4 vertical-cavity surface-emitting laser（VCSEL） arrays with the oxide-apertures of 6 μm,16 μm,19 μm,26 μm,29 μm,36 μm,39 μm,and 46 urn are fabricated and characterized,respectively.The maximum power conversion efficiencies increase rapidly with the augment of oxide-aperture at the beginning and then decrease slowly.A maximum value of27.91%at an oxide-aperture of 18.6 μm is achieved by simulation.The experimental data are well consistent with the simulation results,which are analyzed by utilizing an empirical model.展开更多
Top-emitting oxide-confined intra-cavity contact structure 980nm VCSEL is fabricated by low-pressure metal organic chemical-vapor deposition (LP-MOCVD).Self-aligning etching process and selective oxidation are applied...Top-emitting oxide-confined intra-cavity contact structure 980nm VCSEL is fabricated by low-pressure metal organic chemical-vapor deposition (LP-MOCVD).Self-aligning etching process and selective oxidation are applied for current confinement.Output light power of 10.1mW and slope efficiency of 0.462mW/mA are obtained under room temperature,pulse operation,and injection current of 28mA.The maximum light power is 13.1mW under pulse operation.Output light power of 7.1mW,lasing wavelength of 974nm,and FWHM of 0.6nm are obtained under CW condition.The study of oxide-aperture influence on threshold current and differential resistance shows that lower threshold current can be obtained with a smaller oxide-aperture diameter.展开更多
基金supported by the National Natural Science Foundation of China(Grant Nos.61222501 and 61335004)the Specialized Research Fund for the Doctoral Program of Higher Education of China(Grant No.20111103110019)
文摘The maximum power conversion efficiencies of the top-emitting,oxide-confined,two-dimensional integrated 2×2 and4×4 vertical-cavity surface-emitting laser（VCSEL） arrays with the oxide-apertures of 6 μm,16 μm,19 μm,26 μm,29 μm,36 μm,39 μm,and 46 urn are fabricated and characterized,respectively.The maximum power conversion efficiencies increase rapidly with the augment of oxide-aperture at the beginning and then decrease slowly.A maximum value of27.91%at an oxide-aperture of 18.6 μm is achieved by simulation.The experimental data are well consistent with the simulation results,which are analyzed by utilizing an empirical model.
文摘Top-emitting oxide-confined intra-cavity contact structure 980nm VCSEL is fabricated by low-pressure metal organic chemical-vapor deposition (LP-MOCVD).Self-aligning etching process and selective oxidation are applied for current confinement.Output light power of 10.1mW and slope efficiency of 0.462mW/mA are obtained under room temperature,pulse operation,and injection current of 28mA.The maximum light power is 13.1mW under pulse operation.Output light power of 7.1mW,lasing wavelength of 974nm,and FWHM of 0.6nm are obtained under CW condition.The study of oxide-aperture influence on threshold current and differential resistance shows that lower threshold current can be obtained with a smaller oxide-aperture diameter.
