Cryogenic oxide-confined vertical-cavity surface-emitting laser(VCSEL)has promising application in cryogenic optical interconnect for cryogenic computing.In this paper,we demonstrate a cryogenic 850-nm oxide-confined ...Cryogenic oxide-confined vertical-cavity surface-emitting laser(VCSEL)has promising application in cryogenic optical interconnect for cryogenic computing.In this paper,we demonstrate a cryogenic 850-nm oxide-confined VCSEL at around 4 K.The cryogenic VCSEL with an optical oxide aperture of 6.5μm in diameter can operate in single fundamental mode with a side-mode suppression-ratio of 36 dB at 3.6 K,and the fiber-coupled output power reaches 1 mW at 5 mA.The small signal modulation measurements at 298 and 292 K show the fabricated VCSEL has the potential to achieve a high modulation bandwidth at cryogenic temperature.展开更多
Top-emitting oxide-confined intra-cavity contact structure 980nm VCSEL is fabricated by low-pressure metal organic chemical-vapor deposition (LP-MOCVD).Self-aligning etching process and selective oxidation are applied...Top-emitting oxide-confined intra-cavity contact structure 980nm VCSEL is fabricated by low-pressure metal organic chemical-vapor deposition (LP-MOCVD).Self-aligning etching process and selective oxidation are applied for current confinement.Output light power of 10.1mW and slope efficiency of 0.462mW/mA are obtained under room temperature,pulse operation,and injection current of 28mA.The maximum light power is 13.1mW under pulse operation.Output light power of 7.1mW,lasing wavelength of 974nm,and FWHM of 0.6nm are obtained under CW condition.The study of oxide-aperture influence on threshold current and differential resistance shows that lower threshold current can be obtained with a smaller oxide-aperture diameter.展开更多
We establish a novel method of controlling the transverse modes of vertical cavity surface emitting lasers （VCSELs） to achieve 1 mW single-fundamental-mode lasing. A dielectric mode filter is installed on top of the...We establish a novel method of controlling the transverse modes of vertical cavity surface emitting lasers （VCSELs） to achieve 1 mW single-fundamental-mode lasing. A dielectric mode filter is installed on top of the VCSEL. The dielectric layer （SiO2） is deposited and patterned to modify the mirror reflectivity across the oxide aperture via antiphase reflections. This mode selection is nondestructive and universally applicable for other structures under single transverse mode. Destructive etching techniques （dry/wet） or epitaxial regrowth are also not required. This method simplifies the preparation process and improves the repeatability of the device. Measurements show that under continuous-wave current injection, the side-mode suppression ratio exceeds 30 dB.展开更多
文摘为解决当前常用煤矿氧气检测仪器易受交叉气体干扰且功耗大的问题,基于GD32F303RCT6微控制器和ADN8834热电冷却控制器,设计了一种软启动开关电路控制的垂直腔面发射激光器(Vertical-cavity Surface-emitting Laser,VCSEL)高精度驱动及温控电路。驱动电路中,高频正弦波信号和低频锯齿波信号叠加的二进制数据由微控制器产生,经信号发生电路、电压电流转换电路转化成VCSEL高精度驱动电流信号;温控电路中,设计基于比例积分微分(Proportional Integral Differential,PID)补偿电路和数模转换控制器(Digital to Analog Converter,DAC)目标温度控制电路实现激光器温度自动调节。测试结果表明:驱动电路的电流输出区间为0.680~1.360 mA;锯齿波频率误差小于0.5%,正弦波频率误差小于0.1%;氧气吸收峰扫描精度高达0.07 pm,对应电流扫描精度为0.12μA;温控电路的温度控制精度为±0.012℃。满足了可调谐半导体激光吸收光谱(Tunable Diode Laser Absorption Spectroscopy,TDLAS)煤矿氧气检测应用需求。
基金supported by the National Natural Science Foundation of China(Nos.62275243,62075209,and 61675193)the Beijing Natural Science Foundation(No.Z200006).
文摘Cryogenic oxide-confined vertical-cavity surface-emitting laser(VCSEL)has promising application in cryogenic optical interconnect for cryogenic computing.In this paper,we demonstrate a cryogenic 850-nm oxide-confined VCSEL at around 4 K.The cryogenic VCSEL with an optical oxide aperture of 6.5μm in diameter can operate in single fundamental mode with a side-mode suppression-ratio of 36 dB at 3.6 K,and the fiber-coupled output power reaches 1 mW at 5 mA.The small signal modulation measurements at 298 and 292 K show the fabricated VCSEL has the potential to achieve a high modulation bandwidth at cryogenic temperature.
文摘Top-emitting oxide-confined intra-cavity contact structure 980nm VCSEL is fabricated by low-pressure metal organic chemical-vapor deposition (LP-MOCVD).Self-aligning etching process and selective oxidation are applied for current confinement.Output light power of 10.1mW and slope efficiency of 0.462mW/mA are obtained under room temperature,pulse operation,and injection current of 28mA.The maximum light power is 13.1mW under pulse operation.Output light power of 7.1mW,lasing wavelength of 974nm,and FWHM of 0.6nm are obtained under CW condition.The study of oxide-aperture influence on threshold current and differential resistance shows that lower threshold current can be obtained with a smaller oxide-aperture diameter.
基金Project supported by the National Key Research and Development Project,China(Grant No.2017YFB0503200)the National Natural Science Foundation of China(Grant Nos.61434005,61474118,11774343,and 11674314)+1 种基金the Science and Technology Program of Jilin Province,China(Grant No.20160203013GX)the Youth Innovation Promotion Association,China(Grant No.2017260)
文摘We establish a novel method of controlling the transverse modes of vertical cavity surface emitting lasers （VCSELs） to achieve 1 mW single-fundamental-mode lasing. A dielectric mode filter is installed on top of the VCSEL. The dielectric layer （SiO2） is deposited and patterned to modify the mirror reflectivity across the oxide aperture via antiphase reflections. This mode selection is nondestructive and universally applicable for other structures under single transverse mode. Destructive etching techniques （dry/wet） or epitaxial regrowth are also not required. This method simplifies the preparation process and improves the repeatability of the device. Measurements show that under continuous-wave current injection, the side-mode suppression ratio exceeds 30 dB.
