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p^+多晶Si_(1-x)Ge_x功函数对异质结CMOS器件电学特性影响的模拟研究
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作者 舒斌 张鹤鸣 +5 位作者 王伟 宣荣喜 宋建军 任冬玲 吴铁峰 张永杰 《电子器件》 CAS 2008年第3期795-799,共5页
为使垂直层叠SiGe/Si异质结CMOS器件具有匹配的阈值电压,利用二维器件模拟器MEDICI模拟分析了p+多晶Si1-xGex栅的功函数对此类器件直流与交流特性参数的影响,得出在P+多晶Si1-xGex功函数W=0.85eV,即Ge组分x=0.36时,此类器件的p-MOSFET与... 为使垂直层叠SiGe/Si异质结CMOS器件具有匹配的阈值电压,利用二维器件模拟器MEDICI模拟分析了p+多晶Si1-xGex栅的功函数对此类器件直流与交流特性参数的影响,得出在P+多晶Si1-xGex功函数W=0.85eV,即Ge组分x=0.36时,此类器件的p-MOSFET与n-MOSFET具有匹配的阈值电压,分别为VTp=-0.215V和VTn=0.205V。为此类器件的优化设计和制备提供了理论依据。 展开更多
关键词 异质结CMOS p^+多晶si1-xgex MEDICI模拟 功函数
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Analytical model for subthreshold current and subthreshold swing of short-channel double-material-gate MOSFETs with strained-silicon channel on silicon–germanium substrates 被引量:1
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作者 Pramod Kumar Tiwari Gopi Krishna Saramekala +1 位作者 Sarvesh Dubey Anand Kumar Mukhopadhyay 《Journal of Semiconductors》 EI CAS CSCD 2014年第10期30-36,共7页
The present work gives some insight into the subthreshold behaviour of short-channel double-material- gate strained-silicon on silicon-germanium MOSFETs in terms of subthreshold swing and off-current. The formu- latio... The present work gives some insight into the subthreshold behaviour of short-channel double-material- gate strained-silicon on silicon-germanium MOSFETs in terms of subthreshold swing and off-current. The formu- lation of subthreshold current and, thereupon, the subthreshold swing have been done by exploiting the expression of potential distribution in the channel region of the device. The dependence of the subthreshold characteristics on the device parameters, such as Ge mole fraction, gate length ratio, work function of control gate metal and gate length, has been tested in detail. The analytical models have been validated by the numerical simulation results that were obtained from the device simulation software ATLASTM by Silvaco Inc. 展开更多
关键词 strained-si channel si1-xgex substrate dual-metal gate subthreshold current subthreshold swing
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