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A NEW ALGORITHM FOR ELIMINATING PHASE-SHIFT ERROR IN PHASE SHIFTING INTERFEROMETRY
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作者 Liu Chong Liang Xichang Peng Donglin State Key Laboratory of Mechanical Transmission,Chongqing University 《Chinese Journal of Mechanical Engineering》 SCIE EI CAS CSCD 1999年第2期51-55,共5页
The effect of phaseshift error in phase shifting interferometry is investigated. A new algorithm with two sets of 4 samples for eliminating phase shift error is presented. The computer simulation and experiment resul... The effect of phaseshift error in phase shifting interferometry is investigated. A new algorithm with two sets of 4 samples for eliminating phase shift error is presented. The computer simulation and experiment result show that the phase shift offset should be π when the algorithm is used, and this algorithm has gotten better result than the original 4 sample algorithm. 展开更多
关键词 phase shifting interferometry Error compensation Profile measurement
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