Fabrication and integration of photonic devices for phase-change memory and neuromorphic computing

In the past decade,there has been tremendous progress in integrating chalcogenide phase-change materials(PCMs)on the silicon photonic platform for non-volatile memory to neuromorphic in-memory computing applications.In particular,these non von Neumann computational elements and systems benefit from mass manufacturing of silicon photonic integrated circuits(PICs)on 8-inch wafers using a 130 nm complementary metal-oxide semiconductor line.Chip manufacturing based on deep-ultraviolet lithography and electron-beam lithography enables rapid prototyping of PICs,which can be integrated with high-quality PCMs based on the wafer-scale sputtering technique as a back-end-of-line process.In this article,we present an overview of recent advances in waveguide integrated PCM memory cells,functional devices,and neuromorphic systems,with an emphasis on fabrication and integration processes to attain state-of-the-art device performance.After a short overview of PCM based photonic devices,we discuss the materials properties of the functional layer as well as the progress on the light guiding layer,namely,the silicon and germanium waveguide platforms.Next,we discuss the cleanroom fabrication flow of waveguide devices integrated with thin films and nanowires,silicon waveguides and plasmonic microheaters for the electrothermal switching of PCMs and mixed-mode operation.Finally,the fabrication of photonic and photonic–electronic neuromorphic computing systems is reviewed.These systems consist of arrays of PCM memory elements for associative learning,matrix-vector multiplication,and pattern recognition.With large-scale integration,the neuromorphic photonic computing paradigm holds the promise to outperform digital electronic accelerators by taking the advantages of ultra-high bandwidth,high speed,and energy-efficient operation in running machine learning algorithms.

Pixelated non-volatile programmable photonic integrated circuits with 20-level intermediate states

Multi-level programmable photonic integrated circuits(PICs)and optical metasurfaces have gained widespread attention in many fields,such as neuromorphic photonics,opticalcommunications,and quantum information.In this paper,we propose pixelated programmable Si_(3)N_(4)PICs with record-high 20-level intermediate states at 785 nm wavelength.Such flexibility in phase or amplitude modulation is achieved by a programmable Sb_(2)S_(3)matrix,the footprint of whose elements can be as small as 1.2μm,limited only by the optical diffraction limit of anin-house developed pulsed laser writing system.We believe our work lays the foundation for laser-writing ultra-high-level(20 levels and even more)programmable photonic systems and metasurfaces based on phase change materials,which could catalyze diverse applications such as programmable neuromorphic photonics,biosensing,optical computing,photonic quantum computing,and reconfigurable metasurfaces.

Preface–Introduction to the Special Issue for Chinese-Russian Workshop on Biophotonics and Biomedical Optics

The Chinese-Russian Workshop on Biophotonics and Biomedical Optics 2023 was held online twice on 18–21 September and 25–26 September 2023.The bilateral workshop brought together both Russian and Chinese scientists,engineers,and clinical researchers from a variety of disciplines engaged in applying optical science,photonics,and imaging technologies to problems in biology and medicine.During the workshops,two plenary lectures and twenty invited presentations were presented.This special issue selects some papers from both Russian and Chinese sides,consisting of one review and seven original research articles.

High-efficiency ultra-fast all-optical photonic crystal diode based on the lateral-coupled nonlinear elliptical defect

An all-optical Fano-like diode featuring a nonlinear lateral elliptical micro-cavity and a reflecting column in the photonic crystal waveguide is proposed.The asymmetric micro-cavity is constructed by removing one rod and changing the shape of the lateral rod from a circle to an ellipse.A reflecting pillar is also introduced into the waveguide to construct an F-P cavity with the elliptical defect and enhance the asymmetric transmission for the incident light wave transmitting rightwards and leftwards,respectively.By designing the size of the ellipse and optimizing a reflecting rod at a suitable position,a maximum forward light transmittance of-1.14 dB and a minimum backward transmittance of-57.66 dB are achieved at the working wavelength of 1550.47 nm.The corresponding response time is about 10 ps when the intensity of the pump light beam resonant at 637 nm is 3.97 W/μm2.

Topological slow light and rainbow trapping of surface wave in valley photonic crystal bounded by air

Topological slow light and rainbow trapping tend to rely on large-scale interface structure in previous research work,which have restricted further miniaturization.In this work,we propose a method to realize slow light and rainbow trapping at the zigzag edge of a single valley photonic crystals(VPCs)bounded by air,which is very different from previous studies where rainbow trapping is supported at the interface separating two VPCs with inversion symmetry.By constructing the VPC–air boundaries and VPC–VPC interfaces experimentally,we have observed the topologically protected rainbow trapping simultaneously at the external and internal boundary.This work provides a feasible platform for the miniaturized optical communication devices such as optical buffers,optical storage and optical routing.

Reconfigurable(4, 6^(2)) and(4, 8^(2)) Archimedean plasma photonic crystals in dielectric barrier discharge

Archimedean photonic crystal has become a research area of great interest due to its various unique properties. Here, we experimentally demonstrate the realization of reconfigurable(4, 6^(2))and(4, 8^(2)) Archimedean plasma photonic crystals(APPCs) by use of dielectric barrier discharges in air. Dynamical control on both the macrostructures including the lattice symmetry and the crystal orientation, and the microstructures including the fine structures of scattering elements has been achieved. The formation mechanisms of APPCs are studied by time-resolved measurements together with numerical simulations. Large omnidirectional band gaps of APPCs have been obtained. The tunable topology of APPCs may offer new opportunities for fabricating multi-functional and highly-integrated microwave devices.

Multi-functional photonic spin Hall effect sensor controlled by phase transition

Photonic spin Hall effect(PSHE), as a novel physical effect in light–matter interaction, provides an effective metrological method for characterizing the tiny variation in refractive index(RI). In this work, we propose a multi-functional PSHE sensor based on VO_(2), a material that can reveal the phase transition behavior. By applying thermal control, the mutual transformation into different phase states of VO_(2) can be realized, which contributes to the flexible switching between multiple RI sensing tasks. When VO_(2) is insulating, the ultrasensitive detection of glucose concentrations in human blood is achieved. When VO_(2) is in a mixed phase, the structure can be designed to distinguish between the normal cells and cancer cells through no-label and real-time monitoring. When VO_(2) is metallic, the proposed PSHE sensor can act as an RI indicator for gas analytes. Compared with other multi-functional sensing devices with the complex structures, our design consists of only one analyte and two VO_(2) layers, which is very simple and elegant. Therefore, the proposed VO_(2)-based PSHE sensor has outstanding advantages such as small size, high sensitivity, no-label, and real-time detection, providing a new approach for investigating tunable multi-functional sensors.

Three-dimensional topological crystalline insulator without spin-orbit coupling in nonsymmorphic photonic metacrystal

By including certain point group symmetry in the classification of band topology,Fu proposed a class of threedimensionaltopological crystalline insulators(TCIs)without spin-orbit coupling in 2011.In Fu’s model,surface states(ifpresent)doubly degenerate atГandM when time-reversal and C_(4) symmetries are preserved.The analogs of Fu’s modelwith surface states quadratically degenerate atM are widely studied,while surface states with quadratic degeneracy atГare rarely reported.In this study,we propose a three-dimensional TCI without spin-orbit coupling in a judiciously designednonsymmorphic photonic metacrystal.The surface states of photonic TCIs exhibit quadratic band degeneracy in the(001)surface Brillouin zone(BZ)center(Гpoint).The gapless surface states and their quadratic dispersion are protected by C4and time-reversal symmetries,which correspond to the nontrivial band topology characterized by Z_(2)topological invariant.Moreover,the surface states along lines fromГto the(001)surface BZ boundary exhibit zigzag feature,which is interpretedfrom symmetry perspective by building composite operators constructed by the product of glide symmetries with timereversalsymmetry.The metacrystal array surrounded with air possesses high order hinge states with electric fields highlylocalized at the hinge that may apply to optical sensors.The gapless surface states and hinge states reside in a cleanfrequency bandgap.The topological surface states emerge at the boundary of the metacrystal and perfect electric conductor(PEC),which provide a pathway for topologically manipulating light propagation in photonic devices.

Multifunctional mixed analog/digital signal processor based on integrated photonics

Photonic signal processing offers a versatile and promising toolkit for contemporary scenarios ranging from digital optical communication to analog microwave operation.Compared to its electronic counterpart,it eliminates inherent bandwidth limitations and meanwhile exhibits the potential to provide unparalleled scalability and flexibility,particularly through integrated photonics.However,by far the on-chip solutions for optical signal processing are often tailored to specific tasks,which lacks versatility across diverse applications.Here,we propose a streamlined chip-level signal processing architecture that integrates different active and passive building blocks in silicon-on-insulator(SOI)platform with a compact and efficient manner.Comprehensive and in-depth analyses for the architecture are conducted at levels of device,system,and application.Accompanied by appropriate configuring schemes,the photonic circuitry supports loading and processing both analog and digital signals simultaneously.Three distinct tasks are facilitated with one single chip across several mainstream fields,spanning optical computing,microwave photonics,and optical communications.Notably,it has demonstrated competitive performance in functions like image processing,spectrum filtering,and electro-optical bandwidth equalization.Boasting high universality and a compact form factor,the proposed architecture is poised to be instrumental for next-generation functional fusion systems.

Mode coupling with Fabry-Perot modes in photonic crystal slabs

Fabry–Perot(FP)modes are a class of fundamental resonances in photonic crystal(PhC)slabs.Owing to their low quality factors,FP modes are frequently considered as background fields with their resonance nature being neglected.Nevertheless,FP modes can play important roles in some phenomena,as exemplified by their coupling with guided resonance(GR)modes to achieve bound states in the continuum(BIC).Here,we further demonstrate the genuine resonance mode capability of FP modes PhC slabs.Firstly,we utilize temporal coupled-mode theory to obtain the transmittance of a PhC slab based on the FP modes.Secondly,we construct exceptional points(EPs)in both momentum and parameter spaces through the coupling of FP and GR modes.Furthermore,we identify a Fermi arc connecting two EPs and discuss the far-field polarization topology.This work elucidates that the widespread FPs in PhC slabs can serve as genuine resonant modes,facilitating the realization of desired functionalities through mode coupling.

Progress and realization platforms of dynamic topological photonics

Dynamic topological photonics is a novel research field, combining the time-domain optics and topological physics.In this review, the recent progress and realization platforms of dynamic topological photonics have been well introduced.The definition, measurement methods and the evolution process of the dynamic topological photonics are demonstrated to better understand the physical diagram. This review is meant to bring the readers a different perspective on topological photonics, grasp the advanced progress of dynamic topology, and inspire ideas about future prospects.

Surface phonon resonance:A new mechanism for enhancing photonic spin Hall effect and refractive index sensor

Metal-based surface plasmon resonance(SPR)plays an important role in enhancing the photonic spin Hall effect(SHE)and developing sensitive optical sensors.However,the very large negative permittivities of metals limit their applications beyond the near-infrared regime.In this work,we theoretically present a new mechanism to enhance the photonic SHE by taking advantage of SiC-supported surface phonon resonance(SPhR)in the mid-infrared regime.The transverse displacement of photonic SHE is very sensitive to the wavelength of incident light and the thickness of SiC layer.Under the optimal parameter setup,the calculated largest transverse displacement of SiC-based SPhR structure reaches up to 163.8 ym,which is much larger than the condition of SPR.Moreover,an NO_(2) gas sensor based on the SPhR-enhanced photonic SHE is theoretically proposed with the superior sensing performance.Both the intensity and angle sensitivity of this sensor can be effectively manipulated by varying the damping rate of SiC.The results may provide a promising paradigm to enhance the photonic SHE in the mid-infrared region and open up new opportunity of highly sensitive refractive index sensors.

Topological edge and corner states of valley photonic crystals with zipper-like boundary conditions

We present a stable valley photonic crystal(VPC)unit cell with C_(3v)symmetric quasi-ring-shaped dielectric columns and realize its topological phase transition by breaking mirror symmetry.Based on this unit cell structure,topological edge states(TESs)and topological corner states(TCSs)are realized.We obtain a new type of wave transmission mode based on photonic crystal zipper-like boundaries and apply it to a beam splitter assembled from rectangular photonic crystals(PCs).The constructed beam splitter structure is compact and possesses frequency separation functions.In addition,we construct a box-shaped triangular PC structures with zipper-like boundaries and discover phenomena of TCSs in the corners,comparing its corner states with those formed by other boundaries.Based on this,we explore the regularities of the electric field patterns of TESs and TCSs,explain the connection between the characteristic frequencies and locality of TCSs,which helps better control photons and ensures low power consumption of the system.

Investigation on photonic crystal nanobeam cavity based on mixed diamond–circular holes

A photonic crystal nanobeam cavity(M-PCNC)with a structure incorporating a mixture of diamond-shaped and circular air holes is pro-posed.The performance of the cavity is simulated and studied theoretically.Using thefinite-difference time-domain method,the parameters of the M-PCNC,including cavity thickness and width,lattice constant,and radii and numbers of holes,are optimized,with the quality factor Q and mode volume Vm as performance indicators.Mutual modulation of the lattice constant and hole radius enable the proposed M-PCNC to realize outstanding performance.The optimized cavity possesses a high quality factor Q 1.45105 and an ultra-small mode=×volume Vm 0.01(λ/n)[Zeng et al.,Opt Lett 2023:48;3981–3984]in the telecommunications wavelength range.Light can be progres-=sively squeezed in both the propagation direction and the perpendicular in-plane direction by a series of interlocked anti-slots and slots in the diamond-shaped hole structure.Thereby,the energy can be confined within a small mode volume to achieve an ultra-high Q/Vm ratio.

Application of Padé Approximation in Simulating Photonic Crystals

To save finite-difference time-domain（FDTD） computing time, several methods are proposed to convert the time domain FDTD output into frequency domain. The Pad6 approximation with Baker＇s algorithm and the program are introduced to simulate photonic crystal structures. For a simple pole system with frequency 160THz and quality factor of 5000, the intensity spectrum obtained by the Padé approximation from a 2^8-item sequence output is more exact than that obtained by fast Fourier transformation from a 2^20-item sequence output. The mode frequencies and quality factors are calculated at different wave vectors for the photonic crystal slab from a much shorter FDTD output than that required by the FFT method, and then the band diagrams are obatined. In addition, mode frequencies and Q-factors are calculated for photonic crystal microcavity.

One-Dimensional InP-Based Photonic Crystal Quantum Cascade Laser Emitting at 5.36μm

An InP-based one-dimensional photonic crystal quantum cascade laser is realized. With photo lithography instead of electron beam lithography and using inductively coupled plasma etching, four-period air-semiconductor couples are defined as Bragg reflectors at one end of the resonator. The spectral measurement at 80K shows the quasi-continuous-wave operation with the wavelength of 5.36μm for a 22gm-wide and 2mm-long epilayer-up bonded device.

A 2×3 Photonic Switch in SiGe for 1.55μm Operation

A silicon-based photonic switch is proposed and simulated based on the multimode interference （MMI） principle and the free-carrier plasma dispersion effect in silicon-germanium. The proposed switch, designed for 1.55μm window operation,is useful for DWDM optical networks. The switch consists of two input single-mode ridge waveguide ports,a MMI section, and three output single-mode ridge waveguide ports. In the MMI section, two index-modulation regions are placed to divert input optical signals from the two input ports to each of the three output ports. Switching characteristics are demonstrated theoretically by a beam propagation method for 1.55μm operation. The simulated results show that the insertion loss of the switch is less than 1.43dB, and the crosstalk is between - 18 and - 32.8dB.

基于Photonic Slot Routing的波分复用网络的协议与结构

本文介绍了波分复用技术与全光网络的概念,提出了基于光槽路由的波分复用网络体系结构,讨论了实现光槽与分组传送的方法以及有关的网络存取协议,并给出了全光学网络中网桥与节点的示意性结构。本文的目的是提供一个这种方法的基本描述。

A Study of Properties of the Photonic Band Gap of Unmagnetized Plasma Photonic Crystal

In this study, the propagation of electromagnetic waves in one-dimensional plasma photonic crystals （PPCs）, namely, superlattice structures consisting alternately of a homogeneous unmagnetized plasma and dielectric material, is simulated numerically using the finite-difference time-domain （FDTD） algorithm. A perfectly matched layer （PML） absorbing technique is used in this simulation. The reflection and transmission coefficients of electromagnetic （EM） waves through PPCs are calculated. The characteristics of the photonic band gap （PBG） are discussed in terms of plasma density, dielectric constant ratios, number of periods, and introduced layer defect. These may provide some useful information for designing plasma photonic crystal devices.

Modulation of Photonic Bandgap and Localized States by Dielectric Constant Contrast and Filling Factor in Photonic Crystals

The band structure of 2D photonic crystals (PCs) and localized states resulting from defects are analyzed by finite-difference time-domain (FDTD) technique and Padé approximation.The effect of dielectric constant contrast and filling factor on photonic bandgap (PBG) for perfect PCs and localized states in PCs with point defects are investigated.The resonant frequencies and quality factors are calculated for PCs with different defects.The numerical results show that it is possible to modulate the location,width and number of PBGs and frequencies of the localized states only by changing the dielectric constant contrast and filling factor.