Theoretical Analysis and Experimental Verification on Flow Field of Piezoelectric Pump with Unsymmetrical Slopes Element

Regular valveless piezoelectric pumps have rectifying elements outside their chambers to produce net flow. These rectifying elements outside the chamber will increase the overall volume of the pump and prevent its minimization. Valveless piezoelectric pump with unsymmetrical slopes elements（USE）, proposed in this paper, differs from other valveless pumps in that it is easy to be minimized by developing the chamber bottom as such a rectifying element. In this research, the working principle of the proposed pump was analyzed first. Numerical models were thereby established and numerical simulation was conducted to the chamber flow field with the method of time-dependent velocity. The effects of the USEs on the flow field in the chamber were shown clearly in simulation. And the particular feature of flow field in the chamber was discovered. It behaves a complex flow field, in which strong turbulent occurs companying a lot of vortexes in different directions and different sizes. This feature is just opposite to what regular piezoelectric pumps expect： a moderate flow field. The turbulent flow could be used to have different liquids stirred and well mixed in the chamber to produce homogeneous solution, emulsion or turbid liquid. Meanwhile, numerical simulation also presents the effect of the angles difference of the two slopes upon the flow field, and upon the flow rate of the pump, which fits to the theoretical analysis. Experiments with the proposed pump were also conducted to verify the numerical results. In these experiments, six USEs with different slope angles were used for efficiency tests, which proved the validity and reliability of the numerical analysis. The data obtained from numerical analysis agree well with that from the experiments. The errors ranged from 4.4% to 14.8% with their weighted average error being 9.7%.

Analysis on Flow Field of the Valveless Piezoelectric Pump with Two Inlets and One Outlet and a Rotating Unsymmetrical Slopes Element

Typically,liquid pump and liquids mixer are two separate devices.The invention of piezoelectric pump makes it possible to integrate the two devices.Hower,the existing piezoelectric mixing-pumps are larger because the need the space outside the chamber,and another shortcome of them is that they cannot adjust the mixing ratio of two liquids.In this paper,a new piezoelectric pump being capable of integrating mixer and pump is presented,based on the theory of the piezoelectric pump with the unsymmetrical slopes element（USE）.Besides the features of two inlets and one outlet,the piezoelectric pump has a rotatable unsymmetrical slopes element（RUSE）.When the pump works,two fluids flow into the inlet channels respectively.Then the RUSE controls the ratio of the two flows by adjusting the flow resistances of the two inlet channels.The fluids form a net flow due to the USE principle,while they are mixed into a homogeneous solution due to strong turbulence flow field and complex vortices generated by RUSE in the chamber.And then the solution flows through the outlet.Firstly,the theoretical analysis on this pump is performed.Meanwhile,the flow field in the chamber is calculated and simulated.And then,the relationship between the flows of the two channels and the rotating angle of the RUSE is set up and analyzed.Finally,experiment with the proposed pump is carried out to verify the numerical results.A RUSE with 20° slope angle is used in the experiment.Four sets of data are tested with the RUSE at the rotating angles of 0°,6°,11°,and 16°,respectively,corresponding to the numerical models.The experimental results show that the empirical data and the theoretical data share the same trend.The maximum error between the theoretical flow and the experimental flow is 11.14%,and the maximum error between the theoretical flow ratio of the two inlets and the experimental one is 2.5%.The experiment verified the theoretical analysis.The proposed research provides a new idea for integration of micro liquids mixer and micro liquids pump.

Advances in Valveless Piezoelectric Pump with Cone-shaped Tubes

This paper reviews the development of valve- less piezoelectric pump with cone-shaped tube chrono- logically, which have widely potential application in biomedicine and micro-electro-mechanical systems because of its novel principles and deduces the research direction in the future. Firstly, the history of valveless piezoelectric pumps with cone-shaped tubes is reviewed and these pumps are classified into the following types： single pump with solid structure or plane structure, and combined pump with parallel structure or series structure. Furthermore, the function of each type of cone-shaped tubes and pump structures are analyzed, and new direc- tions of potential expansion of valveless piezoelectric pumps with cone-shaped tubes are summarized and deduced. The historical argument, which is provided by the literatures, that for a valveless piezoelectric pump with cone-shaped tubes, cone angle determines the flow resistance and the flow resistance determines the flow direction. The argument is discussed in the reviewed pumps one by one, and proved to be convincing. Finally, it is deduced that bionics is pivotal in the development of valveless piezoelectric pump with cone-shaped tubes fromthe perspective of evolution of biological structure. This paper summarizes the current valveless piezoelectric pumps with cone-shaped tubes and points out the future development, which may provide guidance for the research of piezoelectric actuators.

FLOW DIRECTION OF PIEZOELECTRIC PUMP WITH NOZZLE/DIFFUSER-ELEMENTS

The piezoelectric pump with nozzle/diffuser-elements, which oscillating formdiffering from regular volumetric reciprocating or rotating pumps because there arenozzle/diffuser-elements substituted for regular valves, is a new type pump whose actuator is apiezoelectric ceramal part with verse piezoelectric effect In recent year, piezoelectric pump ispaid increasing attention to because it is an ideal candidate in application in such area as medicalhealth, mechanical tools and micro-mechanism. The fundamental research on it, however, is still notmade through. Focuses on the phenomenon of different directions of flow among Germany pump, Chinesepump and Swiss pump, which are all fitted with nozzle/diffuser-elements, and analyzes the coneangle of nozzle/diffuser-elements based on the flow equation of valve-less piezoelectric pump withnozzle/diffuser-elements. As a result, the concepts of diffuser toss coefficient and losscoefficient are introduced to explain these phenomena, from which a discussion is given on theoptimization of the cone angle of nozzle/diffuser-element aiming at the maximum of pump flow.

Theoretical Analysis and Experimental Verification on Valve-less Piezoelectric Pump with Hemisphere-segment Bluff-body

Existing researches on no-moving part valves in valve-less piezoelectric pumps mainly concentrate on pipeline valves and chamber bottom valves, which leads to the complex structure and manufacturing process of pump channel and chamber bottom. Furthermore, position fixed valves with respect to the inlet and outlet also makes the adjustability and controllability of flow rate worse. In order to overcome these shortcomings, this paper puts forward a novel implantable structure of valve-less piezoelectric pump with hemisphere-segments in the pump chamber. Based on the theory of flow around bluff-body, the flow resistance on the spherical and round surface of hemisphere-segment is different when fluid flows through, and the macroscopic flow resistance differences thus formed are also different. A novel valve-less piezoelectric pump with hemisphere-segment bluff-body （HSBB） is presented and designed. HSBB is the no-moving part valve. By the method of volume and momentum comparison, the stress on the bluff-body in the pump chamber is analyzed. The essential reason of unidirectional fluid pumping is expounded, and the flow rate formula is obtained. To verify the theory, a prototype is produced. By using the prototype, experimental research on the relationship between flow rate, pressure difference, voltage, and frequency has been carried out, which proves the correctness of the above theory. This prototype has six hemisphere-segments in the chamber filled with water, and the effective diameter of the piezoelectric bimorph is 30mm. The experiment result shows that the flow rate can reach 0.50 mL/s at the frequency of 6 Hz and the voltage of 110 V. Besides, the pressure difference can reach 26.2 mm H20 at the frequency of 6 Hz and the voltage of 160 V. This research proposes a valve-less piezoelectric pump with hemisphere-segment bluff-body, and its validity and feasibility is verified through theoretical analysis and experiment.

Theory and Experimental Verification on Valveless Piezoelectric Pump with Multistage Y-shape Treelike Bifurcate Tubes

Among most traditional piezo water cooling systems, piezoelectric valve pumps are adopted as their driving sources. The valves in these pumps induce problems of shock and vibration and also make their structure complicated, which is uneasy to minimize and reduce their reliability and applicability of the whole system. In order to avoid these problems caused by valve structure, a novel valveless piezoelectric pump is developed, which integrates both functions of transforming and cooling. The pump’s Y-shape tree-like construction not only increases the efficiency of cooling but also the system reliability and applicability. Firstly, a multistage Y-shape treelike bifurcate tube is proposed, then a valveless piezoelectric pump with multistage Y-shape treelike bifurcate tubes is designed and its working principle is analyzed. Then, the theoretical analysis of flow resistance characteristics and the flow rate of the valveless piezoelectric pump are performed. Meanwhile, commercial software CFX is employed to perform the numerical simulation for the pump. Finally, this valveless piezoelectric pump is fabricated, the relationship between the flow rates and driving frequency, as well as the relationship between the back pressure and the driving frequency are experimentally investigated. The experimental results show that the maximum flow rate is 35.6 mL/min under 100 V peak-to-peak voltage (10.3 Hz) power supply, and the maximum back pressure is 55 mm H2O under 100 V (9 Hz) power supply, which validates the feasibility of the valveless piezoelectric pump with multistage Y-shape treelike bifurcate tubes. The proposed research provides certain references for the design of valveless piezoelectric pump and improves the reliability of piezo water cooling systems.

Piezoelectric Pump Used in Bionic Underwater Propulsion Unit

A new piezoelectric pump can pump liquid either forward or backward and adjust the flow rate. Thus an object can be driven forward or backward at different speeds. The driver of the pump, a circular piezoelectric plate, is modelled by Finite Element Method （FEM） in ANSYS and its performance is simulated and analyzed. The pump gives the best performance when the driving signals of the inlet and outlet valves have a bigger duty cycle and the plate has a higher voltage applied.

Analysis of the Flow Rate Characteristics of Valveless Piezoelectric Pump with Fractal-like Y-shape Branching Tubes

Microchannel heat sink with high heat transfer coefficients has been extensively investigated due to its wide application prospective in electronic cooling. However, this cooling system requires a separate pump to drive the fluid transfer, which is uneasy to minimize and reduces their reliability and applicability of the whole system. In order to avoid these problems, valveless piezoelectric pump with fractal-like Y-shape branching tubes is proposed. Fractal-like Y-shape branching tube used in microchannel heat sinks is exploited as no-moving-part valve of the valveless piezoelectric pump. In order to obtain flow characteristics of the pump, the relationship between tube structure and flow rate of the pump is studied. Specifically, the flow resistances of fractal-like Y-shape branching tubes and flow rate of the pump are analyzed by using fractal theory. Then, finite element software is employed to simulate the flow field of the tube, and the relationships between pressure drop and flow rate along merging and dividing flows are obtained. Finally, valveless piezoelectric pumps with fractal-like Y-shape branching tubes with different fractal dimensions of diameter distribution are fabricated, and flow rate experiment is conducted. The experimental results show that the flow rate of the pump increases with the rise of fractal dimension of the tube diameter. When fractal dimension is 3, the maximum flow rate of the valveless pump is 29.16 mL/min under 100 V peak to peak （13 Hz） power supply, which reveals the relationship between flow rate and fractal dimensions of tube diameter distribution. This paper investigates the flow characteristics of valveless piezoelectric pump with fractal-like Y-shape branching tubes, which provides certain references for valveless piezoelectric pump with fractal-like Y-shape branching tubes in application on electronic chip cooling.

DISCOVERY AND ANALYSIS ON CAVI TATION IN PIEZOELECTRIC PUMPS

The contributing factors for the cavitation in piezoelectric pumps areanalyzed, theoretically, and the device fitting for observing and recording is set up. With it theexperiments are carried out to observe the emergence and the flowing of the cavitations in thepiezoelectric pumps. According to the statistic and the analysis to the data of the experiments, thepeculiar features are discovered. These features are composed of balls-amassing, center-more, andflow-out.

Simulation Analysis and Experimental Verification of Spiral-tube-type Valveless Piezoelectric Pump with Gyroscopic Effect

The current research of the valveless piezoelectric pump focuses on increasing the flow rate and pressure differential. Compared with the valve piezoelectric pump, the valveless one has excellent performances in simple structure, low cost, and easy miniaturization. So, their important development trend is the mitigation of their weakness, and the multi-function integration. The flow in a spiral tube element is sensitive to the element attitude caused by the Coriolis force, and that a valveless piezoelectric pump is designed by applying this phenomenon. The pump has gyroscopic effect, and has both the actuator function of fluid transfer and the sensor function, which can obtain the angular velocity when its attitude changes. First, the present paper analyzes the flow characteristics in the tube, obtains the calculation formula for the pump flow, and identifies the relationship between pump attitude and flow, which clarifies the impact of flow and driving voltage, frequency, spiral line type and element attitude, and verifies the gyroscopic effect of the pump. Then, the finite element simulation is used to verify the theory. Finally, a pump is fabricated for experimental testing of the relationship between pump attitude and pressure differential. Experimental results show that when Archimedes spiral θ=4π is selected for the tube design, and the rotation speed of the plate is 70 r/min, the pressure differential is 88.2 Pa, which is 1.5 times that of 0 r/min rotation speed. The spiral-tube-type valveless piezoelectric pump proposed can turn the element attitude into a form of pressure output, which is important for the multi-function integration of the valveless piezoelectric pump and for the development of civil gyroscope in the future.

Effects of Driving Mode on the Performance of Multiple-Chamber Piezoelectric Pumps with Multiple Actuators

Due to the limited output capability of piezoelectric diaphragm pumps, the driving voltage is frequently increased to obtain the desired output. However, the excessive voltage application may lead to a large deformation in the piezoelectric ceramics, which could cause it to breakdown or become damaged. Therefore, increasing the number of chambers to obtain the desired output is proposed. Using a check-valve quintuple-chamber pump with quintuple piezoelectric actuators, the characteristics of the pump under different driving modes are investigated through experiments. By changing the number and connection mode of working actuators, pump performances in terms of flow rate and backpressure are tested at a voltage of 150 V with a frequency range of 60 Hz -400 Hz. Experiment results indicate that the properties of the multiple-chamber pump change significantly with distinct working chambers even though the number of pumping chambers is the same. Pump performance declines as the distance between the working actuators increases. Moreover, pump performance declines dramatically when the working piezoelectric actuator closest to the outlet is involved. The maximum backpressures of the pump with triple, quadruple, and quintuple actuators are increased by 39%, 83%, and 128%, respectively, compared with the pump with double working actuators; the corresponding maximum flow rates of the pumps are simply increased by 25.9%, 49.2%, and 67.8%, respectively. The proposed research offers practical guidance for the effective utilization of the multiple-chamber pumps under different driving modes.

Theory and Experimental Verification on Cymbal-shaped Slotted Valve Piezoelectric Pump

Valve piezoelectric pumps usually have larger flow rate than that of valveless ones. However, the traditional cantilever valve easily induces stress concentration which impacts the reliability of pumps. Therefore, a cymbal-shaped slotted check valve is proposed to be applied in a piezoelectric pump in order to reduce the stress concentration of the valve and thus improve the reliability of the piezoelectric pump. The structure and working principle of the piezoelectric pump are analyzed; the stress analysis of the cymbal-shaped slotted valve diaphragm is conducted. In addition, finite element software is employed to analyze the difference of the Von-Mises stress between the cymbal-shaped slotted diaphragm and the slotted flat diaphragm. The simulation results show that, the Von-Mises stress of cymbal-shaped slotted diaphragm is smaller than that of the slotted flat one. Furthermore, the cymbal-shaped slotted valve piezoelectric pump is also fabricated, and flow rate experiment is performed. The experimental results indicate that the flow rate of piezoelectric pump working in low frequencies(0 Hz < f< 50 Hz) is larger than that working in high frequencies(200 Hz < f< 2000 Hz). When driven at voltage of 160 V and frequency of 5 Hz, the pump reaches its maximum flow rate of 6.6 g/min. The experimental results validate the feasibility of the cymbal-shaped slotted check valve. This research can effectively solve the problem of stress concentration of valve piezoelectric pumps and is helpful for improving the reliability of them.

Advances in Technologies of Piezoelectric Pumping with Valves

Piezoelectric pump faces unprecedented challenges when higher expectation and requirements need to be met in their applications mainly to medical treatment,hygiene and public health,and preventive healthcare.Specifically,the piezoelectric pump with valve has the disadvantages of complex structure,high duty cycle of valves,and valve movement lagged behind piezoelectric ceramics oscillation.In an attempt to inhibit its shortcomings,some researchers presented novel concepts for structural design of piezoelectric pump with valve,which could become a new research focus.Among them,the investigation into various soft valves,represented by soft structure valves made of rigid materials and soft material valves made of flexible materials,has been fruitful in recent years.The integrated design of both material and structure can tackle the problems encountered in the study of piezoelectric pump with valve,thus simplifying the pump structure,reducing the duty-cycle of valves,and improving the lagging of valve motion.In addition,new inventions of pump structure have sprung up,such as the pumps containing a single-chamber with double-drive,single-chamber with single-drive in series and single-chamber with single-drive in parallel,as well as the mixed-chamber in series and parallel.After surveying the recent progresses made by dominant academia in the development of piezoelectric pump encompassing valve,with a particular emphasis on structure design of both valve and pump body,we also summarize and identify the future research directions.

3D FEM Analyses on Flow Field Characteristics of the Valveless Piezoelectric Pump

Due to the special transportation and heat transfer characteristics,the fractal-like Y-shape branching tube is used in valveless piezoelectric pumps as a no-moving-part valve.However,there have been little analyses on the flow resistance of the valveless piezoelectric pump,which is critical to the performance of the valveless piezoelectric pump with fractal-like Y-shape branching tubes.Flow field of the piezoelectric pump is analyzed by the finite element method,and the pattern of the velocity streamlines is revealed,which can well explain the difference of total flow resistances of the piezoelectric pump.Besides,simplified numerical method is employed to calculate the export flow rate of piezoelectric pump,and the flow field of the piezoelectric pump is presented.The FEM computation shows that the maximum flow rate is 16.4 m L/min.Compared with experimental result,the difference between them is just 55.5%,which verifies the FEM method.The reasons of the difference between dividing and merging flow resistance of the valveless piezoelectric pump with fractal-like Y-shape branching tubes are also investigated in this method.The proposed research provides the instruction to design of novel piezoelectric pump and a rapid method to analyse the pump flow rate.

Multi-Field Analysis and Experimental Verification on Piezoelectric Valve-Less Pumps Actuated by Centrifugal Force

A piezoelectric centrifugal pump was developed previously to overcome the low frequency responses of piezoelectric pumps with check valves and liquid reflux of conventional valveless piezoelectric pumps. However, the electro-mechanical-fluidic analysis on this pump has not been done. Therefore, multi-field analysis and experimen- tal verification on piezoelectrically actuated centrifugal valveless pumps are conducted for liquid transport appli- cations. The valveless pump consists of two piezoelectric sheets and a metal tube with piezoelectric elements pushing the metal tube to swing at the first bending resonant fre- quency. The centrifugal force generated by the swinging motion will force the liquid out of the metal tube. The governing equations for the solid and fluid domains are established, and the coupling relations of the mechanical, electrical and fluid fields are described. The bending res- onant frequency and bending mode in solid domain are discussed, and the liquid flow rate, velocity profile, and gauge pressure are investigated in fluid domain. The working frequency and flow rate concerning different components sizes are analyzed and verified through experiments to guide the pump design. A fabricated pro- totype with an outer diameter of 2.2 mm and a length of 80 mm produced the largest flow rate of 13.8 mL/min at backpressure of 0.8 kPa with driving voltage of 80 Vpp. Bysolving the electro-mechanical-fluidic coupling problem, the model developed can provide theoretical guidance on the optimization of centrifugal valveless pump characters.

A Flexible Valve Based Piezoelectric Pump for High Viscosity Cooling Liquid Transportation

A piezoelectric pump with flexible valve has been developed to pump high viscosity cooling liquid in the nanosats thermal control system. The structure of the flexible valve is designed according to the characteristics of the human aortic shape with the aim to simulate the bionic pumping function of the human heart. Dynamic stress-strain features of the flexible valve are analyzed by the finite element method,and the results show that the proposed flexible valve is suitable and functional for the piezoelectric pump. Then the cylinder and diffuser/nozzle piezoelectric pumps based on flexible valves have been developed and fabricated. Experimental results of the output performance indicate that the maximum flow rate of the cylinder piezoelectric pump with flexible valve is 15.38 mL/min,170.77% higher than the diffuser/nozzle piezoelectric pump with flexible valve. The ability of the cylinder piezoelectric pump with flexible valve for transmitting high viscosity liquid has been validated. The piezoelectric pump with flexible valve has potential applications in the nanosats thermal control system.

Design and Experiment of Streamlined Piezoelectric Pump with Low Vortex and Large Flow Rate

Valveless piezoelectric pump is widely used in the medical,however,there is a general and difficult problem to be solved:Low vortex and large flow rate are not compatible,resulting in the blood prone to thrombosis during blood delivery.In this paper,a new valveless piezoelectric(PZT)pump with streamlined flow tubes(streamlined pump)is proposed.The design method and the working principle of the pump are analyzed.The velocity streamlines are simulated,and the results demonstrate that there are no obvious vortexes in the flow tube of the streamlined pump.Five prototype pumps(two cone pumps and three streamlined pumps)are designed and fabricated to perform flow rate and flow resistance experiments.The experimental results illustrate that the maximum flow rate of the streamlined pump is 142 mL/min,which is 179%higher than that of the cone piezoelectric pump,demonstrating that the streamlined pump has a large flow rate performance.This research provides an inspiration for future research on simple structure,low vortex and large flow rate volume-type pumps,and also provides a useful solution for thrombosis preventing.

Principle and Experimental Verification of Caudal-fin-type Piezoelectric-stack Pump with Variable-cross-section Oscillating Vibrator

In the traditional flow-resistance-differential (FRD) type valve-less piezoelectric pump, the generated outflow and pressure are discontinuous because of the inherent periodicity and fluctuation of the pump. To overcome these drawbacks, utilizing the bending vibration of piezoelectric bimorph to drive fluid was conducted. However, our investigation on the current status of this piezoelectric bimorph pump shows that larger driving force and vibration amplitude are required for fluid pumping; the pumping can be realized through the centrifugal force; and the mechanism of fluid pumping is no longer further studied. Based on these cases, the paper designed a piezoelectric-stack pump with variable-cross-section oscillating (VCSO) vibrator by imitating the swing of the caudal-fin of tuna, and the pump is neither the rotating type nor the volumetric type according to the taxonomy. The interaction between the oscillating vibrator and the fluid parcel is firstly analyzed from the viewpoint of momentum conservation, and the analytical expression of pump flow rate is obtained. Then the modal and harmonic response analyses on the vibrator immerged in water are carried out. From the analyses the first two orders resonance frequencies are 832 Hz and 1 939 Hz, respectively, and the peak value of the tip amplitude is 0.6 mm. Laser Doppler vibrometer is used to measure both the frequency and vibration amplitude, and the determined first two orders resonance frequencies are 617 Hz and 1 356 Hz, respectively. The measured tip amplitude reaches to the peak value of 0.3 mm. At last, experimental measurement for the flow rates with different driving frequencies is conducted. The results show that the flow rate can reach 560 mL/min at 1 370 Hz when the pump runs under the backpressure of 30 mm water column. And the flow rate is as much as 560% of that of experiment results carried out by researchers from Brazil. The proposed pump innovates in both theory and taxonomy; in addition, the pump overcomes the drawbacks such as large flow fluctuation and low flow rate in the traditional FRD type pumps, which will help to broaden the application of the valve-less piezoelectric pump.

Fluid Pump Using a Bar-shaped Piezoelectric Transducer

There are two kinds of piezoelectric pumps:check valve pumps and valve-less pumps.Whether to use a check valve or not depends upon the application occasion.To achieve large backpressure for higher flow rates,the pump with check valve is desirable.However,adding check valves implies more complex structure and higher probability of valve blocking,etc.In order to solve the problem,effective driving and transport mechanics with compact construction and reliable service are being sought.In this paper,using the second-order longitudinal vibration mode of a bar-shaped piezoelectric vibrator for driving fluid,a piezoelectric pump is successfully made.The proposed piezoelectric pump consists of coaxial cylindrical shells and a bar-shaped piezoelectric vibrator,which has a disk part and a cone part.The lead zirconium titanate ceramic rings fixed in the vibrator are polarized along the thickness direction.When the second-order longitudinal vibration of the vibrator along its axis is excited,the disk part of the vibrator changes periodically the volume of the chamber and the cone part acts as a pin valve,driving the fluid from the inlet port to the outlet port.Finite elements analysis on the proposed pump model is carried out to verify its operation principle and design by the commercial FEM software ANSYS.Components of the piezoelectric pump were manufactured,assembled,and tested for flow rate and backpressure to validate the concepts of the proposed pump and confirm the simulation results of modal and harmonic analyses.The test results show that the performance of the proposed piezoelectric pump is about 910 mL/min in flow rate with a highest pressure level of 1.5 kPa under 400 V peak-to-peak voltage and 51.7 kHz operating frequency.It is confirmed that this bar-shaped piezoelectric transducer can be effectively applied in fluid transferring mechanism of pump through this research.

Using Finite Element Analysis and Experimental Analysis on Vibration of a Piezoelectric Micro Pump

Due to the rise of biological and MEMS technology in recent years, some micro flow system components have drawn attention and been developed by many investigators. The importance of micro-pumps manufactured is higher than the other part of micro flow system since it is the power source of the entire micro-flow system and responsible for driving working fluid in the microfluidic system. In actual operation, the instability and bad dynamic characteristics of the micro-pump will cause larger fluid flow mobility error, such as transport behavior and response procedures failure, etc., and even damage the microfluidic system. Therefore, to investigate the stability and dynamic characteristics of a micro pump is necessary. The Finite element analysis (FEA), ANSYS Workbench, is employed to analyze the dynamic characteristics of this micro pump, and experiment is also considered in this study.