Control invariant sets play a key role in model predictive control.Using Lyapunov function,a technique is proposed to design control invariant sets of planar systems in a precise form.First,itis designed for a linear ...Control invariant sets play a key role in model predictive control.Using Lyapunov function,a technique is proposed to design control invariant sets of planar systems in a precise form.First,itis designed for a linear system in Brunovsky canonical form.Then,the result is extended to generallinear systems.Finally,the nonlinear control systems are considered,and some sufficient conditionsand design techniques are also obtained.Numerical examples are presented to illustrate the proposeddesign methods.展开更多
The replacement metal gate（RMG） defectivity performance control is very challenging in high-k metal gate（HKMG） chemical mechanical polishing（CMP）. In this study, three major defect types, including fall-on parti...The replacement metal gate（RMG） defectivity performance control is very challenging in high-k metal gate（HKMG） chemical mechanical polishing（CMP）. In this study, three major defect types, including fall-on particles, micro-scratch and corrosion have been investigated. The research studied the effects of polishing pad,pressure, rotating speed, flow rate and post-CMP cleaning on the three kinds of defect, which finally eliminated the defects and achieved good surface morphology. This study will provide an important reference value for the future research of aluminum metal gate CMP.展开更多
基金supported by the National Natural Science Foundation of China under Grant Nos. 60674022, 60736022 and 60821091
文摘Control invariant sets play a key role in model predictive control.Using Lyapunov function,a technique is proposed to design control invariant sets of planar systems in a precise form.First,itis designed for a linear system in Brunovsky canonical form.Then,the result is extended to generallinear systems.Finally,the nonlinear control systems are considered,and some sufficient conditionsand design techniques are also obtained.Numerical examples are presented to illustrate the proposeddesign methods.
基金Project supported by the Major National Science and Technology Special Projects(No.2009ZX02308)the Natural Science Foundation for the Youth of Hebei Province(Nos.F2012202094,F2015202267)the Outstanding Youth Science and Technology Innovation Fund of Hebei University of Technology(No.2013010)
文摘The replacement metal gate（RMG） defectivity performance control is very challenging in high-k metal gate（HKMG） chemical mechanical polishing（CMP）. In this study, three major defect types, including fall-on particles, micro-scratch and corrosion have been investigated. The research studied the effects of polishing pad,pressure, rotating speed, flow rate and post-CMP cleaning on the three kinds of defect, which finally eliminated the defects and achieved good surface morphology. This study will provide an important reference value for the future research of aluminum metal gate CMP.
