Remote plasma enhanced cyclic etching of a cyclosiloxane polymer thin film

The continuous evolution of chip manufacturing demands the development of materials with ultra-low dielectric constants.With advantageous dielectric and mechanical properties,initiated chemical vapor deposited(iCVD)poly(1,3,5-trimethyl-1,3,5-trivinyl cyclotrisiloxane)(pV3D3)emerges as a promising candidate.However,previous works have not explored etching for this cyclosiloxane polymer thin film,which is indispensable for potential applications to the back-end-of-line fabrication.Here,we developed an etching process utilizing O2/Ar remote plasma for cyclic removal of iCVD pV3D3 thin film at sub-nanometer scale.We employed in-situ quartz crystal microbalance to investigate the process parameters including the plasma power,plasma duration and O2 flow rate.X-ray photoelectron spectroscopy and cross-sectional microscopy reveal the formation of an oxidized skin layer during the etching process.This skin layer further substantiates an etching mechanism driven by surface oxidation and sputtering.Additionally,this oxidized skin layer leads to improved elastic modulus and hardness and acts as a barrier layer for protecting the bottom cyclosiloxane polymer from further oxidation.

Electron density measurement of laser-induced epoxy fiber reinforced polymer plasma

Interferograms of laser-induced epoxy fiber reinforced polymer plasmas are obtained through aMach-Zehnder interferometry system. An improved digital double-exposure Fourier method is applied to extractinitial wrapped phases from interferograms, and then an improved phase unwrapping algorithm based on a maskand a branch-cut method is proposed to solve the problem of phase unwrapping. After the inverse Abel transfor-mation of the unwrapped phase, spatial distributions of the electron density of laser-induced epoxy fiber rein-forced polymer plasma at various delays are acquired. Results show that the measured electron density of theplasma is mainly distributed on the order of 10^18 cm^3. The experiment also indicates that the total amount oflaser plasma electrons changes slightly within the recorded time and the change of the electron density is approx-imately inversely proportional to the change of the plasma volume.

Investigation of the performance of a pilot-scale barrel atmospheric plasma system for plasma activation of polymer particles

This study reports the development and performance of a pilot-scale barrel atmospheric plasma reactor for the atmospheric plasma activation treatment of polymer particles. The polymer particles treated included acrylonitrile butadiene styrene(ABS) and polypropylene(PP). These particles had diameters in the range of 3–5 mm. The initial studies were carried out using a laboratory-scale barrel reactor designed to treat polymer particle batch sizes of 20 g. A pilot-scale reactor that could treat 500 g particle batch sizes was then developed to facilitate pre-industrial-scale treatments. The effect of operating pulse density modulation(PDM) in the range 10%–100% and plasma treatment time on the level of activation of the treated polymers were then investigated. ABS revealed a larger decrease in water contact angle compared with PP after plasma treatment under the same conditions. The optimal treatment time of ABS(400 g of polymer particles) in the pilot-scale reactor was 15 min. The plasma-activated polymer particles were used to fabricate dog-bone polymer parts through injection molding.Mechanical testing of the resulting dog-bone polymer parts revealed a 10.5% increase in tensile strength compared with those fabricated using non-activated polymer particles.

Effect of Oxygen on Surface Properties and Drug Release Behavior of Plasma Polymer of n-Butyl Methacrylate

The effects of oxygen on the chemical structure, morphology, hydrophilicity and drug release behavior of radio-frequency plasma poly n- butyl methacrylate （PPBMA） thin film were carded out for the first time. ATR-FTIR and XPS showed that oxygen had little influence on the chemical structure and composition of PPBMAs, which did not agree with the thought that the presence of oxygen gas would increase the oxidized carbon functionalities in the plasma polymer. SEM and static contact angle measurement indicated that in case of deposition with oxygen, the smoothness and hydrophilicity of PPBMA were dramatically improved. The drug release behavior showed that drug release from the PPBMA coating without oxygen was biphasic patterns, while from PPBMA coating with oxygen was Higuchi release. These results were helpful for the design and tailoring of the PPBMA polymer film and other of plasma polymers film, but could provide a new idea for the drug release controlled form.

Deposition of Polymer Thin Film Using an Atmospheric Pressure Micro-Plasma Driven by Dual-Frequency Excitation

Polymer thin film deposition using an atmospheric pressure micro-plasma jet driven by dual-frequency excitations is described in this paper. The discharge process was operated with a mixture of argon （6 slm） and a small amount of acetone （0-2100 ppm）. Plasma composition was measured by optical emission spectroscopy （OES）. In addition to a large number of Ar spectra lines, we observed some spectra of C, CN, CH and C2. Through changing acetone content mixed in argon, we found that the optimum discharge condition for deposition can be characterized by the maximum concentration of carbonaceous species. The deposited film was characterized by scanning electron microscopy （SEM） and X-ray photoelectron spectroscopy （XPS） and Fourier transform infrared （FTIR） spectroscopy. The XPS indicated that the film was mostly composed of C with trace amount of O and N elements. The FTIR suggested different carbon-containing bonds （-CHx, C=O, C=C, C-O-C） presented in the deposited film.

Comparison of Surface Modification of CR-39 Polymer Film Using RF and DC Glow Discharges Plasma

Surfaces of optical elements are deposited by antireflection coatings (ARCs) to decrease the reflection of light. Surface needs treatment before depositing the ARC one of treatment processes by plasma for adhesion improvement and surface hardening. A comparison of RF and DC glow discharges treated CR-39 polymer films gives insight into the mechanism of these surface processes. The surface properties of the plasma-treated samples are examined by microscopy techniques include contact angle measurements, scanning electron microscopy (SEM), atomic force microscopy (AFM), infrared (IR) spectroscopy and refractive index measurements. Results show that the plasma treatment modifies the polymer surface in both composition and morphology. It is found that the surface wettability is enhanced after plasma treatment. It is found that, RF plasma is more effective than DC plasma in CR-39 surface modification, as it implants more oxygen atoms into the surface and makes the contact angle declining to a lower level.

Synthesis and Solid Phase Extraction Performance Study of NNAL-specific Molecularly Imprinted Polymers Using Dummy Templates

Dummy molecularly imprinted polymers （DMIPs） for 4-（methylnitrosamino）-1-（3-pyridyl）-1-butanol （NNAL） were produced using three structural analogues as dummy template molecules. The chosen analogues were 4-（acetymethylamino）-1-（3-pyridyl）-butanol, 4- （methylamino）-1-（3-pyridyl）-1-butanol, and 1-（3-pyridyl）-1,4,-butanediol. The molecular recognition characteristics of the produced polymers were evaluated by X-ray photoelec- tron spectroscopy （XPS） and Fourier transform infrared spectroscopy （FT-IR）. Interactions between NNAL and methacrylic acid should be cooperative hydrogen bonds while the ni- trogen atom of the pyridine ring and the oxygen atom of the nitroso group in NNAL are two of the hydrogen-bond acceptors. It was further demonstrated that DMIP synthesized by 4-（acetymethylamino）-1-（3-pyridyl）-butanol had the best binding performance by XPS and FT-IR. Then dummy molecularly imprinted solid phase extraction （DMISPE） was developed for the determination of the analyte using the hit polymer as the sorbing material. Under optimal conditions, the recovery of NNAL dissolved in standard solution reached 93%. And the investigated polymer exhibited much higher binding of NNAL when nicotine was acted as the competitive molecule. Also the proposed method was applied to the measurement of NNAL spiked in blank urine samples with recoveries ranging from 87.2% to 101.2%.

Thermo-sensitive polymer nanospheres as a smart plugging agent for shale gas drilling operations

Emulsifier-free poly（methyl methacrylate-styrene） [P（MMA-St）] nanospheres with an average particle size of 100 nm were synthesized in an isopropyl alcoholwater medium by a solvothermal method. Then, through radical graft copolymerization of thermo-sensitive mono- mer N-isopropylacrylamide （NIPAm） and hydrophilic monomer acrylic acid （AA） onto the surface of P（MMA- St） nanospheres at 80 ℃, a series of thermo-sensitive polymer nanospheres, named SD-SEAL with different lower critical solution temperatures （LCST）, were prepared by adjusting the mole ratio of NIPAm to AA. The products were characterized by Fourier transform infrared spectroscopy, transmission electron microscopy, thermogravimetric analysis, particle size distribution, and specific surface area analysis. The temperature-sensitive behavior was studied by light transmittance tests, while the sealing performance was investigated by pressure transmission tests with Lungmachi Formation shales. The experimental results showed that the synthesized nanoparticles are sensitive to temperature and had apparent LCST values which increased with an increase in hydrophilic monomer AA. When the temperature was higher than its LCST value, SD- SEAL played a dual role of physical plugging and chemical inhibition, slowed down pressure transmission, and reduced shale permeability remarkably. The plugged layer of shale was changed to being hydrophobic, which greatly improved the shale stability

A New Luminescent Cd(Ⅱ) Coordination Polymer Constructed with 2-(Carboxymethoxy) benzoic Acid

In this work, we synthesized a new Cd（Ⅱ） coordination polymer, [Cd（L）(cmb)H;O]· H;O（1）, by using mixed 2-（carboxymethoxy）benzoic acid（H2 cmb） and typical chelating N-donor ligands 2-（2-fluoro-6-fluorophenyl）-1 H-imidazo[4,5-f][1,10]phenanthroline ligand（L）. 1 crystallizes in monoclinic, space group P21/c with a = 17.6150（8）, b = 9.7811（4）, c = 18.1603（8） ?, β = 118.9150（10）o, V = 2738.9（2） ?;, Z = 4, C28 H20 CdF2 N4 O7, Mr = 674.88, Dc = 1.637 g/cm3, F（000） = 1352, μ（Mo Ka） = 0.865 mm–1, R = 0.0643 and w R = 0.1976. In 1, the cmb2– anions link neighboring Cd（Ⅱ） atoms in a bis-chelating mode, yielding a one-dimensional chain structure along the b axis. The L ligands are attached on one side of the chain through chelating the Cd（Ⅱ） atoms, and are stacked with those of an adjacent chain through π-π interactions to generate a one-dimensional double-chain structure. Furthermore, the one-dimensional double-chains are stacked by C–H???π interactions between the carbon atom of L ligand and the benzene ring of cmb2–ligand to give a layer structure. Moreover, the solid state luminescent property of 1 was also investigated at room temperature.

1D Lanthanide Coordination Polymers Based on 3-(Pyridin-4-yl)benzoic Acid: Syntheses, Structures and Luminescent Properties

ABSTRACT Four novel 1D lanthanide coordination polymers with formula [Ln（3,4-pybz）3（HzO）2. H2O]n （Ln = 1 Sm; 2 Eu; 3 Tb; 4 Dy, 3,4-Hpybz = 3-（pyridin-4-yl）benzoic acid） have been synthesized by hydrothermal reactions of lanthanide oxide and 3-（pyridine-4-yl） benzoic acid. Single-crystal X-ray diffraction shows that the four compounds are isostructural. They all crystallize in a monoelinic system, space group P1^-. They have a doubly carboxylate-bridged infinite-chain structure with alternating Ln-（carboxylate）2-Ln linkages and one chelating carboxylate group on each metal center. The Ln ion also combines to two water molecules to form an eight-coordinate square antiprismatic geometry. The pyridine nitrogen atoms of the ligand do not coordinate to the metal centers but direct the formation of a 3D network through hydrogen bonding with coordinated water molecules. The photoluminescent properties of 2 and 3 have been also studied.

Crystal Structure, Thermal Behavior and Luminescence of a New Copper Coordination Polymer Constructed with 4-(Carboxymethoxy)-benzoic Acid

A new Cu(Ⅱ) coordination polymer, [Cu(L1)(L2)](1), was synthesized under hydrothermal conditions(H_2L1 = 4-(carboxymethoxy)benzoic acid, L2 = 2-(4-fluorophenyl)-1 H-imidazo[4,5-f][1,10]phenanthroline). Crystallographic data for 1: triclinic, space group P1 with a = 9.750(5), b = 10.148(5), c = 12.869(5) ?, α = 104.904(5), β = 102.133(5), γ = 95.219(5)°, V = 1188.7(10) ?~3, Z = 2, C_(28)H_(17)FN_4O_5Cu, Mr = 572.01, D_c = 1.598 g/cm^3, F(000) = 582, μ(MoKa) = 0.977 mm^(-1), R = 0.0474 and w R = 0.1144. The TGA behaviors and luminescence of 1 have been studied in detail. The L1 dianions link neighboring Cu(Ⅱ) atoms in a bis-chelating mode, yielding a one-dimensional chain structure along the b axis. The L2 ligands are attached on one side of the chain through chelating the Cu(Ⅱ) atoms, and are stacked with those of an adjacent chain through π-π interactions, yielding a layer structure. Additionally, the N–H???O hydrogen bonds further stabilize the structure of 1.

A New Cadmium(Ⅱ) Coordination Polymer Constructed by 2-(2-Chloro-6-fluorophenyl)-1H-imidazo[4,5-f][1,10]phenanthroline and 1,2,3-Benzenecarboxylate: Synthesis, Structure and Luminescence

A new Cd（II） coordination polymer, namely, [Cd3（1,2,3-BTC）2（L）2]·2.25H2O （1, L = 2-（2-chloro-6-fluorophenyl）-1H-imidazo[4,5-A][1,10]phenanthroline and 1,2,3-BTC = 1,2,3-ben- zenetricarboxylate）, has been synthesized under hydrothermal conditions. The compound was characterized by single-crystal X-ray diffraction. It crystallizes in triclinic, space group Pī with α = 11.650（2）, b = 12.240（2）, c = 19.760（4） A, α = 72.01（3）, β = 77.11（3）, γ = 83.48（3）°, V = 2609.4（9） A3, Z = 2, C56H31Cd3Cl2F2N8O14.25, Mr = 1489.99, Dc = 1.896 g/cm3, F（000） = 1466, μ（MoKa） = 1.401 mm^-1, R = 0.0401 and wR = 0.1104. Compound 1 shows a 1D chain structure, and the neigh- boring 1D chains of 1 are joined together by π···π interactions to result in a 2D supramolecular layer. In addition, the luminescent property of 1 has been studied in the solid state at room temperature.

Synthesis, Structure and Photoluminescence of a New Cd(Ⅱ) Coordination Polymer Based on 4-(Carboxymethoxy)-benzoic Acid and 1,10-Phenanthroline Derivative

A new ID coordination polymer, [Cda（L1）2（L2）2].H2O （1, H2L1 = 4-（carboxy- methoxy）benzoic acid and L2 = 2-（4-fluorophenyl）-I H-imidazo[4,5-f][1,10]phenanthroline）, has been hydrothermally synthesized and characterized by elemental analysis and single-crystal X-ray diffraction. It crystallizes in triclinic, space group P1 with a = 9.985（5）, b = 10.768（5）, c = 12.512（5） A, a = 68.959（5）, β = 80.354（5）, γ = 79.663（5）°, V= 1227.4（10） A3, Z = 1, C56H36Cd2F2N8O11, Mr = 1259.73, Dc = 1.704 g/cm3, F（000） = 630, μ（MoKa） = 0.949 mm-1, R = 0.0261 and wR = 0.0655. The L1 anions link the neighboring Cd（II） atoms to form a 1D double chain structure. The L2 ligands are alternately located on both sides of the double chains. More interestingly, the lateral L2 ligands from adjacent double chains are paired to furnish strong π-π interactions, yielding a 2D supramolecular layer. N-H...O, O-H...N and O-H...O hydrogen bonds further stabilize the structure of 1. The luminescent property of 1 was studied in solid state at room temperature.

Synthesis, Structure and Characterization of a New Iron Coordination Polymer:[Fe(L)(trans-1,4-chdc)]_n

A novel Fe（II） coordination polymer [Fe（L）（trans-1,4-chdc）];~ has been hydrother- mally synthesized by using 1,4-cyclohexanedicarboxylic acid （1,4-H2chdc） and 2-（2-fluoro- phenyl）-lH-imidazo[4,5-f][1,10]phenanthroline （L）. Crystallographic data： monoclinic, space group C2/c with a = 14.571（5）, b = 32.389（6）, c = 10.948（5）A, 18 = 115.186（5）°, V= 4676（3）A3, Z = 8, C27H21FFeN404, Mr = 540.33, De --- 1.535 g/cm3, F（000） = 2224, μ（MoKa） = 0.697 mmI, R = 0.0462 and wR = 0.1110. The two kinds of trans-l,4-chdc ligands link neighboring Fe（II） atoms to yield a two-dimensional layer structure. The π-π interactions between the L ligands of neighboring layers result in a three-dimensional supramolecular architecture. The IR and UV-vis spectra of the compound have been investigated in detail.

Hydrophobic coating of surfaces by plasma polymerization in an RF plasma reactor with an outer planar electrode:synthesis,characterization and biocompatibility

This paper presents the plasma polymerization of poly（hexafluorobutyl acrylate）（PHFBA） thin films on different substrates in an RF plasma reactor with an outer planar electrode. This reactor configuration allows？large area uniformity and fast processing times. Deposition rates of up to60 nm min-1were observed. The influence？of plasma power and substrate temperature on the？deposition rate, structure and wettability of the as-deposited films was？investigated. It was observed that better hydrophobicity was obtained at high plasma power and in low temperature conditions. PHFBA thin films deposited on electrospun poly（acrylonitrile） fiber mats under such conditions resulted in superhydrophobic surfaces with？contact angle values greater than 150°.In？vitro cell studies using human epithelial cells demonstrated the non-toxic nature of the？plasma-polymerized PHFBA films.

Synthesis and Crystal Structure of a New Lead Coordination Polymer: [Pb(L)(1,4-ndc)]

The title coordination polymer, [Pb（L）（1,4-ndc）] 1 （L = 2-（4-fluorophenyl）-1Himidazo[4,5f1,10]phenanthroline, 1,4-ndc = naphthalene-1,4-dicarboxylic acid）, has been obtained by using hydrothermal synthesis and characterized by elemental analysis, IR and singlecrystal X-ray diffraction. It crystallizes in monoclinic, space group P21/c with a = 10.1043（11）, b = 14.3162（15）, c = 17.6061（18）, β = 95.3990（10）°, V = 2535.5（5）3, Z = 4, C31H17FN4O4Pb, Mr = 735.68, Dc = 1.927 g/cm3, F（000） = 1416, μ（MoKa） = 6.709 mm-1, R = 0.0201 and wR = 0.0489. The 1,4-ndc dianions link neighboring Pb（II） atoms in a bis-chelating mode, yielding a one-dimensional chain structure along the c axis. The C-H···π interactions between the carbon atom of L ligand and the benzene ring of 1,4-ndc lead the one-dimensional chains to form a two-dimensional supramolecular layer. The π-π interactions between L ligand and 1,4-ndc ligand make the two-dimensional layers generate a three-dimensional supramolecular architecture. Additionally, the N-H···O hydrogen bonds further stabilize the structure of 1.

Investigation of working pressure on the surface roughness controlling technology of glow discharge polymer films based on the diagnosed plasma

The effects of working pressure on the component, surface morphology, surface roughness, and deposition rate of glow discharge polymer （GDP） films by a trans-2-butene/hydrogen gas mixture were investigated based on plasma characteristics diagnosis. The composition and ion energy distributions of a multi-carbon （CaHs/H2） plasma mixture at different working pressures were diagnosed by an energy-resolved mass spectrometer （MS） during the GDP film deposition process. The Fourier transform infrared spectroscopy （FT-IR）, field emission scanning electron microscope （SEM） and white-fight interferometer （WLI） results were obtained to investigate the structure, morphology and roughness characterization of the deposited films, respectively. It was found that the degree of ionization of the C4H8/H2 plasma reduces with an increase in the working pressure. At a low working pressure, the C-H fragments exhibited small-mass and high ion energy in plasma. In this case, the film had a low CH3/CH2 ratio, and displayed a smooth surface without any holes, cracks or asperities. While the working pressure increased to 15 Pa, the largest number of large-mass fragments led to the deposition rate reaching a maximum of 2.11 #m h-1, and to hole defects on the film surface. However, continuing to increase the working pressure, the film surface became smooth again, and the interface between clusters became inconspicuous without etching pits.

A New Co(Ⅱ) Coordination Polymer Based on a Flexible 1,4-Cyclohexanedicarboxylic Acid: Synthesis, Structure and Thermal Behavior

A new Co（Ⅱ） coordination polymer, [Co（1,4-chdc）（L）（H2O）]n（1）, was synthesized under hydrothermal condition（1,4-H2chdc = 1,4-cyclohexanedicarboxylic acid, L = 2-（4-fluoro-phenyl）-1 H-imidazo[4,5-f][1,10]phenanthroline）. Its crystal structure was determined by single-crystal X-ray diffraction. 1 crystallizes in triclinic, space group P1 with a = 8.790（5）, b = 10.486（5）, c = 13.305（5） ?, α = 87.391（5）, β = 82.925（5）, γ = 81.841（5）o, V = 1204.2（10） ?3, Z = 2, C27H23FN4O5Co, Mr = 561.42, Dc = 1.548 g/cm3, F（000） = 578, μ（Mo Ka） = 0.769 mm-1, R = 0.0415 and wR = 0.1043. In 1, each 1,4-chdc anion bridges two neighboring Co（Ⅱ） atoms to give a chain structure. The L ligands are attached on one side of the chain through chelating the Co（Ⅱ） atoms, and are stacked with those of an adjacent chain through π-π interactions, yielding a double-chain structure. The double-chain structures are linked into a supramolecular layer structure through N–H···O hydrogen-bonding interactions between the adjacent double-chain structures. Moreover, the thermal behavior of 1 was also studied.

Helical Coordination Polymer with a 3-Fold Interpenetration Structure Based on 5-(Hydroxymethyl)isophthalic Acid

5-（Hydroxymethyl） isophthalic acid （H2HIA） as a novel organic ligand was prepared from 3,5-bis（methoxycarbonyl）benzoic acid by a two-step method. And then, a 3D helical coor- dination polymer with a 3-fold interpenetration structure, namely [Zn1/2（HIA）1/2（DPEE）1/2]n （1）, was hydrothermally synthesized at 160 ℃, using H2HIA ligands to assemble with DPEE ligands and Zn2＋ ions. Complex 1 crystalizes in orthorhombic system, space group Pnna, with a = 8.2118（5）, b = 17.1698（7）, c =14.9922（7） ？, V = 2113.82（18） ？3, μ = 1.194 mm-1, Z = 4 and S = 0.967. Moreover, some physical characteristics of complex 1, such as powder X-ray diffraction （PXRD）, thermogravimetry analyses （TGA） and photoluminescent properties, were also investigated.

Synthesis,Crystal Structure and Magnetic Properties of a Cobalt(Ⅱ)Coordination Polymer with4,4'-(Propane-2,2-diyl)dibenzoate and4,4'-Bis(1-imidazolyl)biphenyl

A novel coordination polymer, {[Co（CBA）（BIMB）0.5]＇H20}n （1, H2CBA = 4,4＇- （propane-2,2-diyl）dibenzoic acid, and BIMB = 4,4＇-bis（1-imidazolyl）biphenyl）, has been hydro- thermally prepared and characterized by IR spectroscopy, elemental analysis and single-crystal X-ray diffraction. The crystal is of monoclinic system, space group P2/c with a = 14.909（3）, b = 7.1963（15）, c = 24.592（5） A, β = 104.312（2）, V = 2556.5（9） A3, C26H23N2OsCo, Mr = 502.39, Dc = 1.305 g/cm3, F（000） = 1040,μ = 0.708 mm-1 and Z = 4. The final R= 0.0580 and wR = 0.1605 for 3228 observed reflections （1 〉 2a（I））. Single-crystal structure analysis shows that complex 1 exhibits a three-dimensional 2-fold interpenetrating pillared helical-layer open framework of a-Po topology based upon binuclear paddlewheel units. Moreover, its magnetic properties have also been investigated.