High performance micromachining of sapphire by laser induced plasma assisted ablation(LIPAA)using GHz burst mode femtosecond pulses

GHz burst-mode femtosecond(fs)laser,which emits a series of pulse trains with extremely short intervals of several hundred picoseconds,provides distinct characteristics in materials processing as compared with the conventional irradiation scheme of fs laser(single-pulse mode).In this paper,we take advantage of the moderate pulse interval of 205 ps(4.88 GHz)in the burst pulse for high-quality and high-efficiency micromachining of single crystalline sapphire by laser induced plasma assisted ablation(LIPAA).Specifically,the preceding pulses in the burst generate plasma by ablation of copper placed behind the sapphire substrate,which interacts with the subsequent pulses to induce ablation at the rear surface of sapphire substrates.As a result,not only the ablation quality but also the ablation efficiency and the fabrication resolution are greatly improved compared to the other schemes including single-pulse mode fs laser direct ablation,single-pulse mode fs-LIPAA,and nanosecond-LIPAA.

Influence of reaction gas flows on the properties of SiGe:H thin film prepared by plasma assisted reactive thermal chemical vapour deposition

A new preparing technology, very high frequency plasma assisted reactive thermal chemical vapour deposition （VHFPA-RTCVD）, is introduced to prepare SiGe：H thin films on substrate kept at a lower temperature. In the previous work, reactive thermal chemical vapour deposition （I^TCVD） technology was successfully used to prepare SiGe：H thin films, but the temperature of the substrate needed to exceed 400℃. In this work, very high frequency plasma method is used to assist RTCVD technology in reducing the temperature of substrate by largely enhancing the temperature of reacting gases on the surface of the substrate. The growth rate, structural properties, surface morphology, photo- conductivity and dark-conductivity of SiGe：H thin films prepared by this new technology are investigated for films with different germanium concentrations, and the experimental results are discussed.

Quantitative behavior of vibrational excitation in AC plasma assisted dry reforming of methane

Quantitative behavior of non-equilibrium excitation by direct electron impact in low-temperature dry reforming of methane was investigated by integrated studies of experimental validation and kinetic modeling.A plasma chemistry kinetic mechanism incorporating the reactions involving vibrational excitation of CH4,CO2,H2 and CO molecules as well as the low temperature He/CH4/CO2 conversion pathways was developed and validated.The calculation results showed that at lower E/N values(<150 Td)large population of energized electrons generated in a He/CH4/CO2 discharge resulted in an intensification of vibrational excitation.Despite the large generation of vibration,the vibrationally excited molecules in a 0.5/0.25/0.25 of He/CH4/CO2 discharge mixture were easy to relax,due to the strong coupling of the vibration of different molecules in a gas mixture.The results showed that the moderate levels of the vibrational excitation,such as CO2(v10,11,...,18)and CO(v9,10),presented most efficient in the stimulation of species generation including CO,CH2 O,CH3 OH,C2 H4 and C2 H6.Specifically,under conditions of E/N of 108 Td,14.9%of CO formation was estimated from the recombination of CO2(v)with CH3 and H,CO2(v)+CH3→CH3 O+CO,CO2(v)+H→CO+OH.Also,4.8%of C2 H4 formation was from the recombination reaction CH4(v)+CH→C2 H4+H.These results highlight the strong roles of vibrational states in a complex plasma chemistry system.

Investigation of flame structure in plasma-assisted turbulent premixed methane-air flame

The mechanism of plasma-assisted combustion at increasing discharge voltage is investigated in detail at two distinctive system schemes（pretreatment of reactants and direct in situ discharge）.OH-planar laser-induced fluorescence（PLIF） technique is used to diagnose the turbulent structure methane-air flame,and the experimental apparatus consists of dump burner,plasma-generating system,gas supply system and OH-PLIF system.Results have shown that the effect of pretreatment of reactants on flame can be categorized into three regimes：regime I for voltage lower than 6.6 k V;regime II for voltage between 6.6 and 11.1 k V;and regime III for voltage between11.1 and 12.5 k V.In regime I,aerodynamic effect and slower oxidation of higher hydrocarbons generated around the inner electrode tip plays a dominate role,while in regime III,the temperature rising effect will probably superimpose on the chemical effect and amplify it.For wire-cylinder dielectric barrier discharge reactor with spatially uneven electric field,the amount of radicals and hydrocarbons are decreased monotonically in radial direction which affects the flame shape.With regard to in situ plasma discharge in flames,the discharge pattern changes from streamer type to glow type.Compared with the case of reactants pretreatment,the flame propagates further in the upstream direction.In the discharge region,the OH intensity is highest for in situ plasma assisted combustion,indicating that the plasma energy is coupled into flame reaction zone.

Simultaneous catalytic removal of NOx and diesel PM over La_(0.9) K_(0.1) CoO_3 catalyst assisted by plasma

The simultaneous removal of NOx and particulate matter(PM) from diesel exhaust is investigated over a mixed metal oxide catalyst of La 0.9 K 0.1 CoO 3 loaded on γ-Al 2O 3 spherules with the assistant of plasma. It was found that NOx was reduced by PM in oxygen rich atmosphere, the CO 2 and N 2 were produced in the same temperature window without considering the N 2 formed by plasma decomposition. As a result, the temperature for the PM combustion decreases and the reduction efficiency of NOx to N 2 increases during the plasma process, which indicated that the activity of the catalyst can be improved by plasma. The NOx is decomposed by plasma at both low temperature and high temperature. Therefore, the whole efficiency of NOx conversion is enhanced.

Non-Conventional Plasma Assisted Catalysts for Diesel Exhaust Treatment: A Case Study

This paper reports the application of pulse discharges along with catalysts in treat- ing the exhaust gas at higher temperatures. In the present work a plasma reactor, filled with catalysts, called as plasma catalytic reactor, is studied for removal of oxides of nitrogen, total hydrocarbons and carbon monoxide. The experiments are conducted on an actual diesel engine exhaust at no-load and at different temperatures starting from room temperature to 300°C. The removal efficiencies of these pollutants are studied. The experiments are carried out with both con- ventional and non-conventional catalysts. The idea is to explore the pollutant removal efficiency characteristics by non-conventional catalysts. The efficiency results are compared with that of conventional catalysts. The experiments are carried out at a constant pulse repetition rate of 120 pps. Both pellet and honeycomb type catalysts are used in the study.

Characteristics and properties of metal aluminum thin films prepared by electron cyclotron resonance plasma-assisted atomic layer deposition technology

Metal aluminum （A1） thin films are prepared by 2450 MHz electron cyclotron resonance plasma-assisted atomic layer deposition on glass and p-Si substrates using trimethylaluminum as the precursor and hydrogen as the reductive gas. We focus our attention on the plasma source for the thin-film preparation and annealing of the as-deposited films relative to the surface square resistivity. The square resistivity of as-deposited A1 films is greatly reduced after annealing and almost reaches the value of bulk metal. Through chemical and structural analysis, we conclude that the square resistivity is determined by neither the contaminant concentration nor the surface morphology, but by both the crystallinity and crystal size in this process.

Numerical simulation of plasma-assisted combustion of methane-air mixtures in combustion chamber

A two-dimensional mathematical model was developed to investigate the effects of dielectric barrier discharge （DBD） plasma on CH4-air mixtures combustion at atmospheric pressure. Considering the physical and chemical processes of plasma-assisted combustion （PAC）, plasma discharge, heat transfer and turbulent were simultaneously coupled into simulation of PAC. This coupling model consists of DBD kinetic model and methane combustion model. By comparing simulations and the original reference＇s results, a high-accuracy of this model was validated. In addition, the effects of PAC actuation parameters on combustion characteristics were studied. Numerical simulations show that with an inlet airflow velocity of 10 m s-1, a CH4-air mixtures＇ equivalence ratio of 0.5, an applied voltage of 10 kV, a frequency of 1200 kHz, compared to conventional combustion （CC）, the highest flame temperature rises by 32 K; outlet temperature distribution coefficient drops by 2.3%; the maximum net reaction rate of CH4 and H20 increase by 11.22% and 12.80% respectively; the maximum CO emission index decreases by 14.61%; the mixing region turbulence mixing time reduces by 89 ms.

Experimental investigation of effects of airflows on plasma-assisted combustion actuator characteristics

The effects of the airflow on plasma-assisted combustion actuator （PACA） characteristics are studied in detail. The plasma is characterized electrically, as well as optically with a spectrometer. Our results show that the airflow has an obvious influence on the PACA characteristics. The breakdown voltage and vibrational temperature decrease, while the discharge power increases compared with the stationary airflow. The memory effect of metastable state species and the transportation characteristics of charged particles in microdischarge channel are the dominant causes for the variations of the breakdown voltage and discharge power, respectively, and the vibrational temperature calculated in this work can describe the electron energy of the dielectric barrier discharge plasma in PACA. These results offer new perspectives for the use of PACA in plasma-assisted combustion.

Structural Evolution of SiC Films During Plasma-Assisted Chemical Vapour Deposition

Evolution of chemical bonding configurations for the films deposited from hexam- ethyldisiloxane （HMDSO） diluted with H2 during plasma assisted chemical vapour deposition is investigated. In the experiment a small amount of CH4 was added to adjust the plasma environment and modify the structure of the deposited films. The measurements of Raman spectroscopy and X-ray diffraction （XRD） revealed the production of 6H-SiC embedded in the amorphous matrix without the input of CH4. As CH4 was introduced into the deposition reaction, the transition of 6H-SiC to cubic SiC in the films took place, and also the film surfaces changed from a structure of ellipsoids to cauliflower-like shapes. With a further increase of CH4 in the flow ratio, the obtained films varied from Si-C bonding dominant to a sp^2/sp^3 carbon-rich composition.

Effect of actuating voltage and discharge gap on plasma assisted detonation initiation process

The influence of actuating voltage and discharge gap on plasma assisted detonation initiation by alternating current dielectric barrier discharge was studied in detail.A loose coupling method was used to simulate the detonation initiation process of a hydrogen–oxygen mixture in a detonation tube under different actuating voltage amplitudes and discharge gap sizes.Both the discharge products and the detonation forming process assisted by the plasma were analyzed.It was found that the patterns of the temporal and spatial distributions of discharge products in one cycle keep unchanged as changing the two discharge operating parameters.However,the adoption of a higher actuating voltage leads to a higher active species concentration within the discharge zone,and atom H is the most sensitive to the variations of the actuating voltage amplitude among the given species.Adopting a larger discharge gap results in a lower concentration of the active species,and all species have the same sensitivity to the variations of the gap.With respect to the reaction flow of the detonation tube,the corresponding deflagration to detonation transition（DDT） time and distance become slightly longer when a higher actuating voltage is chosen.The acceleration effect of plasma is more prominent with a smaller discharge gap,and the benefit builds gradually throughout the DDT process.Generally,these two control parameters have little effect on the amplitude of the flow field parameters,and they do not alter the combustion degree within the reaction zone.

Vacuum Assisted Closure (VAC) and Platelet-Rich Plasma (PRP): A Successful Combination in a Challenging Case of Gastroschisis

Giant gastroschisis could be a surgical challenge concerning the abdominal wall reconstruction. Many techniques have been described for both primary or staged closure but sometimes neither of them is succesful in all patients. We are presenting the combined use of Vacuum Assisted Closure (VAC) and Platelet-Rich Plasma (PRP) to improve the result in this difficult case. The use of VAC device is a well known procedure in the treatment of adult difficult wounds closure. It consists of a sponge applied directly on the abdominal wall defect, covered with a transparent dressing and connected to a controlled continuous negative pressure system [1]. Platelet-rich plasma (PRP) is an autologous concentration of human platelets in a small volume of plasma. Due to this combination it provides multiple growth and healing factors actively secreted by platelets which have been shown to begin and accelerate wound healing [2] [3]. The association between VAC and PRP was effective in the shrinkage and reduction of the abdominal defect. Fifteen months after the removal of the VAC device the fascia appears competent with a cutaneus scar that will need a plastic correction in the future. The VAC should be considered as a helpful and effective device in case of complicated giant gastroschisis or omphalocele when traditional treatment is not sufficient.

Effect of actuating frequency on plasma assisted detonation initiation

Aiming at studying the influence of actuating frequency on plasma assisted detonation initiation by alternating current dielectric barrier discharge, a loosely coupled method is used to simulate the detonation initiation process of a hydrogenoxygen mixture in a detonation tube at different actuating frequencies. Both the discharge products and the detonation forming process which is assisted by the plasma are analyzed. It is found that the patterns of the temporal and spatial distributions of discharge products in one cycle are not changed by the actuating frequency. However, the concentration of every species decreases as the actuating frequency rises, and atom O is the most sensitive to this variation, which is related to the decrease of discharge power. With respect to the reaction flow of the detonation tube, the deflagration-todetonation transition（DDT） time and distance both increase as the actuating frequency rises, but the degree of effect on DDT development during flow field evolution is erratic. Generally, the actuating frequency affects none of the amplitude value of the pressure, temperature, species concentration of the flow field, and the combustion degree within the reaction zone.

Tuning the Spatially Controlled Growth,Structural Self-Organizing and Cluster-Assembling of the Carbyne-Enriched Nano-Matrix during Ion-Assisted Pulse-Plasma Deposition

Carbyne-enriched nanomaterials are of current interest in nanotechnology-related applications.The properties of these nanomaterials greatly depend on their production process.In particular,structural self-organization and auto-synchronization of nanostructures are typical phenomena observed during the growth and heteroatom-doping of carbyne-enriched nanostructured metamaterials by the ion-assisted pulse-plasma deposition method.Accordingly,fine tuning of these processes may be seen as the key step to the predictive designing of carbyneenriched nano-matrices with improved properties.In particular,we propose an innovative concept,connected with application of the vibrational-acoustic effects and based on universal Cymatics mechanisms.These effects are used to induce vibration-assisted self-organized wave patterns together with the simultaneous manipulation of their properties through an electric field.Interaction between the inhomogeneous electric field distribution generated on the vibrating layer and the plasma ions serves as the additional energizing factor controlling the local pattern formation and self-organization of the nano-structures.

Preparation of Diamond-like Carbon Film Assisted in the Plasma of Dielectric Barrier Discharge at Atmospheric Pressure

Dielectric barrier discharge at atmospheric presure has been applied to prepare hydrocarbon films on large- area glass and silicon substrates. When hydrogen and methane mixture(2:1) is used as discharge gas and the substrate is heated to 300 C, hard hydrogenated amorphous carbon film is deposited. From the IR deconvolution analysis of the C-H stretching absorption for the coating, the hydrocarbon group ration (CH3:CH2:CH) and C-C bond type ratio (sp3c/sp2c) are about 10%: 21%: 69% and 3:1~6:1,respectively. Their Knoop hardness is up to 10Gpa. No film isdeposited when the content of methane in the mixed gases is decreased to 5% at 300 C silicon substrate.

Effects of AlN nucleation layer thickness on crystal quality of AlN grown by plasma-assisted molecular beam epitaxy

In this paper, the effects of thickness of AlN nucleation layer grown at high temperature on AlN epi-layer crystalline quality are investigated. Crack-ftee AlN samples with various nucleation thicknesses are grown on sapphire substrates by plasma-assisted molecular beam epitaxy. The AlN crystalline quality is analysed by transmission electron microscope and x-ray diffraction （XRD） rocking curves in both （002） and （102） planes. The surface profiles of nucleation layer with different thicknesses after in-situ annealing are also analysed by atomic force microscope. A critical nucleation thickness for realising high quality AlN films is found. When the nucleation thickness is above a certain value, the （102） XRD full width at half maximum （FWHM） of AlN bulk increases with nucleation thickness increasing, whereas the （002） XRD FWHM shows an opposite trend. These phenomena can be attributed to the characteristics of nucleation islands and the evolution of crystal grains during AlN main layer growth.

Remote-Plasma-Assisted Deposition of Pentacene Layer Using Atomic-Hydrogen

Pentacene thin layers were deposited on Si with the native oxide at 80°C by remote-plasma-assisted deposition (RPAD) using hydrogen-plasma cell to supply atomic hydrogen radicals. The deposition rate was increased by RPAD comparing to that by non-excited hydrogen gas supply whereas thermal evaporation rate of pentacene from crucible was same in the both process. DFM and XRD studies showed the grain laterally grew in the thin film phase with the size above 10 μm by RPAD. First-principles molecular orbital calculations suggested pentacene is evaporated from crucible as the trimer or larger cluster but atomic hydrogen penetrated into the cluster enhances cracking of pentacene clusters to the monomer.

Increasing ZnO Growth Rate by Modifying Oxygen Plasma Conditions in Plasma-Assisted Molecular Beam Epitaxy

The authors report that the growth rate of ZnO can be significantly increased by modifying the oxygen plasma conditions in plasma-assisted molecular beam epitaxy. Both the aperture diameter and the distance between the plasma source and the substrate affect the growth rate and the quality of the ZnO films. A short source to substrate distance is essential in achieving higher growth rate, which is explained by reduced chance of oxygen atom collisions to accommodate the short oxygen mean free path at high background pressure. At a shorter source to substrate distance, the growth rate is higher with a larger aperture diameter. The quality of the ZnO thin films grown under different conditions is assessed by x-ray diffraction and room-temperature photoluminescence measurements.

Evaluation of gases'molecular abundance ratio by fiber-optic laser-induced breakdown spectroscopy with a metal-assisted method

A metal-assisted method is proposed for the evaluation of gases’molecular abundance ratio in fiber-optic laser-induced breakdown spectroscopy(FO-LIBS).This method can reduce the laser ablation energy and make gas composition identification possible.The principle comes from the collision between the detected gases and the plasma produced by the laser ablation of the metal substrate.The interparticle collision in the plasma plume leads to gas molecules dissociating and sparking,which can be used to determine the gas composition.The quantitative relationship between spectral line intensity and molecular abundance ratio was developed over a large molecular abundance ratio range.The influence of laser ablation energy and substrate material on gas quantitative calibration measurement is also analyzed.The proposed metal-assisted method makes the measurement of gases’molecular abundance ratios possible with an FO-LIBS system.

Experimental Study of MHD-Assisted Mixing and Combustion Under Low Pressure Conditions

In order to reveal the mechanism of MHD-assisted mixing, and analyse the major parameters which influence the effect of MHD-assisted mixing, experiments of MHD-assisted mixing are carried out with a non-premixed butane-air combustion system. The evolvement of the discharge section and the effect of MHD-assisted mixing on combustion are investigated by changing the magnetic flux density and airflow velocity. The results show that the discharge area not only bends but also rotates around the centered wire electrode, which are mainly caused by the Lorentz force. Moreover, the highest curvature occurs near the centered wire electrode.The discharge localizes near the surface of the wire electrode and annular electrode when there is no ponderomotive force. However, if the ponderomotive force is applied, the discharge happens between these two electrodes and it gradually shrinks with time. The discharge area cannot localize near the annular electrode, which is due to the increase of energy loss in the airflow.When the airflow velocity exceeds a certain value, the discharge section becomes unstable because the injected energy cannot maintain the discharge. The rotation motion of the discharge section could enlarge the contact surface between butane and air, and is therefore beneficial for mixing and combustion. Magnetic flux density and airflow velocity are critical parameters for MHD-assisted mixing.