Plasma density enhancement in radio-frequency hollow electrode discharge

The plasma density enhancement outside hollow electrodes in capacitively coupled radio-frequency(RF) discharges is investigated by a two-dimensional(2D) particle-in-cell/Monte-Carlo collision(PIC/MCC) model. Results show that plasma exists inside the cavity when the sheath inside the hollow electrode hole is fully collapsed, which is an essential condition for the plasma density enhancement outside hollow electrodes. In addition, the existence of the electron density peak at the orifice is generated via the hollow cathode effect(HCE), which plays an important role in the density enhancement. It is also found that the radial width of bulk plasma at the orifice affects the magnitude of the density enhancement, and narrow radial plasma bulk width at the orifice is not beneficial to obtain high-density plasma outside hollow electrodes.Higher electron density at the orifice, combined with larger radial plasma bulk width at the orifice,causes higher electron density outside hollow electrodes. The results also imply that the HCE strength inside the cavity cannot be determined by the magnitude of the electron density outside hollow electrodes.

Preparation of a beam emission spectroscopy diagnostic based on a Lyman-alpha line to diagnose core and edge-plasma density fluctuation on the HL-2A tokamak

In this article,the design of a Lyman-alpha-based beam emission spectroscopy(LAB)diagnostic on the HL-2A tokamak has been proposed for the first time.The purpose of this novel diagnostic is to measure density fluctuations of tokamak plasma.The light-collection system of LAB,which consists of the first mirror and two groups of coaxial double-mirror telescopes,can realize a twosegmented viewing field ofρ=0–0.2 andρ=0.75–1,which is optimized to measure plasma density fluctuation,not only in the edge transport barrier region but also in the internal transport barrier region,to investigate the underlying physics of turbulence in tokamaks.Spectrometers are developed to separate out the Doppler-shifted target line(122.03 and 122.17 nm)from the background Lyman-alpha line(121.53 nm).Here,30 Core-LAB channels and 30 Edge-LAB channels are under development on the HL-2A tokamak.It has high radial spatial resolutions of about 2.7 mm and 3.3 mm for the core and edge channels,respectively.Taking the high light intensity of this Lyman-alpha line into account,temporal resolution of 200 k Hz can be ensured by broad bandwidth amplifiers.This high spatio-temporal resolution makes LAB a potential keen tool to experimentally investigate tokamak plasma physics.

Spatial Distribution of ECR Plasma Density in ECR-PECVD Reaction Chamber

The spatial distribution of Electron Cyclotron Resonance （ECR） plasma in the ECRPlasma Enhanced Metalorganic Chemical Vapour Deposition （ECR-PECVD） reaction chamber is diagnosed by a Langmuir probe. The uniformity is also investigated. The results show that the ECR plasma in the upper region of the reaction chamber under the influence of magnetic field has poor radial and axial uniformity. However, the plasma in the downstream region of the reaction chamber has fine radial uniformity. This excellent uniform plasma in the downstream has extensive application in plasma process.

Plasma Density Influence on the Properties of a Plasma Filled Rod Pinch Diode

The rod pinch diode is perfect as a source of accelerators for flash X-ray radiography by virtue of a small and stable spot. But it is not suitable for intensive curreЦt drivers because of high diode impendence of 40～60Ω. However, by employing pre-filled plasma into diode prior to the driving current, the diode impendence can be effectively reduced. Plasma density plays an important role in this process, especially for sheath formation and space charge current in the diode. Analysis and simulation results show that a proper range of plasma density could be 1015～1016 cm-3.

Determinations of plasma density and decay time in the hollow cathode discharge by microwave transmission

The microwave （MW） transmission method is employed to measure both the plasma density and the plasma decay time in the hollow cathode discharge （HCD） in argon at low pressure. The plasma density in DC-driven or pulsed HCD is on the order of 1012 cm-3, which can block the X-band MW effectively. In the case of pulsed HCD, the MW transmittance shows the same waveform as the pulsed current during the rising edge if the driving frequency is low, but with a longer delay during the falling edge. The MW transmittance reaches a constant low level when the driving frequency is high enough. The plasma decay time in the HCD system is measured to be about 100 μs around a pressure of 120 Pa. The ambipolar diffusion is considered to be the major mechanism in the decay process.

Characterisation of the plasma density with two artificial neural network models

This paper establishes two artificial neural network models by using a multi layer perceptron algorithm and radial based function algorithm in order to predict the plasma density in a plasma system. In this model, the input layer is composed of five neurons： the radial position, the axial position, the gas pressure, the microwave power and the magnet coil current. The output layer is the target output neuron： the plasma density. The accuracy of prediction is tested with the experimental data obtained by the Langmuir probe. The effectiveness of two artificial neural network models are demonstrated, the results show good agreements with corresponding experimental data. The ability of the artificial neural network model to predict the plasma density accurately in an electron cyclotron resonance-plasma enhanced chemical vapour deposition system can be concluded, and the radial based function is more suitable than the multi layer perceptron in this work.

Iterative Calculation of Plasma Density from a Cylindrical Probe Characteristic

A novel method is proposed for treating cylindrical probe characteristics to obtain plasma density. The method consists of exponential extrapolation of the transitional part of the I -V curve to the floating potential for the ion saturation current, other than the existing theories which use the ion branch, and an iterative sheath thickness correction procedure for improved accuracy. The method was tested by treating Langmuir probe I-V characteristics obtained from inductively coupled Ar discharges at various pressures, and comparing the present results with those deduced by existing theories. It was shown that the plasma densities obtained by the present method are in good agreement with those calculated by the Allen-Boyd-Reynolds （ABR） theory, suggesting the effectiveness of the proposed method. Without need of manual setting and adjustment of fitting parameters, the method may be suitable for automatic and real time processing of probe characteristics.

Plasma Density Measurements in Cable Gun Experiments with a Sensitive He-Ne Interferometer

A time-resolved sensitive He-Ne laser interferometer without complicated active stabilization was built up and applied to low-density plasma measurements. A precision of about 0.2° in phase measurements was achieved with a minimum line-integrated plasma density as low as 8.3× 10^13 cm^-2. With this interferometer, the characteristics of the plasma generated by a cable plasma gun was investigated systematically. The reproducibility, spatial and temporal distributions and the averaged injection velocity of the plasma are presented. In addition, the interaction of the plasma flow with a conductor was studied by placing a metal plate in the downstream of the cable gun.

High Selective Etching of Aluminum Alloys In High Plasma Density Reactor

An inductively coupled plasma (ICP) discharge and its etching behaviors for aluminum alloys were investigated in this report. A radio frequency power supply was used for plasma generation. The unique hardware configuration enabled one to control ion energy separately from plasma density. Plasma properties were measured with a Langmuir probe. Electron temperature, plasma potential and plasma density were found to be comparable with those reported from Electron Cyclotron Resonance (ECR) and other types of reactors[1].A mixture of HBr and chlorine gases were used for this aluminum etch study. Experimental matrices were designed with Response Surface Methodology (RSM) to analyze the process trends versus etch parameters, such as source power, bias power and gas composition. An etch rate of 8500A to 9000A per minute was obtained at 5 to 15 mTorr pressure ranges. Anisotropic profiles with high photoresist selectivity (5 to 1) and silicon dioxide selectivity greater than 10 were achieved with HBr addition into chlorine plasma.Bromine-containing chemistry for an aluminum etch in a low pressure ICP discharge showed great potential for use in ULSI fabrication. In addition, the hardware used was very simple and the chamber size was much smaller than other high density plasma sources.

A Study of Energy Conversion Efficiency Versus Plasma Density by Lower Hybrid Current Drive in HT-7 Tokamak

Ramp-up experiments by means of lower hybrid wave on HT-7 superconducting tokamak have been performed and analyzed. A ramp-up rate of over 300 kA/s is obtained and a conversion efficiency of over 1.0% has been achieved during the ramp-up phase. The study of the dependence of conversion efficiency on plasma density shows that the conversion efficiency is affected by the driven current, which is mainly dominated by the competition of impurity concentration with wave accessibility condition. In addition, the effect of current profile may play an important role in determining the conversion efficiency.

Depolarization of intense laser beams by dynamic plasma density gratings

As a typical plasma-based optical element that can sustain ultra-high light intensity,plasma density gratings driven by intense laser pulses have been extensively studied for wide applications.Here,we show that the plasma density grating driven by two intersecting driver laser pulses is not only nonuniform in space but also varies over time.Consequently,the probe laser pulse that passes through such a dynamic plasma density grating will be depolarized,that is,its polarization becomes spatially and temporally variable.More importantly,the laser depolarization may spontaneously take place for crossed laser beams if their polarization angles are arranged properly.The laser depolarization by a dynamic plasma density grating may find application in mitigating parametric instabilities in laser-driven inertial confinement fusion.

Measurements of plasma density profile evolutions with a channel-guided laser

The discharged capillary plasma channel has been extensively studied as a high-gradient particle acceleration and transmission medium.A novel measurement method of plasma channel density profiles has been employed,where the role of plasma channels guiding the advantages of lasers has shown strong appeal.Here,we have studied the high-order transverse plasma density profile distribution using a channel-guided laser,and made detailed measurements of its evolution under various parameters.The paraxial wave equation in a plasma channel with high-order density profile components is analyzed,and the approximate propagation process based on the Gaussian profile laser is obtained on this basis,which agrees well with the simulation under phase conditions.In the experiments,by measuring the integrated transverse laser intensities at the outlet of the channels,the radial quartic density profiles of the plasma channels have been obtained.By precisely synchronizing the detection laser pulses and the plasma channels at various moments,the reconstructed density profile shows an evolution from the radial quartic profile to the quasi-parabolic profile,and the high-order component is indicated as an exponential decline tendency over time.Factors affecting the evolution rate were investigated by varying the incentive source and capillary parameters.It can be found that the discharge voltages and currents are positive factors quickening the evolution,while the electron-ion heating,capillary radii and pressures are negative ones.One plausible explanation is that quartic profile contributions may be linked to plasma heating.This work helps one to understand the mechanisms of the formation,the evolutions of the guiding channel electron-density profiles and their dependences on the external controllable parameters.It provides support and reflection for physical research on discharged capillary plasma and optimizing plasma channels in various applications.

Study of plasma parameters of coaxial plasma source using triple Langmuir probe and Faraday cup diagnostics

Coaxial plasma guns are a type of plasma source that produces plasma which propagates radially and axially controlled by the shape of the ground electrode, which has attracted much interest in several applications. In this work, a 120° opening angle of CPG nozzle is used as a plasma gun configuration that operates at the energy of 150 J. The ionization of polyethylene insulator between the electrodes of the gun produces a cloud of hydrogen and carbon plasma.The triple Langmuir probe and Faraday cup are used to measure plasma density and plasma temperature. These methods are used to measure the on-axis and off-axis plasma divergence of the coaxial plasma gun. The peak values of ion densities measured at a distance of 25 mm on-axis from the plasma gun are(1.6±0.5)×10^(19)m^(-3)and(2.8±0.6)×10^(19)m^(-3)for hydrogen and carbon plasma respectively and the peak temperature is 3.02±0.5 eV. The mean propagation velocity of plasma is calculated using the transit times of plasma at different distances from the plasma gun and is found to be 4.54±0.25 cm/μs and 1.81±0.18 cm/μs for hydrogen and carbon plasma respectively. The Debye radius is obtained from the measured experimental data that satisfies the thin sheath approximation. The shot-to-shot stability of plasma parameters facilitates the use of plasma guns in laboratory experiments. These types of plasma sources can be used in many applications like plasma opening switches, plasma devices, and as plasma sources.

Observations and parametric study on the role of plasma density on extremely low-frequency chorus wave generation

Extremely low-frequency(ELF)chorus waves with frequencies below 0.1 fcecan cause the scattering losses of relativistic electrons.Previous studies have suggested that ELF chorus waves are excited by anisotropic electrons with energies up to a few hundred ke V.Here,we report an interesting event observed using the Van Allen Probes on November 1,2012,where distinct ELF chorus waves occurred exactly corresponding to the enhancement of the plasma density.Using the correlated data of particles and plasma environments,the continuous calculation of growth rates along the satellite trajectory was conducted.The linear analysis results display a similar pattern to the observation results.To further identify the impact of the plasma density on the frequency control of ELF chorus waves,the growth rates were then calculated by only changing the value of the plasma density.The calculation results show that the growth rates move to lower frequencies with plasma density enhancement during the event.These findings indicate that the increased plasma density has a considerable impact on the wave frequency.The current study can enrich our understanding of the possible role of plasma density on the generation of ELF chorus waves.

Correlation ofⅢ/Ⅴsemiconductor etch results with physical parameters of high-density reactive plasmas excited by electron cyclotron resonance

Reactive ion etching is the interaction of reactive plasmas with surfaces. To obtain a detailed understanding of this process, significant properties of reactive composite low-pressure plasmas driven by electron cyclotron resonance（ECR） were investigated and compared with the radial uniformity of the etch rate. The determination of the electronic properties of chlorine-and hydrogen-containing plasmas enabled the understanding of the pressure-dependent behavior of the plasma density and provided better insights into the electronic parameters of reactive etch gases. From the electrical evaluation of I（V） characteristics obtained using a Langmuir probe,plasmas of different compositions were investigated. The standard method of Druyvesteyn to derive the electron energy distribution functions by the second derivative of the I（V）characteristics was replaced by a mathematical model which has been evolved to be more robust against noise, mainly, because the first derivative of the I（V） characteristics is used. Special attention was given to the power of the energy dependence in the exponent. In particular, for plasmas that are generated by ECR with EM modes, the existence of Maxwellian distribution functions is not to be taken as a self-evident fact, but the bi-Maxwellian distribution was proven for Ar-and Kr-stabilized plasmas. In addition to the electron temperature, the global uniform discharge model has been shown to be useful for calculating the neutral gas temperature. To what extent the invasive method of using a Langmuir probe could be replaced with the noninvasive optical method of emission spectroscopy, particularly actinometry, was investigated,and the resulting data exhibited the same relative behavior as the Langmuir data. The correlation with etchrate data reveals the large chemical part of the removal process—most striking when the data is compared with etching in pure argon. Although the relative amount of the radial variation of plasma density and etch rate is approximately ？5%, the etch rate shows a slightly concave shape in contrast to the plasma density.

Plasma diagnosis of tetrahedral amorphous carbon films by filtered cathodic vacuum arc deposition

Filtered cathodic vacuum arc(FCVA)deposition is regarded as an important technique for the synthesis of tetrahedral amorphous carbon(ta-C)films due to its high ionization rate,high deposition rate and effective filtration of macroparticles.Probing the plasma characteristics of arc discharge contributes to understanding the deposition mechanism of ta-C films on a microscopic level.This work focuses on the plasma diagnosis of an FCVA discharge using a Langmuir dualprobe system with a discrete Fourier transform smoothing method.During the ta-C film deposition,the arc current of graphite cathodes and deposition pressure vary from 30 to 90 A and from 0.3 to 0.9 Pa,respectively.The plasma density increases with arc current but decreases with pressure.The carbon plasma density generated by the arc discharge is around the order of10^(10)cm^(-3).The electron temperature varies in the range of 2-3.5 eV.As the number of cathodic arc sources and the current of the focused magnetic coil increase,the plasma density increases.The ratio of the intensity of the D-Raman peak and G-Raman peak(I_(D)/I_(G))of the ta-C films increases with increasing plasma density,resulting in a decrease in film hardness.It is indicated that the mechanical properties of ta-C films depend not only on the ion energy but also on the carbon plasma density.

Laser-induced plasma electron number density:Stark broadening method versus the Saha-Boltzmann equation

We report spectroscopic studies on plasma electron number density of laser-induced plasma produced by ns-Nd：YAG laser light pulses on an aluminum sample in air at atmospheric pressure. The effect of different laser energy and the effect of different laser wavelengths were compared. The experimentally observed line profiles of neutral aluminum have been used to extract the excitation temperature using the Boltzmann plot method, whereas the electron number density has been determined from the Stark broadened as well as using the Saha-Boltzmann equation （SBE）. Each approach was also carried out by using the AI emission line and Mg emission lines. It was observed that the,SBE method generated a little higher electron number density value than the Stark broadening, method, but within the experimental uncertainty range. Comparisons of Ne determined by the two methods show the presence of a linear relation which is independent of laser energy or laser wavelength. These results show the applicability of the SBE method for Are determination, especially when the system does not have any pure emission lines whose electron impact factor is known, Also use of Mg lines gives superior results than Al lines.

Plasma Electron Density Measuring and Processing on the J-TEXT Tokamak

Plasma electron density is one of the most fundamental parameters in the study of tokamak plasma physics.The method of plasma electron density measuring and processing on the Joint Texas Experimental Tokamak(J-TEXT) was presented in this paper.The principle of the plasma electron density measuring by hydrogen cyanide(HCN) laser interferometer was introduced.Room temperature triglycine sulface(TGS) detector was used to obtain the beat signal of HCN,and phase difference was measured by high-speed acquisition card DAQ2010.Based on the signal characteristics,a specific HCN processing algorithm was designed to eliminate the baseline offset accurately and process overturns of HCN signals effectively.As a result,plasma electron density with high accuracy and low noise has been obtained during the J-TEXT tokamak experiment.

Intensities and shifts of Lyman and Balmer lines of hydrogen-like ions in high density plasmas

The spectral line intensities and line shifts of Lyman and Balmer series for transitions up to n=5 of hydrogen-like ion are studied in plasmas with densities and temperatures in the ranges n_(c)~10^(18)-10^(21)cm^(-3),T_(e)=0.3e1.2 eV respectively.The screened potential used to describe the interaction between charged particles includes the electron exchange-correlation and finite-temperature gradient effects and is valid for both weakly and strongly coupled plasmas.The dependencies of alpha,beta and gamma line shifts of Lyman and Balmer series on plasma density(for fixed temperature)and temperature(for fixed density)are investigated.The results for the H_(a)line shifts are compared with the available high-density experimental data.

Effect of sintering on the relative density of Cr-coated diamond/Cu composites prepared by spark plasma sintering

Cr-coated diamond/Cu composites were prepared by spark plasma sintering. The effects of sintering pressure, sintering temperature, sintering duration, and Cu powder particle size on the relative density and thermal conductivity of the composites were investigated in this paper. The influence of these parameters on the properties and microstructures of the composites was also discussed. The results show that the relative density of Cr-coated diamond/Cu reaches ~100% when the composite is gradually compressed to 30 MPa during the heating process. The densification temperature increases from 880 to 915℃ when the diamond content is increased from 45vol% to 60vol%. The densification temperature does not increase further when the content reaches 65vol%. Cu powder particles in larger size are beneficial for increasing the relative density of the composite.