This work is concerned with ion beam dynamics and compares the emittance to aberration ratios of two-and three-electrode extraction systems. The study is conducted with the aid of Version 7 of SIMION 3D ray-tracing so...This work is concerned with ion beam dynamics and compares the emittance to aberration ratios of two-and three-electrode extraction systems. The study is conducted with the aid of Version 7 of SIMION 3D ray-tracing software. The beam dependence on various parameters of the extraction systems is studied and the numerical results lead to qualitative conclusions. Ion beam characteristics using diode and triode extraction systems are investigated with the aid of the computer code SIMION 3 D, Version 7.0. The diode （two electrode extraction system） and triode （three- electrode extraction, acceleration-deceleration system） extraction systems are designed and optimized with different geometric parameters of the electrode system, voltage applied to the extraction electrode, and plasma parameters inside the ion source chamber, as well as by the ion beam space charge. This work attempts to describe the importance of the acceleration-deceleration extraction system. It shows that besides an increase of the beam energy, the ion beam has lower emittance than the two-electrode extraction system. Ion beams of the highest quality are extracted whenever the half-angular divergence is minimum for which the perveance current intensity and the extraction gap have optimum value. Knowing the electron temperature of the plasma is necessary to determine plasma potential and the exact beam energy.展开更多
The characteristics of ion beam extraction and focused to a volume as small as possible were investigated with the aid of computer code SIMION 3D version 7. This has been used to evaluate the extraction characteristi...The characteristics of ion beam extraction and focused to a volume as small as possible were investigated with the aid of computer code SIMION 3D version 7. This has been used to evaluate the extraction characteristics （accel-decel system） to generate an ion beam with low beam emittance and high brightness. The simulation process can provide a good study for optimizing the extraction and focusing system of the ion beam without any losses and transported to the required target. Also, a study of a simulation model for the extraction system of the ion source was used to describe the possible plasma boundary curvatures during the ion extraction that may be affected by the change in an extraction potential with a constant plasma density meniscus.展开更多
文摘This work is concerned with ion beam dynamics and compares the emittance to aberration ratios of two-and three-electrode extraction systems. The study is conducted with the aid of Version 7 of SIMION 3D ray-tracing software. The beam dependence on various parameters of the extraction systems is studied and the numerical results lead to qualitative conclusions. Ion beam characteristics using diode and triode extraction systems are investigated with the aid of the computer code SIMION 3 D, Version 7.0. The diode （two electrode extraction system） and triode （three- electrode extraction, acceleration-deceleration system） extraction systems are designed and optimized with different geometric parameters of the electrode system, voltage applied to the extraction electrode, and plasma parameters inside the ion source chamber, as well as by the ion beam space charge. This work attempts to describe the importance of the acceleration-deceleration extraction system. It shows that besides an increase of the beam energy, the ion beam has lower emittance than the two-electrode extraction system. Ion beams of the highest quality are extracted whenever the half-angular divergence is minimum for which the perveance current intensity and the extraction gap have optimum value. Knowing the electron temperature of the plasma is necessary to determine plasma potential and the exact beam energy.
文摘The characteristics of ion beam extraction and focused to a volume as small as possible were investigated with the aid of computer code SIMION 3D version 7. This has been used to evaluate the extraction characteristics （accel-decel system） to generate an ion beam with low beam emittance and high brightness. The simulation process can provide a good study for optimizing the extraction and focusing system of the ion beam without any losses and transported to the required target. Also, a study of a simulation model for the extraction system of the ion source was used to describe the possible plasma boundary curvatures during the ion extraction that may be affected by the change in an extraction potential with a constant plasma density meniscus.
