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The Aging Study on Polyethylene Terephthalate with Surface Modification by Water Vapor Plasma 被引量:1
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作者 敖玲 钮金真 +2 位作者 刘裕明 胡建芳 陈慧英 《Plasma Science and Technology》 SCIE EI CAS CSCD 2001年第3期761-764,共4页
The aging effects of the contact angle and surface energy on polyethylene terephthalate (PET) have been investigated with surface modification by water vapor plasma. The experimental results show that the contact ang... The aging effects of the contact angle and surface energy on polyethylene terephthalate (PET) have been investigated with surface modification by water vapor plasma. The experimental results show that the contact angle of water and PET decreases obviously and surface energy increases. However, with the increase of the aging time, the contact angle and surface energy change back gradually to original state. 展开更多
关键词 The Aging Study on Polyethylene Terephthalate with surface modification by Water Vapor plasma PET
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Modeling of Inner Surface Modification of a Cylindrical Tube by Plasma-Based Low-Energy Ion Implantation
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作者 郑博聪 王克胜 雷明凯 《Plasma Science and Technology》 SCIE EI CAS CSCD 2015年第4期309-316,共8页
The inner surface modification process by plasma-based low-energy ion implantation(PBLEII)with an electron cyclotron resonance(ECR)microwave plasma source located at the central axis of a cylindrical tube is model... The inner surface modification process by plasma-based low-energy ion implantation(PBLEII)with an electron cyclotron resonance(ECR)microwave plasma source located at the central axis of a cylindrical tube is modeled to optimize the low-energy ion implantation parameters for industrial applications.In this paper,a magnetized plasma diffusion fluid model has been established to describe the plasma nonuniformity caused by plasma diffusion under an axial magnetic field during the pulse-off time of low pulsed negative bias.Using this plasma density distribution as the initial condition,a sheath collisional fluid model is built up to describe the sheath evolution and ion implantation during the pulse-on time.The plasma nonuniformity at the end of the pulse-off time is more apparent along the radial direction compared with that in the axial direction due to the geometry of the linear plasma source in the center and the difference between perpendicular and parallel plasma diffusion coefficients with respect to the magnetic field.The normalized nitrogen plasma densities on the inner and outer surfaces of the tube are observed to be about 0.39 and 0.24,respectively,of which the value is 1 at the central plasma source.After a 5μs pulse-on time,in the area less than 2 cm from the end of the tube,the nitrogen ion implantation energy decreases from 1.5 keV to 1.3 keV and the ion implantation angle increases from several degrees to more than 40°;both variations reduce the nitrogen ion implantation depth.However,the nitrogen ion implantation dose peaks of about 2×10^(10)-7×10^(10)ions/cm^2 in this area are 2-4 times higher than that of 1.18×10^(10)ions/cm^2 and 1.63×10^(10)ions/cm^2 on the inner and outer surfaces of the tube.The sufficient ion implantation dose ensures an acceptable modification effect near the end of the tube under the low energy and large angle conditions for nitrogen ion implantation,because the modification effect is mainly determined by the ion implantation dose,just as the mass transfer process in PBLEII is dominated by low-energy ion implantation and thermal diffusion.Therefore,a comparatively uniform surface modification by the low-energy nitrogen ion implantation is achieved along the cylindrical tube on both the inner and outer surfaces. 展开更多
关键词 plasma-based low-energy ion implantation inner surface modification magnetized plasma diffusion fluid model sheath collisional fluid model
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