In this paper, we propose an ellipsometer using a phase retarder and rotating polarizer and analyzer at a speed ratio I：N. Different ellipsometric configurations are presented by assuming N = 1, 2, and 3. Moreover, t...In this paper, we propose an ellipsometer using a phase retarder and rotating polarizer and analyzer at a speed ratio I：N. Different ellipsometric configurations are presented by assuming N = 1, 2, and 3. Moreover, two values of the offset angle of the retarder are considered for each ellipsometric configuration. The Mueller formalism is employed to extract the Stokes parameters, from which the intensity received by the detector is obtained. The optical properties of c-Si are calculated using all configurations. A comparison between different configurations is carried out considering the effect of the noise on the results and the uncertainties in the ellipsometric parameters as functions of the uncertainties of the Fourier coefficients. It is found that the alignment of the phase retarder has a crucial impact on the results and the ellipsometric configuration with speed ratio 1：1 is preferred over the other configurations.展开更多
In this paper we propose theoretically a set of ellipsometric configurations using a rotating polarizer, compensator, and analyzer at a speed ratio of N1ω：N2ω：N3ω. Different ellipsometric configurations can be ob...In this paper we propose theoretically a set of ellipsometric configurations using a rotating polarizer, compensator, and analyzer at a speed ratio of N1ω：N2ω：N3ω. Different ellipsometric configurations can be obtained by giving different integral values to N1, N2, and N3. All configurations are applied to bulk c-Si and GaAs to calculate the real and imaginary parts of the refractive index of the samples. The accuracies of all ellipsometric configurations are investigated in the presence of a hypothetical noise and with small misalignments of the optical elements. Moreover, the uncertainties in the ellipsometric parameters as functions of the uncertainties of the Fourier coefficients are studied. The comparison among different configurations reveals that the rotating compensator–analyzer configuration corresponds to the minimum error in the calculated optical parameters.展开更多
文摘In this paper, we propose an ellipsometer using a phase retarder and rotating polarizer and analyzer at a speed ratio I：N. Different ellipsometric configurations are presented by assuming N = 1, 2, and 3. Moreover, two values of the offset angle of the retarder are considered for each ellipsometric configuration. The Mueller formalism is employed to extract the Stokes parameters, from which the intensity received by the detector is obtained. The optical properties of c-Si are calculated using all configurations. A comparison between different configurations is carried out considering the effect of the noise on the results and the uncertainties in the ellipsometric parameters as functions of the uncertainties of the Fourier coefficients. It is found that the alignment of the phase retarder has a crucial impact on the results and the ellipsometric configuration with speed ratio 1：1 is preferred over the other configurations.
文摘In this paper we propose theoretically a set of ellipsometric configurations using a rotating polarizer, compensator, and analyzer at a speed ratio of N1ω：N2ω：N3ω. Different ellipsometric configurations can be obtained by giving different integral values to N1, N2, and N3. All configurations are applied to bulk c-Si and GaAs to calculate the real and imaginary parts of the refractive index of the samples. The accuracies of all ellipsometric configurations are investigated in the presence of a hypothetical noise and with small misalignments of the optical elements. Moreover, the uncertainties in the ellipsometric parameters as functions of the uncertainties of the Fourier coefficients are studied. The comparison among different configurations reveals that the rotating compensator–analyzer configuration corresponds to the minimum error in the calculated optical parameters.
