Indium tin oxide (ITO) nano-particles were prepared directly using waste ITO target, which had been coated by magnetron controlled sputtering. The waste ITO target was cleaned with de-ionized water, and then dissolv...Indium tin oxide (ITO) nano-particles were prepared directly using waste ITO target, which had been coated by magnetron controlled sputtering. The waste ITO target was cleaned with de-ionized water, and then dissolved in acid, filtrated, neutralized, manipulated through azeotropic distillation and finally dried, and in this way the precursor of indium tin hydroxide was obtained. The nanosized rio composite powder was prepared after the precursor heat-treated at 500℃ for 2 h. TEM images show a narrow distribution of particle size is 5-20 nm and the particle size can be controlled. Its granule has a spherical shape and the dispersion of the particle is well. X-ray diffraction (XRD) patterns indicate the only cubic In2O3 phase in the ITO powder hot-treated at 500℃. The purity of ITO composite powder is 99.9907%. The content of radium within filtrate was detected by using the EDTA titration of determination of indium in the ITO powder and ITO target. Appropriate amount of SnCl4.5H2O was dissolved in the filtrate, and then ITO powder containing 10 wt.% SnO2 was successfully prepared by heat-treating.展开更多
Ba-Al-S-Eu sputtering target for blue emitting phosphors was prepared by powder sintering method. XRD patterns showed that the main components of the target were barium tetra aluminum sulfide (BaAl4S7), bariutm sulf...Ba-Al-S-Eu sputtering target for blue emitting phosphors was prepared by powder sintering method. XRD patterns showed that the main components of the target were barium tetra aluminum sulfide (BaAl4S7), bariutm sulfide (BaS), and europium sulfide (EuS). In the samples, part of the barium and aluminum are formed into barium aluminum oxide (BaAl2O4) with the impurity element of oxygen. The PL characteristic spectra of the target showed the 470 nm blue emission obviously, and the Ba-Al-S thin films also transmitted a purple-blue emission at the position of 440 nm.The results indicated that this method was suitable for the fabrication of the Ba-Al-S:Eu sputtering target.展开更多
对铟锡氧化物ITO(Indium Tin Oxide)纳米粉末的制备方法如均相共沉淀法,水溶液共沉淀法,电解法,溶胶-凝胶法,喷雾燃烧法,喷雾热分解法等以及ITO磁控溅射靶的现有几种制备工艺进行了综合评述。阐述了各种制备工艺过程和工作原理,比较和...对铟锡氧化物ITO(Indium Tin Oxide)纳米粉末的制备方法如均相共沉淀法,水溶液共沉淀法,电解法,溶胶-凝胶法,喷雾燃烧法,喷雾热分解法等以及ITO磁控溅射靶的现有几种制备工艺进行了综合评述。阐述了各种制备工艺过程和工作原理,比较和分析了各工艺方法的优缺点,并提出了制备高品质ITO粉末及ITO靶的努力方向。展开更多
基金This work was financially supported by the National "863 " program of China (No. 2004AA303542).
文摘Indium tin oxide (ITO) nano-particles were prepared directly using waste ITO target, which had been coated by magnetron controlled sputtering. The waste ITO target was cleaned with de-ionized water, and then dissolved in acid, filtrated, neutralized, manipulated through azeotropic distillation and finally dried, and in this way the precursor of indium tin hydroxide was obtained. The nanosized rio composite powder was prepared after the precursor heat-treated at 500℃ for 2 h. TEM images show a narrow distribution of particle size is 5-20 nm and the particle size can be controlled. Its granule has a spherical shape and the dispersion of the particle is well. X-ray diffraction (XRD) patterns indicate the only cubic In2O3 phase in the ITO powder hot-treated at 500℃. The purity of ITO composite powder is 99.9907%. The content of radium within filtrate was detected by using the EDTA titration of determination of indium in the ITO powder and ITO target. Appropriate amount of SnCl4.5H2O was dissolved in the filtrate, and then ITO powder containing 10 wt.% SnO2 was successfully prepared by heat-treating.
基金supported by Provincial Natural Science Foundation of Beijing (3063022)
文摘Ba-Al-S-Eu sputtering target for blue emitting phosphors was prepared by powder sintering method. XRD patterns showed that the main components of the target were barium tetra aluminum sulfide (BaAl4S7), bariutm sulfide (BaS), and europium sulfide (EuS). In the samples, part of the barium and aluminum are formed into barium aluminum oxide (BaAl2O4) with the impurity element of oxygen. The PL characteristic spectra of the target showed the 470 nm blue emission obviously, and the Ba-Al-S thin films also transmitted a purple-blue emission at the position of 440 nm.The results indicated that this method was suitable for the fabrication of the Ba-Al-S:Eu sputtering target.
文摘对铟锡氧化物ITO(Indium Tin Oxide)纳米粉末的制备方法如均相共沉淀法,水溶液共沉淀法,电解法,溶胶-凝胶法,喷雾燃烧法,喷雾热分解法等以及ITO磁控溅射靶的现有几种制备工艺进行了综合评述。阐述了各种制备工艺过程和工作原理,比较和分析了各工艺方法的优缺点,并提出了制备高品质ITO粉末及ITO靶的努力方向。