In this paper,two-dimensional electron gas(2DEG) regions in AlGaN/GaN high electron mobility transistors(HEMTs) are realized by doping partial silicon into the AlGaN layer for the first time.A new electric field p...In this paper,two-dimensional electron gas(2DEG) regions in AlGaN/GaN high electron mobility transistors(HEMTs) are realized by doping partial silicon into the AlGaN layer for the first time.A new electric field peak is introduced along the interface between the AlGaN and GaN buffer by the electric field modulation effect due to partial silicon positive charge.The high electric field near the gate for the complete silicon doping structure is effectively decreased,which makes the surface electric field uniform.The high electric field peak near the drain results from the potential difference between the surface and the depletion regions.Simulated breakdown curves that are the same as the test results are obtained for the first time by introducing an acceptor-like trap into the N-type GaN buffer.The proposed structure with partial silicon doping is better than the structure with complete silicon doping and conventional structures with the electric field plate near the drain.The breakdown voltage is improved from 296 V for the conventional structure to 400 V for the proposed one resulting from the uniform surface electric field.展开更多
利用具备亚微米量级空间分辨率和纳秒级时间分辨率的热反射测温技术对工作在脉冲偏置条件下的CGH4006P型Ga N HEMT进行了瞬态温度检测。测量了Ga N器件表面栅极、漏极和源极金属各部位在20μs内的瞬态温度幅度、分布及变化速度等数据。...利用具备亚微米量级空间分辨率和纳秒级时间分辨率的热反射测温技术对工作在脉冲偏置条件下的CGH4006P型Ga N HEMT进行了瞬态温度检测。测量了Ga N器件表面栅极、漏极和源极金属各部位在20μs内的瞬态温度幅度、分布及变化速度等数据。栅极、漏极和源极的温度幅度有着非常明显的差距,器件表面以栅为中心呈现较大的温度分布梯度。器件表面栅金属温度变化幅度最高、变化速度最快,其主要温度变化发生在5μs之内。经过仔细分析,器件各部位温度差异的主要原因是器件的传热方向、不同区域与发热点的距离。展开更多
基于Ga N高电子迁移率晶体管(HEMT)技术,研制了在0.8-4 GHz频率下,输出功率大于50 W的宽带平衡式功率放大器。采用3 d B耦合器电桥构建平衡式功率放大器结构;采用多节阻抗匹配技术设计了输入/输出匹配网络,实现了功率放大器的宽带特性...基于Ga N高电子迁移率晶体管(HEMT)技术,研制了在0.8-4 GHz频率下,输出功率大于50 W的宽带平衡式功率放大器。采用3 d B耦合器电桥构建平衡式功率放大器结构;采用多节阻抗匹配技术设计了输入/输出匹配网络,实现了功率放大器的宽带特性;采用高介电常数Al2O3基材实现了小型化功率放大器单元;采用热膨胀系数与Si C接近的铜-钼-铜载板作为Ga N HEMT管芯共晶载体,防止功率管芯高温工作过程中因为热膨胀而烧毁。测试结果表明,在0.8-4 GHz频带内,功率放大器功率增益大于6.4 d B,增益平坦度为±1.5 d B,饱和输出功率值大于58.2 W,漏极效率为41%-62%。展开更多
综述了近几年微波、毫米波氮化镓高电子迁移率晶体管(Ga N HEMT)与单片微波集成电路(MMIC)在高效率、宽频带、高功率和先进热管理等方面的应用创新进展。介绍了基于Ga N HEMT器件所具有的高功率密度和高击穿电压,采用波形工程原理设计...综述了近几年微波、毫米波氮化镓高电子迁移率晶体管(Ga N HEMT)与单片微波集成电路(MMIC)在高效率、宽频带、高功率和先进热管理等方面的应用创新进展。介绍了基于Ga N HEMT器件所具有的高功率密度和高击穿电压,采用波形工程原理设计的各类开关模式的高效率功率放大器,以及基于Ga N HEMT器件的高功率密度、高阻抗的特点与先进的宽带拓扑电路和功率合成技术相结合的宽频带和高功率放大器。详细介绍了微波高端和毫米波段的高效率、宽频带和高功率放大器,多功能电路和多功能集成的Ga N MMIC。最后阐述了由于Ga N HEMT的功率密度是其他半导体器件的数倍,其先进热管理的创新研究也成为热点。展开更多
基金Project supported by the Young Scientists Fund of the National Natural Science Foundation of China (Grant No. 61106076)
文摘In this paper,two-dimensional electron gas(2DEG) regions in AlGaN/GaN high electron mobility transistors(HEMTs) are realized by doping partial silicon into the AlGaN layer for the first time.A new electric field peak is introduced along the interface between the AlGaN and GaN buffer by the electric field modulation effect due to partial silicon positive charge.The high electric field near the gate for the complete silicon doping structure is effectively decreased,which makes the surface electric field uniform.The high electric field peak near the drain results from the potential difference between the surface and the depletion regions.Simulated breakdown curves that are the same as the test results are obtained for the first time by introducing an acceptor-like trap into the N-type GaN buffer.The proposed structure with partial silicon doping is better than the structure with complete silicon doping and conventional structures with the electric field plate near the drain.The breakdown voltage is improved from 296 V for the conventional structure to 400 V for the proposed one resulting from the uniform surface electric field.
基金Supported by the National Natural Science Foundation of China (61822407,62074161,62004213)the National Key Research and Development Program of China under (2018YFE0125700)。
文摘利用具备亚微米量级空间分辨率和纳秒级时间分辨率的热反射测温技术对工作在脉冲偏置条件下的CGH4006P型Ga N HEMT进行了瞬态温度检测。测量了Ga N器件表面栅极、漏极和源极金属各部位在20μs内的瞬态温度幅度、分布及变化速度等数据。栅极、漏极和源极的温度幅度有着非常明显的差距,器件表面以栅为中心呈现较大的温度分布梯度。器件表面栅金属温度变化幅度最高、变化速度最快,其主要温度变化发生在5μs之内。经过仔细分析,器件各部位温度差异的主要原因是器件的传热方向、不同区域与发热点的距离。
文摘基于Ga N高电子迁移率晶体管(HEMT)技术,研制了在0.8-4 GHz频率下,输出功率大于50 W的宽带平衡式功率放大器。采用3 d B耦合器电桥构建平衡式功率放大器结构;采用多节阻抗匹配技术设计了输入/输出匹配网络,实现了功率放大器的宽带特性;采用高介电常数Al2O3基材实现了小型化功率放大器单元;采用热膨胀系数与Si C接近的铜-钼-铜载板作为Ga N HEMT管芯共晶载体,防止功率管芯高温工作过程中因为热膨胀而烧毁。测试结果表明,在0.8-4 GHz频带内,功率放大器功率增益大于6.4 d B,增益平坦度为±1.5 d B,饱和输出功率值大于58.2 W,漏极效率为41%-62%。
文摘综述了近几年微波、毫米波氮化镓高电子迁移率晶体管(Ga N HEMT)与单片微波集成电路(MMIC)在高效率、宽频带、高功率和先进热管理等方面的应用创新进展。介绍了基于Ga N HEMT器件所具有的高功率密度和高击穿电压,采用波形工程原理设计的各类开关模式的高效率功率放大器,以及基于Ga N HEMT器件的高功率密度、高阻抗的特点与先进的宽带拓扑电路和功率合成技术相结合的宽频带和高功率放大器。详细介绍了微波高端和毫米波段的高效率、宽频带和高功率放大器,多功能电路和多功能集成的Ga N MMIC。最后阐述了由于Ga N HEMT的功率密度是其他半导体器件的数倍,其先进热管理的创新研究也成为热点。