INFLUENCE OF WHEEL STRUCTURAL PARAMETERS ON MACHINING ACCURACY OF ULTRA-PRECISION PLANE HONING

A new idea for designing wheel patterns is presented so as to solve theproblems about machining accuracy of workpiece and wear of honing wheel in ultra-precision planehoning. The influence factors on motion principle and pattern structures are analyzed andoptimization machining parameters are obtained. By calculating effective cutting length on thesurface of workpiece cut by wheel's abrasive and the orbit of one point on the surface of workpiececontacting with wheel, the wear coefficient of different kinds of wheels and accuracy coefficient ofworkpiece machined by corresponding wheels are obtained. Furthermore, the simulation results showthat the optimal pattern structure of wheel turns out to have lower wheel wear and higher machiningaccuracy.

Mesoplasticity Approach to Studies of the Cutting Mechanism in Ultra-precision Machining

There have been various theoretical attempts by researchers worldwide to link up different scales of plasticity studies from the nano-, micro- and macro-scale of observation, based on molecular dynamics, crystal plasticity and continuum mechanics. Very few attempts, however, have been reported in ultra-precision machining studies. A mesoplasticity approach advocated by Lee and Yang is adopted by the authors and is successfully applied to studies of the micro-cutting mechanisms in ultra-precision machining. Traditionally, the shear angle in metal cutting, as well as the cutting force variation, can only be determined from cutting tests. In the pioneering work of the authors, the use of mesoplasticity theory enables prediction of the fluctuation of the shear angle and micro-cutting force, shear band formation, chip morphology in diamond turning and size effect in nano-indentation. These findings are verified by experiments. The mesoplasticity formulation opens up a new direction of studies to enable how the plastic behaviour of materials and their constitutive representations in deformation processing, such as machining can be predicted, assessed and deduced from the basic properties of the materials measurable at the microscale.

Systematic analysis of error sources during ultra-precision machining

During ultra-precision machining, machining accuracy is determined by many factors and interaction of these factors. Error sources are systematically analyzed for ultra-precision machine tools, and the influencing degree of each factor is presented to provide orientation for error reduction and error compensation.

Study of material removal behavior on R-plane of sapphire during ultra-precision machining based on modified slip-fracture model

In this paper, the modified slip/fracture activation model has been used in order to understand the mechanism of ductile-brittle transition on the R-plane of sapphire during ultra-precision machining by reflecting direction of resultant force. Anisotropic characteristics of crack morphology and ductility of machining depending on cutting direction were explained in detail with modified fracture cleavage and plastic deformation parameters. Through the analysis, it was concluded that crack morphologies were mainly determined by the interaction of multiple fracture systems activated while, critical depth of cut was determined by the dominant plastic deformation parameter. In addition to this, by using proportionality relationship between magnitude of resultant force and depth of cut in the ductile region, an empirical model for critical depth of cut was developed.

Research of Digital Manufacturing Technology Application on Ultra-precision Optical Workpiece Machining

Digital manufacturing technology can be used in optical field to solve many problems caused by traditional machining. According to the characters of digital manufacturing and the practical applications of ultra-precision machining,the process of digital ultra-precision machining and its technical contents were presented in this paper. In the conclusions,it was stated that the digitalization of ultra-precision machining will be an economical and efficient way for the production of new sorts of optical workpieces.

345 GHz Band-Pass Filter Using Ultra-Precision Machining Technology

This paper presents a terahertz（THz）band-pass filter using ultra-precision machining technology based on Chebyshev filter prototype.This iris inductive window coupled waveguide filter was designed by using 8 resonant cavities with a center frequency of 345 GHz and a 7% bandwidth.The final design fulfills the desired specifications and presents the minimum insertion loss of 1.55 d B and the return loss of less than 15 d B at 345 GHz.The stop-band rejection is50 d B off the center frequency about 30 GHz,which means it has a good performance of high stop-band suppression.Compared with the recent development of THz filters,this filter possesses the characteristic of simple structure and is easy to machining.

Dynamic Accuracy Design Method of Ultra-precision Machine Tool

Ultra-precision machine tool is the most important physical tool to machining the workpiece with the frequency domain error requirement, in the design process of which the dynamic accuracy design(DAD) is indispensable and the related research is rarely available. In light of above reasons, a DAD method of ultra-precision machine tool is proposed in this paper, which is based on the frequency domain error allocation.The basic procedure and enabling knowledge of the DAD method is introduced. The application case of DAD method in the ultra-precision flycutting machine tool for KDP crystal machining is described to show the procedure detailedly. In this case, the KDP workpiece surface has the requirements in four different spatial frequency bands, and the emphasis for this study is put on the middle-frequency band with the PSD specifications. The results of the application case basically show the feasibility of the proposed DAD method. The DAD method of ultra-precision machine tool can effectively minimize the technical risk and improve the machining reliability of the designed machine tool. This paper will play an important role in the design and manufacture of new ultra-precision machine tool.

Active vibration control of spindle in ultra-precision turning machine

In order to minimize vibration and improve rotary precision of spindle, we apply active vibration control technique to ultra-precision turning machine based on the analysis of vibration characteristic of aerostatic bearing spindle. Using aerostatic bearing itself as actuator, the vibration of spindle is controlled by adjusting admission pressure respectively and by changing pressure distribution in the bearing. The experiments and simulations prove that this method can minimize the vibration of spindle effectively.

Dynamic modeling of ultra-precision fly cutting machine tool and the effect of ambient vibration on its tool tip response

The dynamic performances of an ultra-precision fly cutting machine tool(UFCMT)has a dramatic impact on the quality of ultra-precision machining.In this study,the dynamic model of an UFCMT was established based on the transfer matrix method for multibody systems.In particular,the large-span scale flow field mesh model was created;and the variation in linear and angular stiffness of journal and thrust bearings with respect to film thickness was investigated by adopting the dynamic mesh technique.The dynamic model was proven to be valid by comparing the dynamic characteristics of the machine tool obtained by numerical simulation with the experimental results.In addition,the power spectrum density estimation method was adopted to simulate the statistical ambient vibration excitation by processing the ambient vibration signal measured over a long period of time.Applying it to the dynamic model,the dynamic response of the tool tip under ambient vibration was investigated.The results elucidated that the tool tip response was significantly affected by ambient vibration,and the isolation foundation had a good effect on vibration isolation.

Optimization of Honing Wheel Structure Parameters in Ultra-precision Plane Honing

Free abrasive particle machining in simple machine such as: honing, polishing can get higher surface finish mirror, but surface error, and working procedure is hard to control. Therefore, the vertical disposed ultra-precision plane honing method by ultra-particle diamond honing wheel is put forward to. The results of experiments indicate: plane-honing wheel has higher machining accuracy and machining efficiency. But at the same time the structure parameters of honing wheel effects on machining accuracy. By analyzing the relation of honing wheel structure parameters and workpiece machining accuracy, the relation of honing wheel and wear coefficient, then this paper gets honing wheel structure parameters in the condition of best accuracy coefficient and wear coefficient, and resolve the problem of choosing honing wheel structure parameters in ultra-precision plane honing at last. This paper analyses the relation of honing wheel structure parameters and workpiece machining accuracy coefficient and wear coefficient, by building relative movement math model of honing wheel and workpiece in plane honing. Through theory calculating, the result indicate: about honing machine tools for large volume manufacture, honing wheel wear is main effect factor, so honing wheel should adopt obverse triangle radial structure. About honing machining for high accuracy and low-batch quantities, machining accuracy coefficient is main factors; so honing wheel should adopt reverse triangle radial structure. Neglected the manufacturing factors of honing wheel, then we can design honing wheel with high power curve structure to meet the need of machining accuracy coefficient and honing wheel wear coefficient in higher accuracy honing.

Tool path generation of ultra-precision diamond turning: A state-of-the-art review

With the increasing market demand for optical complex surface parts,the application of multi-axis ultraprecision single-point diamond turning is increasing.A tool path generation method is very important to decrease manufacturing time,enhance surface quality,and reduce cost.Compared with the tool path generation of the traditional multi-axis milling,that of the ultra-precision single-point diamond turning requires higher calculation accuracy and efficiency.This paper reviews the tool path generation of ultra-precision diamond turning,considering several key issues:cutter location(CL)points calculation,the topological form of tool path,interpolation mode,and G code optimization.

Research on Large Depth Diameter Ratio Ultra-precision Aspheric Grinding System

In this paper, the factors of affecting surface roughness and profiles accuracy of the machined larege depth diamter ratio aspheric surfaces in ultra-precision grinding process are analyzed theoretically. An ultra-precision aspheric grinding system is then designed and manufactured. Aerostatic form is adopted to build the spindle of the workpiece, transverse guideway, longitudinal guideway and the spindle of the grinder in this system. The following specification is achieved, such as the turning accuracy of the spindle of the workpiece is 0.05 μm, radial rigidity of the spindle is GE 220N/μm, axial rigidity is GE 160 N/μm, radial rigidity of the guideway is GE 200N/μm, the highest rotational speed of the grinder is 80 000 rev/min and its turning accuracy is 0.1 μm, the resolution of linear displacement of the transverse and longitudinal guideway is 4.9 nm. Adjusting range of this adjusting mechanism is 2 mm in the Y direction, the adjusting accuracy of the precise adjusting mechanism is 0.1 μm. Micro displacement measuring system of this ultra-precision aspheric grinding adopts two-backfeed strategy, and angle displacement back-feed is realized by photoelectric encoder, it’s resolution is 655 360 pulse/rev. after 4 frequency multiplication, it’s angle displacement resolution is achieved 2 621 440 pulse/rev. Straight-line displacement is monitored by single frequency laser interferometer (DLSTAX LTM-20B, made in Japan). This CNC system adopts inimitable bi-arc step length flex CN interpolation algorithm, it’s CN system resolution is 5 nm.So this aspheric grinding system ensures profile accuracy of the machined part. The resolution of this interferometer is 5 nm. Finally, lots of ultra-precision grinding experiments are carried out on this grinding system. Some optical aspheric parts, with profiles accuracy of 0.3 μm, surface roughness less than 0.01 μm, are obtained.

RESEARCH ON TECHNOLOGY AND SYSTEM FOR ON－LINE MEASUREMENT OF SURFACE ROUGHNESS IN ULTRA＝PRECISION MACHINING

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3D surface topography formation in ultra-precision turning

The generation process of 3D surface topography in ultra-precision turning is analyzed, as the result of superimposing between actual roughness surface,waviness surface and geometrical form texture surface. From the viewpoints of machine technical system and manufacturing process,factors influencing on roughness surface, waviness surface and geometrical form texture surface in ultra-precision turning are discussed further.The 3D topography of ideal roughness surface and actual surface affected by cutting vibration are simulated respectively.

A hybrid physics-data-driven surface roughness prediction model for ultra-precision machining

The surface finish quality is critical to the service performance of a machined part,and single-point diamond ultra-precision machining can achieve excellent surface quality for many engineering materials.This study studied the problem of predicting the surface roughness for titanium alloy workpieces in ultra-precision machining.Process data and surface roughness measurement results were obtained during end-face machining experiments.A deep learning neural network model was built based on the ResNet-50 architecture to predict surface roughness.We propose increasing prediction accuracy by using the energy ratio difference(ERD)as a stability feature that can be extracted using fast iterative variational mode decomposition(FI-VMD).The roughness value obtained with an analytic model was also used as an input feature of the prediction model.The prediction accuracy of the proposed approach was depicted to be improved by 8.7%with the two newly introduced roughness predictors.The influence of the tool parameters on the prediction accuracy was investigated,and the proposed hybrid-driven model exhibited higher robustness to errors of the tool parameters than the analytic roughness model.

Temperature Variable Optimization for Precision Machine Tool Thermal Error Compensation on Optimal Threshold

Machine tool thermal error is an important reason for poor machining accuracy. Thermal error compensation is a primary technology in accuracy control. To build thermal error model, temperature variables are needed to be divided into several groups on an appropriate threshold. Currently, group threshold value is mainly determined by researchers experience. Few studies focus on group threshold in temperature variable grouping. Since the threshold is important in error compensation, this paper arms to find out an optimal threshold to realize temperature variable optimization in thermal error modeling. Firstly, correlation coefficient is used to express membership grade of temperature variables, and the theory of fuzzy transitive closure is applied to obtain relational matrix of temperature variables. Concepts as compact degree and separable degree are introduced. Then evaluation model of temperature variable clustering is built. The optimal threshold and the best temperature variable clustering can be obtained by setting the maximum value of evaluation model as the objective. Finally, correlation coefficients between temperature variables and thermal error are calculated in order to find out optimum temperature variables for thermal error modeling. An experiment is conducted on a precise horizontal machining center. In experiment, three displacement sensors are used to measure spindle thermal error and twenty-nine temperature sensors are utilized to detect the machining center temperature. Experimental result shows that the new method of temperature variable optimization on optimal threshold successfully worked out a best threshold value interval and chose seven temperature variables from twenty-nine temperature measuring points. The model residual of z direction is within 3 μm. Obviously, the proposed new variable optimization method has simple computing process and good modeling accuracy, which is quite fit for thermal error compensation.

Precision Design for Machine Tool Based on Error Prediction

Digitization precision analysis is an important tool to ensure the design precision of machine tool currently. The correlative research about precision modeling and analysis mainly focuses on the geometry precision and motion precision of machine tool, and the forming motion precision of workpiece surface. For the machine tool with complex forming motion, there is not accurate corresponding relationship between the existing criterion on precision design and the machining precision of workpiece. Therefore, a design scheme on machine tool precision based on error prediction is proposed, which is divided into two-stage digitization precision analysis crucially. The first stage aims at the technology system to complete the precision distribution and inspection from the workpiece to various component parts of technology system and achieve the total output precision of machine tool under the specified machining precision; the second stage aims at the machine tool system to complete the precision distribution and inspection from the output precision of machine tool to the machine tool components. This article serves YK3610 gear hobber as the example to describe the error model of two systems and basic application method, and the practical cutting precision of this machine tool achieves to 5-4-4 grade. The proposed method can provide reliable guidance to the precision design of machine tool with complex forming motion.

Error compensation on precision machine tool servo control system based on digital concave filter

It is concluded from the results of testing the frequency characteristics of the sub micron precision machine tool servo control system, that the existence of several oscillating modalities is the main factor that affects the performance of the control system. To compensate for this effect,several concave filters are utilized in the system to improve the control accuracy. The feasibility of compensating for several oscillating modalities with a single concave filter is also studied. By applying a modified Butterworth concave filter to the practical system, the maximum stable state output error remains under ±10 nm in the closed loop positioning system.

Active Vibration Isolation System for Sub microultra precision Turning Machine

Now vibration isolation of ultra precision machine tool is usually achieved through air springs systems. As far as HCM I sub micro turning machine developed by HIT, an active vibration isolation system that consists of air springs and electro magnetic actuators was presented. The primary function of air springs is to support the turning machine and to isolate the high frequency vibration. The electro magnetic actuators controlled by fuzzy neural networks isolate the low frequency vibration. The experiment indicates that active vibration isolation system isolates base vibration effectively in all the frequency range. So the vibration of the machine bed is controlled under 10 -6 g and the surface roughness is improved.