Application of a macromolecular chelating agent in chemical mechanical polishing of copper film under the condition of low pressure and low abrasive concentration

The mechanism of the FA/O chelating agent in the process of chemical mechanical polishing （CMP） is introduced. CMP is carried on a φ300 mm copper film. The higher polishing rate and lower surface roughness are acquired due to the action of an FA/O chelating agent with an extremely strong chelating ability under the condition of low pressure and low abrasive concentration during the CMP process. According to the results of several kinds of additive interaction curves when the pressure is 13.78 kPa, flow rate is 150 mL/min, and the rotating speed is 55/60 rpm, it can be demonstrated that the FA/O chelating agent plays important role during the CMP process.

A novel SOI pressure sensor for high temperature application

The silicon on insulator（SOI） high temperature pressure sensor is a novel pressure sensor with highperformance and high-quality. A structure of a SOI high-temperature pressure sensor is presented in this paper.The key factors including doping concentration and power are analyzed. The process of the sensor is designed with the critical process parameters set appropriately. The test result at room temperature and high temperature shows that nonlinear error below is 0.1%, and hysteresis is less than 0.5%. High temperature measuring results show that the sensor can be used for from room temperature to 350℃ in harsh environments. It offers a reference for the development of high temperature piezoresistive pressure sensors.

Influence of Mechanical Activation on Acid Leaching Dephosphorization of High-phosphorus Iron Ore Concentrates

High pressure roll grinding（HPRG）and ball milling were compared to investigate the influence of mechanical activation on the acid leaching dephosphorization of a high-phosphorus iron ore concentrate,which was manufactured through magnetizing roasting-magnetic separation of high-phosphorus oolitic iron ores.The results indicated that when high-phosphorus iron ore concentrates containing 54.92 mass% iron and 0.76 mass% phosphorus were directly processed through acid leaching,iron ore concentrates containing 55.74mass%iron and 0.33mass%phosphorus with an iron recovery of 84.64%and dephosphorization of 63.79% were obtained.When high-phosphorus iron ore concentrates activated by ball milling were processed by acid leaching,iron ore concentrates containing56.03mass%iron and 0.21mass% phosphorus with an iron recovery of 85.65% and dephosphorization of 77.49%were obtained.Meanwhile,when high-phosphorus iron ore concentrates activated by HPRG were processed by acid leaching,iron ore concentrates containing 58.02mass%iron and 0.10mass% phosphorus were obtained,with the iron recovery reaching 88.42% and the dephosphorization rate reaching 88.99%.Mechanistic studies demonstrated that ball milling can reduce the particle size,demonstrating aprominent reunion phenomenon.In contrast,HPRG pretreatment contributes to the formation of more cracks within the particles and selective dissociation of iron and P bearing minerals,which can provide the favorable kinetic conditions to accelerate the solid-liquid reaction rate.As such,the crystal structure is destroyed and the surface energy of mineral particles is strengthened by mechanical activation,further strengthening the dephosphorization.