The development of pressure sensor arrays capable of distinguishing the shape and texture details of objects is of considerable interest in the emerging fields of smart robots,prostheses,human-machine interfaces,and a...The development of pressure sensor arrays capable of distinguishing the shape and texture details of objects is of considerable interest in the emerging fields of smart robots,prostheses,human-machine interfaces,and artificial intelligence(AI).Here we report an integrated pressure sensor array,by combining solution-processed two-dimensional(2D)MoS2 van der Waals(vdW)thin film transistor(TFT)active matrix and conductive micropyramidal pressure-sensitive rubber(PSR)electrodes made of polydimethylsiloxane/carbon nanotube composites,to achieve spatially revolved pressure mapping with excellent contrast and low power consumption.We demonstrate a 10×10 active matrix by using the 2D MoS2 vdW-TFTs with high on-off ratio>10^(6),minimal hysteresis,and excellent device-to-device uniformity.The combination of the vdW-TFT active matrix with the highly uniform micropyramidal PSR electrodes creates an integrated pressure sensing array for spatially resolved pressure mapping.This study demonstrates that the solution-processed 2D vdW-TFTs offer a solution for active-matrix control of pressure sensor arrays,and could be extended for other active-matrix arrays of electronic or optoelectronic devices.展开更多
基金Y.H.acknowledges the financial support from the Office of Naval Research through award N00014-18-1-2491.X.F.D.acknowledged the support from the US Department of Energy,Office of Basic Energy Sciences,Division of Materials Science and Engineering through award DE-SC0018828(material preparation).
文摘The development of pressure sensor arrays capable of distinguishing the shape and texture details of objects is of considerable interest in the emerging fields of smart robots,prostheses,human-machine interfaces,and artificial intelligence(AI).Here we report an integrated pressure sensor array,by combining solution-processed two-dimensional(2D)MoS2 van der Waals(vdW)thin film transistor(TFT)active matrix and conductive micropyramidal pressure-sensitive rubber(PSR)electrodes made of polydimethylsiloxane/carbon nanotube composites,to achieve spatially revolved pressure mapping with excellent contrast and low power consumption.We demonstrate a 10×10 active matrix by using the 2D MoS2 vdW-TFTs with high on-off ratio>10^(6),minimal hysteresis,and excellent device-to-device uniformity.The combination of the vdW-TFT active matrix with the highly uniform micropyramidal PSR electrodes creates an integrated pressure sensing array for spatially resolved pressure mapping.This study demonstrates that the solution-processed 2D vdW-TFTs offer a solution for active-matrix control of pressure sensor arrays,and could be extended for other active-matrix arrays of electronic or optoelectronic devices.
