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Principle and Process Window of Cerium Dioxide Thin Film Fabrication with Dual Plasma Deposition 被引量:1
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作者 L.P. Wang B. Y Tang +2 位作者 X.B. Tian YX.Leng Q. YZhang and P.K.Chu Department of Physics and Materials Science, City University of Hong Kong, 83 Tat Chee Avenue, Kowloon, Hong Kong, China 《Journal of Materials Science & Technology》 SCIE EI CAS CSCD 2001年第1期29-30,共2页
Cerium dioxide, CeO2, is a potentially superior material in a myriad of areas, and many methods have been proposed to deposit single crystal CeO2 thin films. A novel fabrication technique utilizing dual plasma generat... Cerium dioxide, CeO2, is a potentially superior material in a myriad of areas, and many methods have been proposed to deposit single crystal CeO2 thin films. A novel fabrication technique utilizing dual plasma generated by metal vacuum arc (MEVVA) and radio frequency (RF) is discussed in this paper. We have recently conducted a systematic investigation to determine the optimal process window to deposit CeO2 thin films'on Si(100) substrates. The X-ray diffraction results show the existence of CeO2(100) in the as-deposited sample. 展开更多
关键词 Thin Window Principle and process Window of Cerium Dioxide Thin Film Fabrication with Dual Plasma Deposition
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The Principle of Square Hole Machining and It's Tooling Structure Design
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作者 Jinxia NIU 《International Journal of Technology Management》 2015年第2期7-8,共2页
In order to meet the rapid needs of processing square hole in mechanical equipment, the paper expounds the square hole processing method: planetary wheel method, and analyze the principle of tooling structure and pro... In order to meet the rapid needs of processing square hole in mechanical equipment, the paper expounds the square hole processing method: planetary wheel method, and analyze the principle of tooling structure and process with computer graphics parameters design. The results that, as long as the appropriate parameters, using the above method not only can punch the square hole, can also be processed triangle, the five angle and hexagonal regular polygon holes. The square hole processing method can provide theoretical basis and engineering reliable reference for related engineering and technical personnel. 展开更多
关键词 Abstract: In order to meet the rapid needs of processing square hole in mechanical equipment the paper expounds the square hole processing method: planetary wheel method and analyze the principle of tooling structure and process with computer graphics parameters design. The results that as long as the appropriate parameters using the above method not only can punch the square hole can also be processed triangle the five angle and hexagonal regular polygon holes. The square hole processing method can provide theoretical basis and engineering reliable reference for related engineering and technical personnel. Keywords: Square hole processing Planet wheel Lelo triangle Square hole drilling
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