A probe-hole field emission microscope system,controlled by the Apple Ⅱ computer,has been developed and operated successfully for measuring the work function of a single crystalplane.The detection screen,the phototub...A probe-hole field emission microscope system,controlled by the Apple Ⅱ computer,has been developed and operated successfully for measuring the work function of a single crystalplane.The detection screen,the phototube and the amplifier are combined for measuring theprobe-hole current.The combination is calibrated and the calibrated data are used in the com-puter program.The high voltage on the viewing screen is adjusted by using a D/A converter.The total current and the probe-hole current are acquired by using an A/D converter.A programin BASIC is used for processing all data and the Fowler-Nordheim plot parameters are given.Work functions of single crystal planes can then be calculated;as examples,the work functionson the clean W(100)and W(111)planes are measured to be 4.67 eV and 4.45 eV,respectively.展开更多
对高精度探头的研究和发展进行了叙述,介绍了所研制的一款由一个二维角度传感器、一个弹性机构和一个自制的微球形钨探针组成的微孔测量探头。对探头的刚度和重复性分别进行了仿真验证和实验测试,结果表明:该探头在三维方向上的刚度均小...对高精度探头的研究和发展进行了叙述,介绍了所研制的一款由一个二维角度传感器、一个弹性机构和一个自制的微球形钨探针组成的微孔测量探头。对探头的刚度和重复性分别进行了仿真验证和实验测试,结果表明:该探头在三维方向上的刚度均小于0.4 m N/μm,重复性均优于20 nm(k=2)。最后利用该探头对一个直径为420μm的微孔进行了实际测量,测量结果验证了该探头的实用性。展开更多
基金Subject Supported by the Natural Science Fund of China.
文摘A probe-hole field emission microscope system,controlled by the Apple Ⅱ computer,has been developed and operated successfully for measuring the work function of a single crystalplane.The detection screen,the phototube and the amplifier are combined for measuring theprobe-hole current.The combination is calibrated and the calibrated data are used in the com-puter program.The high voltage on the viewing screen is adjusted by using a D/A converter.The total current and the probe-hole current are acquired by using an A/D converter.A programin BASIC is used for processing all data and the Fowler-Nordheim plot parameters are given.Work functions of single crystal planes can then be calculated;as examples,the work functionson the clean W(100)and W(111)planes are measured to be 4.67 eV and 4.45 eV,respectively.
文摘对高精度探头的研究和发展进行了叙述,介绍了所研制的一款由一个二维角度传感器、一个弹性机构和一个自制的微球形钨探针组成的微孔测量探头。对探头的刚度和重复性分别进行了仿真验证和实验测试,结果表明:该探头在三维方向上的刚度均小于0.4 m N/μm,重复性均优于20 nm(k=2)。最后利用该探头对一个直径为420μm的微孔进行了实际测量,测量结果验证了该探头的实用性。