Semiconductor fabrication is a manufacturing sequence with hundreds of sophisticated unit operations and it is always challenged by strategy development for ensuring the yield of defect-free products.In this paper,an ...Semiconductor fabrication is a manufacturing sequence with hundreds of sophisticated unit operations and it is always challenged by strategy development for ensuring the yield of defect-free products.In this paper,an advanced control strategy through integrating product and process control is established.The proposed multiscale scheme contains three layers for coordinated equipment control,process control and product quality control.In the upper layer,online control performance assessment is applied to reduce the quality variation and maximize the overall product performance （OPP）.It serves as supervisory control to update the recipe of the process controller in the middle layer.The process controller is designed as an exponentially weighted moving average （EWMA） run-to-run controller to reject disturbances,such as process shift,drift and tool worn out,that are exerted to the op-eration.The equipment in the process is individually controlled to maintain its optimal operational status and maximize the overall equipment effectiveness （OEE）,based on the set point given by the process controller.The ef-ficacy of the proposed integrated control scheme is demonstrated through case studies,where both the OPP （for product） and the OEE （for equipment） are enhanced.展开更多
When harvested the potato has a high moisture content, this could make its transportation and storage difficult. To help solve the transportation difficulties, potato is made into whole flour by many food processing c...When harvested the potato has a high moisture content, this could make its transportation and storage difficult. To help solve the transportation difficulties, potato is made into whole flour by many food processing companies. Potato whole flour has high nutritional value and may be regarded as beneficial to human health and fitness. In addition to the direct use of potato whole flour,it can also be used as added ingredients into other food products. This study summarizes and analyzes the processing technology of potato whole flour and its application in noodle products.展开更多
文摘Semiconductor fabrication is a manufacturing sequence with hundreds of sophisticated unit operations and it is always challenged by strategy development for ensuring the yield of defect-free products.In this paper,an advanced control strategy through integrating product and process control is established.The proposed multiscale scheme contains three layers for coordinated equipment control,process control and product quality control.In the upper layer,online control performance assessment is applied to reduce the quality variation and maximize the overall product performance （OPP）.It serves as supervisory control to update the recipe of the process controller in the middle layer.The process controller is designed as an exponentially weighted moving average （EWMA） run-to-run controller to reject disturbances,such as process shift,drift and tool worn out,that are exerted to the op-eration.The equipment in the process is individually controlled to maintain its optimal operational status and maximize the overall equipment effectiveness （OEE）,based on the set point given by the process controller.The ef-ficacy of the proposed integrated control scheme is demonstrated through case studies,where both the OPP （for product） and the OEE （for equipment） are enhanced.
基金Supported by National Key R&D Program of China(2016YFD0401302)National Natural Science Foundation of China(31701636)
文摘When harvested the potato has a high moisture content, this could make its transportation and storage difficult. To help solve the transportation difficulties, potato is made into whole flour by many food processing companies. Potato whole flour has high nutritional value and may be regarded as beneficial to human health and fitness. In addition to the direct use of potato whole flour,it can also be used as added ingredients into other food products. This study summarizes and analyzes the processing technology of potato whole flour and its application in noodle products.
