Low-order wavefront error account for a large proportion of wave aberrations.A compensation method for low order aberration of projection lithography objective based on Interior Point Method is presented.Compensation ...Low-order wavefront error account for a large proportion of wave aberrations.A compensation method for low order aberration of projection lithography objective based on Interior Point Method is presented.Compensation model between wavefront error and degree of movable lens freedom is established.Converting over-determined system to underdetermined system,the compensation is solved by Interior Point Method(IPM).The presented method is compared with direct solve the over-determined system.Then,other algorithm GA,EA and PS is compared with IPM.Simulation and experimental results show that the presented compensation method can obtained compensation with less residuals compared with direct solve the over-determined system.Also,the presented compensation method can reduce computation time and obtain results with less residuals compare with AGA,EA and PS.Moreover,after compensation,RMS of wavefront error of the experimental lithography projection objective decrease from 56.05 nm to 17.88 nm.展开更多
Motivated by the classical Gorenstein homological theory and structure of Tate cohomology, we develop a theory of Gorenstein projective objects and Tate cohomology in an exact category A with enough projectives. We st...Motivated by the classical Gorenstein homological theory and structure of Tate cohomology, we develop a theory of Gorenstein projective objects and Tate cohomology in an exact category A with enough projectives. We study some properties of Gorenstein projective objects and establish Tate cohomology of objects with finite Gorenstein projective dimension.展开更多
Let T be a right exact functor from an abelian category B into another abelian category A.Then there exists a functor p from the product category A×B to the comma category(T↓A).In this paper,we study the propert...Let T be a right exact functor from an abelian category B into another abelian category A.Then there exists a functor p from the product category A×B to the comma category(T↓A).In this paper,we study the property of the extension closure of some classes of objects in(T↓A),the exactness of the functor p and the detailed description of orthogonal classes of a given class p(X,Y)in(T↓A).Moreover,we characterize when special precovering classes in abelian categories A and B can induce special precovering classes in(T↓A).As an application,we prove that under suitable conditions,the class of Gorenstein projective leftΛ-modules over a triangular matrix ringΛ=(R M 0 S)is special precovering if and only if both the classes of Gorenstein projective left R-modules and left S-modules are special precovering.Consequently,we produce a large variety of examples of rings such that the class of Gorenstein projective modules is special precovering over them.展开更多
Projection-type recorders of computer-generated Fourier holograms have potential due to the decreased precision requirements of the optical scheme compared to most known holographic data recorders based on two-beam sc...Projection-type recorders of computer-generated Fourier holograms have potential due to the decreased precision requirements of the optical scheme compared to most known holographic data recorders based on two-beam schemes.In the case of optical memory system development,the reduction factor of the projection scheme requires the application of properly developed optical components.The present report is dedicated to the development of special objectives for the projection scheme of computer-generated Fourier holograms.展开更多
文摘Low-order wavefront error account for a large proportion of wave aberrations.A compensation method for low order aberration of projection lithography objective based on Interior Point Method is presented.Compensation model between wavefront error and degree of movable lens freedom is established.Converting over-determined system to underdetermined system,the compensation is solved by Interior Point Method(IPM).The presented method is compared with direct solve the over-determined system.Then,other algorithm GA,EA and PS is compared with IPM.Simulation and experimental results show that the presented compensation method can obtained compensation with less residuals compared with direct solve the over-determined system.Also,the presented compensation method can reduce computation time and obtain results with less residuals compare with AGA,EA and PS.Moreover,after compensation,RMS of wavefront error of the experimental lithography projection objective decrease from 56.05 nm to 17.88 nm.
文摘Motivated by the classical Gorenstein homological theory and structure of Tate cohomology, we develop a theory of Gorenstein projective objects and Tate cohomology in an exact category A with enough projectives. We study some properties of Gorenstein projective objects and establish Tate cohomology of objects with finite Gorenstein projective dimension.
基金supported by National Natural Science Foundation of China (Grant Nos. 11671069 and 11771212)Zhejiang Provincial Natural Science Foundation of China (Grant No. LY18A010032)+1 种基金Qing Lan Project of Jiangsu Province and Jiangsu Government Scholarship for Overseas Studies (Grant No. JS2019-328)during a visit of the first author to Charles University in Prague with the support by Jiangsu Government Scholarship
文摘Let T be a right exact functor from an abelian category B into another abelian category A.Then there exists a functor p from the product category A×B to the comma category(T↓A).In this paper,we study the property of the extension closure of some classes of objects in(T↓A),the exactness of the functor p and the detailed description of orthogonal classes of a given class p(X,Y)in(T↓A).Moreover,we characterize when special precovering classes in abelian categories A and B can induce special precovering classes in(T↓A).As an application,we prove that under suitable conditions,the class of Gorenstein projective leftΛ-modules over a triangular matrix ringΛ=(R M 0 S)is special precovering if and only if both the classes of Gorenstein projective left R-modules and left S-modules are special precovering.Consequently,we produce a large variety of examples of rings such that the class of Gorenstein projective modules is special precovering over them.
基金performed as a part of the state assignments of the Ministry of Education and Science of the Russian Federation,No.3.9.2014
文摘Projection-type recorders of computer-generated Fourier holograms have potential due to the decreased precision requirements of the optical scheme compared to most known holographic data recorders based on two-beam schemes.In the case of optical memory system development,the reduction factor of the projection scheme requires the application of properly developed optical components.The present report is dedicated to the development of special objectives for the projection scheme of computer-generated Fourier holograms.
